Patents Assigned to FEI Company
  • Patent number: 12223752
    Abstract: Disclosed herein are charged particle microscopy (CPM) support systems, as well as related methods, computing devices, and computer-readable media. For example, in some embodiments, a CPM support apparatus may include: first logic to cause a CPM to generate a single image of a first portion of a specimen; second logic to generate a first mask based on one or more regions-of-interest provided by user annotation of the single image; and third logic to train a machine-learning model using the single image and the one or more regions-of-interest. The first logic may cause the CPM to generate multiple images of corresponding multiple additional portions of the specimen, and the second logic may, after the machine-learning model is trained using the single image and the one or more regions-of-interest, generate multiple masks based on the corresponding images of the additional portions of the specimen using the machine-learning model without retraining.
    Type: Grant
    Filed: September 30, 2021
    Date of Patent: February 11, 2025
    Assignee: FEI Company
    Inventors: Ondrej Machek, Pavel Potocek, Tereza Konečná
  • Patent number: 12216068
    Abstract: Methods for using a single electron microscope system for investigating a sample with twin electron beams having different focal lengths include the steps of emitting electrons toward the sample, forming the electrons into a two beams, and then modifying the focal properties of at least one of the two beams such that they have different focal planes. Once the two beams have different focal planes, the first electron beam is focused at the sample, and the second electron beam is focused so that it acts as a TEM beam that is parallel beam when incident on the sample. Emissions resultant from the first electron beam and the TEM beam being incident on the sample can then be detected by a single detector or detector array and used to generate a TEM image.
    Type: Grant
    Filed: January 16, 2024
    Date of Patent: February 4, 2025
    Assignee: FEI Company
    Inventors: Alexander Henstra, Yuchen Deng, Holger Kohr
  • Patent number: 12216029
    Abstract: The present invention relates to a method for preparing and/or processing a sample. The sample comprises at least one fluid, and the method comprises directing a charged particle beam onto the at least one fluid and causing the at least one fluid to flow in response to the charged particle beam being directed on to it. The present invention also relates to a system and a computer program product used to carry out the method.
    Type: Grant
    Filed: May 27, 2022
    Date of Patent: February 4, 2025
    Assignee: FEI Company
    Inventors: Libor Novak, Tomas Kazda
  • Publication number: 20250037286
    Abstract: Methods and apparatus determine a location of a boundary of a given material in a sample, based on classification of reciprocal space images at respective positions. A diffraction image at a given position is classified to identify a material at that position. Imaging and classification at multiple positions can quickly and reliably find the boundary with sub-micron accuracy. Binary search provides speed-up. Classification is performed by neural network. The technique is suitable for distinguishing monocrystalline, polycrystalline, and amorphous silicon, high-Z materials (tungsten), or low-Z materials (carbon), among others. The technique integrates into automated workflows, with precise positioning of further imaging, probing, or milling operations based on the located boundary. Examples and variations are disclosed.
    Type: Application
    Filed: July 25, 2023
    Publication date: January 30, 2025
    Applicant: FEI Company
    Inventors: John Francis Flanagan, Christopher John Hakala, Lucas Winiarski
  • Patent number: 12211666
    Abstract: Apparatuses and processes for generating data for three-dimensional reconstruction are disclosed herein. An example method at least includes exposing a subsequent surface of a sample, acquiring an image of the subsequent surface, comparing the image of the subsequent surface to an image of a reference surface, based on the comparison exceeding a threshold, acquiring a compositional or crystalline map of the subsequent surface, and based on the comparison not exceeding the threshold, exposing a next surface.
    Type: Grant
    Filed: December 22, 2021
    Date of Patent: January 28, 2025
    Assignee: FEI Company
    Inventors: Oleksii Kaplenko, Tomáš Vystavěl, Petr Wandrol, Ondřej Machek
  • Patent number: 12211295
    Abstract: A scanning microscope system configured for material analysis and mineralogy comprising a first detector and a second detector, and a data-processing system comprising a data-storage component and a segmentation component. The data-storage component is configured for providing image(s) of a sample based on first emissions from a plurality of first scan locations. The segmentation component is configured for determining at least one or a plurality of second scan locations for at least one or a plurality of region(s) of the at least one image. The second detector is configured for detecting second emissions from at least one of the second scan locations of at least one of the regions. The system is further configured for determining the second scan location(s) for the region(s) and detecting the second emissions from the at least one of the second scan locations of the at least one of the regions in parallel.
