Abstract: A flexible optical marker is applied to an optical scale substrate to make an optical scale assembly for an optical position encoder. The marker may be a limit marker, index marker, or other type of marker. The marker substrate may be a plastic film such as polyester, singulated from a “recombine” roll created by a web process. The marker has a microstructured pattern on one surface that is covered with a reflective metal coating. The marker also has an adhesive layer and is affixed to the optical scale substrate by a process of aligning the marker to an edge of the scale and then applying pressure to the upper surface of the marker. The marker may be applied with a handle portion that is separated from the marker after the marker is affixed. The marker may be especially useful with a flexible scale substrate such as a metal tape substrate.

Abstract: An optical position encoder employs spatial filtering of diffraction orders other than +/?1st diffraction orders for greater accuracy. The encoder includes a light source, a scale including a diffractive scale pattern, an optical detector adjacent to the scale, and first and second spaced-apart diffraction gratings between the light source and the scale. The gratings and scale are configured to spatially separate +/?1st diffraction orders from other diffraction orders and to direct the +/?1st diffraction orders along respective optical paths. The optical paths diverge from the first grating to respective locations on the second grating that are separated by more than the beam width of the source light beam. The optical paths further converge from the locations on the second grating to an area of the scale adjacent to the detector, and then extend from the area of the scale to the detector to create an interference pattern as a function of the relative position between the scale and the light source.

Abstract: A laser processing system is disclosed for providing a relatively small velocity of a laser beam at target location while at least one scanner scans at a relatively larger velocity. The system includes a laser source, a first scanning unit, a beam expander, a second scanning unit and focusing optics. The laser source is for providing a pulsed laser output having at least one beam with a beam dimension. The first scanning unit is for scanning the laser output in a first direction along a first axis at the target location. The beam expander is for receiving the laser output and for modifying a beam diameter of the laser output and providing a modified laser output. The second scanning unit is for scanning the modified laser output from the beam expander in a second direction along the first axis at the target location.

Abstract: A rotary optical position encoder for detecting angular position includes a light source, a monolithic scale disk including an optical scale pattern, a monolithic reticle substrate including sets of reticle aperture patterns between the light source and the scale disk, detection and conversion circuitry, and digital processing circuitry. The light source, scale disk, reticle substrate, and detection and conversion circuitry form a plurality of optical sub-encoders at angular positions about the rotational axis, each sub-encoder having an optical path extending from the light source to the detection and conversion circuitry via a respective set of reticle aperture patterns and the optical scale pattern. The digital processing circuitry is operative to combine digital position output values of the sub-encoders to generate an encoder position output value.

Abstract: A laser monitoring and controlling apparatus is disclosed that includes a laser, a data server and a laser Graphical User Interface (GUI). In an embodiment, the apparatus further includes, an imaging means and means for displaying images from the imaging means on the GUI.

Abstract: A method is disclosed for on-the-fly processing at least one structure of a group of structures with a pulsed laser output. The method includes the steps of relatively positioning the group of structures and the pulsed laser output axis with non-constant velocity, and applying the pulsed laser output to the at least one structure of the group of structures during the step of relatively positioning the group of structures and the pulsed laser output axis with non-constant velocity.

Abstract: An optical encoder includes a source of a light beam, an optical grating that generates a spatial pattern of interference fringes, and an optical detector which includes generally elongated detector elements that sample the interference fringe pattern at spatially separated locations along the direction of motion of the grating. Each detector element has one or more segments slanted along the direction of motion of the grating by an integer multiple of the period of an undesirable harmonic component of the fringe pattern, thereby spatially integrating the harmonic component and suppressing its contribution to an output of the detector. One specific detector type includes parallel elongated rectangular elements in a rectangular array that is rotated slightly about a Z axis; another type includes detector elements arranged to form a non-rectangular parallelogram.

Abstract: An absolute encoder employs multiple sub-encoders of different resolutions and a linking algorithm for combining the sub-encoder outputs to form an accurate, high-resolution position estimate. The sub-encoders can utilize edge modulation of a main grating track, sloped patterns of successively higher periods, and other types of scale patterns. The sub-encoders can also use a variety of detector types suitable for the patterns being used. In one linking approach, pairs of tracks are linked together successively by applying a phase shift to the coarser track and then combining it with the finer track such that the transitions of the coarse track estimates become aligned with those of the finer track, whereupon the values can be combined to form a linked position estimate. In another approach, beat tracks are calculated from physical tracks of similar period, and the beat tracks are used as the coarser tracks in the linking process.

Abstract: A position transducer system is disclosed for a limited rotation motor that includes an illumination source that directs illumination toward an illumination reflector that rotates with a rotor of the limited rotation motor, and a plurality of detector areas adjacent the illumination source for receiving modulated reflected illumination from the illumination reflector.

Abstract: A laser-based method and system for processing targeted surface material and article produced thereby are provided. The system processes the targeted surface material within a region of a workpiece while avoiding undesirable changes to adjacent non-targeted material. The system includes a primary laser subsystem including a primary laser source for generating a pulsed laser output including at least one pulse having a wavelength and a pulse width less than 1 ns. A delivery subsystem irradiates the targeted surface material of the workpiece with the pulsed laser output including the at least one pulse to texture the targeted surface material. The pulsed laser output has sufficient total fluence to initiate ablation within at least a portion of the targeted surface material and the pulse width is short enough such that the region and the non-targeted material surrounding the material are substantially free of slag.

