Patents Assigned to CSMC TECHNOLOGIES FAB2 CO., LTD.
  • Patent number: 11462628
    Abstract: A semiconductor device, and a manufacturing method thereof. The method includes: providing a semiconductor substrate provided with a body region, a gate dielectric layer, and a field oxide layer, formed on the semiconductor substrate; forming a gate polycrystalline, the gate polycrystalline covering the gate dielectric layer and the field oxide layer and exposing at least one portion of the field oxide layer; forming a drift region in the semiconductor substrate by ion implantation using a drift region masking layer as a mask, removing the exposed portion of the field oxide layer by further using the drift region masking layer as the mask to form a first field oxide self-aligned with the gate polycrystalline; forming a source region in the body region, and forming a drain region in the drift region; forming a second field oxide on the semiconductor substrate; and forming a second field plate on the second field oxide.
    Type: Grant
    Filed: November 13, 2018
    Date of Patent: October 4, 2022
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Huajun Jin, Guipeng Sun
  • Patent number: 11430780
    Abstract: A TVS device and a manufacturing method therefor. The TVS device comprises: a first doping type semiconductor substrate (100); a second doping type deep well I (101), a second doping type deep well II (102), and a first doping type deep well (103) provided on the semiconductor substrate; a second doping type heavily doped region I (104) provided in the second doping type deep well I (101); a first doping type well region (105) and a first doping type heavily doped region I (106) provided in the second doping type deep well II (102); a first doping type heavily doped region II (107) and a second doping type heavily doped region II (108) provided in the first doping type deep well (105); a second doping type heavily doped region III (109) located in the first doping type well region (105) and the second doping type deep well II (102); and a first doping type doped region (110) provided in the first doping type well region (105).
    Type: Grant
    Filed: November 1, 2019
    Date of Patent: August 30, 2022
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Shikang Cheng, Yan Gu, Sen Zhang
  • Patent number: 11394306
    Abstract: Provided is a dynamic control method that turns off a primary-side switching transistor when an output voltage exceeds an upper limit, and control the switching of a secondary-side synchronous rectification transistor with a fixed cycle and a fixed duty cycle. During the time that the synchronous rectification transistor is turned on, the energy of a load capacitor at the output end is extracted to the primary side, which causes the output voltage to drop rapidly and the overshoot voltage to decrease greatly.
    Type: Grant
    Filed: June 29, 2020
    Date of Patent: July 19, 2022
    Assignees: CSMC TECHNOLOGIES FAB2 CO., LTD., SOUTHEAST UNIVERSITY
    Inventors: Shen Xu, Wei Wang, Feng Lin, Boyong He, Wei Su, Weifeng Sun, Longxing Shi
  • Publication number: 20220223692
    Abstract: A gallium nitride power device, including: a gallium nitride substrate; cathodes; a plurality of gallium nitride protruding structures arranged on the gallium nitride substrate and between the cathodes, a groove is formed between adjacent gallium nitride protruding structures; an electron transport layer, covering a top portion and side surfaces of each of the gallium nitride protruding structures; a gallium nitride layer, arranged on the electron transport layer and filling each of the grooves; a plurality of second conductivity type regions, where each of the second conductivity type regions extends downward from a top portion of the gallium nitride layer into one of the grooves, and the top portion of each of the gallium nitride protruding structures is higher than a bottom portion of each of the second conductivity type regions; and an anode, arranged on the gallium nitride layer and the second conductivity type regions.
    Type: Application
    Filed: September 25, 2020
    Publication date: July 14, 2022
    Applicants: SOUTHEAST UNIVERSITY, CSMC TECHNOLOGIES FAB2 CO.,LTD
    Inventors: SIYANG LIU, NINGBO LI, DEJIN WANG, KUI XIAO, CHI ZHANG, SHENG LI, XINYI TAO, WEIFENG SUN, LONGXING SHI
  • Patent number: 11387349
    Abstract: A trench gate depletion-type VDMOS device and a method for manufacturing the same are disclosed. The device comprises a drain region; a trench gate including a gate insulating layer on an inner wall of a trench and a gate electrode filled in the trench and surrounded by the gate insulating layer; a channel region located around the gate insulating layer; a well region located on both sides of the trench gate; a source regions located within the well region; a drift region located between the well region and the drain region; a second conductive-type doped region located between the channel region and the drain region; and a first conductive-type doped region located on both sides of the second conductive-type doped region and located between the drift region and the drain region.