    Type: Grant
    Filed: December 28, 2021
    Date of Patent: January 28, 2025
    Assignee: FEI Company
    Inventor: Darius Koĉár
  • Publication number: 20250029809
    Abstract: Elongated or other non-circular charged-particle beams (CPBs) are used to produce substrate images that can be processed such as by deconvolution to produce a final image. In some cases, first and second images associated with an asymmetric CPB beams aligned along parallel axes are deconvolved and then combined to produce the final image or combined and then deconvolved to produce the final image. Milling or other processing can be performed by aligning an asymmetric CPB with respect to a CPB scan or processing direction.
    Type: Application
    Filed: July 21, 2023
    Publication date: January 23, 2025
    Applicant: FEI Company
    Inventors: Galen GLEDHILL, Alexander HENSTRA
  • Patent number: 12205318
    Abstract: Disclosed herein are scientific instrument support systems, as well as related methods, computing devices, and computer-readable media. For example, in some embodiments, a method for determining sample location and associated stage coordinates by a microscope at least comprises acquiring, with a navigation camera, an image of a plurality of samples loaded on a fixture, the image being of low resolution at a field of view that includes the fixture and all samples of the plurality of samples, analyzing the image with a trained model to identify the plurality of samples, based on the analysis, associating each sample with a location on the fixture, based on the location on the fixture of each sample, associating separate stage coordinate information with each sample of the plurality of samples loaded on the fixture, and translating a stage holding the fixture to first stage coordinates based on the associated stage coordinate information of a first sample of the plurality of samples.
    Type: Grant
    Filed: January 21, 2022
    Date of Patent: January 21, 2025
    Assignee: FEI Company
    Inventors: Sven Beunen, Scott Maclay
  • Publication number: 20250003845
    Abstract: Apparatus and methods are disclosed for vibration-free cryogenic cooling, suitable for TEM and other analytic equipment. A thermal battery includes one or more of: a cryocooler, a thermal switch, a thermal cold storage reservoir, and a cold finger. The thermal reservoir is mounted outside a sample chamber. The cold finger provides thermal coupling between the reservoir and a sample holder inside the sample chamber. In varying embodiments, sample holder and sample temperatures are regulated by a heater or by an inline variable thermal resistor. Cyclic phased operation includes cooling the reservoir, decoupling the cryocooler from the reservoir, and temperature-regulated passive vibration-free thermal energy extraction from sample to reservoir. The described system delivers a stand time of 12 hours at 20 K. Temperature regulation, a hybrid thermal switch, damping of thermal fluctuations, and material selection are described.
    Type: Application
    Filed: September 16, 2024
    Publication date: January 2, 2025
    Applicant: FEI Company
    Inventors: Ronald Lamers, Hans Persoon, Alphons Theophile Augusta Maria de Waele, Theo Ruijl, Hugo van Leeuwen
  • Publication number: 20250005714
    Abstract: Methods and apparatus apply focus stacking to sample preparation, improving accuracy of analytic tasks, facilitating automation, and improving throughput. Focus stacking is applied to a set of sample images having different focus depths, to produce a composite image in which features at different depths are in focus and, optionally, a depth map. A sample location is selected from the composite image and a localized material removal, measurement, or imaging operation is performed based on the sample location. A depth value from the depth map is used to set a working depth of a tool for performing the localized operation. Applications include lamella preparation for cryogenic TEM analysis of biological samples. Other applications, techniques, and variations are disclosed.
    Type: Application
    Filed: June 30, 2023
    Publication date: January 2, 2025
    Applicant: FEI Company
    Inventors: Matej Dolník, Radim Kríž, Lukáš Malý
  • Publication number: 20250006453
    Abstract: Magnetic lenses, charged particle microscope systems including the same, and associated methods. In an example, a magnetic lens is configured to direct a charged particle beam to a sample location and comprises a plurality of pole pieces and at least two independent coils. The magnetic lens operates as an objective lens with variable main objective plane without immersing a sample in a magnetic field. The variable main objective plane permits selective adjustment of a magnification of the charged particle beam at the focal plane without immersing the sample location in the magnetic fields produced by coils of the magnetic lens. In an example, a charged particle microscope system comprises a charged particle source, a sample holder, and a magnetic objective lens. In an example, a method comprises positioning a sample relative to a magnetic lens and operating the magnetic lens to focus a charged particle beam to a focus location.
