Abstract: In a resistively heated heat-loss pressure gauge, electrical current is switched between a sensing element and a compensating element at different duty cycles. As a result, the sensing element is heated relative to the compensating element. A fixed resistance is placed in series with at least the compensating element. The current source applies current to heat the sensing element to a temperature at which the resistance of the sensing element matches the combined resistance of the compensating element and the fixed resistive element.

Abstract: A robot arm includes a drive assembly and an articulated arm assembly pivotally connected to the drive assembly. The articulated arm includes a pivoting base link system, a wrist link system, and a first elbow link system rotatably connected to the base link system by a pair of upper arms and connected to the wrist link system by a pair of forearms, a second elbow link system rotatably connected to the base link system by another at least one upper arm and connected to the wrist link system by another at least one forearm, wherein the drive assembly is connected to at least one of the upper arms and the base link system to provide three degrees of freedom by driving the at least one of the upper arms and pivoting the pivoting base link system to position the wrist link system at a given location with a predetermined skew relative to an axis of translation.

Abstract: Disclosed is a very low temperature or cryogenic refrigeration system with a scroll compressor and utilizing a mixed refrigerant that decreases refrigerant discharge temperature by refrigerant injection into the compressor.

Abstract: The invention relates to a device for loading substrates into and unloading them from a clean room, comprising a lock device onto which a transport box for receiving the substrates can be placed and which is fitted with a hermetically sealing lock opening, and a process unit adjacent to the lock opening. To allow for a valid adjustment of the lock device in relation to the process unit even when the lock device is exchanged, the invention provides for an adapter device to be positioned between the process unit and the lock device to which the lock device can be removably fixed and which is maintained at the level of the process unit and can be adjustably aligned in relation to same.

Abstract: A method determines axial alignment between the centroid of an end effector and the effective center of a specimen held by the end effector. The method is implemented with use of an end effector coupled to a robot arm and having a controllable supination angle. A condition in which two locations of the effective center of the specimen measured at 180° displaced supination angles do not lie on the supination axis indicates that the centroid is offset from the actual effective center of the specimen.

Abstract: A combination vacuum gauge provides simultaneous absolute and differential pressure measurements over a wide range of pressures ranging from atmospheric pressures to ultrahigh vacuum by processing the readings from an absolute high vacuum gauge (e.g., an ionization gauge and/or a heat-loss sensor), a differential low vacuum gauge providing a differential relative to ambient pressure (e.g., a diaphragm sensor), and a barometric absolute pressure sensor exposed to the ambient atmosphere outside the measurement region. The barometric absolute pressure sensor reading is used to convert the differential vacuum gauge reading from uncalibrated differential pressure to calibrated absolute pressure.

Abstract: A single ducted valve assembly provides an integrated cryopump valve having a purge valve port connecting the assembly to a cryopump with a coaxial connection having an inner duct and an outer duct. A pressurized gas interface connects a pressurized gas source to the cryopump through the inner duct. A rough valve port can connect the outer duct of the assembly to a rough vacuum pump; and a relief valve port can connect the outer duct of the assembly to an exhaust stack.

Abstract: A method for determining a node based penalty for use in a path finding algorithm for an automated material handling system (AMHS) is described. The AMHS includes a track interconnecting a plurality of nodes, and on which a plurality of material transport vehicles (MTVs) move. In particular, each of the nodes and MTVs provide queue-blocking data that is stored in a queue-blocking database along with a time tag indicating the time the data was collected. The AMHS retrieves data from the queue-blocking database that has a time tag within a predetermined time window and determines a queue blocking metric for each node in the material transport system. The queue blocking time is converted from to a node based penalty that is the additional distance that an MTV would travel while blocked. Thus, the node based penalty distance is added to the physical distance between a pair of nodes to provide a distance metric indicative of the current traffic conditions.

Abstract: A semiconductor wafer comprises a wafer formed of a semiconductor material having a peripheral edge portion and a repeating mark on the edge portion of the wafer to allow identification of the wafer. Also described is a method of identifying and tracking these semiconductor wafers.

Abstract: A method for extending a first application class includes integrating a first data buffer within the first application class for holding extended properties, and utilizing a rule based engine to determine the values to associate with one or more of the extended properties of the first application class.

Abstract: A substrate handling robot includes an arm drive mechanism. A first arm is connected to the arm drive mechanism. A multiple substrate batch loader is connected to the first arm. A second arm is also connected to the arm drive mechanism. A single plane end effector is connected to the second arm. The multiple substrate batch loader produces a vacuum signal indicative of how many substrates are held by the multiple substrate batch loader. A vacuum signal interpreter alters the movement of the first arm in response to the substrate load number. An object sensor is connected to the second arm. The object sensor assesses the number of substrates in a cassette adjacent to the multiple substrate batch loader. A substrate loading sequence controller controls the first arm and the second arm in response to the number of substrates in the cassette, such that the second arm removes substrates from the cassette in such a manner as to facilitate complete loading of the multiple substrate batch loader.

