Abstract: Methods and systems for chemical analysis. For instance, a device for chemical analysis of a sample includes a housing, an inlet, a pump, multiple membranes and at least one detector. The housing contains an interior chamber of the device. The inlet on the housing introduces the sample into the interior chamber. The pump is connected to the housing to form a partial vacuum in the interior chamber. The multiple membranes have different response times to different constituents of the sample. The multiple membranes include at least a first membrane and a second membrane. At least one of the first membrane and the second membrane comprises a tubular portion. The multiple membranes have different response times to different constituents of the sample. The detector is for detecting the different constituents of the sample after interaction with the multiple membranes. In addition, a method for chemical analysis of a sample.

Abstract: A system and method for chemical analysis are described herein. The system includes a probe, a sample collection cartridge, and a chemical analyzer. The probe is configured to collect the optimal amount of sample for a future analysis and to store this chemical sample in the sample collection cartridge. The probe also collects sample data. The chemical analyzer is configured to determine the optimal analysis settings based on the sample data and analyze the chemical sample stored in the sample collection cartridge based on the optimal analysis settings.

Abstract: Systems for a managing a chemical process and photoionization detectors for analyzing a process gas are presented. In one aspect, the system includes a process gas source in fluid communication with the process chamber and a photoionization detector. The photoionization detector is configured to analyze the process gas. The photoionization detector includes a heat resistant coupling for connection to the system, a gas sample chamber with the radiation window soldered or brazed to a wall of the gas sample chamber, and a radiation source configured to emit radiation through the radiation window and into the gas sample chamber to analyze the process gas. In another aspect, the photoionization detector includes a removable coupling, a gas sample chamber, and a radiation source. The removable coupling is for connection to the process gas handling system and includes a metal gasket and metal flanges.

Abstract: A method of measuring an atmosphere in a guest vacuum chamber of a vacuum tool includes measuring a first composition of the atmosphere in the host vacuum chamber using a residual gas analyzer (RGA). The host and guest vacuum chambers are not coupled during the measuring of the first composition. The host vacuum chamber is coupled to the guest vacuum chamber, so the atmospheres in each can mix in the host vacuum chamber. A second composition of the atmosphere in the host vacuum chamber is measured using the RGA after the chambers are coupled. Using a processor, a composition of the guest atmosphere is automatically determined using the measured first and second compositions. A vacuum tool can include the host and guest chambers, the valve, the RGA, and a processor configured to control the valve to carry out this or other methods.

Abstract: A combination retainer and electrical contact mechanism for a deposition monitor sensor includes a sensor body and a removable flexible electrical contact spanning between a fixed electrical (contact) element in the sensor's body and one face of an associated monitor crystal. A retainer insulates or insures electrical isolation of the spanning electrical contact from unwanted contact to electrically grounded components in which at least one of the retainer and crystal holder include features that maintain the electrical contact with the retainer in order to provide a single mechanism.

Abstract: A sound velocity sensor is defined by a hermetic multi-chambered enclosure for containing flowing gases and mixtures of gases. The contained flowing gases are acoustically excited and the acoustic energy is measured over a fixed distance between a first sending end of the enclosure and a receiving end. The speed of sound of the gases are determined by comparing the energy transmitted through the flowing gases at various frequencies so as to precisely determine the resonant frequency of the gases flowing through the enclosure. In accordance with the present design, the chambers of the enclosure include internal transition shapes therebetween for optimizing the transmission of acoustic energy through the flowing gases and also enhancing one or more additional resonant modes at higher useful frequencies. The transition shapes used in connection with the sensor can be at least one of parabolic, hyperbolic, linear and exponential in nature.

Abstract: An apparatus for monitoring and detecting material deposited onto a substrate during a deposition process in a processing chamber includes a storage structure having a primary axis extending between respective first and second ends and an exterior lateral surface between the first and second ends extending about the primary axis. A plurality of monitor crystals are supported by the storage structure at spaced positions along said exterior lateral surface and in which a drive mechanism advances the storage structure rotatably and axially relative to the primary axis such that at least one monitor crystal is advanced or retracted relative to at least one measuring position. A retained crystal that is advanced to the measuring position can be electrically connected, using a brush contact or other mechanism, in order to excite the crystal using a resonance circuit.

Abstract: A detector in a residual gas analyzer (RGA) is configured to receive ions traveling in a downstream direction along a beamline and includes a steering electrode offset from the beamline. A first ion-receiving electrode is at least partly on the opposite side of the steering electrode from the beamline. A second ion-receiving electrode is at least partly offset from the beamline, at least partly across the beamline from at least a portion of the steering electrode, and at least partially upstream of at least a portion of the steering electrode. A shielding electrode is arranged at least partly between the beamline and the second ion-receiving electrode. A source applies a potential to the shielding electrode. A residual gas analyzer (RGA) includes an ion source, an analyzer, and such a detector.

Abstract: A combination retainer and electrical contact mechanism for a deposition monitor sensor includes a sensor body and a removable flexible electrical contact spanning between a fixed electrical (contact) element in the sensor's body and one face of an associated monitor crystal. A retainer insulates or insures electrical isolation of the spanning electrical contact from unwanted contact to electrically grounded components in which at least one of the retainer and crystal holder include features that maintain the electrical contact with the retainer in order to provide a single mechanism.