    Type: Application
    Filed: June 27, 2023
    Publication date: January 2, 2025
    Applicant: FEI Company
    Inventors: Jan Stopka, Tomáš Radlicka, Martin Oral
  • Patent number: 12183539
    Abstract: Various approaches are provided for transferring samples within an inert gas environment to and from a beam system. In one example, a sample transfer capsule includes a container configured to store a sample during transport, wherein the container is adjustable between a closed configuration and an open configuration, an inert gas storage chamber coupled to the container and configured to store an inert gas, and a valve coupled to the inert gas storage chamber and the container and configured to selectively allow the inert gas to flow from the inert gas storage chamber to the container when the container is in the closed configuration. In this way, samples may be maintained in an inert gas environment during transport and while beam system vacuum chambers are vented, thereby reducing exposure of the samples and subsequently reducing the rate of a chemical reaction, such as oxidation or nitridation, of the samples.
    Type: Grant
    Filed: January 31, 2022
    Date of Patent: December 31, 2024
    Assignee: FEI Company
    Inventors: Libor Novák, Petr Glajc, Marek Uncovský
  • Patent number: 12183537
    Abstract: A positioning system can include a drive unit having an actuator element and a control system. The actuator element can include a piezoelectric material. The control system can be configured to select a path between a first position and a second position, identify at least one change of direction of the actuator element along the selected path, generate a hysteresis-compensated drive signal based at least in part on the change in direction, and apply the hysteresis-compensated drive signal to the actuator element to move an object along the path.
    Type: Grant
    Filed: November 29, 2022
    Date of Patent: December 31, 2024
    Assignee: FEI Company
    Inventors: Edwin Verschueren, Paul Tacx
  • Patent number: 12176179
    Abstract: A method for reducing throughput time in a sample image acquisition session in transmission electron microscopy comprises: providing an electron microscope comprising a sample component, a beam generator, an adjusting component, and a filtering component; securing a sample by using the sample component; generating an electron beam by using the beam generator; generating an image beam by directing the beam to the sample component; adjusting at least one of the beam and the image beam by using the adjusting component to obtain at least one modified image beam, wherein the adjusting is performed in such a way, that off-axial aberration of the modified image beam is minimized; and filtering the modified image beam via the filtering component to reduce resolution-deteriorating effect of chromatic aberration on the modified image beam resulting from the adjusting of the at least one of the beam and the image beam.
    Type: Grant
    Filed: September 26, 2023
    Date of Patent: December 24, 2024
    Assignee: FEI Company
    Inventors: Maarten Bischoff, Peter Christiaan Tiemeijer, Tjerk Gerrit Spanjer, Stan Johan Pieter Konings
  • Patent number: 12175648
    Abstract: The invention relates to a method implemented by a data processing apparatus, comprising the steps of receiving an image; providing a set-point for a desired image quality parameter of said image; and processing said image using an image analysis technique for determining a current image quality parameter of said image. In the method, the current image quality parameter is compared with said desired set-point. Based on said comparison, a modified image is generated by using an image modification technique. The generating comprises a step of deteriorating said image in terms of said image quality parameter in case said current image quality parameter exceeds said set-point. The modified image is then output and may be further analysed.
