Patents Assigned to CSMC TECHNOLOGIES FAB2 CO., LTD.
  • Publication number: 20240136413
    Abstract: A laterally diffused metal oxide semiconductor device and a preparation method thereof are disclosed. The semiconductor device includes: a substrate; a body region having a first conductivity type and formed in the substrate; a drift region, having a second conductivity type, formed in the substrate and adjacent to the body region; a field plate structure, formed on the drift region, a lower surface of an end of the field plate structure close to the body region being flush with the upper surface of the substrate, and the end of the field plate structure close to the body region also having an upwardly extending inclined surface; and a drain region, having a second conductivity type, formed in an upper layer of the drift region, and in contact with the end of the field plate structure away from the body region.
    Type: Application
    Filed: July 27, 2021
    Publication date: April 25, 2024
    Applicant: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: CHUNXU LI, FENG LIN, SHUXIAN CHEN, HONGFENG JIN, HUAJUN JIN, GANG HUANG, YU HUANG, BIN YANG
  • Patent number: 11923453
    Abstract: The present invention relates to an LDMOS device and a method for preparing same. When a field plate hole is formed by etching an interlayer dielectric layer, the etching of the field plate hole is stopped on a blocking layer by means of providing the blocking layer between a semiconductor base and the interlayer dielectric layer. Since the blocking layer is provided with at least one layer of an etch stop layer, and steps are formed on the surface of the blocking layer, at least two levels of formed hole field plates are distributed in a step shape, and lower ends of the first level of hole field plates to the nth level of hole field plates are gradually further away from the drift area in the direction from a gate structure to a drain area.
    Type: Grant
    Filed: August 18, 2020
    Date of Patent: March 5, 2024
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Huajun Jin, Chunxu Li
  • Patent number: 11894458
    Abstract: A lateral double-diffused metal oxide semiconductor field effect transistor (LDMOS), including: a trench gate including a lower part inside a trench and an upper part outside the trench, a length of the lower part in a width direction of a conducting channel being less than that of the upper part, and the lower part extending into a body region and having a depth less than that of the body region; an insulation structure arranged between a drain region and the trench gate and extending downwards into a drift region, a depth of the insulation structure being less than that of the drift region.
    Type: Grant
    Filed: September 25, 2020
    Date of Patent: February 6, 2024
    Assignees: SOUTHEAST UNIVERSITY, CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Jiaxing Wei, Qichao Wang, Kui Xiao, Dejin Wang, Li Lu, Ling Yang, Ran Ye, Siyang Liu, Weifeng Sun, Longxing Shi
  • Patent number: 11887979
    Abstract: A transient voltage suppression device and a manufacturing method therefor, the transient voltage suppression device including: a substrate, a first conductivity type well region and a second conductivity type well region disposed in the substrate. The first conductivity type well region includes a first well, a second well, and a third well. The second conductivity type well region includes a fourth well that isolates the first well from the second well, and a fifth well that isolates the second well from the third well. The device further includes a Zener diode well region provided in the first well, a first doped region provided in the Zener diode well region, a second doped region provided in the Zener diode well region, a third doped region provided in the second well, a fourth doped region provided in the third well, and a fifth doped region provided in the third well.
    Type: Grant
    Filed: August 15, 2019
    Date of Patent: January 30, 2024
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Shikang Cheng, Yan Gu, Sen Zhang
  • Patent number: 11777416
    Abstract: A flyback converter and an output voltage acquisition method therefor and apparatus thereof, wherein the output voltage acquisition method comprises the following steps: acquiring the reference output voltage of a flyback converter; sampling the current output voltage of the flyback converter within a reset time of each switching period among M continuous switching periods of the flyback converter, wherein M is a positive integer; and according to the reference output voltage and the current output voltage, sampling a dichotomy to successively approximate the current output voltage until the M switching periods are finished, and acquiring the output voltage of the flyback converter.
