Patents Assigned to IMEC
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Patent number: 12289117Abstract: An input circuitry for receiving an analog input signal comprises: an input transistor configured to receive the analog input signal on a gate terminal of the input transistor wherein the input transistor is connected to a digital component providing a digital signal, and wherein the input transistor is configured to receive the digital signal on a bulk terminal of the input transistor; wherein the input transistor is configured to provide an output current based on the analog input signal and the digital signal, such that the input transistor provides digital-to-analog conversion of the digital signal received on the bulk terminal.Type: GrantFiled: December 19, 2022Date of Patent: April 29, 2025Assignees: IMEC VZW, KATHOLIEKE UNIVERSITEIT LEUVENInventors: Xiaohua Huang, Marco Ballini
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Patent number: 12283166Abstract: An event-driven transmission method comprises converting at least one event to at least one corresponding pulse pair and transmitting the at least one pulse pair. In this context, a delay between each pulse pair represents a corresponding identifier with respect to the respective event or with respect to at least one corresponding object causing or experiencing the respective event.Type: GrantFiled: April 8, 2021Date of Patent: April 22, 2025Assignee: Stichting IMEC NederlandInventor: Yao-Hong Liu
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Patent number: 12279911Abstract: This patent disclosure relates to an ultrasound transducer including an array of ultrasound transducing elements, a plurality of transducer drive lines. The ultrasound transducer further includes an array of control circuits, wherein each individual control circuit includes a drive switch and a memory element, the drive switch comprising at least one thin-film transistor, the memory element being configured to store and control the state of the drive switch.Type: GrantFiled: July 1, 2021Date of Patent: April 22, 2025Assignee: IMEC VZWInventors: Florian De Roose, Kris Myny
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Patent number: 12278086Abstract: The present disclosure relates to the determination of a pattern height of a pattern, which has been produced with extreme ultraviolet (EUV) lithography in a resist film. The determination is performed by using an electron beam (e-beam) system, in particular, by using a scanning electron microscope (SEM). In this respect, the disclosure provides a device for determining the pattern height, wherein the device comprising a processor. The processor is configured to obtain a SEM image of the pattern from an SEM. Further, the processor is configured to determine a contrast value related to the pattern based on the obtained SEM image. Subsequently, the processor is configured to determine the pattern height based on calibration data and the determined contrast value.Type: GrantFiled: June 2, 2022Date of Patent: April 15, 2025Assignees: IMEC VZW, Katholieke Universiteit LeuvenInventors: Gian Francesco Lorusso, Mohamed Saib, Alain Moussa, Anne-Laure Charley, Danilo De Simone, Joren Severi
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Patent number: 12276784Abstract: A micromirror array comprises a substrate, a plurality of minors for reflecting incident light and, for each mirror (20) of the plurality of minors, at least one piezoelectric actuator (21) for displacing the minor, wherein the at least one piezoelectric actuator is connected to the substrate. The micromirror array further comprises one or more pillars (24) connecting the minor to the at least one piezoelectric actuator. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection apparatus.Type: GrantFiled: August 5, 2020Date of Patent: April 15, 2025Assignees: ASML Netherlands B.V., IMEC v.Z.W.Inventors: Luc Roger Simonne Haspeslagh, Veronique Rochus, Guilherme Brondani Torri, Nitesh Pandey, Sebastianus Adrianus Goorden
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Patent number: 12267805Abstract: Example embodiments relate to methods for estimating a location of at least one mobile network node and respective network. An example method for estimating a location of at least one mobile network node of a wireless communication network including the at least one mobile network node and at least two static network nodes includes performing initial range measurements between the at least two static network nodes in a pairwise manner. The method also includes determining an initial location estimate. Additionally, the method includes determining an estimate for corresponding noise samples. Further, the method includes estimating corresponding initial parameters of a Gaussian mixture noise model. In addition, the method includes determining a weighted sum of respective refined parameters of the Gaussian mixture noise model and the corresponding initial parameters of the Gaussian mixture noise model.Type: GrantFiled: July 20, 2022Date of Patent: April 1, 2025Assignee: Stichting IMEC NederlandInventors: Alireza Sheikh, Jac Romme
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Patent number: 12259361Abstract: The disclosure includes a system for photoacoustic inspection of an object. The system includes a broadband emission source configured to generate an emission beam, a direction apparatus including at least one spectrum splitter configured to split the emission beam into at least a first and a second component, the direction apparatus being configured to sequentially direct the respective components to N respective locations on the object at N times to generate N respective acoustic waves within the object. The N respective locations and N times are such that the respective N acoustic waves at least semi-constructively interfere to generate a respective propagating acoustic wave within the object. The system also includes a vibration sensing system configured to detect said respective propagating acoustic waves at a respective detection location on the object.Type: GrantFiled: February 15, 2021Date of Patent: March 25, 2025Assignees: IMEC VZW, Universiteit GentInventors: YanLu Li, Roeland Baets
