Patents Assigned to Avalanche Technology, Inc.
  • Patent number: 9030866
    Abstract: Methods using a sequence of externally generated magnetic fields to initialize the magnetization directions of each of the layers in perpendicular MTJ MRAM elements for data and reference bits when the required magnetization directions are anti-parallel are described. The coercivity of the fixed pinned and reference layers can be made unequal so that one of them can be switched by a magnetic field that will reliably leave the other one unswitched. Embodiments of the invention utilize the different effective coercivity fields of the pinned, reference and free layers to selectively switch the magnetization directions using a sequence of magnetic fields of decreasing strength. Optionally the chip or wafer can be heated to reduce the required field magnitude. It is possible that the first magnetic field in the sequence can be applied during an annealing step in the MRAM manufacture process.
    Type: Grant
    Filed: January 12, 2015
    Date of Patent: May 12, 2015
    Assignee: Avalanche Technology, Inc.
    Inventors: Yuchen Zhou, Yiming Huai
  • Patent number: 9028910
    Abstract: The present invention is directed to a method for manufacturing spin transfer torque magnetic random access memory (STTMRAM) devices. The method, which utilizes in-situ annealing and etch-back of the magnetic tunnel junction (MTJ) film stack, comprises the steps of depositing a barrier layer on top of a bottom magnetic layer and then depositing an interface magnetic layer on top of the barrier layer to form an MTJ film stack; annealing the MTJ film stack at a first temperature and then cool the MTJ film stack to a second temperature lower than the first temperature; etching away a top portion of the interface magnetic layer; and depositing at least one top layer on top of the etched interface magnetic layer. The method may further include the step of annealing the MTJ film stack at a third temperature between the first and second temperature after the step of depositing at least one top layer.
    Type: Grant
    Filed: May 8, 2014
    Date of Patent: May 12, 2015
    Assignee: Avalanche Technology, Inc.
    Inventors: Yuchen Zhou, Yiming Huai
  • Patent number: 9024398
    Abstract: A spin transfer torque magnetic random access memory (STTMRAM) element comprises a reference layer, which can be a single layer structure or a synthetic multi-layer structure, formed on a substrate, with a fixed perpendicular magnetic component. A junction layer is formed on top of the reference layer and a free layer is formed on top of the junction layer with a perpendicular magnetic orientation, at substantially its center of the free layer and switchable. A tuning layer is formed on top of the free layer and a fixed layer is formed on top of the tuning layer, the fixed layer has a fixed perpendicular magnetic component opposite to that of the reference layer. The magnetic orientation of the free layer switches relative to that of the reference layer. The perpendicular magnetic components of the fixed layer and the reference layer substantially cancel each other and the free layer has an in-plane edge magnetization field.
    Type: Grant
    Filed: September 13, 2013
    Date of Patent: May 5, 2015
    Assignee: Avalanche Technology, Inc.
    Inventors: Huadong Gan, Yuchen Zhou, Yiming Huai
  • Patent number: 9025371
    Abstract: A perpendicular spin-transfer torque magnetic random access memory (STTMRAM) element includes a fixed layer having a magnetization that is substantially fixed in one direction and a barrier layer formed on top of the fixed layer and a free layer. The free layer has a number of alternating laminates, each laminate being made of a magnetic layer and an insulating layer. The magnetic layer is switchable and formed on top of the barrier layer. The free layer is capable of switching its magnetization to a parallel or an anti-parallel state relative to the magnetization of the fixed layer during a write operation when bidirectional electric current is applied across the STTMRAM element. Magnetic layers of the laminates are ferromagnetically coupled to switch together as a single domain during the write operation and the magnetization of the fixed and free layers and the magnetic layers of the laminates have perpendicular anisotropy.
    Type: Grant
    Filed: January 30, 2015
    Date of Patent: May 5, 2015
    Assignee: Avalanche Technology, Inc.
    Inventors: Yiming Huai, Rajiv Yadav Ranjan, Roger K. Malmhall
  • Patent number: 9019758
    Abstract: A spin transfer torque magnetic random access memory (STTMRAM) element includes a composite fixed layer formed on top of a substrate and a tunnel layer formed upon the fixed layer and a composite free layer formed upon the tunnel barrier layer. The magnetization direction of each of the composite free layer and fixed layer being substantially perpendicular to the plane of the substrate. The composite layers are made of multiple repeats of a bi-layer unit which consists of a non-magnetic insulating layer and magnetic layer with thicknesses adjusted in a range that makes the magnetization having a preferred direction perpendicular to film plane.
