Patents Assigned to GLOBALFOUNDRIES Singapore Pte. Ltd.
  • Patent number: 11139311
    Abstract: A memory device is provided, which includes a substrate, a first memory cell, and a second memory cell. The first memory cell is arranged over the substrate and the second memory cell is arranged adjacent to the first memory cell. The first and second memory cells include a shared doped region arranged between the first and second memory cells.
    Type: Grant
    Filed: February 13, 2020
    Date of Patent: October 5, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Yongshun Sun, Eng Huat Toh, Shyue Seng Tan, Kiok Boone Elgin Quek
  • Patent number: 11127784
    Abstract: Integrated circuits with embedded memory structures, and methods for fabricating integrated circuits are provided. An exemplary method for fabricating an integrated circuit includes forming from a first metallization layer a first lower conductive interconnect in a first region of a dielectric layer and a second lower conductive interconnect in a second region of the dielectric layer. The method includes forming a memory structure in the first region. Further, the method includes depositing an interlayer dielectric over the first region and over the second region. Also, the method includes forming from a second metallization layer a first upper conductive interconnect over the interlayer dielectric, wherein the first upper conductive interconnect is coupled to the memory structure.
    Type: Grant
    Filed: December 12, 2018
    Date of Patent: September 21, 2021
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Curtis Chun-I Hsieh, Wanbing Yi, Yi Jiang, Juan Boon Tan
  • Patent number: 11127459
    Abstract: The present disclosure generally relates to memory devices and methods of forming the same. More particularly, the present disclosure relates to resistive random-access (ReRAM) memory devices incorporating reference cells for achieving high sensing yield. The present disclosure provides a memory device including a main cell structure having a dimension, and a reference cell structure electrically coupled to the main cell structure. The reference cell structure has a dimension that is different from the dimension of the main cell structure, in which the main cell structure and the reference cell structure include a switching element arranged between a pair of conductors.
    Type: Grant
    Filed: March 16, 2020
    Date of Patent: September 21, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Curtis Chun-I Hsieh, Wei-Hui Hsu, Wanbing Yi, Yi Jiang, Kai Kang, Juan Boon Tan
  • Patent number: 11119917
    Abstract: The present disclosure relates to split gate flash MLC based neuromorphic processing and method of making the same. Embodiments include MLC split-gate flash memory formed over a substrate, the MLC split-gate flash memory embedded with artificial neuromorphic processing to dynamically program and erase each cell of the MLC split-gate flash memory; and sense visual imagery by the artificial neuromorphic processing.
    Type: Grant
    Filed: July 12, 2018
    Date of Patent: September 14, 2021
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Danny Pak-Chum Shum, Shyue Seng Tan, Xinshu Cai, Fan Zhang, Soh Yun Siah, Tze Ho Simon Chan
  • Patent number: 11094696
    Abstract: Devices and methods for forming a device are presented. The device includes a substrate having a well of a first polarity type and a thyristor-based memory cell. The thyristor-based memory cell includes at least a first region of a second polarity type adjacent to the well, a gate which serves as a second word line disposed on the substrate, at least a first layer of the first polarity type disposed adjacent to the first region of the second polarity type and adjacent to the gate, and at least a heavily doped first layer of the second polarity type disposed on the first layer of the first polarity type and adjacent to the gate. At least the heavily doped first layer of the second polarity type is self-aligned with side of the gate.
    Type: Grant
    Filed: December 12, 2018
    Date of Patent: August 17, 2021
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Eng Huat Toh, Shyue Seng Tan, Elgin Kiok Boone Quek, Danny Pak-Chum Shum
  • Patent number: 11088156
    Abstract: A flash memory device is provided. The device comprises a substrate and a source region in the substrate. A first gate stack is positioned above the substrate and adjacent to the source region. A dual function gate structure having an upper portion and a lower portion is positioned above the source region. The upper portion of the dual function gate structure overlaps the first gate stack and the lower portion is adjacent to the first gate stack. A second gate is positioned above the substrate on an opposite side of the first gate stack from the dual function gate. A drain region is in the substrate adjacent to the second gate.
    Type: Grant
    Filed: August 28, 2019
    Date of Patent: August 10, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xinshu Cai, Shyue Seng Tan, Kiok Boone Elgin Quek, Eng Huat Toh
  • Patent number: 11081523
    Abstract: A memory device may be provided, including a base layer, an insulating layer, a first electrode, a switching element, a capping element and a second electrode. The insulating layer may be arranged over the base layer and may include a recess having opposing side walls. The first electrode may be arranged at least partially within the recess of the insulating layer and along the opposing side walls of the recess of the insulating layer. The switching element may be arranged at least partially within the recess of the insulating layer and along the first electrode. The capping element and the second electrode may be arranged at least partially within the recess of the insulating layer. The capping element may be arranged between the second electrode and the switching element, and a part of the second electrode may extend across the capping element to contact the switching element.