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Patent number: 12261045Abstract: According to an aspect there is provided a patterning method comprising: over a lower pattern memorization layer, forming a pattern of first upper blocks, then an upper pattern memorization layer and then a pattern of second upper blocks; thereafter patterning upper trenches in the upper pattern memorization layer using lithography and etching, and forming spacer lines along sidewalls of the upper trenches to define spacer-provided upper trenches, at least a subset being interrupted by a respective first upper block; patterning first lower trenches in the lower pattern memorization layer by etching the spacer-provided upper trenches into the lower pattern memorization layer, at least a subset of the first lower trenches being interrupted by a lower pattern memorization layer portion preserved at a location defined by a respective one of the first upper blocks; thereafter, forming an auxiliary trench mask stack and patterning auxiliary trenches therein using lithography and etching; and thereafter, patterniType: GrantFiled: January 3, 2022Date of Patent: March 25, 2025Assignee: IMEC VZWInventors: Victor M. Blanco, Frederic Lazzarino
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Patent number: 12251206Abstract: A method for automatic multi-object localization and/or vital sign monitoring is provided. The method comprises the steps of receiving a radar signal in order to form a corresponding observation matrix, reducing noise by applying singular value decomposition to the observation matrix, processing the result of the singular value decomposition by an independent component analysis in order to estimate the corresponding sources, and estimating propagation channels of the estimated sources by minimizing the corresponding residual error based on the observation matrix and the estimated sources.Type: GrantFiled: March 8, 2021Date of Patent: March 18, 2025Assignee: Stichting IMEC NederlandInventors: Yiting Lu, Marco Mercuri
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Patent number: 12255408Abstract: A phased array transceiver element comprises a local oscillator stage for generating beamformed in-phase and quadrature local oscillator signals, the local oscillator stage comprising a phase shifter connectable to a reference frequency source and applying a first phase shift; a primary frequency multiplier input from the phase shifter and applying a primary frequency multiplication factor; a phase-splitting arrangement input from the primary frequency multiplier and having a first output and a second output, the phase-splitting arrangement applying a second phase shift at the first output and a third phase shift at the second output; a first secondary frequency multiplier input from the first output of the phase-splitting arrangement, having an output for the in-phase local oscillator signal, and applying a secondary frequency multiplication factor; and a second secondary frequency multiplier input from the second output of the phase-splitting arrangement, having an output for the quadrature local oscillatorType: GrantFiled: March 16, 2023Date of Patent: March 18, 2025Assignee: Imec VZWInventors: Yang Zhang, Jan Craninckx, Pierre Wambacq, Giuseppe Gramegna
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Patent number: 12249970Abstract: A filter includes cascaded building blocks, for filtering an incoming signal. Each building block has first and second delay elements. A first scaling device is between an input node of the first delay element and an output node of the second delay element, and a second scaling device is between an output node of the first delay element and an input node of the second delay element. The building block has a cross scaling device between the output nodes of the first delay element and of the second delay element, and/or between the input nodes of the first delay element and of the second delay element. The building block is configured such that, in operation, incoming signals at the input node and output node of the second delay element are summed together.Type: GrantFiled: September 24, 2019Date of Patent: March 11, 2025Assignees: UNIVERSITEIT GENT, IMEC VZWInventors: Guy Torfs, Michiel Verplaetse
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Patent number: 12243193Abstract: The disclosure relates generally to image processing. For example, the invention relates to a method and a device for de-noising an electron microscope (EM) image. The method includes the act of selecting a patch of the EM image, wherein the patch comprises a plurality of pixels, wherein the following acts are performed on the patch: i) replacing the value of one pixel, for example of a center pixel, of the patch with the value of a different, for example randomly selected, pixel from the same EM image; ii) determining a de-noised value for the one pixel based on the values of the other pixels in the patch; and iii) replacing the value of the one pixel with the determined de-noised value.Type: GrantFiled: July 2, 2021Date of Patent: March 4, 2025Assignee: IMEC VZWInventors: Bappaditya Dey, Sandip Halder, Gouri Sankar Kar, Victor M. Blanco, Senthil Srinivasan Shanmugam Vadakupudhu Palayam
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Patent number: 12241957Abstract: Example embodiments relate to methods for distance determination. One embodiment includes a method for determining a distance between a first radio signal transceiver and a second radio signal transceiver. The method includes receiving a first set and a second set of measurement results. The first set is acquired by the first radio signal transceiver based on signals transmitted from the second radio signal transceiver and the second set is acquired by the second radio signal transceiver based on signals transmitted from the first radio signal transceiver. The first set is representable as including, for each of a plurality of frequencies, a measurement pair. The method also includes calculating, for each frequency of the plurality of frequencies, a preliminary estimate of a value proportional to a one-way frequency domain channel response. Additionally, the method includes determining a final estimate of the value proportional to the one-way frequency domain channel response.Type: GrantFiled: December 17, 2020Date of Patent: March 4, 2025Assignee: Stichting IMEC NederlandInventors: Jacobus Petrus Adrianus Romme, Pepijn Boer, Lichen Yao