    Type: Grant
    Filed: September 2, 2011
    Date of Patent: April 28, 2015
    Assignee: Avalanche Technology, Inc.
    Inventors: Yiming Huai, Jing Zhang, Rajiv Yadav Ranjan, Yuchen Zhou, Roger Klas Malmhall, Ioan Tudosa
  • Patent number: 9013045
    Abstract: BEOL memory cells are described that include one or more sidewall protection layers on the memory device (including, for example, an MTJ element) deposited prior to interconnect via etching to prevent the formation of electrical shorts between layers. One embodiment uses a single layer sidewall protection sleeve that is deposited after the memory device has been patterned. The layer material is vertically etched down to expose the upper surface of the top electrode while leaving a residual layer of protective material surrounding the rest of the memory device. The material for the protection layer is selected to resist the etchant used to remove the first dielectric material from the via in the subsequent interconnect process. A second embodiment uses dual-layer sidewall protection in which the first layer covers the memory element is preferably an oxygen-free dielectric and the second layer protects the first layer during via etching.
    Type: Grant
    Filed: April 1, 2014
    Date of Patent: April 21, 2015
    Assignee: Avalanche Technology, Inc.
    Inventors: Kimihiro Satoh, Yiming Huai, Jing Zhang, Ebrahim Abedifard
  • Publication number: 20150102441
    Abstract: The present invention is directed to a spin transfer torque (STT) MRAM device having a perpendicular magnetic tunnel junction (MTJ) memory element. The memory element includes a perpendicular MTJ structure in between a non-magnetic seed layer and a non-magnetic cap layer. The MTJ structure comprises a magnetic free layer structure and a magnetic reference layer structure with an insulating tunnel junction layer interposed therebetween, an anti-ferromagnetic coupling layer formed adjacent to the magnetic reference layer structure, and a magnetic fixed layer formed adjacent to the anti-ferromagnetic coupling layer. At least one of the magnetic free and reference layer structures includes a non-magnetic perpendicular enhancement layer, which improves the perpendicular anisotropy of magnetic layers adjacent thereto.
    Type: Application
    Filed: April 17, 2014
    Publication date: April 16, 2015
    Applicant: Avalanche Technology, Inc.
    Inventors: Huadong Gan, Yuchen Zhou, Yiming Huai, Zihui Wang, Xiaobin Wang
  • Publication number: 20150102438
    Abstract: The present invention is directed to an MRAM element comprising a magnetic free layer structure and a magnetic reference layer structure with an insulating tunnel junction layer interposed therebetween. The magnetic free layer structure has a variable magnetization direction substantially perpendicular to the layer plane thereof. The magnetic reference layer structure includes a first magnetic reference layer formed adjacent to the insulating tunnel junction layer and a second magnetic reference layer separated from the first magnetic reference layer by a first non-magnetic perpendicular enhancement layer. The first and second magnetic reference layers have a first fixed magnetization direction substantially perpendicular to the layer plane thereof.
    Type: Application
    Filed: March 3, 2014
    Publication date: April 16, 2015
    Applicant: Avalanche Technology Inc.
    Inventors: Huadong Gan, Yiming Huai, Zihui Wang, Yuchen Zhou
  • Publication number: 20150102439
    Abstract: The present invention is directed to an MRAM element comprising a plurality of magnetic tunnel junction (MTJ) memory elements. Each of the memory elements comprises a magnetic reference layer structure, which includes a first and a second magnetic reference layers with a tantalum perpendicular enhancement layer interposed therebetween, an insulating tunnel junction layer formed adjacent to the first magnetic reference layer opposite the tantalum perpendicular enhancement layer, and a magnetic free layer formed adjacent to the insulating tunnel junction layer. The first and second magnetic reference layers have a first fixed magnetization direction substantially perpendicular to the layer planes thereof.
    Type: Application
    Filed: April 18, 2014
    Publication date: April 16, 2015
    Applicant: Avalanche Technology, Inc.
