Patents Assigned to GLOBALFOUNDRIES Singapore Pte. Ltd.
  • Patent number: 12266671
    Abstract: Structures for a photodetector and methods of forming a structure for a photodetector. The structure includes a semiconductor layer having a p-n junction and a deep trench isolation region extending through the semiconductor layer. The deep trench isolation region includes first layers and second layers that alternate with the first layers to define a Bragg mirror. The first layers contain a first material having a first refractive index, and the second layers contain a second material having a second refractive index that is greater than the first refractive index.
    Type: Grant
    Filed: October 21, 2021
    Date of Patent: April 1, 2025
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Eric Linardy, Eng Huat Toh, Ping Zheng, Kiok Boone Elgin Quek
  • Patent number: 12266702
    Abstract: Structures for a memory device and methods of forming a structure for a memory device. The structure includes a first and second source/drain regions in a semiconductor substrate, a first gate stack on the semiconductor substrate, and a second gate stack on the semiconductor substrate adjacent to the first gate stack. The first and second gate stacks are positioned in a lateral direction between the first source/drain region and the second source/drain region. The first gate stack includes first and second gate electrodes, and the first gate electrode includes segments spaced apart along a longitudinal axis of the first gate stack.
    Type: Grant
    Filed: June 8, 2022
    Date of Patent: April 1, 2025
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Young Way Teh, Bin Zhu, Madhu Sudan Mukhopadhyay, Subramanian Sundareswara
  • Patent number: 12255200
    Abstract: The present disclosure generally relates to trench isolation structures for semiconductor devices. More particularly, the present disclosure relates to semiconductor devices having trench isolation structures with varying depths for electrically isolating integrated circuit (IC) components in the semiconductor devices. The present disclosure also relates to method of forming the trench isolation structures.
    Type: Grant
    Filed: July 8, 2024
    Date of Patent: March 18, 2025
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Yong Wah See, Guowei Zhang, Ee Jan Khor, Chin Leng Ko
  • Patent number: 12238938
    Abstract: Structures for a random number generator that include magnetic-tunnel-junction layer stacks and methods of forming such structures. The structure comprises a write line, first and source lines, a first transistor connected by the first source line to a first end of the write line, and a second transistor connected by the second source line to a second end of the write line. The structure further comprises a plurality of magnetic-tunneling-junction layer stacks disposed on the write line between the first and second ends of the write line.
    Type: Grant
    Filed: May 6, 2024
    Date of Patent: February 25, 2025
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Vinayak Bharat Naik, Jian Peng Chan, Seidikkurippu Nellainayagam Piramanayagam
  • Patent number: 12224089
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to a thin film resistor and methods of manufacture. A structure includes: a thin film resistor having an opening and being between an upper insulator material and a lower insulator material; and a contact extending through the opening in the thin film resistor and into the lower insulator material.
    Type: Grant
    Filed: April 8, 2022
    Date of Patent: February 11, 2025
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Chuan Wang, Chim Seng Seet, Yudi Setiawan
  • Patent number: 12224368
    Abstract: The present disclosure generally relates to semiconductor devices for use in optoelectronic/photonic applications and integrated circuit (IC) chips. More particularly, the present disclosure relates to devices containing photodiodes such as avalanche photodiodes (APDs) and single photon avalanche diodes (SPADs). The present disclosure may provide a device including a substrate, a first well of a first conductivity type in the substrate, a second well of a second conductivity type in the substrate, and a buried layer of the second conductivity type in the substrate. The buried layer may be below the first well and the second well. The buried layer may have a first section and a second section, in which the first section has a larger thickness than the second section.
    Type: Grant
    Filed: May 16, 2024
    Date of Patent: February 11, 2025
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Francesco Gramuglia, Eng Huat Toh, Ping Zheng
  • Patent number: 12201039
    Abstract: A memory device and method of making the same is provided. The memory device includes a first electrode, an oxygen scavenging layer on the first electrode, a hard mask on the oxygen scavenging layer, and a second electrode on the hard mask. A switching layer is arranged on a portion of the oxygen scavenging layer, and the switching layer is conformal to a side surface of the hard mask.
    Type: Grant
    Filed: August 12, 2021
    Date of Patent: January 14, 2025
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Shyue Seng Tan
  • Patent number: 12193243
    Abstract: The disclosed subject matter relates generally to structures, memory devices and methods of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices having two resistive layers and a conductive layer arranged between two electrodes. The present disclosure provides a memory device including a first electrode above an interlayer dielectric region, a second electrode above the interlayer dielectric region, the second electrode is laterally adjacent to the first electrode, a conductive layer between the first electrode and the second electrode, in which the conductive layer is electrically isolated, a first resistive layer between the first electrode and the conductive layer, and a second resistive layer between the second electrode and the conductive layer.
