Abstract: A connecting device is disclosed for electrically and mechanically linking multiple circuit boards arranged in two perpendicular stacks. The connecting device includes two identical connectors, each with a plurality of outwardly extended electrical socket contacts, and a pair of opposite, electrically insulative shoulders projected outwardly beyond the socket contacts. Electrical pin contacts are recessed into the shoulders. The pair of connectors can be engaged when in facing relation, with one of them rotated 90.degree. relative to the other. As the connectors are moved toward engagement, each shoulder of each connector enters into a nesting relation between the opposed shoulders of the other connector, pre-aligning the opposed pin and socket contacts. The shoulders have inclined edges at their outer faces, to assist in capturing their associated opposed shoulders and guide them, in a self-aligning manner, into the nesting relation. The connectors require a 90.degree.

Abstract: The invention provides an improved direct-write/read charged particle beam lithography/readout system employing multiple channel charged particle beam optical columns wherein a plurality of individually controlled, single deflector stage charged particle beam optical columns are operated in parallel to simultaneously write or read the same or complementary semiconductor device microcircuit patterns on a plurality of different target areas of a semiconductor target wafer whereby considerably increased thru-put of a microcircuit fabrication facility is achieved.

Abstract: A capacitance height gage for positioning the reticle of an electron beam lithography apparatus. The gage includes a hybrid circuit substrate carrying four measuring and two reference capacitor circuits. Each has a driven plate, the four measuring plates disposed opposite the object surface to be measured, and the two reference plates disposed on the top of the substrate. Two ground plates are disposed a predetermine distance from the reference driven plates. The object surface comprises the ground plate for the four measuring driven plates. The reference plates calibrate the measuring plates.

Abstract: An all-electrostatic variable spot charged particle (electron) beam shaping sub-system which is compact and of much smaller size than known similar systems designed for the same purpose and operating with magnetic lenses. The improved electrostatic variable spot-shaping sub-system does not require mechanical rotation of the spot-shaping apertures for maintaining alignment or orientation. The improved sub-system includes both beam steering and beam blanking requiring less than 3 volts for operation of the blanking controls to turn the beam on and off. The novel system easily accomodates a variety of different beam-shaping apertures for use as the second beam shaping aperture in the sub-system including rectilinear triangles of different orientation to provide smooth 45 degree pattern delineation, rectangles, squares, and even different diameter circles where such configurations are required by a particular pattern to be written in the target plane.

Abstract: An integrated circuit package includes a leadless ceramic chip carrier and four connectors mounted thereto. The chip carrier has a rectangular surface with a plurality of conductive pads at its periphery. Each connecter includes a set of elongate conductive arms attached to the contact pads and extended outward therefrom and parallel to one another. The outer ends of the arms in each connector are attached to a generally flat and dielectric member. The arms are folded back upon themselves to position each member opposite the leadless chip carrier surface, with the outer ends of its associated arms aligned with the pads. So aligned, the arm ends are positioned for direct connection to selected contacts on a printed circuit board.

Abstract: The technique of measuring the spotsize and edgewidth of an electron beam by incrementally scanning the beam through discrete scan locations across a sharp edge is improved by processing the resulting beam current signals directly rather than the differentiated beam current signal. A linear regression is performed on beam current data points expected to fall in the linear portion of the beam current versus beam position characteristic in order to provide a linear approximation of the overall characteristic. Extrapolation of the linear function to its intersections with the maximum (I.sub.1) and minimum (I.sub.0) beam current levels yields corresponding beam positions Z.sub.B and Z.sub.A, such that (Z.sub.B -Z.sub.A) is a measure of spotsize in the scan direction. Edgewidth between the twelve and eighty-eight percent amplitude levels is obtained by locating measured beam currents at incremental scan locations on both sides of beam positions Z.sub.A and Z.sub.

Abstract: Pseudo-random numbers (PRNs) have great importance in data processing and encryption. The standard technique for generating PRNs on computers at the present time involves software implementation of recursively computing PRN.sub.n+1 =(PRN.sub.n)(b) mod M, in real number field which means that a relatively slow and involved multiplication must occur for each PRN, and each PRN calculation is strictly subsequent to previous PRM calculations. This disclosure shows a systolic multiplier implemented by a series of exclusive OR operations which generates simultaneously a new set of the PRN's from the current set of PRN's in parallel. The operation of multiplication mod M is performed over a finite field instead of a real number field. To facilitate the multiplication, the input operands are first transformed into a different representation that consists of more bits than that of the original ones. The operation of multiplication is then carried out in this transformed representation.

Abstract: An improved deflection amplifier interconnection circuit structure for charged particle beam write/read apparatus having a deflector stage wherein the charged particle apparatus is mounted within an evacuated housing by a support member. Transmission line-type printed wiring conductor patterns are provided within the insulating support member which serves as a combined electrical and vacuum feed-thru structure. The transmission line-type printed wiring conductor pattern interconnects the output of a deflector drive amplifier to the deflector element of the charged particle beam apparatus within the evacuated housing. An improved impedance match between the deflector drive amplifier and the deflector element is obtained along with improved cooling capability for the amplifier and elimination of the need for mounting the amplifier within a separate housing remotely located from the evacuated housing for the charged particle apparatus.

Abstract: A method and apparatus for in-situ cleaning of charged particle beam optical systems such as electron microscopes, electron beam lithography systems, ion beam microscopes or lithography systems, through the use of a specially introduced plasma forming gas such as hydrogen that is excited by applying a high voltage, high frequency excitation potential between various optical elements of the electron beam optical column. Alternately, specially constructed separate plasma forming electrodes can be built into the electron beam optical system for this purpose. During the cleaning operation the plasma reacts chemically with the contaminants previously formed on the surface of the electron beam column optical elements to form gaseous reactants which then are pumped out of the electron beam column system.