    Inventors: Huadong Gan, Yuchen Zhou, Yiming Huai, Zihui Wang, Xiaobin Wang
  • Publication number: 20150104882
    Abstract: Embodiments of the invention are described that use a thin metallic hard mask, which can be a bi-layer film, to increase the incident IBE angle for MTJ sidewall cleaning without losing the process margin for the subsequent interconnection process. The patterned metallic hard mask pads also serve as the top electrode for the MTJ cells. Using a thin metallic hard mask is possible when the hard mask material acts as a CMP stopper without substantial loss of thickness. In the first embodiment, the single layer hard mask is preferably ruthenium. In the second embodiment, the lower layer of the bi-layer hard mask is preferably ruthenium. The wafer is preferably rotated during the IBE process for uniform etching. A capping layer under the hard mask is preferably used as the etch stopper during hard mask etch process in order not to damage or etch through the upper magnetic layer.
    Type: Application
    Filed: October 10, 2013
    Publication date: April 16, 2015
    Applicant: Avalanche Technology Inc.
    Inventors: Dong Ha Jung, Kimihiro Satoh, Jing Zhang, Yuchen Zhou, Yiming Huai
  • Patent number: 9009397
    Abstract: A method of writing to one or more solid state disks (SSDs) employed by a storage processor includes receiving a command, creating sub-commands from the command based on a granularity, and assigning the sub-commands to the SSDs independently of the command thereby causing striping across the SSDs.
    Type: Grant
    Filed: November 6, 2013
    Date of Patent: April 14, 2015
    Assignee: Avalanche Technology, Inc.
    Inventors: Mehdi Asnaashari, Siamack Nemazie
  • Patent number: 9009396
    Abstract: A computer system includes a central processing unit (CPU), a system memory coupled to the CPU and including flash tables, and a physically-addressable solid state disk (SSD) coupled to the CPU. The physically-addressable SSD includes a flash subsystem and a non-volatile memory and is addressable using physical addresses. The flash subsystem includes one or more copies of the flash tables and the non-volatile memory includes updates to the copy of the flash tables. The flash tables include tables used to map logical to physical blocks for identifying the location of stored data in the physically addressable SSD, wherein the updates to the copy of the flash tables and the one or more copies of the flash tables are used to reconstruct the flash tables upon power interruption.
    Type: Grant
    Filed: January 18, 2013
    Date of Patent: April 14, 2015
    Assignee: Avalanche Technology, Inc.
    Inventor: Siamack Nemazie
  • Publication number: 20150095554
    Abstract: A method of writing to one or more solid state disks (SSDs) employed by a storage processor includes receiving a command, creating sub-commands from the command based on a granularity, and assigning the sub-commands to the SSDs independently of the command thereby causing striping across the SSDs.
    Type: Application
    Filed: November 6, 2013
    Publication date: April 2, 2015
    Applicant: Avalanche Technology, Inc.
    Inventors: Mehdi Asnaashari, Siamack Nemazie
  • Publication number: 20150095555
    Abstract: A method of thin provisioning in a storage system is disclosed. The method includes communicating to a user a capacity of a virtual storage, the virtual storage capacity being substantially larger than that of a storage pool. Further, the method includes assigning portions of the storage pool to logical unit number (LUN) logical block address (LBA)-groups only when the LUN LBA-groups are being written to and maintaining a mapping table to track the association of the LUN LBA-groups to the storage pool.
    Type: Application
    Filed: February 3, 2014
    Publication date: April 2, 2015
    Applicant: Avalanche Technology, Inc.
    Inventors: Mehdi Asnaashari, Ruchirkumar D. Shah, Siamack Nemazie
  • Patent number: 8996888
    Abstract: A mobile device includes an application processor, an RF modem for connection to cellular networks, wireless device for connection to wireless networks, a display coupled to the application processor, audio devices coupled to the application processor, power management for providing power through a main battery; and charging the battery, a hybrid memory including a magnetic memory, the magnetic memory further including a parameter area configured to store parameters used to authenticate access to certain areas of the main memory, and a parameter memory that maintains a first area, used to store protected zone parameters, and a second area used to store authentication parameters, the protection zone parameters and the authentication parameters being associated with access to the certain areas in the main memory that requires authentication. Upon modification of any of the parameters stored in the parameter memory by a user, a corresponding location of the parameter area of the main memory is also modified.
    Type: Grant
    Filed: September 28, 2012
    Date of Patent: March 31, 2015
    Assignee: Avalanche Technology, Inc.