    Type: Grant
    Filed: December 19, 2019
    Date of Patent: October 3, 2023
    Assignees: SOUTHEAST UNIVERSITY, CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Weifeng Sun, Huaxin Zhang, Hu Zhang, Menglin Yu, Siyu Zhao, Shen Xu, Longxing Shi
  • Patent number: 11770076
    Abstract: Disclosed are a system and method for controlling an active clamp flyback (ACF) converter. The system includes: a drive module configured to control turning-on or turning-off of a main switching transistor SL and a clamp switching transistor SH; a main switching transistor voltage sampling circuit configured to sample a voltage drop between an input terminal and an output terminal of the main switching transistor SL; a first comparator connected to the main switching transistor voltage sampling circuit and configured to determine whether a sampled first sampling voltage is a positive voltage or a negative voltage; and a dead time calculation module configured to adjust, according to an output of the first comparator and a main switching transistor control signal DUTYL of a current cycle, a clamp switching transistor control signal DUTYH of next cycle outputted by the drive module.
    Type: Grant
    Filed: June 19, 2020
    Date of Patent: September 26, 2023
    Assignees: SOUTHEAST UNIVERSITY, CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Shen Xu, Minggang Chen, Wanqing Yang, Dejin Wang, Rui Jiang, Weifeng Sun, Longxing Shi
  • Patent number: 11742423
    Abstract: A laterally double-diffused metal oxide semiconductor device is provided, including: a drift region (3) having a first conductivity type; a first body region (10) disposed on the drift region (3) and having a second conductivity type, the first conductivity type and the second conductivity type being opposite conductivity types; a first conductivity type region (13) disposed in the first body region (10); a second body region (12) disposed in the first conductivity type region (13) and having the second conductivity type; a source region (11) disposed in the second body region (12) and having the first conductivity type; and a contact region (9) disposed in the first body region (10) and having the second conductivity type.
    Type: Grant
    Filed: August 20, 2020
    Date of Patent: August 29, 2023
    Assignees: SOUTHEAST UNIVERSITY, CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Jing Zhu, Guichuang Zhu, Nailong He, Sen Zhang, Shaohong Li, Weifeng Sun, Longxing Shi
  • Publication number: 20230268111
    Abstract: A stacked spiral inductor, comprising: a substrate, and multiple stacked insulating layers and inductive metal layers formed on the substrate by means of a semiconductor process. Each inductive metal layer comprises a conductive coil in a shape of a spiral and a through hole area used for connecting two adjacent inductive metal layers. The conductive coils of the inductive metal layers have a common coil center. In two adjacent inductive metal layers, the conductive coil of the lower inductive metal layer is retracted toward the coil center with respect to the conductive coil of the upper inductive metal layer.
    Type: Application
    Filed: April 27, 2023
    Publication date: August 24, 2023
    Applicant: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventor: Congying DONG
  • Patent number: 11711088
    Abstract: An analog-to-digital converter and a clock generation circuit thereof are provided. The clock generation circuit comprises cascaded clock generation modules. The clock generation module at each stage is configured to generate a corresponding internal clock signal, and each stage of the clock generation module comprises a delay module and a logic gate module. The second input end of the N-th stage of the logic gate module is connected to the output end of the previous stage of the logic gate module, and the output end of the logic gate module is configured to output an internal clock, so that each stage of the clock generation module can generate one internal clock signal.
    Type: Grant
    Filed: December 23, 2019
    Date of Patent: July 25, 2023
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Chen Li, Hao Wang
  • Patent number: 11671765
    Abstract: A Micro-Electro-Mechanical System (MEMS) device includes a substrate, and a first sacrificial layer, a first conductive film, a second sacrificial layer, and a second conductive film successively laminated on the substrate, the second sacrificial layer being provided with a cavity; and further includes an amplitude-limiting layer provided with a first through hole and an isolation layer provided with a second through hole. The amplitude-limiting layer is located between the first conductive film and the first sacrificial layer and the isolation layer is located between the amplitude-limiting layer and the first conductive film, and/or the amplitude-limiting layer is located on the second conductive film and the isolation layer is located between the amplitude-limiting layer and the second conductive film. The amplitude-limiting layer extends to a projection region of an opening of the cavity and is in a suspended state.