    Type: Grant
    Filed: October 14, 2019
    Date of Patent: July 12, 2022
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Yan Gu, Shikang Cheng, Sen Zhang
  • Patent number: 11336217
    Abstract: A method and an apparatus for reducing noise of a switched reluctance motor, includes: supplying a PWM signal as a driving signal to a driving circuit of a switched reluctance motor; and varying a carrier frequency of the PWM signal as an operation period of the switched reluctance motor varies; if the switched reluctance motor changes phase, determining that the operation period of the switched reluctance motor varies.
    Type: Grant
    Filed: December 29, 2018
    Date of Patent: May 17, 2022
    Assignees: CSMC TECHNOLOGIES FAB2 CO., LTD., SOUTHEAST UNIVERSITY
    Inventors: Rui Zhong, Mingshu Zhang, Sen Zhang, Jinyu Xiao, Wei Su, Weifeng Sun, Longxing Shi
  • Patent number: 11315824
    Abstract: A method for manufacturing a trench isolation structure comprising forming a shallow trench having a wider upper section and a narrower lower section in a wafer surface, removing part of the silicon oxide by etching, forming a silicon oxide corner structure at a corner at a top corner of the shallow trench by thermal oxidation, depositing silicon nitride on the wafer surface to cover surfaces of the shallow trench silicon oxide and the silicon oxide corner structure, dry etching the silicon nitride on the shallow trench silicon oxide surface thereby forming masking silicon nitride residues extending into the trench, etching downwards to form a deep trench, forming silicon oxide layers on a side wall and the bottom of the deep trench, depositing polycrystalline silicon in the shallow and deep trenches, removing the silicon nitride, and forming silicon oxide in the shallow trench to cover the polycrystalline silicon.
    Type: Grant
    Filed: July 3, 2018
    Date of Patent: April 26, 2022
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventor: Shukun Qi
  • Patent number: 11309406
    Abstract: A manufacturing method of an LDMOS device comprises: obtaining a wafer formed with a doped region having a first conductivity type, wherein a top buried layer is formed inside the doped region having the first conductivity type, and a field oxide insulation layer structure is formed on the top buried layer; disposing a trench on the doped region having the first conductivity type, wherein the trench extends to the top buried layer and the field oxide insulation layer structure such that a portion of the top buried layer is removed; injecting an ion of a second conductivity type to form a well region below the trench; and forming a doped source region in the well region. The first conductivity type and the second conductivity type are opposite conductivity types.
    Type: Grant
    Filed: December 5, 2018
    Date of Patent: April 19, 2022
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Nailong He, Sen Zhang, Guangsheng Zhang, Yun Lan
  • Patent number: 11276690
    Abstract: The present application provides an integrated semiconductor device and an electronic apparatus, comprising a semiconductor substrate and a first doped epitaxial layer having a first region, a second region, and a third region; a partition structure is arranged in the third region; the first region is formed having at least two second doped deep wells, and the second region is formed having at least two second doped deep wells; a dielectric island partially covers a region between two adjacent doped deep wells in the first region and second region; a gate structure covers the dielectric island; a first doped source region is located on the two sides of the gate structure, and a first doped source region located in the same second doped deep well is separated; a first doped trench is located on the two sides of the dielectric island in the first region, and extends laterally to the first doped source region.
    Type: Grant
    Filed: November 21, 2018
    Date of Patent: March 15, 2022
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Shikang Cheng, Yan Gu, Sen Zhang
  • Patent number: 11264468
    Abstract: A semiconductor device includes a semiconductor substrate, a field oxide layer, a gate region and field plate integrated structure and a plurality of contact holes. A body region and a drift region are formed in the semiconductor substrate. An active region is formed in the body region, and a drain region is formed in the drift region. A field oxide layer is located on the drift region and the drift region surrounds a part of the field oxide layer. An integrated structure including a gate region and a field plate, the integrated structure extending from above the field oxide layer to above the body region. A depth of a contact hole closer to the source region penetrating into the field oxide layer is greater than a depth of a contact hole closer to the drain region penetrating into the field oxide layer.