Abstract: An Automated Material Handling System (AMHS) that allows an overhead hoist transport vehicle to load/ unload parts directly to/from storage units included in the system. The AMHS includes an overhead hoist transport subsystem and a vertical carousel stocker having a plurality of storage bins. The subsystem includes an overhead hoist transport vehicle traveling along a suspended track defining a predetermined route. The route passes over the stocker, which allows the vehicle to access parts directly from one of the storage bins. The selected bin is positioned at the top of the stocker underneath the track. Next, the vehicle is moved along the track to a position above the selected bin. The hoist is then lowered parallel to the longitudinal axis of the stocker toward the selected bin. Finally, the hoist is operated to pick parts directly from the bin, or to place parts in the bin.

Abstract: An electronic controller maintains the operating temperature of a cryopump by controlling a heater coupled to the cryopump. The heater is coupled to a cryopumping surface of the cryopump. The controller can control the operation of the heater in response to feedback from temperature sensors coupled to the cryopump. The controller can cause the heater to shut-off if a temperature sensor reads out of its normal temperature range.

Abstract: A material handling and transport system and process for moving a substrate carrier between storage and processing destinations are provided. The system includes a vehicle that runs on a support structure, such as a pathway or a track assembly supported on the floor, which may be in a pressurized tunnel. A carrier nest on the vehicle receives and supports the carrier. A lifting mechanism on the vehicle vertically raises and lowers the carrier nest. A load port support surface is disposed vertically above the support structure. The carrier is raised through an opening in the load port support surface. A load port nest on the load port support surface receives and supports the carrier adjacent a selected destination. A carrier manipulation mechanism manipulates the carrier over the load port nest. The lifting mechanism then lowers the carrier onto the load port nest. The system is particularly suited for handling and transporting semiconductor wafer carriers.

Abstract: A device (10) for handling substrates (11) inside and outside a clean room (15) is provided with a locking transfer device (17), by which means a substrate cassette (12) that is accommodated in a box (13) in clean-room conditions can be removed from or placed in said box (13); and with a first handling device (51), by which means the substrates (11) can be placed in or removed from the cassette (12). According to the invention, a storage area (20) for a plurality of cassette boxes (13) is positioned on or above the clean room (15) and the locking transfer device (17) is provided between the storage area (20) and the clean room (15), so that various work and production steps can be combined in such a way as to save space.

Abstract: A helium management control system for controlling the helium refrigerant supply from a common manifold supplies a plurality of cryogenic refrigerators with an appropriate helium supply. The system employs a plurality of sensors to monitor and regulate the overall refrigerant supply to deliver an appropriate refrigerant supply to each of the cryogenic refrigerators depending on the computed aggregate cooling demand of all of the cryogenic refrigerators. An appropriate supply of helium is distributed to each cryopump by sensing excess and sparse helium refrigerant and redistributing refrigerant accordingly. If the total refrigeration supply exceeds the total refrigerant demand, or consumption, excess refrigerant is directed to cryogenic refrigerators which can utilize the excess helium to complete a current cooling function more quickly.

Abstract: A semiconductor cassette reducer has a first substantially U-shaped plate and a second substantially U-shaped plate. A number of wafer supports connect the first substantially U-shaped plate to the second substantially U-shaped plate. Several retention springs are attached to the first substantially U-shaped plate. The retention springs hold the semiconductor cassette reducer in a FOUP (front opening unified pod).

Abstract: Disclosed is an ultra-low temperature, dual-compressor (114,144), recirculating gas chilling system that includes a closed-loop mixed-refrigerant primary refrigeration system (110) in combination with a closed-loop gas secondary refrigeration loop (112). The ultra-low temperature, dual-compressor (114,144), recirculating gas chilling system disclosed is capable of providing continuous long term chilled gas and fast cooling of a high or ambient temperature object (158), such as a chuck used in processing semiconductor wafers or any such device. The gas chilling system is characterized by three modes of operation: a normal cooling mode, a bakeout mode, and a post-bake cooling mode.

Abstract: For a device for the detection of substrates stacked at an opening of a wall element, there existed the problem of constructing the detection device in such a way that the detection of the position of the substrates can be performed more flexibly with respect to the course of measurement and the measuring method employed and a defined approach of a sensor system to the semiconductor substrate to be detected is ensured in a definite position of measurement with a lowered risk of particle generation. A transmitting and receiving device (11) consists of a vertical drive mechanism (10) mounted on the wall element (1) and a sensor head (13) that can be adjusted between a lower and an upper position by means of the vertical drive mechanism (10), said sensor head being arranged so as to pivot on the vertical drive mechanism (10) in order to pivot into the opening (4).

Abstract: An automated material handling system that includes an extractor/buffer apparatus capable of simultaneously accessing multiple Work-In-Process (WIP) parts, thereby providing a highly efficient interface between WIP storage locations and transport equipment. The extractor/buffer apparatus includes multiple extractor/buffer modules, each module being configured to interface with a location for holding WIP parts that is a number of WIP parts deep. Each module includes a platform for holding multiple WIP parts. Further, multiple modules may be disposed side-by-side to form an extractor/buffer apparatus capable of handling multiple rows of WIP parts.