Patents Assigned to GLOBALFOUNDRIES Singapore Pte. Ltd.
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Patent number: 12183754Abstract: Structures for a single-photon avalanche diode and methods of forming a structure for a single-photon avalanche diode. The structure includes a semiconductor layer having a first well and a second well defining a p-n junction with the first well, and an interlayer dielectric layer on the semiconductor layer. A deep trench isolation region includes a conductor layer and a dielectric liner. The conductor layer penetrates through the semiconductor layer and the interlayer dielectric layer. The conductor layer has a first end, a second end, and a sidewall that connects the first end to the second end. The dielectric liner is arranged to surround the sidewall of the conductor layer. A metal feature is connected to the first end of the conductor layer.Type: GrantFiled: August 24, 2021Date of Patent: December 31, 2024Assignee: GlobalFoundries Singapore Pte. Ltd.Inventors: Ping Zheng, Eng Huat Toh, Eric Linardy, Kiok Boone Elgin Quek
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Patent number: 12176395Abstract: Structures for a laterally-diffused metal-oxide-semiconductor device and methods of forming a structure for a laterally-diffused metal-oxide-semiconductor device. The structure comprises a drain and a source in a semiconductor substrate. The source includes a source region having a first terminating end, a second terminating end, and a length between the first terminating end and the second terminating end. The structure further comprises a shallow trench isolation region in the semiconductor substrate. The shallow trench isolation region surrounds the drain. The structure further comprises a gate that surrounds the shallow trench isolation region and the drain. The gate has a side section between the drain and the source region, the side section of the gate has a width, and the gate has a length in a direction transverse to the width. The length of the source region is substantially equal to the length of the gate.Type: GrantFiled: April 11, 2024Date of Patent: December 24, 2024Assignee: GlobalFoundries Singapore Pte. Ltd.Inventors: Lwin Min Kyaw, Dong Hyun Shin, Upinder Singh, Jeoung Mo Koo
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Patent number: 12176048Abstract: A one-time programmable (OTP) fuse includes a fuse link including a thin film resistor (TFR) layer between a first insulator layer and a second insulator layer. A first terminal of the OTP fuse includes a first conductive pillar through one of the first and second insulator layers and in contact with the TFR layer; and a second terminal of the OTP fuse includes a second conductive pillar through one of the first and second insulator layers and in contact with the TFR layer. The second conductive pillar and the TFR layer have a lateral contact interface having a same shape as an outer portion of the second conductive pillar. The second conductive pillar does not simply land on the TFR layer, but extends through it. Application of a current to the OTP fuse results in programming via rupture of the lateral contact interface (not electromigration in the fuse link).Type: GrantFiled: December 22, 2022Date of Patent: December 24, 2024Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Siow Lee Chwa, Handoko Linewih, Yudi Setiawan, Qiying Wong
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Patent number: 12176405Abstract: Structures for a field-effect transistor and methods of forming a structure for a field-effect transistor. The structure comprises a semiconductor layer, a first raised source/drain region on the semiconductor layer, a second raised source/drain region on the semiconductor layer, a gate electrode laterally between the first raised source/drain region and the second raised source/drain region, a first airgap laterally between the first raised source/drain region and the gate electrode, and a second airgap laterally between the second raised source/drain region and the gate electrode. The gate electrode includes a first section and a second section between the first section and the semiconductor layer, the first section of the gate electrode has a first width, the second section of the gate electrode has a second width, and the first width is greater than the second width.Type: GrantFiled: May 15, 2024Date of Patent: December 24, 2024Assignee: GlobalFoundries Singapore Pte. Ltd.Inventors: Khee Yong Lim, Xinfu Liu, Xiao Mei Elaine Low
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Patent number: 12154854Abstract: Structures for an electronic fuse and methods of forming an electronic fuse. The structure includes a first terminal, a second terminal, and a fuse link extending from the first terminal to the second terminal. The structure further includes a silicide layer having a first portion included in the fuse link and a second portion included in the first terminal and the second terminal. The first portion of the silicide layer has a first thickness, the second portion of the silicide layer has a second thickness, and the first thickness is less than the second thickness.Type: GrantFiled: January 7, 2022Date of Patent: November 26, 2024Assignee: GlobalFoundries Singapore Pte. Ltd.Inventors: Shyue Seng Tan, George Mulfinger, Eng Huat Toh