    Type: Grant
    Filed: January 15, 2019
    Date of Patent: March 1, 2022
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventor: Guangyang Wang
  • Patent number: 11257720
    Abstract: A manufacturing method for a semiconductor device, and an integrated semiconductor device. The manufacturing method comprises: on a semiconductor substrate, forming an epitaxial layer having a first region, a second region, and a third region; forming at least one groove in the third region, forming at least two second doping deep traps in the first region, and forming at least two second doping deep traps in the second region; forming a first dielectric island between the second doping deep traps and forming a second dielectric island on the second doping deep traps; forming a first doping groove at both sides of the first dielectric island in the first region; forming a gate structure on the first dielectric island; forming an isolated first doping source region using the second dielectric island as a mask.
    Type: Grant
    Filed: November 21, 2018
    Date of Patent: February 22, 2022
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Shikang Cheng, Yan Gu, Sen Zhang
  • Patent number: 11233045
    Abstract: A transient voltage suppression device includes a substrate; a first conductivity type well region disposed in the substrate and comprising a first well and a second well; a third well disposed on the substrate, a bottom part of the third well extending to the substrate; a fourth well disposed in the first well; a first doped region disposed in the second well; a second doped region disposed in the third well; a third doped region disposed in the fourth well; a fourth doped region disposed in the fourth well; a fifth doped region extending from inside of the fourth well to the outside of the fourth well, a portion located outside the fourth well being located in the first well; a sixth doped region disposed in the first well; a seventh doped region disposed below the fifth doped region and in the first well.
    Type: Grant
    Filed: September 4, 2019
    Date of Patent: January 25, 2022
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Shikang Cheng, Yan Gu, Sen Zhang
  • Patent number: 11227948
    Abstract: A lateral double-diffused metal oxide semiconductor component and a manufacturing method therefor. The lateral double-diffused metal oxide semiconductor component comprises: a semiconductor substrate, the semiconductor substrate being provided thereon with a drift area; the drift area being provided therein with a trap area and a drain area, the trap area being provided therein with an active area and a channel; the drift area being provided therein with a deep trench isolation structure arranged between the trap area and the drain area, and the deep trench isolation structure being provided at the bottom thereof with alternately arranged first p-type injection areas and first n-type injection areas.
    Type: Grant
    Filed: September 1, 2018
    Date of Patent: January 18, 2022
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Nailong He, Sen Zhang, Xuchao Li
  • Patent number: 11222888
    Abstract: An anti-static metal oxide semiconductor field effect transistor structure includes an anti-static body structure and a slave metal oxide semiconductor field effect transistor, the anti-static body structure includes: a main metal oxide semiconductor field effect transistor; a first silicon controlled rectifier, an anode thereof being connected to a drain of the main metal oxide semiconductor field effect transistor, a cathode and a control electrode thereof being connected to a source of the main metal oxide semiconductor field effect transistor; and a second silicon controlled rectifier, an anode thereof being connected to the drain of the main metal oxide semiconductor field effect transistor, a cathode thereof being connected to a gate of the main metal oxide semiconductor field effect transistor, a control electrode thereof being connected to the source or the gate of the main metal oxide semiconductor field effect transistor.
    Type: Grant
    Filed: March 5, 2019
    Date of Patent: January 11, 2022
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventor: Jun Sun
  • Patent number: 11201557
    Abstract: A control system for synchronous rectifying transistor of LLC converter, the system comprising a voltage sampling circuit, a high-pass filtering circuit, a PI compensation and effective value detection circuit, and a control system taking a microcontroller (MCU) as a core. When the LLC converter is operating at a high frequency, a drain-source voltage VDS(SR) of the synchronous rectifying transistor delivers, via the sampling circuit, a change signal of the drain-source voltage during turn-off into the high-pass filtering circuit and the PI compensation and effective value detection circuit to obtain an effective value amplification signal of a drain-source voltage oscillation signal caused by parasitic parameters, and the current value is compared with a previously collected value via a control circuit taking a microcontroller (MCU) as a core, so as to change a turning-on time of the synchronous rectifying transistor in the next period.
    Type: Grant
    Filed: December 29, 2018
    Date of Patent: December 14, 2021
    Assignees: CSMC TECHNOLOGIES FAB2 CO, LTD., SOUTHEAST UNIVERSITY
    Inventors: Qinsong Qian, Shengyou Xu, Feng Lin, Hao Wang, Wei Su, Qi Liu, Longxing Shi
  • Patent number: 11188700
    Abstract: The present application relates to a resistance simulation method for a power device, comprising: establishing an equivalent resistance model of a power device, wherein the connection relationship of N fingers is equivalent to N resistors Rb connected in parallel, input ends of adjacent resistors Rb are connected by means of a resistor Ra, output ends of adjacent resistors Rb are connected by means of a resistor Rc, R a = 1 N ? R 0 , R c = 1 N ? R 1 , and Rb=RDEV*N+RS+RD, wherein R0 and R1 are respectively resistances of a source metal strip and a drain metal strip, Rs is a metal resistor of a first intermediate layer connecting one source region to the source metal strip, RD is a metal resistor of a second intermediate layer connecting one drain region to the drain metal strip, and RDEV is the channel resistance of the power device; and calculating the resistance of the equivalent resistance model as the resistance of the power device.