    Inventors: Siamack Nemazie, Ngon Van Le
  • Publication number: 20150084140
    Abstract: The present invention is directed to a memory device having a via landing pad in the peripheral circuit that minimizes the memory cell size. A device having features of the present invention comprises a peripheral circuit region and a magnetic memory cell region including at least a magnetic tunnel junction (MTJ) element. The peripheral circuit region comprises a substrate and a bottom contact formed therein; a landing pad including a first magnetic layer structure formed on top of the bottom contact and a second magnetic layer structure separated from the first magnetic layer structure by an insulating tunnel junction layer, wherein each of the insulating tunnel junction layer and the second magnetic layer structure has an opening aligned to each other; and a via partly embedded in the landing pad and directly coupled to the first magnetic layer structure through the openings.
    Type: Application
    Filed: September 20, 2013
    Publication date: March 26, 2015
    Applicant: Avalanche Technology Inc.
    Inventors: Kimihiro Satoh, Yiming Huai
  • Patent number: 8980649
    Abstract: In accordance with a method of the present invention, a method of manufacturing a magnetic random access memory (MRAM) cell and a corresponding structure thereof are disclosed to include a multi-stage manufacturing process. The multi-stage manufacturing process includes performing a front end on-line (FEOL) stage to manufacture logic and non-magnetic portions of the memory cell by forming an intermediate interlayer dielectric (ILD) layer, forming intermediate metal pillars embedded in the intermediate ILD layer, depositing a conductive metal cap on top of the intermediate ILD layer and the metal pillars, performing magnetic fabrication stage to make a magnetic material portion of the memory cell being manufactured, and performing back end on-line (BEOL) stage to make metal and contacts of the memory cell being manufactured.
    Type: Grant
    Filed: September 16, 2013
    Date of Patent: March 17, 2015
    Assignee: Avalanche Technology, Inc.
    Inventors: Rajiv Yadav Ranjan, Parviz Keshtbod, Roger Klas Malmhall
  • Patent number: 8982616
    Abstract: A perpendicular spin transfer torque magnetic random access memory (STTMRAM) element includes a fixed layer having a magnetization that is substantially fixed in one direction and a barrier layer formed on top of the fixed layer and a free layer. The free layer has a number of alternating laminates, each laminate being made of a magnetic layer and an insulating layer. The magnetic layer is switchable and formed on top of the barrier layer. The free layer is capable of switching its magnetization to a parallel or an anti-parallel state relative to the magnetization of the fixed layer during a write operation when bidirectional electric current is applied across the STTMRAM element. Magnetic layers of the laminates are ferromagnetically coupled to switch together as a single domain during the write operation and the magnetization of the fixed and free layers and the magnetic layers of the laminates have perpendicular anisotropy.
    Type: Grant
    Filed: November 26, 2012
    Date of Patent: March 17, 2015
    Assignee: Avalanche Technology, Inc.
    Inventors: Rajiv Yadav Ranjan, Roger Klas Malmhall, Yiming Huai
  • Patent number: 8981506
    Abstract: A perpendicular spin-transfer torque magnetic random access memory (STTMRAM) element is configured to store a state when electrical current is applied thereto. The perpendicular STTMRAM element includes a magnetization layer having a first free layer and a second free layer, separated by a non-magnetic separation layer (NMSL). The direction of magnetization of the first and second free layers each is in-plane prior to the application of electrical current and after the application of electrical current, the direction of magnetization of the second free layer becomes substantially titled out-of-plane and the direction of magnetization of the first free layer switches. Upon electrical current being discontinued, the direction of magnetization of the second free layer remains in a direction that is substantially opposite to that of the first free layer.
    Type: Grant
    Filed: June 19, 2013
    Date of Patent: March 17, 2015
    Assignee: Avalanche Technology, Inc.
    Inventors: Yuchen Zhou, Yiming Huai, Jing Zhang, Rajiv Yadav Ranjan, Roger Klas Malmhall
  • Publication number: 20150074347
    Abstract: A magnetic memory device includes a main memory made of magnetic memory, the main memory and further includes a parameter area used to store parameters used to authenticate data. Further, the magnetic memory device has parameter memory that maintains a protected zone used to store protected zone parameters, and an authentication zone used to store authentication parameters, the protection zone parameters and the authentication parameters being associated with the data that requires authentication. Upon modification of any of the parameters stored in the parameter memory by a user, a corresponding location of the parameter area of the main memory is also modified.
    Type: Application
    Filed: November 14, 2014
    Publication date: March 12, 2015
    Applicant: AVALANCHE TECHNOLOGY, INC.
    Inventors: Siamack Nemazie, NGON VAN LE