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Patent number: 12237371Abstract: A method for forming a semiconductor device is provided. The method comprises forming a device layer stack comprising an alternating sequence of lower sacrificial layers and channel layers, and a top sacrificial layer over the topmost channel layer, wherein the top sacrificial layer is thicker than each lower sacrificial layer; etching the top sacrificial layer to form a top sacrificial layer portion underneath the sacrificial gate structure; forming a first spacer on end surfaces of the top sacrificial layer portion; etching the channel and lower sacrificial layers while using the first spacer as an etch mask to form channel layer portions and lower sacrificial layer portions; etching the lower sacrificial layer portions to form recesses in the device layer stack, while the first spacer masks the end surfaces of the top sacrificial layer portion; and forming a second spacer in the recesses.Type: GrantFiled: September 16, 2021Date of Patent: February 25, 2025Assignee: IMEC VZWInventors: Boon Teik Chan, Hans Mertens, Eugenio Dentoni Litta
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Patent number: 12237207Abstract: A method for forming a buried metal line in a semiconductor substrate comprises forming, at a position between a pair of semiconductor structures, a metal line trench in the semiconductor substrate at a level below a base of each semiconductor structure of the pair, and forming the metal line in the metal line trench by means of area selective deposition of a metal line material, followed by embedding the pair of semiconductor structures in an insulating layer.Type: GrantFiled: September 18, 2023Date of Patent: February 25, 2025Assignee: Imec vzwInventors: Boon Teik Chan, Zheng Tao, Efrain Altamirano Sanchez, Anshul Gupta, Basoene Briggs
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Patent number: 12220727Abstract: The present invention provides a flexible ultrasound transducer (1) for an ultrasound monitoring system for examining a curved object.Type: GrantFiled: March 12, 2020Date of Patent: February 11, 2025Assignees: IMEC VZW, KATHOLIEKE UNIVERSITEIT LEUVENInventors: David Cheyns, Yongbin Jeong, Xavier Rottenberg
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Patent number: 12216057Abstract: A method and apparatus are provided for a spectroscopic measurement for determining a lateral recess depth in the sidewall of a microstructure. The structure is formed on a larger substrate with the sidewall in an upright position relative to the substrate, and the recess extends essentially parallel to the substrate. The recess may be an etch depth obtained by etching a first layer relative to two adjacent layers, the layers oriented parallel to the substrate, the etch process progressing inward from the sidewall. An incident energy beam falling on the structure generates a spectroscopic response captured and processed respectively by a detector and a processing unit. The response comprises one or more peaks related to the material or materials of the substrate and the structure. According to the method, a parameter is derived from said one or more peaks, that is representative of the lateral recess depth.Type: GrantFiled: July 9, 2021Date of Patent: February 4, 2025Assignee: IMEC VZWInventors: Thomas Nuytten, Janusz Bogdanowicz
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Patent number: 12214580Abstract: The present disclosure relates to a method for transferring a target layer to a substrate. The method includes providing a stack by forming a first transfer layer over a first substrate, forming a second transfer layer on the first transfer layer, the second transfer layer being water-soluble, and forming the target layer on the second transfer layer, such that the stack has a top surface. The method also includes bonding the top surface of the stack to a second substrate, separating the first transfer layer from the second transfer layer, and dissolving the second transfer layer in water.Type: GrantFiled: June 7, 2022Date of Patent: February 4, 2025Assignees: IMEC VZW, Katholieke Universiteit Leuven, KU LEUVEN R&DInventors: Boshen Liang, Dominika Wysocka, David Cheyns
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Patent number: 12204025Abstract: A method for determining a distance to a target comprises: receiving a bitstream of binary digits corresponding to a time-varying signal based on light transmitted by a light source being reflected by the target, wherein each binary digit in the bitstream is defined based on the time-varying signal at a time instance represented by the binary digit being above or below a threshold; comparing the bitstream to a set of stored reference bitstreams, wherein the set comprises pairs comprising a first reference bitstream and a second reference bitstream representing a common distance to the target, wherein the first reference bitstream is phase-shifted in relation to the second reference bitstream; and determining the distance to the target based on selection of a pair of reference bitstreams based on said comparing.Type: GrantFiled: August 1, 2022Date of Patent: January 21, 2025Assignee: IMEC VZWInventors: Orges Furxhi, Azhar Din, Nikolaos Papadopoulos, Jiwon Lee, Mauricio Velazquez Lopez
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Patent number: 12204996Abstract: An integrated system for quantum computation is provided, In one aspect, the system includes at least one semiconductor spin quantum bit (qubit); a feedline configured to act as an electron spin resonance (ESR) antenna for control of the at least one qubit; at least one resonator; and a ground plane common to both the feedline and the at least one resonator. The at least one resonator is capacitively coupled to the feedline, and configured for readout of the at least one qubit via the feedline. The feedline and the at least one resonator are arranged in adjacent layers separated by at least a dielectric. A corresponding method of performing quantum computation using such an integrated system is also provided.Type: GrantFiled: December 20, 2021Date of Patent: January 21, 2025Assignee: IMEC VZWInventors: Fahd Ayyalil Mohiyaddin, Ruoyu Li, Bogdan Govoreanu, Steven Brebels