    Type: Grant
    Filed: April 30, 2020
    Date of Patent: June 6, 2023
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Yonggang Hu, Guoping Zhou, Changfeng Xia
  • Patent number: 11605641
    Abstract: A flash device and a manufacturing method thereof. The method comprises: providing a substrate, and forming, on the substrate, a floating gate polycrystalline layer, a floating gate oxide layer, and a tunneling oxide layer; wherein the floating gate polycrystalline layer is formed on the substrate, the floating gate oxide layer is formed between the substrate and the floating gate polycrystalline layer, a substrate region at one side of the floating gate polycrystalline layer is a first substrate region, a substrate region at the other side of the floating gate polycrystalline layer is a second substrate region; forming, on the tunneling oxide layer, located in the first substrate region, a continuous non-conductive layer, the non-conductive layer extending to the tunneling oxide layer at a side wall of the floating gate polycrystalline layer; and forming, on the tunneling oxide layer, a polysilicon layer.
    Type: Grant
    Filed: October 12, 2019
    Date of Patent: March 14, 2023
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Song Zhang, Zhibin Liang, Yan Jin, Dejin Wang
  • Patent number: 11588049
    Abstract: A semiconductor device and method for manufacturing same. The semiconductor device comprises: a drift region (120); an isolation structure (130) contacting the drift region (120), the isolation structure (130) comprising a first isolation layer (132), a hole etch stop layer (134) on the first isolation layer (132), and a second isolation layer (136) on the hole etch stop layer (134); and a hole field plate (180) provided above the hole etch stop layer (134) and contacting the hole etch stop layer (134).
    Type: Grant
    Filed: July 26, 2019
    Date of Patent: February 21, 2023
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventor: Huajun Jin
  • Patent number: 11557959
    Abstract: An automatic dead zone time optimization system in a primary-side regulation flyback power supply continuous conduction mode (CCM), including a closed loop formed by a control system, including a single output digital to analog converter (DAC) midpoint sampling module, a digital control module, a current detection module, a dead zone time calculation module and a pulse-width modulation (PWM) driving module, and a controlled synchronous rectification primary-side regulation flyback converter. A primary-side current is sampled using a DAC Sampling mechanism to calculate a secondary-side average current, so as to obtain a primary-side average current and a secondary-side average current, in the case of CCM. A secondary-side current is input into the dead zone time calculation module to obtain a reasonable dead zone time; and the PWM driving module is jointly controlled by a primary-side regulation loop and the obtained dead zone time.
    Type: Grant
    Filed: December 29, 2018
    Date of Patent: January 17, 2023
    Assignees: CSMC TECHNOLOGIES FAB2 CO., LTD., SOUTHEAST UNIVERSITY
    Inventors: Shen Xu, Minggang Chen, Hao Wang, Jinyu Xiao, Wei Su, Weifeng Sun, Longxing Shi
  • Patent number: 11552164
    Abstract: A semiconductor device comprises: a substrate; a well region provided in the substrate, having a second conductivity type; source regions having a first conductivity type; body tile regions having the second conductivity type, the source regions and the body tie regions being alternately arranged in a conductive channel width direction so as to form a first region extending along the conductive channel width direction, and a boundary where the edges of the source regions and the edges of the body tie regions are alternately arranged being formed on two sides of the first region; and a conductive auxiliary region having the first conductivity type, provided on at least one side of the first region, and directly contacting the boundary, a contact part comprising the edge of at least one source region on the boundary and the edge of at least one body tie region on the boundary.
    Type: Grant
    Filed: August 9, 2019
    Date of Patent: January 10, 2023
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Huajun Jin, Guipeng Sun
  • Patent number: 11532726
    Abstract: A VDMOS device and a manufacturing method therefor.
    Type: Grant
    Filed: December 14, 2020
    Date of Patent: December 20, 2022
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventor: Zheng Bian
  • Patent number: 11515395
    Abstract: A gallium nitride power device, including: a gallium nitride substrate; cathodes; a plurality of gallium nitride protruding structures arranged on the gallium nitride substrate and between the cathodes, a groove is formed between adjacent gallium nitride protruding structures; an electron transport layer, covering a top portion and side surfaces of each of the gallium nitride protruding structures; a gallium nitride layer, arranged on the electron transport layer and filling each of the grooves; a plurality of second conductivity type regions, where each of the second conductivity type regions extends downward from a top portion of the gallium nitride layer into one of the grooves, and the top portion of each of the gallium nitride protruding structures is higher than a bottom portion of each of the second conductivity type regions; and an anode, arranged on the gallium nitride layer and the second conductivity type regions.