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Patent number: 12156476Abstract: The present disclosure relates to semiconductor structures and, more particularly, to temperature sensors with programmable magnetic tunnel junction structures and methods of manufacture. A structure includes a resistor material connected in series with a programmable magnetic tunnel junction structure in a Wheatstone bridge configuration.Type: GrantFiled: September 8, 2021Date of Patent: November 26, 2024Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Ping Zheng, Eng Huat Toh
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Patent number: 12142673Abstract: The present disclosure relates to semiconductor structures and, more particularly, to transistor with wrap-around extrinsic base and methods of manufacture. The structure includes: a substrate; a collector region within the substrate; an emitter region over the substrate and which comprises silicon based material; an intrinsic base; and an extrinsic base overlapping the emitter region and the intrinsic base; an extrinsic base overlapping the emitter region and the intrinsic base; and an inverted âTâ shaped spacer which separates the emitter region from the extrinsic base and the collector region from the emitter region.Type: GrantFiled: September 19, 2023Date of Patent: November 12, 2024Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Xinshu Cai, Shyue Seng Tan, Vibhor Jain, John J. Pekarik, Kien Seen Daniel Chong, Yung Fu Chong, Judson R. Holt, Qizhi Liu, Kenneth J. Stein
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Patent number: 12136507Abstract: Structures for an on-chip resistor and methods of forming a structure for an on-chip resistor. The structure includes a first resistor body and a second resistor body coupled to the first resistor body. The first resistor body contains a first material having a first drift effect. The second resistor body contains a second material having a second drift effect that is different from the first drift effect.Type: GrantFiled: March 30, 2022Date of Patent: November 5, 2024Assignee: GlobalFoundries Singapore Pte. Ltd.Inventors: Qiang Bai, Kumar Singh Sudhish, Biying Guan, Venkataramani Chandrasekar, Karan Khullar, Lingfen Kong
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Patent number: 12136649Abstract: Semiconductor structures including a deep trench isolation structure and methods of forming a semiconductor structure including a deep trench isolation structure. The semiconductor structure includes a semiconductor substrate having a device region, and a deep trench isolation structure in the semiconductor substrate. The deep trench isolation structure further includes a first portion, a second portion adjacent to the first portion, and a conductor layer in the first portion and the second portion. The conductor layer in the first portion of the deep trench isolation structure surrounds the device region. The conductor layer in the second portion of the deep trench isolation structure defines an electrical connection to the semiconductor substrate.Type: GrantFiled: April 19, 2022Date of Patent: November 5, 2024Assignee: GlobalFoundries Singapore Pte. Ltd.Inventors: Jianbo Zhou, Shiang Yang Ong, Namchil Mun, Hung Chang Liao, Zhongxiu Yang
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Patent number: 12124787Abstract: Disclosed are a system and method for automatically and systematically generating device-based design rules and corresponding device-based design rule checking (DRC) codes. In the system and method, design rules associated with specific devices are generated based on at least one table of related data (e.g., maturity status information, restriction status information, etc.) for different devices. Based on the design rules and on unique definitions for the specific devices, design rule checking (DRC) codes associated with the specific devices are generated. By using this approach, comprehensive and accurate device-based design rules and corresponding device-based DRC codes can be quickly generated to ensure acceptable product reliability and yield. Furthermore, processes used to generate the device-based DRC codes can be iteratively repeated (e.g.Type: GrantFiled: November 5, 2021Date of Patent: October 22, 2024Assignee: GlobalFoundries Singapore Pte. Ltd.Inventors: Shu Zhong, Ming Zhu, Pinghui Li, Yiang Aun Nga
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Patent number: 12107124Abstract: The present disclosure relates to semiconductor structures and, more particularly, to bipolar transistors and methods of manufacture. The structure includes: an intrinsic base region; an emitter region above the intrinsic base region; a collector region under the intrinsic base region; and an extrinsic base region comprising metal material, and which surrounds the intrinsic base region and the emitter region.Type: GrantFiled: December 22, 2021Date of Patent: October 1, 2024Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Xinshu Cai, Shyue Seng Tan, Vibhor Jain, John J. Pekarik, Robert J. Gauthier, Jr.