Abstract: The invention provides a modular-building block method and system of fabrication, installation, alignment and operation of a multi-beam assembly of miniaturized, all-electrostatic charged particle optical columns, such electron beam or ion beam optical columns mounted in parallel in a closely packed cluster over a small target surface area for parallel simultaneous charged particle beam writing on the target surface with the multiple-channel cluster of charged particle beam optical columns. The assembly provides a system and method of increased thru-put in the direct charged particle beam writing on semiconductor target wafers during fabrication of semiconductor micro-circuit chips.

Abstract: An electron gun includes a preferably non-metallic apertured grid with a flat upstream-facing surface closely spaced from and parallel to a flat emitting surface of a cathode. The grid aperture diverges in a downstream direction and has its peripheral wall contoured to shape the transverse cross-section of an emitted electron beam at a predetermined downstream location, preferably at the beam crossover. The peripheral wall of the grid aperture is devoid of sharp transitions, has a circular cross section to produce a circular beam crossover of minimum diameter, and has a convex segment extending from the upstream end of the aperture and joining a concave segment extending to the downstream end of the aperture. The convex first segment has a smaller radius of curvature than the second concave segment and has its center of curvature disposed substantially at the upstream facing surface.

Abstract: Resist coating on the surface of a semiconductor wafer is removed by a one-step process using anisotropic reactive ion etching through an apertured stencil disposed close to but spaced from the resist-coated surface. The ion bombardment greatly enhances the plasma etch rate in the areas of the coating exposed through stencil apertures so that only the exposed areas are effectively etched during the limited exposure time in spite of the presence of chemically reactive gas between the stencil and other areas of the wafer surface. The technique is limited by low resolution but is ideally suited for clearing resist from atop fiducial marks used to align the wafer with multiple wafers in an integrated circuit chip.

Abstract: A circuit means for detecting data errors in VLSI processing circuits at the earliest point such an error occurs in the processing stream or (in different modes) at any selected point therein, and for providing the prior operands and faulty (intermediate) output data together with an indication of what is wrong with the data. Described are registers and/or means for controlling the mode of the circuitry, error detection means (being, for example, parity check circuits), and an output means for providing the output in an organized way responsive to the controlling means and the output of the error detecton means. The method of using such a circuit is inherent in the disclosure.

Abstract: A method for polling headphones of a passive tv audience meter system. Tv audience members wear headphones by which they may receive the audio portion of the tv programs. The headphones are enabled to receive the audio for a short time by periodic polls transmitted by a tv audience meter. The headphones in turn acknowledge to the polls to indicate to the meter which members of the audience are watching tv. The method uses short and long period polls in conjunction with a timer whose period is shorter than the long period poll. The long period poll permits activation of headphone but also prevents adequate audio reception until the headphone acknowledges the poll. The short period poll is entered in response to the receipt of an acknowledgement and permits uninterrupted audio.

Abstract: A backup material for small bore drilling in hard crystalline materials, such as multilayer circuit boards containing polyimide/glass, polyimide kevlar or modified epoxy BT/glass, includes at least one layer of hard crystalline material. Standard LCOA material with an additional layer selected from the group comprising polyimides, fluorocarbons and high temperature polycarbonates has proven successful.

Abstract: A solder/desolder tool has a heater block supporting a handle at its upper end and a heating plate at its lower end. The heating plate is thermally engaged by heating elements housed in the heater block. An array of pin relief apertures are formed in the heating plate. Retractable clamps are pivoted to the heater block for clamping a leadless chip against the heating plate. The leadless chip has an array of input/output sockets corresponding to the array of pin relief apertures. A method is disclosed for soldering the chip sockets to a corresponding array of pins supported by a PC board. According to the method, solder balls are loaded in the chip sockets, and the chip is then secured in the tool to reflow the solder balls to form solder plugs. The solder plugs are then set upon the upper ends of the pins and melted by the heating plate so that solder joints are formed between the pins and sockets. The chip is released from the tool to allow the solder joints to cool.

Abstract: An adapter for metering tv viewing in homes having video cassette recorders ("VCR's"). The adapter disables antenna (cable) input to the VCR except when in the record mode. Record mode is detected by a probe which detects the 70 MHz erase signal of the erase heads. When in record mode, antenna input to the VCR is enabled and a tv meter determines channel tuning. A bandpass filter on the VCR video output restricts the tv's ability to tube channels other than the VCR output. If the tv is tuned to the VCR output channel, the viewer is monitoring the program being recorded or watching a prerecorded tape. Otherwise, he is tuning through the normal antenna (cable) input and a meter determines the tv's channel tuning.

Abstract: A cable sensor for sensing a DC signal sent by a cable system's headend in order to switch a converter from converting one set of frequencies to another. When the cable sensor detects such a DC signal, it provides isolation from the DC for a cable tv ratings monitor connected to the cable system and further provides a signal to the monitor that the signal has occurred in order for the monitor to switch frequency/program assignments.

Abstract: A meter for passively logging the presence of TV viewers including circuitry for disabling the audio of a TV set, a transmitter for wirelessly transmitting the audio to a plurality of headphones, a circuit responsive to the headphones presence upon the head of a viewer for transmitting a headphone ID signal to a monitor, a receiver in the monitor for logging the fact that particular headphones are activated, and a time of day clock for logging the period of time particular headphones are activated.