    Type: Grant
    Filed: February 7, 2022
    Date of Patent: January 7, 2025
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Shyue Seng Tan
  • Patent number: 12191351
    Abstract: Structures for a laterally-diffused metal-oxide-semiconductor device and methods of forming same. The structure comprises a semiconductor substrate including a trench, a source and a drain in the semiconductor substrate, a dielectric layer inside the trench, and a gate in the dielectric layer. The trench has a first sidewall and a second sidewall, the source is adjacent to the first sidewall of the trench, the drain is adjacent to the second sidewall of the trench, and the gate is laterally between the first sidewall of the trench and the second sidewall of the trench. The structure further comprises an air gap in the dielectric layer. The air gap is below the gate, and the air gap is laterally between the first sidewall of the trench and the second sidewall of the trench.
    Type: Grant
    Filed: May 14, 2024
    Date of Patent: January 7, 2025
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Bong Woong Mun, Jeffrey B. Johnson
  • Patent number: 12183754
    Abstract: Structures for a single-photon avalanche diode and methods of forming a structure for a single-photon avalanche diode. The structure includes a semiconductor layer having a first well and a second well defining a p-n junction with the first well, and an interlayer dielectric layer on the semiconductor layer. A deep trench isolation region includes a conductor layer and a dielectric liner. The conductor layer penetrates through the semiconductor layer and the interlayer dielectric layer. The conductor layer has a first end, a second end, and a sidewall that connects the first end to the second end. The dielectric liner is arranged to surround the sidewall of the conductor layer. A metal feature is connected to the first end of the conductor layer.
    Type: Grant
    Filed: August 24, 2021
    Date of Patent: December 31, 2024
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Ping Zheng, Eng Huat Toh, Eric Linardy, Kiok Boone Elgin Quek
  • Patent number: 12176405
    Abstract: Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. The structure comprises a semiconductor layer, a first raised source/drain region on the semiconductor layer, a second raised source/drain region on the semiconductor layer, a gate electrode laterally between the first raised source/drain region and the second raised source/drain region, a first airgap laterally between the first raised source/drain region and the gate electrode, and a second airgap laterally between the second raised source/drain region and the gate electrode. The gate electrode includes a first section and a second section between the first section and the semiconductor layer, the first section of the gate electrode has a first width, the second section of the gate electrode has a second width, and the first width is greater than the second width.
    Type: Grant
    Filed: May 15, 2024
    Date of Patent: December 24, 2024
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Khee Yong Lim, Xinfu Liu, Xiao Mei Elaine Low
  • Patent number: 12176395
    Abstract: Structures for a laterally-diffused metal-oxide-semiconductor device and methods of forming a structure for a laterally-diffused metal-oxide-semiconductor device. The structure comprises a drain and a source in a semiconductor substrate. The source includes a source region having a first terminating end, a second terminating end, and a length between the first terminating end and the second terminating end. The structure further comprises a shallow trench isolation region in the semiconductor substrate. The shallow trench isolation region surrounds the drain. The structure further comprises a gate that surrounds the shallow trench isolation region and the drain. The gate has a side section between the drain and the source region, the side section of the gate has a width, and the gate has a length in a direction transverse to the width. The length of the source region is substantially equal to the length of the gate.
    Type: Grant
    Filed: April 11, 2024
    Date of Patent: December 24, 2024
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Lwin Min Kyaw, Dong Hyun Shin, Upinder Singh, Jeoung Mo Koo
  • Patent number: 12176048
    Abstract: A one-time programmable (OTP) fuse includes a fuse link including a thin film resistor (TFR) layer between a first insulator layer and a second insulator layer. A first terminal of the OTP fuse includes a first conductive pillar through one of the first and second insulator layers and in contact with the TFR layer; and a second terminal of the OTP fuse includes a second conductive pillar through one of the first and second insulator layers and in contact with the TFR layer. The second conductive pillar and the TFR layer have a lateral contact interface having a same shape as an outer portion of the second conductive pillar. The second conductive pillar does not simply land on the TFR layer, but extends through it. Application of a current to the OTP fuse results in programming via rupture of the lateral contact interface (not electromigration in the fuse link).
    Type: Grant
    Filed: December 22, 2022
    Date of Patent: December 24, 2024
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Siow Lee Chwa, Handoko Linewih, Yudi Setiawan, Qiying Wong
  • Patent number: 12156476
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to temperature sensors with programmable magnetic tunnel junction structures and methods of manufacture. A structure includes a resistor material connected in series with a programmable magnetic tunnel junction structure in a Wheatstone bridge configuration.