    Type: Grant
    Filed: May 14, 2020
    Date of Patent: August 3, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Curtis Chun-I Hsieh, Wei-Hui Hsu, Yi Jiang, Wanbing Yi, Juan Boon Tan
  • Patent number: 11069743
    Abstract: Structures including non-volatile memory elements and methods of fabricating a structure including non-volatile memory elements. A first non-volatile memory element includes a first electrode, a second electrode, and a switching layer between the first electrode and the second electrode. A second non-volatile memory element includes a first electrode, a second electrode, and a switching layer between the first electrode and the second electrode. A first bit line is coupled to the first electrode of the first non-volatile memory element and to the first electrode of the second non-volatile memory element. A second bit line is coupled to the second electrode of the first non-volatile memory element.
    Type: Grant
    Filed: June 9, 2020
    Date of Patent: July 20, 2021
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Shyue Seng Tan
  • Patent number: 11063158
    Abstract: A sensor is provided, which includes a semiconductor substrate, a photodiode region, and a multi-layered resistive element. The photodiode region is arranged in the semiconductor substrate. The multi-layered resistive element is arranged over the semiconductor substrate and is coupled with the photodiode region.
    Type: Grant
    Filed: December 16, 2019
    Date of Patent: July 13, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Lanxiang Wang, Eng Huat Toh, Shyue Seng Tan, Kiok Boone Elgin Quek
  • Patent number: 11056430
    Abstract: According to various embodiments, a semiconductor device may include a thin film arranged within a first inter-level dielectric layer, a masking region, and a contact plug. The masking region may be arranged over the thin film, within the first inter-level dielectric layer. The masking region may be structured to have a higher etch rate than the first inter-level dielectric layer. The contact plug may extend along a vertical axis, from a second inter-level dielectric layer to the thin film. A bottom portion of the contact plug may be surrounded by the masking region. The bottom portion of the contact plug may include a lateral member that extends along a horizontal plane at least substantially perpendicular to the vertical axis. The lateral member may be in contact with the thin film.
    Type: Grant
    Filed: March 10, 2020
    Date of Patent: July 6, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Chengang Feng, Handoko Linewih, Yanxia Shao, Yudi Setiawan
  • Patent number: 11054387
    Abstract: The present disclosure generally relates to semiconductor devices, and more particularly to semiconductor devices integrated with an ion-sensitive field-effect transistor (ISFET) and methods of forming the same. The semiconductor device may include a substrate, a reference gate structure disposed above the substrate, a floating gate structure disposed above the substrate and adjacent to the reference gate structure, where the reference gate structure is electrically coupled to the floating gate structure, and a dielectric layer disposed between the reference gate structure and the floating gate structure.
    Type: Grant
    Filed: August 22, 2019
    Date of Patent: July 6, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Xinshu Cai, Shyue Seng Tan, Eng Huat Toh
  • Patent number: 11050426
    Abstract: According to various embodiments, a logic gate device includes a transistor, a first resistor, a second resistor and a third resistor. The first resistor is connected between a first input terminal of the logic gate device and a gate terminal of the transistor. The second resistor is connected between a second input terminal of the logic gate device and the gate terminal. The third resistor is connected between a voltage supply terminal and a first terminal of the transistor. The logic gate device is configured to generate an output voltage at the first terminal based on input voltages received at the first input terminal and the second input terminal.
    Type: Grant
    Filed: March 12, 2020
    Date of Patent: June 29, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Desmond Jia Jun Loy, Eng Huat Toh, Shyue Seng Tan
  • Patent number: 11047930
    Abstract: A device having a Hall effect sensor is provided. The Hall effect sensor includes a sensor well and a Hall plate disposed within the sensor well. The Hall plate includes a first current terminal and a second current terminal configured to flow a current through the Hall plate, and the Hall plate further includes a first sensing terminal and a second sensing terminal configured to sense a Hall voltage. A separation layer and a separation well are disposed within the sensor well, as well as surround the Hall plate and isolate the Hall plate. At least one of a current sensitivity and a resistance of the Hall effect sensor is tunable based on an adjustable thickness of the Hall plate. The thickness of the Hall plate is adjustable based at least in part on implants in the separation layer and/or a bias voltage applied to the separation layer.
    Type: Grant
    Filed: March 11, 2019
    Date of Patent: June 29, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Yongshun Sun, Eng Huat Toh, Kiok Boone Elgin Quek
  • Patent number: 11035899
    Abstract: The present disclosure relates to a detection system, and, more particularly, to system for detection of passive voltage contrast and methods of use. The system includes a chamber; a stage provided within the chamber, configured to stage a target structure; an electron beam apparatus which is structured to emit an e-beam toward the stage; and a laser source which emits a laser signal toward the stage, at a same area as the e-beam.