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Patent number: 12102020Abstract: A semiconductor memory device is provided. The memory device includes a first electrode, a resistive layer, and a second electrode. The resistive layer is arranged over the first electrode. The second electrode is arranged over the resistive layer. The second electrode includes a lower surface and an extension extending from under the lower surface. The extension is at least partially arranged within the resistive layer.Type: GrantFiled: January 4, 2022Date of Patent: September 24, 2024Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Jianxun Sun, Ramasamy Chockalingam, Juan Boon Tan
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Patent number: 12101944Abstract: The embodiments herein relate to semiconductor memory devices and methods of forming the same. A semiconductor memory device is provided. The semiconductor memory device includes a memory cell having a first electrode, a second electrode, a switching layer, and a via structure. The second electrode is adjacent to a side of the first electrode and the switching layer overlays uppermost surfaces of the first and second electrodes. The via structure is over the uppermost surface of the second electrode.Type: GrantFiled: February 10, 2021Date of Patent: September 24, 2024Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Shyue Seng Tan
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Patent number: 12094763Abstract: A device may include a first conductive element and an interlevel dielectric arranged over the first conductive element. The device may further include a dual damascene opening including a first end, a second end, and sidewalls extending between the first and second ends, the sidewalls extending through the interlevel dielectric. A metal-insulator-metal (MIM) stack may line the dual damascene opening. The MIM stack may include a first conductive liner lining the sidewalls and the second end of the dual damascene opening, an insulator layer lining the first conductive liner, and a second conductive liner lining the insulator layer. A first metal interconnect may be disposed in and filling the dual damascene opening lined with the MIM stack.Type: GrantFiled: September 7, 2021Date of Patent: September 17, 2024Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Kwang Sing Yew, Ramasamy Chockalingam, Juan Boon Tan
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Patent number: 12068359Abstract: A semiconductor device may include: a substrate; a protective region provided over the substrate; and a core structure enclosed by the protective region. The core structure may include a core material etchable by a chemical solution. The protective region may include a protective material resistant to etching by the chemical solution. The core structure may have a first side and a second side opposite to the first side, the first side being closer to the substrate than the second side. The core structure may be narrowest at the first side of the core structure.Type: GrantFiled: October 15, 2019Date of Patent: August 20, 2024Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Lawrence Selvaraj Susai, Chor Shu Cheng, Yong Chau Ng, Lulu Peng, Zishan Ali Syed Mohammed, Nuraziz Yosokumoro
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Patent number: 12051761Abstract: A structure includes a photodetector including alternating p-type semiconductor layers and n-type semiconductor layers in contact with each other in a stack. Each semiconductor layer includes an extension extending beyond an end of an adjacent semiconductor layer of the alternating p-type semiconductor layers and n-type semiconductor layers. The extensions provide an area for operative coupling to a contact. The extensions can be arranged in a cascading, staircase arrangement, or may extend from n-type semiconductor layers on one side of the stack and from p-type semiconductor layers on another side of the stack. The photodetector can be on a substrate in a first region, and a complementary metal-oxide semiconductor (CMOS) device may be on the substrate on a second region separated from the first region by a trench isolation. The photodetector is capable of detecting and converting near-infrared (NIR) light, e.g., having wavelengths of greater than 0.75 micrometers.Type: GrantFiled: May 5, 2022Date of Patent: July 30, 2024Assignee: GLOBALFOUNDRIES SINGAPORE PTE LTDInventors: Xinshu Cai, Yongshun Sun, Kiok Boone Elgin Quek, Khee Yong Lim, Shyue Seng Tan, Eng Huat Toh, Thanh Hoa Phung, Cancan Wu
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Patent number: 12034039Abstract: A capacitor structure for an integrated circuit (IC) and a related method of forming are disclosed. The capacitor structure includes three electrodes. A planar bottom electrode has a first insulator layer thereover. A middle electrode includes a conductive layer over the first insulator layer and a plurality of spaced conductive pillars contacting the conductive layer. A second insulator layer extends over and between the plurality of spaced conductive pillars and contacts the conductive layer. An upper electrode extends over the second insulator layer, and hence, over and between the plurality of spaced conductive pillars. A length of the upper electrode can be controlled, in part, by the number and dimensions of the conductive pillars to increase capacitance capabilities per area.Type: GrantFiled: October 18, 2021Date of Patent: July 9, 2024Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: EeJan Khor, Ramasamy Chockalingam, Juan Boon Tan
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Patent number: 12032041Abstract: The present disclosure relates to sensors and, more particularly, to magnetic field sensors. More specifically, a structure includes a package with a wraparound geometry and discontinuous ends, and includes a low permeability magnetic material.Type: GrantFiled: March 17, 2022Date of Patent: July 9, 2024Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Vinayak Bharat Naik, Hemant M. Dixit, Kazutaka Yamane, Eng Huat Toh
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Patent number: 12027587Abstract: The present disclosure relates to semiconductor structures and, more particularly, to electrostatic discharge (ESD) devices and methods of manufacture. The structure includes a bipolar transistor device, including a base region, having a base contact region, in a first well of a first conductivity type, a collector region, having a collector contact region, in a second well of a second conductivity type, and an emitter region, having an emitter contact region, in the first well, located between the base contact region and the second well, and a reverse-doped resistance well, of the second conductivity type, located in the first well of the first conductivity type between the base contact region and the emitter contact region structured to decrease turn-on voltage of the bipolar transistor device.Type: GrantFiled: June 23, 2023Date of Patent: July 2, 2024Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.Inventors: Kyongjin Hwang, Raunak Kumar, Robert J. Gauthier, Jr.
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Patent number: 12027474Abstract: Structures for a laser-detection device including a magnetic-tunneling-junction layer stack and related methods. The structure has a magnetic-tunneling-junction layer stack including a fixed layer, a free layer, and an insulating spacer between the fixed layer and the free layer, and a power supply coupled to the magnetic-tunneling-junction layer stack. The power supply is configured to bias the magnetic-tunneling-junction layer stack to modulate an energy barrier of the magnetic-tunneling-junction layer stack for switching between a low-resistance state and a high-resistance state in response to receiving incident electromagnetic radiation of an intensity.Type: GrantFiled: July 12, 2022Date of Patent: July 2, 2024Assignee: GlobalFoundries Singapore Pte. Ltd.Inventors: Jia Hao Lim, Vinayak Bharat Naik