Abstract: The present invention intends to provide a method for manufacturing a semiconductor device in which source/drain extension regions having a uniform depth are created with high reproducibility. This objective is achieved by the following method: A gate electrode 24 is formed on a semiconductor substrate 21 via a gate insulator 23. The portion of the semiconductor substrate 21 other than the gate electrode 24 is irradiated with an ultra-short pulsed laser light having a pulse width within a range from 10 to 1000 femtoseconds in order to create an amorphous layer 26a. Then, recesses 27 are created in the semiconductor substrate 21 by selectively etching the amorphous layer 26a. The recesses 27 are filled with semiconductor layers 28 whose impurity concentration is higher than that of the semiconductor substrate 21, and the source/drain extension regions 31 are created there.

Abstract: A polyamide having a structure represented by the chemical formula (1): wherein m and n represent an integer satisfying m?1, n?1, 2?(m+n)?150, 0.3?m/(m+n)?0.9, R1 and R2 represent at least one monovalent organic group containing a photopolymerizable unsaturated bond, X1 represents at least one tetravalent aromatic group, X2 represents at least one trivalent aromatic group, Y1 and Y2 represent at least one divalent organic group, and Z represents at least one monovalent organic group selected from mono-substituted amino and imido groups.

Abstract: Disclosed is a negative type photosensitive resin composition comprising (A) a polyamide having a photopolymerizable unsaturated double bond, (B) a monomer having a photopolymerizable unsaturated double bond, (C) a photopolymerization initiator and (D) a melamine resin.

Abstract: An anisotropic conductive adhesive sheet comprising at least a curing agent, a curable insulating resin and conductive particles, wherein in a region extending from a one-side surface of the anisotropic conductive adhesive sheet along the thickness direction to a position of not greater than 2.0 times the average diameter of the conductive particles, 90% or more of the sum of conductive particles are present, the 90% or more of the sum of conductive particles being present without contact with other conductive particles, and wherein the average diameter of conductive particles is in the range of 1 to 8 ?m, the average particle distance between adjacent conductive particles being in the range of 1 to 5 times the average particle diameter and not greater than 20 ?m, and wherein the thickness of the anisotropic conductive adhesive sheet is at least 1.5 times the average particle distance but not greater than 40 ?m.

Abstract: Disclosed is a hydroxy polyamide represented by the following general formula (1) and having a 5-amino isophthalic acid derivative structure in the main chain structure. (1) (In the formula, m and n represent integers, X represents at least one tetravalent organic group, Y represents at least one divalent organic group having a 5-amino isophthalic acid derivative structure, and Z represents at least one divalent organic group.

Abstract: Plasma producing method and apparatus as well as plasma processing apparatus including the plasma producing apparatus wherein one or more high-frequency antennas are arranged in a plasma producing chamber, and a high-frequency power is applied to a gas in the chamber from the antenna(s) to produce inductively coupled plasma. Impedance of the high-frequency antenna is set in a range of 45 ? or lower.

Abstract: Plasma producing method and apparatus wherein a plurality of high-frequency antennas are arranged in a plasma producing chamber, and a high-frequency power supplied from a high-frequency power supply device (including a power source, a phase controller and the like) is applied to a gas in the chamber from the antennas to produce inductively coupled plasma. At least some of the plurality of high-frequency antennas are arranged in a fashion of such parallel arrangement that the antennas successively neighbor to each other and each of the antennas is opposed to the neighboring antenna. The high-frequency power supply device controls a phase of a high-frequency voltage applied to each antenna, and thereby controls an electron temperature of the inductively coupled plasma.

Abstract: An azimuth measuring device capable of calibrating a magnetic sensor without putting load on a user is provided. When a point having amplified output values Sx, Sy, Sz after a sensitivity correction as x, y, z components is arranged on an xyz coordinate system, an offset information calculation section 8 calculates the center coordinates of such a sphere whose surface is located in the vicinity of each point and calculates an x component of the center coordinates of this sphere as a current offset Cx of an x-axis Hall element HEx, a y component of the center coordinates of this sphere as a current offset Cy of a y-axis Hall element HEy and a z component of the center coordinates of this sphere as a current offset Cz of a z-axis Hall element HEz. It is thereby possible to calibrate the magnetic sensor without putting load on the user.

Abstract: A low-cost, current sensor suitable for mass production and a manufacturing method thereof are provided. The current sensor is small with high sensitivity and can be packaged in a standard assembly line which is normally used when an integrated circuit is manufactured. Further, it is possible to obtain a sufficient shielding effect against a disturbance flux without degrading the detecting sensitivity of a flux. A first magnetic material 50 is bonded to the lower part of a current conductor 22C. The first magnetic material 50 has the function of converging and amplifying a flux 3 generated by the current to be measured. A second magnetic material 51 is bonded above a magnetic sensor chip 20. The second magnetic material 51 has a shielding function against a disturbance flux entering from the outside.

Abstract: A current measuring method capable of reducing the size of a current sensor while ensuring electric insulation easily and suitable for enhancing reliability by preventing heat generation. A current measuring device comprises a printed board (3) having a conductor for measurement (4), and a noncontact current sensor (100) being mounted on the printed board (3), wherein the current sensor (100) is mounted on the surface (92) of the printed board (3) opposite to the side provided with the conductor for measurement (4). Since the current sensor (100) is mounted on the rear surface (92), electric insulation between the secondary conductor of the current sensor (100) and the conductor for measurement (4) can be ensured relatively easy.

Abstract: A pointing device is provided which can reduce its size and height, reduce leakage magnetic flux density to the outside. Magnetic sensors are disposed symmetrically two by two on X and Y axes on a printed circuit board. A silicone resin is placed on the printed circuit board, and an internally and externally unipolarly magnetized ring-like magnet is placed near the center of the magnetic sensors. The printed circuit board and silicone resin are not bonded. The silicone resin is easily deformed by applying external force, and returns to its initial state without the external force as soon as the external force is removed. The ring-like magnet is configured to move approximately in parallel to the surface of the printed circuit board. The variations in the ambient magnetic flux density produced by the movement of the ring-like magnet are detected by the magnetic sensors.

Abstract: An angle detection apparatus for detecting an angle of a rotatable magnetic field source comprises first and second magnetic sensor units for detecting first and second magnetic components of the magnetic field of the magnetic field source, driving means for driving the first and second magnetic sensor unit and control means. The control means control an output signal of the first magnetic sensor unit so as to have a fixed value and the driving means drive the second magnetic sensor unit according to the same drive conditions as those applied to the first magnetic sensor unit at the time when the first magnetic sensor unit is controlled by said control means so that an output signal of the second magnetic sensor unit is proportional to the tangent of said angle.

Abstract: A wrinkle-free organic film having a high light transmittance and a uniform film thickness is obtained by forming an organic thin film on the surface of a substrate having a contact angle of the surface to water of 90° or higher, followed by peeling the film therefrom.