Abstract: An illumination system is disclosed for use in a semiconductor wafer back side inspection assembly. The illumination system includes an illumination source that is configured to direct illumination toward a highly reflective and directionally reflective surface at an angle ? of about 45 degrees to about 75 degrees with respect to the surface.

Abstract: A method of analyzing a limited rotation motor system is disclosed. The method includes the step of providing a motor control frequency domain signal that is representative of a frequency domain representation of the motor control signal responsive to a first digital signal that is representative of a motor control signal. The method also includes the step of providing a position detection frequency domain signal that is representative of a frequency domain representation of the position detection signal responsive to a second digital signal that is representative of a position detection signal.

Abstract: A method of fabricating a plurality of composite optical assemblies is disclosed. Each optical assembly includes a first optical element and a second optical element. The method includes the steps of providing a first composite substrate that may be divided into a plurality of first optical elements and forming on an exposed surface of the first composite substrate a second composite substrate that may be divided into a plurality of second optical elements, the first and second composite substrates providing a composite structure.

Abstract: An absolute encoder employs multiple sub-encoders of different resolutions and a linking algorithm for combining the sub-encoder outputs to form an accurate, high-resolution position estimate. The sub-encoders can utilize edge modulation of a main grating track, sloped patterns of successively higher periods, and other types of scale patterns. The sub-encoders can also use a variety of detector types suitable for the patterns being used. In one linking approach, pairs of tracks are linked together successively by applying a phase shift to the coarser track and then combining it with the finer track such that the transitions of the coarse track estimates become aligned with those of the finer track, whereupon the values can be combined to form a linked position estimate. In another approach, beat tracks are calculated from physical tracks of similar period, and the beat tracks are used as the coarser tracks in the linking process.

Abstract: A reflective metrological scale has a scale pattern of elongated side-by-side marks surrounded by reflective surface areas of a substrate, which may be a nickel-based metal alloy such as Invar® or Inconel® and may be a thin and elongated flexible tape. Each mark has a furrowed cross section and may have a depth in the range of 0.5 to 2 microns. The central region of each mark may be rippled or ridged and may be darkened to provide an enhanced optical reflection ratio with respect to surrounding reflective surface areas. A manufacturing method includes the repeated steps of (1) creating a scale mark by irradiating a surface of the substrate at a mark location with a series of overlapped pulses from a laser, each pulse having an energy density of less than about 1 joule per cm2, and (2) changing the relative position of the laser and the substrate by a displacement amount defining a next mark location on the substrate at which a next mark of the scale is to be created.

Abstract: A limited rotation motor optical scanning system is disclosed that includes a limited rotation motor scanner, a digital controller servo system, a position feedback unit, a wide angle compensation unit, a digital processor, and an adjustment unit. The limited rotation motor scanner element is adapted for directing an energy beam to at least one location within a field of view. The digital controlled servo system is adapted for controlling motion of the limited rotation motor scanner element in accordance with a servo command waveform. The position feedback unit is for providing a position feedback signal indicative of a rotational position of the limited rotation motor scanner element. The wide angle compensation unit is for receiving the position feedback signal and for providing a boost signal that is representative of a boost factor that compensates for torque constant variation with the rotational position of said limited rotation motor scanner element.

Abstract: A limited rotation motor system that includes a rotor is disclosed wherein the rotor includes a sleeve with a first open end and an a second end having an integral closed end element, and a permanent magnet that is received through the first open end of the sleeve. The first open end of the sleeve is also adapted to receive an output device, and the second closed end is for mounting the rotor within the limited rotation motor system.

Abstract: A scanning assembly is disclosed for providing controlled movement of a mirror. The scanning assembly includes a motor shaft of a limited rotation motor, a scanning device, and a scanning device mounting unit. The mirror mounting unit includes a tapered base for coupling the scanning device mounting unit to the output shaft of the limited rotation motor. One of the tapered base and the output shaft includes a cylindrical tapered male plug having a decreasing inner diameter that decreases along a direction of coupling of the tapered base and the output shaft for engaging the tapered base to the output shaft. The tapered base includes an overall taper angle of at most about 4.0 degrees from the rotational axis of the output shaft.

Abstract: An absolute encoder employs multiple sub-encoders of different resolutions and a linking algorithm for combining the sub-encoder outputs to form an accurate, high-resolution position estimate. The sub-encoders can utilize edge modulation of a main grating track, sloped patterns of successively higher periods, and other types of scale patterns. The sub-encoders can also use a variety of detector types suitable for the patterns being used. In one linking approach, pairs of tracks are linked together successively by applying a phase shift to the coarser track and then combining it with the finer track such that the transitions of the coarse track estimates become aligned with those of the finer track, whereupon the values can be combined to form a linked position estimate. In another approach, beat tracks are calculated from physical tracks of similar period, and the beat tracks are used as the coarser tracks in the linking process.

Abstract: An optical encoder includes a source of a light beam, an optical grating that generates a spatial pattern of interference fringes, and an optical detector which includes generally elongated detector elements that sample the interference fringe pattern at spatially separated locations along the direction of motion of the grating. Each detector element has one or more segments slanted along the direction of motion of the grating by an integer multiple of the period of an undesirable harmonic component of the fringe pattern, thereby spatially integrating the harmonic component and suppressing its contribution to an output of the detector. One specific detector type includes parallel elongated rectangular elements in a rectangular array that is rotated slightly about a Z axis; another type includes detector elements arranged to form a non-rectangular parallelogram.