    Type: Grant
    Filed: May 15, 2019
    Date of Patent: June 15, 2021
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Changqing Chen, Fransiscus X. G. Rivai, Choon Seng Adrian Ng, Kay Guan Chia
  • Patent number: 11031251
    Abstract: A method of forming a uniform self-aligned low-k layer with a large process window for inserting a memory array with pillar/convex topography and the resulting device are provided. Embodiments include forming a substrate with a first region and a second region; forming a first low-K layer over the substrate; forming an oxide layer over the first low-K layer; forming a spacer over the oxide layer; etching the spacer to expose the oxide layer in the first region; removing the oxide layer and a portion of the first low-K layer in the first region and a portion of the oxide layer and a portion of the spacer in the second region; removing the spacer in the second region; cleaning the first low-K layer and the oxide layer, a triangular-like shaped portion of the oxide layer remaining; and forming a second low-K layer over the substrate.
    Type: Grant
    Filed: March 4, 2019
    Date of Patent: June 8, 2021
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Curtis Chun-I Hsieh, Wanbing Yi, Yi Jiang, Juan Boon Tan, Zhehui Wang
  • Patent number: 11031281
    Abstract: According to various embodiments, a semiconductor device may include: a semiconductor substrate; a deep trench extending from a first portion of the semiconductor substrate to a second portion of the semiconductor substrate, wherein the second portion underlies the first portion; and an insulator region at least substantially lining sides of the deep trench. The insulator region includes at least one shallow trench in the first portion of the semiconductor substrate. At least a portion of the shallow trench(es) is arranged over at least a portion of the deep trench.
    Type: Grant
    Filed: June 4, 2019
    Date of Patent: June 8, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventor: Ke Dong
  • Patent number: 11016055
    Abstract: Structures for transistor-based sensors and related fabrication methods. A layer stack is formed that includes a semiconductor layer and a cavity. A transistor is formed that has a gate electrode over the layer stack, and an interconnect structure is formed over the layer stack and the transistor. First and second openings are formed that extend through the metallization levels of the interconnect structure and the semiconductor layer to the cavity. The first opening defines a fluid inlet coupled to the cavity, and the second opening defines a fluid outlet coupled to the cavity.
    Type: Grant
    Filed: July 9, 2019
    Date of Patent: May 25, 2021
    Assignee: GLOBALFOUNDRIES SINGAPORE PTE. LTD.
    Inventors: Humberto Campanella-Pineda, Qizhi Liu, Vibhor Jain, You Qian, Joan Josep Giner de Haro
  • Patent number: 11018093
    Abstract: Methodologies and an apparatus for enabling magnetic shielding of stand alone MRAM are provided. Embodiments include placing MRAM dies and logic dies on a first surface of a mold frame; forming a top magnetic shield over top and side surfaces of the MRAM dies; forming a mold cover over the MRAM dies, FinFET dies and mold frame; removing the mold frame to expose a bottom surface of the MRAM dies and FinFET dies; and forming a bottom magnetic shield over the bottom surface of the MRAM dies.
    Type: Grant
    Filed: June 5, 2019
    Date of Patent: May 25, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Bharat Bhushan, Juan Boon Tan, Boo Yang Jung, Wanbing Yi, Danny Pak-Chum Shum
  • Patent number: 11011632
    Abstract: A device which includes a substrate having a device region is provided. The device region may be a high voltage device region. A source region and a drain region are disposed in the substrate within the device region. A gate is arranged over the substrate and between the source region and the drain region. A trench structure having a trench is disposed in the substrate within the device region. The trench structure is arranged on a first side of the gate where a predetermined distance is arranged between the trench structure and the first side of the gate. A well tap region is disposed adjacent to the source region. The well tap region is arranged at least around a bottom and a sidewall of the trench. The well tap region has a deeper depth within the substrate as compared to the source region.
    Type: Grant
    Filed: December 6, 2018
    Date of Patent: May 18, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventor: Guowei Zhang
  • Patent number: 11011509
    Abstract: An ESD protection device may include a substrate, a first conductivity region arranged at least partially within the substrate, a second conductivity region arranged at least partially within the first conductivity region, third and fourth conductivity regions arranged at least partially within the second conductivity region, and first and second terminal portions arranged at least partially within the third and fourth conductivity regions respectively. The third and fourth conductivity regions may be spaced apart from each other. The substrate and the second conductivity region may have a first conductivity type. The first conductivity region, third conductivity region, fourth conductivity region and first and second terminal portions may have a second conductivity type different from the first conductivity type. The first and second terminal portions may have higher doping concentrations than the third and fourth conductivity regions respectively.
    Type: Grant
    Filed: September 18, 2019
    Date of Patent: May 18, 2021
    Assignee: GLOBALFOUNDRIES Singapore Pte. Ltd.
    Inventors: Jie Zeng, Raunak Kumar, Kyong Jin Hwang