Abstract: A detector in a residual gas analyzer (RGA) is configured to receive ions traveling in a downstream direction along a beamline and includes a steering electrode offset from the beamline. A first ion-receiving electrode is at least partly on the opposite side of the steering electrode from the beamline. A second ion-receiving electrode is at least partly offset from the beamline, at least partly across the beamline from at least a portion of the steering electrode, and at least partially upstream of at least a portion of the steering electrode. A shielding electrode is arranged at least partly between the beamline and the second ion-receiving electrode. A source applies a potential to the shielding electrode. A residual gas analyzer (RGA) includes an ion source, an analyzer, and such a detector.

Abstract: A method of measuring an atmosphere in a guest vacuum chamber of a vacuum tool includes measuring a first composition of the atmosphere in the host vacuum chamber using a residual gas analyzer (RGA). The host and guest vacuum chambers are not coupled during the measuring of the first composition. The host vacuum chamber is coupled to the guest vacuum chamber, so the atmospheres in each can mix in the host vacuum chamber. A second composition of the atmosphere in the host vacuum chamber is measured using the RGA after the chambers are coupled. Using a processor, a composition of the guest atmosphere is automatically determined using the measured first and second compositions. A vacuum tool can include the host and guest chambers, the valve, the RGA, and a processor configured to control the valve to carry out this or other methods.

Abstract: A sound velocity sensor is defined by a hermetic multi-chambered enclosure for containing flowing gases and mixtures of gases. The contained flowing gases are acoustically excited and the acoustic energy is measured over a fixed distance between a first sending end of the enclosure and a receiving end. The speed of sound of the gases are determined by comparing the energy transmitted through the flowing gases at various frequencies so as to precisely determine the resonant frequency of the gases flowing through the enclosure. In accordance with the present design, the chambers of the enclosure include internal transition shapes therebetween for optimizing the transmission of acoustic energy through the flowing gases and also enhancing one or more additional resonant modes at higher useful frequencies. The transition shapes used in connection with the sensor can be at least one of parabolic, hyperbolic, linear and exponential in nature.

Abstract: A method for accurately calculating the thickness of deposited thin film layers onto a piezoelectric crystal blank in which dissimilar materials can be utilized, enabling determinations for various applications employing exotic materials. Additionally, the specific acoustic impedance (or equivalent z-ratio) of an unknown deposited material can be determined. The exact analytical solution nearly eliminates thickness errors when several layers of different materials are sequentially deposited on the same monitor quartz crystal.

Abstract: A method for forming an ultra-thin membrane for use in a chemical analyzer such as a mass spectrometer includes the step of applying a sacrificial blocking layer onto a porous substrate, applying a semi-permeable membrane layer onto the sacrificial blocking layer, and removing the sacrificial blocking layer following cure of the membrane layer. In a preferred version, at least one of the blocking layer and the membrane layer are applied to the porous support by means of spin coating, though other deposition techniques can be employed.

Abstract: A method for accurately calculating the thickness of deposited thin film layers onto a piezoelectric crystal blank in which dissimilar materials can be utilized, enabling determinations for various applications employing exotic materials. Additionally, the specific acoustic impedance (or equivalent z-ratio) of an unknown deposited material can be determined. The exact analytical solution nearly eliminates thickness errors when several layers of different materials are sequentially deposited on the same monitor quartz crystal.

Abstract: An apparatus for heating a surface to liberate at least one analyte for detection thereof includes a source of energy to irradiate the surface and a collector to collect at least one gas from the surface, the at least one gas being capable of including the a least one liberated analyte. The apparatus further includes a detector linked to the collector to detect the presence of the at least one liberated analyte wherein the detection is used to control the power of the energy source by utilizing feedback relating to at least one condition of the surface.

Abstract: A clamp assembly for bringing an RF sensor into electrical contact with an RF current carrier is provided herein. The clamp assembly (101) comprises a first wedge-shaped element (103), and a second wedge-shaped element (105) which is slidingly engaged with said first wedge-shaped element. Preferably, the clamp assembly also comprises a collar (113) within which the first and second wedge-shaped elements are disposed. The clamp assembly preferably further comprises a fastener (111), such as a screw, which adjoins the first and second elements, in which case the clamp assembly is adapted such that, as the screw is rotated in a first direction, at least one of the first and second elements expands against the collar and/or the RF current carrier.

Abstract: A clamp assembly for bringing an RF sensor into electrical contact with an RF current carrier is provided herein. The clamp assembly (101) comprises a first wedge-shaped element (103), and a second wedge-shaped element (105) which is slidingly engaged with said first wedge-shaped element. Preferably, the clamp assembly also comprises a collar (113) within which the first and second wedge-shaped elements are disposed. The clamp assembly preferably further comprises a fastener (111), such as a screw, which adjoins the first and second elements, in which case the clamp assembly is adapted such that, as the screw is rotated in a first direction, at least one of the first and second elements expands against the collar and/or the RF current carrier.

Abstract: An apparatus for heating a surface to liberate at least one analyte for detection thereof includes a source of energy to irradiate the surface and a collector to collect at least one gas from the surface, the at least one gas being capable of including the a least one liberated analyte. The apparatus further includes a detector linked to the collector to detect the presence of the at least one liberated analyte wherein the detection is used to control the power of the energy source by utilizing feedback relating to at least one condition of the surface.

Abstract: A high-performance miniature RF sensor that maintains gain, directivity, and isolation in a miniature package. The miniature RF sensor includes stacked current and voltage pickups disposed in a PCB construction, the sensor further including quarter wave transforming filter, triaxial shielding, and skin-effect filtering.