Abstract: A dispersion measurement apparatus includes a pulse forming unit, an imaging unit, and an operation unit. The pulse forming unit forms a light pulse train including a plurality of light pulses having time differences and center wavelengths different from each other from a light pulse output from a pulsed laser light source. The imaging unit includes an image sensor capable of performing imaging at an imaging interval shorter than a minimum peak interval of the light pulse train, and images a light pulse train passed through a measurement object to generate imaging data. The operation unit receives the imaging data, detects a temporal waveform of the light pulse train for each pixel of the image sensor, and estimates a wavelength dispersion amount of the measurement object for each pixel of the image sensor based on a feature value of the temporal waveform.

Abstract: Disclosed is a laser processing method for imparting compressive residual stress to an object along an objective area on a surface of the object by irradiating the objective area with laser light. The laser processing method includes: a first step of expanding an area irradiated with the laser light toward a first side in the objective area; and a second step of expanding the area irradiated with the laser light toward a second side different from the first side in the objective area.

Abstract: An inspection device includes a laser irradiation unit irradiating a wafer with laser light, a display displaying information, and a control unit. The control unit is constituted to execute deriving of an estimated processing result including information a modified region and a crack extending from the modified region formed on the wafer when the wafer is irradiated with the laser light by the laser irradiation unit on the basis of set recipes (processing conditions), and controlling the display so as to display an estimated processing result image depicting both a graphic image of the wafer and a graphic image of the modified region and the crack in the wafer in consideration of positions of the modified region and the crack in the wafer derived as the estimated processing result.

Abstract: Disclosed is a laser processing method for imparting compressive residual stress to an object along an objective area on a surface of the object by irradiating the objective area with laser light. The laser processing method includes a processing step of scanning the objective area with an irradiation spot of the laser light while increasing a moving average in intensity of the laser light per unit area.

Abstract: Disclosed is a laser device including: a rod-shaped laser medium extending in a first direction; a first light source unit including a first base having a first notch through which the laser medium passes and a plurality of excitation light sources attached to the first base; and a holder supporting the laser medium and the first light source unit. At least one of the first base and the holder includes a first regulating part configured to regulate a position of the first base with respect to the holder.

Abstract: An optical module includes a mirror unit having a movable mirror portion, a magnet portion configured to generate a magnetic field acting on the movable mirror portion, and a package accommodating the magnet portion. The magnet portion has a Halbach structure including a first magnet applied with a force in a first direction, and a second magnet applied with a force in a second direction. The package has a bottom walls portion, a side wall portion, and a restriction portion configured to restrict movement of the second magnet in the second direction. The movable mirror portion is disposed in a space formed by the restriction portion.

Abstract: A photodetection device includes a photodetection element and a package. The photodetection element includes a semiconductor substrate and a light absorption film. The light absorption film is provided on a region of at least a part of a region around a photodetection region on a principal surface of the semiconductor substrate. The light absorption film has a multi-layer structure including a light absorption layer, a resonance layer, and a reflection layer. At a wavelength of detection target light, a light transmittance inside the resonance layer is larger than a light transmittance inside the light absorption layer, and a light reflectance on a surface of the reflection layer is larger than a light reflectance on a surface of the resonance layer.

Abstract: A photon counting device includes a plurality of pixels each including a photoelectric conversion element configured to convert input light to charge, and an amplifier configured to amplify the charge converted by the photoelectric conversion element and convert the charge to a voltage, an A/D converter configured to convert the voltage output from the amplifier of each of the plurality of pixels to a digital value and output the digital value, a correction unit configured to correct the digital value output from the A/D converter so that an influence of a variation in a gain and an offset value among the plurality of pixels is curbed, a calculation unit configured to output a summed value obtained by summing the corrected digital values corresponding to at least two pixels, and a conversion unit configured to convert the summed value output from the calculation unit to a number of photons.

Abstract: A device includes a signal generation unit that generates a first signal having a first repetition frequency and a second signal having a second repetition frequency higher than the first repetition frequency, a light source unit that generates light whose wavelength is modulated with time through internal modulation based on the first signal, a modulation unit that further modulates, with time, the wavelength of the light using a Doppler effect through external modulation based on the second signal, a splitting unit that divides the light output from the modulation unit into measurement light and reference light, an irradiation unit that irradiates a target object with the measurement light, a detection unit that detects interference light between reflected light from the target object and the reference light, and a calculation unit that calculates a distance to the target object on the basis of an output signal from the detection unit.

Abstract: A mirror device includes a support portion, a movable portion, and a pair of torsion bars disposed on both sides of the movable portion on a first axis. The movable portion includes a frame-shaped frame connected to the pair of torsion bars and a mirror unit disposed inside the frame. The mirror unit is connected to the frame in each of a pair of connection regions located on both sides of the mirror unit in a direction parallel to a second axis. A region other than the pair of connection regions in a region between the mirror unit and the frame is a space. An outer edge of the mirror unit and an inner edge of the frame are connected to each other so that a curvature in each of the pair of connection regions is continuous when viewed from a direction perpendicular to the first and the second axes.

Abstract: A terahertz wave lens includes a substrate having a surface provided with an uneven structure that changes a phase of the terahertz wave. The uneven structure includes a plurality of holes that are periodically arranged. The uneven structure includes a plurality of regions where the plurality of holes are arranged. A height of the hole in a thickness direction of the substrate and a width of the pillar differ for each of the regions. Outer end portions of the uneven structure in the thickness direction are located on the same plane.