    Type: Grant
    Filed: September 8, 2021
    Date of Patent: November 26, 2024
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Ping Zheng, Eng Huat Toh
  • Patent number: 12154854
    Abstract: Structures for an electronic fuse and methods of forming an electronic fuse. The structure includes a first terminal, a second terminal, and a fuse link extending from the first terminal to the second terminal. The structure further includes a silicide layer having a first portion included in the fuse link and a second portion included in the first terminal and the second terminal. The first portion of the silicide layer has a first thickness, the second portion of the silicide layer has a second thickness, and the first thickness is less than the second thickness.
    Type: Grant
    Filed: January 7, 2022
    Date of Patent: November 26, 2024
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Shyue Seng Tan, George Mulfinger, Eng Huat Toh
  • Patent number: 12142673
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to transistor with wrap-around extrinsic base and methods of manufacture. The structure includes: a substrate; a collector region within the substrate; an emitter region over the substrate and which comprises silicon based material; an intrinsic base; and an extrinsic base overlapping the emitter region and the intrinsic base; an extrinsic base overlapping the emitter region and the intrinsic base; and an inverted “T” shaped spacer which separates the emitter region from the extrinsic base and the collector region from the emitter region.
    Type: Grant
    Filed: September 19, 2023
    Date of Patent: November 12, 2024
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xinshu Cai, Shyue Seng Tan, Vibhor Jain, John J. Pekarik, Kien Seen Daniel Chong, Yung Fu Chong, Judson R. Holt, Qizhi Liu, Kenneth J. Stein
  • Patent number: 12136507
    Abstract: Structures for an on-chip resistor and methods of forming a structure for an on-chip resistor. The structure includes a first resistor body and a second resistor body coupled to the first resistor body. The first resistor body contains a first material having a first drift effect. The second resistor body contains a second material having a second drift effect that is different from the first drift effect.
    Type: Grant
    Filed: March 30, 2022
    Date of Patent: November 5, 2024
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Qiang Bai, Kumar Singh Sudhish, Biying Guan, Venkataramani Chandrasekar, Karan Khullar, Lingfen Kong
  • Patent number: 12136649
    Abstract: Semiconductor structures including a deep trench isolation structure and methods of forming a semiconductor structure including a deep trench isolation structure. The semiconductor structure includes a semiconductor substrate having a device region, and a deep trench isolation structure in the semiconductor substrate. The deep trench isolation structure further includes a first portion, a second portion adjacent to the first portion, and a conductor layer in the first portion and the second portion. The conductor layer in the first portion of the deep trench isolation structure surrounds the device region. The conductor layer in the second portion of the deep trench isolation structure defines an electrical connection to the semiconductor substrate.
    Type: Grant
    Filed: April 19, 2022
    Date of Patent: November 5, 2024
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Jianbo Zhou, Shiang Yang Ong, Namchil Mun, Hung Chang Liao, Zhongxiu Yang
  • Patent number: 12124787
    Abstract: Disclosed are a system and method for automatically and systematically generating device-based design rules and corresponding device-based design rule checking (DRC) codes. In the system and method, design rules associated with specific devices are generated based on at least one table of related data (e.g., maturity status information, restriction status information, etc.) for different devices. Based on the design rules and on unique definitions for the specific devices, design rule checking (DRC) codes associated with the specific devices are generated. By using this approach, comprehensive and accurate device-based design rules and corresponding device-based DRC codes can be quickly generated to ensure acceptable product reliability and yield. Furthermore, processes used to generate the device-based DRC codes can be iteratively repeated (e.g.
    Type: Grant
    Filed: November 5, 2021
    Date of Patent: October 22, 2024
    Assignee: GlobalFoundries Singapore Pte. Ltd.
    Inventors: Shu Zhong, Ming Zhu, Pinghui Li, Yiang Aun Nga
  • Patent number: 12107124
    Abstract: The present disclosure relates to semiconductor structures and, more particularly, to bipolar transistors and methods of manufacture. The structure includes: an intrinsic base region; an emitter region above the intrinsic base region; a collector region under the intrinsic base region; and an extrinsic base region comprising metal material, and which surrounds the intrinsic base region and the emitter region.
    Type: Grant
    Filed: December 22, 2021
    Date of Patent: October 1, 2024
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xinshu Cai, Shyue Seng Tan, Vibhor Jain, John J. Pekarik, Robert J. Gauthier, Jr.