    Type: Grant
    Filed: August 15, 2019
    Date of Patent: November 30, 2021
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Nan Zhang, Jing Zhou, Hao Wang, Zhan Gao, Maoqian Zhu, Cheng Zhou, Zhijin Li, Lin Wu, Shuming Guo, Yong Huang
  • Patent number: 11171223
    Abstract: A method for manufacturing a semiconductor device and an integrated semiconductor device, said method comprising: providing an epitaxial layer having a first region and a second region, forming, in the first region, at least two second doping-type deep wells, and forming, in the second region, at least two second doping-type deep wells; forming a first dielectric island between the second doping-type deep wells and forming a second dielectric island on the second doping-type deep wells; forming a first doping-type trench on two sides of the first dielectric island in the first region; forming a gate structure on the first dielectric island; and forming a separated first doping-type source region by using the second dielectric island as a mask, the first doping-type trench extending, in the first region, transversally to the first doping-type source region.
    Type: Grant
    Filed: November 21, 2018
    Date of Patent: November 9, 2021
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Shikang Cheng, Yan Gu, Sen Zhang
  • Patent number: 11164946
    Abstract: A manufacturing method for a flash device. A manufacturing method for a flash device, comprising: providing a substrate; forming sequentially, on the substrate, a floating gate (FG) oxide layer, an FG polycrystalline layer, and an FG mask layer; etching, at the FG location region, the FG polycrystalline layer and the FG mask layer, forming a window on the FG mask layer, and forming a trench on the FG polycrystalline layer, the window being communicated with the trench; performing second etching of the side wall of the window of the FG mask layer, enabling the width of the trench located on the FG polycrystalline layer to be less than the width of the secondarily-etched window located on the FG mask layer; and oxidizing the FG polycrystalline layer, enabling the oxide to fill the trench to form a field oxide layer; and etching an FG having sharp angles.
    Type: Grant
    Filed: December 14, 2017
    Date of Patent: November 2, 2021
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Tao Liu, Zhibin Liang, Song Zhang, Yan Jin, Dejin Wang
  • Patent number: 11158736
    Abstract: A MOSFET structure and a manufacturing method thereof are provided. The structure includes a substrate, a well region of a first conductivity type, a first trench formed on a surface of the well region of the first conductivity type and extending downwards to a well region of a second conductivity type, a source disposed in the well region of the second conductivity type and under the first trench, a gate oxide layer disposed on an inner surface of the first trench, a polysilicon gate disposed on the gate oxide layer, a conductive plug extending downwards from above the first trench and being in contact with the well region of the second conductivity type after extending through the source, an insulation oxide layer filled in the first trench between the conductive plug and the polysilicon gate, and a drain disposed outside the first trench and obliquely above the source.
    Type: Grant
    Filed: June 2, 2020
    Date of Patent: October 26, 2021
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventor: Tse-Huang Lo
  • Patent number: 11158737
    Abstract: Provided in the present invention are an LDMOS component, a manufacturing method therefor, and an electronic device, comprising: a semiconductor substrate (100); a drift area (101) provided in the semiconductor substrate; a gate electrode structure (103) provided on a part of the surface of the semiconductor substrate and covers a part of the surface of the drift area; a source electrode (1052) and a drain electrode (1051) respectively provided in the semiconductor substrate on either side of the gate electrode structure, where the drain electrode is provided in the drift area and is separated from the gate electrode structure; a metal silicide barrier layer (106) covering the surface of at least a part of the semiconductor substrate between the gate electrode structure and the drain electrode; and a first contact hole (1081) provided on the surface of at least a part of the metal silicide barrier layer.
    Type: Grant
    Filed: August 3, 2018
    Date of Patent: October 26, 2021
    Assignee: CSMC TECHNOLOGIES FAB2 CO., LTD.
    Inventors: Huajun Jin, Guipeng Sun, Hongfeng Jin