Abstract: An observation apparatus includes a light source, a mirror, a condenser lens, an objective lens, a beam splitter, an imaging unit, and an analysis unit. The analysis unit includes an interference intensity image acquisition unit, a first complex amplitude image generation unit, a second complex amplitude image generation unit, a two-dimensional phase image generation unit, a three-dimensional phase image generation unit, and a refractive index distribution calculation unit. The analysis unit irradiates an observation object with light along each of a plurality of light irradiation directions, acquires an interference intensity image at a reference position for each of the plurality of light irradiation directions from the imaging unit, and performs necessary processing based on the interference intensity images to obtain a three-dimensional refractive index distribution of the observation object.

Abstract: A light source device includes a light source that generates continuous light, a retroreflective material that retroreflects a light beam from the light source, an optical system that guides the light beam from the light source to the retroreflective material and output the light beam retroreflected from the retroreflective material to the outside, and a modulation unit that is disposed in the optical system, changes an optical path length between the light source and the retroreflective material with time, and changes a wavelength of the light beam with time using a Doppler effect.

Abstract: A mirror unit includes an optical scanning device, a frame member, and a window member. The frame member includes first and second wall portions facing each other in an X-axis direction. The first wall portion is higher than the second wall portion. The window member is disposed on a top surface of the first wall portion and a top surface of the second wall portion and is inclined with respect to a mirror surface of the optical scanning device. In a cross-section parallel to the X-axis direction, the first wall portion is separated from a first line passing through a first end at a side of the first wall portion in the mirror surface and a first corner portion formed at the side of the first wall portion by an outer surface opposite to the frame member and a first side surface in the window member.

Abstract: An electrodeless laser-driven light source includes a laser source that generates CW sustaining light. A pump laser generates pump light. A Q-switched laser crystal is positioned to receive the pump light and generates pulsed laser light in response to the generated pump light that propagates to a breakdown region in a gas filled bulb comprising an ionizing gas. A detector detects plasma light generated by a CW plasma located at least partly in a CW plasma region in the gas filled bulb comprising the ionizing gas and generates a detection signal. A controller generates control signals that control the pump light to the Q-switched laser crystal so as to extinguish the pulsed laser light within a time delay after the detection signal exceeds a threshold level.

Abstract: A method for manufacturing a gallium nitride semiconductor device includes: preparing a gallium nitride wafer; forming an epitaxial growth film on the gallium nitride wafer to provide a processed wafer having chip formation regions; perform a surface side process on a one surface side of the processed wafer; removing the gallium nitride wafer and dividing the processed wafer into a chip formation wafer and a recycle wafer; and forming an other surface side element component on an other surface side of the chip formation wafer.

Abstract: A quantum simulator includes a chamber, a light beam generation apparatus, and a photodetector. The light beam generation apparatus includes a light source, an optical mask, a spatial light modulator, and a lens. The optical mask includes an inner region having a rectangular shape with a side parallel to a first direction or a second direction, and an outer region surrounding the inner region. When an xy coordinate system including an x axis parallel to the first direction and a y axis parallel to the second direction is set on an image plane, the light beam generation apparatus forms and regularly arranges focusing spots such that a minimum value of a difference between x coordinate values and a minimum value of a difference between y coordinate values of center positions of the focusing spots are longer than a non-overlapping distance.

Abstract: Disclosed is a laser device includes: a rod-shaped laser medium extending in a first direction; a first light source unit including a first base and a plurality of excitation light sources; a second light source unit arranged side by side with the first light source unit in a second direction intersecting with the first direction, the second light source unit including a second base and a plurality of excitation light sources; and a holder supporting the laser medium, the first light source unit, and the second light source unit. At least one of the first base and the holder includes a first regulating part configured to regulate a position of the first base with respect to the holder, and at least one of the second base and the holder includes a second regulating part configured to regulate a position of the second base with respect to the holder.

Abstract: An electrodeless laser-driven light source includes a laser source that generates a CW sustaining light and a pump laser that generates a pump. An optical beam combiner combines the CW sustaining light and the pump such that the CW sustaining light and the pump propagate co-linearly. A Q-switched laser crystal generates pulsed light in response to the pump. A gas-filled bulb is configured such that the pulsed light ignites a pulse plasma in a breakdown region of the gas bulb and the sustaining light sustains a CW plasma in a CW plasma region of the gas bulb, thereby emitting a high brightness light from the gas bulb, where the gas-filled bulb is positioned between the output of the pump laser and the pump input of the Q-switched laser crystal such that the CW plasma absorbs the pump light quenching the pulsed light generated by the Q-switched laser crystal.

Abstract: A sample observation device includes: an emission optical system that emits planar light to a sample on an XZ plane; a scanning unit that scans the sample in a Y-axis direction so as to pass through an emission surface of the planar light; an imaging optical system that has an observation axis inclined with respect to the emission surface and forms an image of observation light generated in the sample; an image acquisition unit that acquires a plurality of pieces of XZ image data corresponding to an optical image of the observation light; and an image generation unit that generates XY image data based on the plurality of pieces of XZ image data. The image generation unit extracts an analysis region of the plurality of pieces of XZ image data acquired in the Y-axis direction, integrates brightness values of at least the analysis region in a Z-axis direction to generate X image data, and combines the X image data in the Y-axis direction to generate the XY image data.