    Type: Grant
    Filed: September 25, 2020
    Date of Patent: November 29, 2022
    Assignees: SOUTHEAST UNIVERSITY, CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Siyang Liu, Ningbo Li, Dejin Wang, Kui Xiao, Chi Zhang, Sheng Li, Xinyi Tao, Weifeng Sun, Longxing Shi
  • Patent number: 11502194
    Abstract: An MOSFET manufacturing method, comprising: etching an oxide layer and a silicon nitride layer on a first conductivity type well region, and forming an opening exposing the first conductivity type well region; etching the first conductivity type well region to form a first trench; depositing a medium oxide layer and performing back etching; etching the first conductivity type well region to form a second trench that is connected to the first trench, and forming a grid on an inner wall of the second trench, forming a second conductivity type well region in the first conductivity type well region at the bottom of the second trench, and forming a source in the second conductivity type well region; and removing the oxide layer and the silicon nitride layer, and forming a drain at the first conductivity type well region outside of the trench.
    Type: Grant
    Filed: July 25, 2019
    Date of Patent: November 15, 2022
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventor: Tse-huang Lo
  • Publication number: 20220352369
    Abstract: A laterally double-diffused metal oxide semiconductor device is provided, including: a drift region (3) having a first conductivity type; a first body region (10) disposed on the drift region (3) and having a second conductivity type, the first conductivity type and the second conductivity type being opposite conductivity types; a first conductivity type region (13) disposed in the first body region (10); a second body region (12) disposed in the first conductivity type region (13) and having the second conductivity type; a source region (11) disposed in the second body region (12) and having the first conductivity type; and a contact region (9) disposed in the first body region (10) and having the second conductivity type.
    Type: Application
    Filed: August 20, 2020
    Publication date: November 3, 2022
    Applicants: SOUTHEAST UNIVERSITY, CSMC TECHNOLOGIES FAB2 CO.,LTD.
    Inventors: JING ZHU, GUICHUANG ZHU, NAILONG HE, SEN ZHANG, SHAOHONG LI, WEIFENG SUN, LONGXING SHI
  • Patent number: 11476324
    Abstract: An MIM capacitor and a manufacturing method therefor. The manufacturing method comprises: providing a semiconductor substrate, and forming a first metal layer on the semiconductor substrate; forming an anti-reflection layer on the first metal layer; performing photoetching and etching on the first metal layer and the anti-reflection layer so as to define an MIM capacitor region, wherein the first metal layer in the MIM capacitor region serves as a lower electrode plate of the MIM capacitor, and the anti-reflection layer in the MIM capacitor region serves as a dielectric layer of the MIM capacitor; and forming an upper electrode plate of the MIM capacitor on the anti-reflection layer in the MIM capacitor region.
    Type: Grant
    Filed: November 11, 2019
    Date of Patent: October 18, 2022
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventor: Hongfeng Jin
  • Patent number: 11462628
    Abstract: A semiconductor device, and a manufacturing method thereof. The method includes: providing a semiconductor substrate provided with a body region, a gate dielectric layer, and a field oxide layer, formed on the semiconductor substrate; forming a gate polycrystalline, the gate polycrystalline covering the gate dielectric layer and the field oxide layer and exposing at least one portion of the field oxide layer; forming a drift region in the semiconductor substrate by ion implantation using a drift region masking layer as a mask, removing the exposed portion of the field oxide layer by further using the drift region masking layer as the mask to form a first field oxide self-aligned with the gate polycrystalline; forming a source region in the body region, and forming a drain region in the drift region; forming a second field oxide on the semiconductor substrate; and forming a second field plate on the second field oxide.
    Type: Grant
    Filed: November 13, 2018
    Date of Patent: October 4, 2022
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Huajun Jin, Guipeng Sun