    Type: Grant
    Filed: November 30, 2023
    Date of Patent: December 24, 2024
    Assignee: FEI Company
    Inventors: Remco Schoenmakers, Maurice Peemen, Pavel Potoček
  • Patent number: 12165835
    Abstract: An apparatus includes an electron source coupled to provide an electron beam, a beam deflector arranged to provide a pulsed electron beam from the electron beam, a detector arranged to receive the pulsed electron beam after transmitting through a sample, and a controller coupled to control at least the beam deflector and the detector, the controller coupled to or including code that, when executed by the controller, causes the apparatus to establish the pulsed electron beam with pulse characteristics based on control of at least the beam deflector, wherein an illumination window is formed based on the pulse characteristics, the illumination window being a time frame when the sample is illuminated with a pulse of the pulsed electron beam, and to form a detection window for the detector and synchronize the detection window in relation to the illumination window, wherein detection events occurring in the detection window form the basis of an image, wherein the detection window determines a time frame when the de
    Type: Grant
    Filed: December 28, 2021
    Date of Patent: December 10, 2024
    Assignee: FEI Company
    Inventors: Bart Jozef Janssen, Gerard van Veen
  • Patent number: 12165833
    Abstract: Systems and methods for efficiently processing multiple samples with a BIB system, are disclosed. An example method for efficiently processing multiple samples with a BIB system according to the present invention comprises removing an individual sample holder containing a sample from a storage location within the BIB system, wherein the BIB system includes multiple sample holders positioned in one or more storage locations, loading the individual sample holder onto a sample stage configured to hold the sample holder during polishing of the corresponding sample held by the individual sample holder, and causing a BIB source to emit a broad ion beam towards the sample, wherein the broad ion beam removes at least a portion of the sample upon which it is incident. Once a desired portion of the sample is removed, the sample holder is removed from the sample stage and loaded back into the storage location.
    Type: Grant
    Filed: May 19, 2022
    Date of Patent: December 10, 2024
    Assignee: FEI Company
    Inventors: Michal Hrouzek, Libor Novak, Krishna Kanth Neelisetty, Petr Wandrol
  • Patent number: 12165839
    Abstract: Systems and method for the preparation and delivery of biological samples for charged particle analysis are disclosed herein. An example system at least includes an ion filter coupled to select a sample ion from an ionized sample supply, the ion filter including a quadrupole filter to select the sample ion from the sample supply, an energy reduction cell coupled to receive the selected sample ion and reduce a kinetic energy of the sample ion, a validation unit coupled to receive the sample ion and determine whether the sample ion is a target sample ion, a substrate coupled to receive the sample, wherein the substrate is electron transparent, an ion transport module coupled to receive the sample ion from the ion filter and transport the sample ion to the substrate, and an imaging system arranged to image, with a low energy charged particle beam, the sample located on the substrate, wherein the substrate is arranged in an analysis location.
    Type: Grant
    Filed: July 18, 2023
    Date of Patent: December 10, 2024
    Assignee: FEI Company
    Inventors: Marcus Straw, Dmitry Grinfeld, Alexander Makarov, Alan Bahm, Aaron Torok, Kun Liu, Joseph Christian, Josh Gilbert, Tom Nichols, Jeff Kosmoski
  • Patent number: 12165832
    Abstract: Methods and systems for performing sample lift-out and protective cap placement for highly reactive materials within charged particle microscopy systems are disclosed herein. Methods include preparing a nesting void in a support structure, translating at least a portion of a sample into the nesting void, and milling material from a region of the support structure that defines the nesting void. The material from the region of the support structure is milled such that at least some of the removed material redeposits to form an attachment bond between the sample and a remaining portion of the support structure. In various embodiments, the sample can then be investigated using one or more of serial sectioning tomography on the sample, enhanced insertable backscatter detector (CBS) analysis on the sample, and electron backscatter diffraction (EBSD) analysis on the sample.
    Type: Grant
    Filed: December 31, 2021
    Date of Patent: December 10, 2024
    Assignee: FEI Company
    Inventors: Adam Stokes, Cliff Bugge, Brandon Van Leer, Valerie Brogden, Chengge Jiao, Letian Li, David Donnet
  • Patent number: 12158372
    Abstract: Methods and apparatus are disclosed for concurrent cleaning and cleanliness monitoring of a sample such as a substrate for electron point projection microscopy. A graphene sample is illuminated by a laser. Raman scattering from contaminants generates secondary light which is analyzed by spectrometer. Based on Raman scattering analysis, sample cleanliness is determined. Cleaning can be dynamically terminated based on achieving a target cleanliness level or based on prediction thereof. Variations and additional applications are disclosed.
    Type: Grant
    Filed: June 6, 2022
    Date of Patent: December 3, 2024
    Assignee: FEI Company
    Inventors: Joseph Christian, Jorge Filevich