Abstract: A leak detection device (10) comprising a gas detector (12), a vacuum pump (14), a port for a test object (22) and a gas conducting path connecting the port to the gas detector (12) and the vacuum pump (14), is characterized in that the port (16) comprises a controllable isolation valve (20) for the selective opening or closing of the port (16), and that a pressure measurement device (24) for measuring the pressure at the port (16) is provided and the connection line (18) comprises a controllable venting valve (V3, V3a) for selectively allowing gas from the surrounding atmosphere to flow to the port (16) in a pulse-like manner, wherein the leak detection device (10) is configured to measure the pressure p(t1) at the port (16) at a first time t1 before the opening of the venting valve, thereafter to open and close the venting valve in a pulse-like manner and to measure the pressure p(t2) at the port (16) at least at a time t2>t1 after the closing of the venting valve and to determine, whether the isolation

Abstract: A method for monitoring precursor material in a carrier stream of a fabrication system comprises depositing a film of precursor material on a surface of a QCM sensor and determining a starting resonance frequency of the QCM sensor with the deposited film of precursor material. The resonance frequency of the QCM sensor is measured during operation of the fabrication system and compared with the starting resonance frequency. A system error is issued when the measured resonance frequency differs from the corresponding starting resonance frequency by more than a threshold value. A system correction is automatically implemented and configured to restore the QCM sensor to the starting resonance frequency.

Abstract: Method for adapting the concentration of a sample gas in a gas mixture to be analysed by a gas chromatograph assembly (10), the gas chromatograph assembly (10) comprising a sample gas inlet (20) for introducing a sample gas to be analysed, a secondary gas inlet (40), a gas chromatograph infrared sensor (12), a gas chromatograph column (26), and a gas chromatograph bypass (28) parallel to the column (26), characterized by a) introducing an amount of sample gas through the sample gas inlet (20), b) introducing an amount of secondary gas through the secondary gas inlet (40), c) mixing the sample gas and the secondary gas to a gas mixture and conducting the gas mixture via the gas chromatograph bypass (28), d) circulating the gas mixture in a gas conducting loop (52) comprising the gas chromatograph bypass (28), the gas chromatograph infrared sensor (12) and not comprising the gas chromatograph column (26), e) analysing the gas mixture thus obtained by means of gas chromatography employing the gas chromatograp

Abstract: A system and method for determining the changes in resonance frequency in crystal microbalance (CM) sensors and the resulting changes in the determination of incremental mass on the CM sensors caused by temperature. Dual mode resonances and coefficients are used in a deconvolution process to determine and extract the frequency shift caused by temperature to provide the temperature compensated incremental mass (?M). In one embodiment, dual mode analysis is provided using a mass mode (e.g., the c-mode fundamental frequency (fc100)) and a temperature mode (e.g., the anharmonic frequency (fc102)) and associated coefficients. In other embodiments that are more sensitive to temperature changes, dual mode analysis is provided using the b-mode fundamental frequency (fb100) as the temperature-mode and associated coefficients.

Abstract: A method of maintenance optimization for production equipment in a factory includes specifying a time period and determining maintenance tasks to be performed on each piece of production equipment over the specified time period. The technician skills required to perform each maintenance task are determined. The availability of each technician during the specified time period and their certifications are then determined. The parts required for each maintenance task and a parts inventory are determined. A production schedule for the specified time period is then determined. A recommended maintenance schedule is generated which minimizes production impact during the specified time period based on the determined maintenance tasks, technician availability and certifications and parts availability. The recommended maintenance schedule includes a recommended time to perform each maintenance task and a recommended technician to perform each maintenance task.

Abstract: A sealing system includes a first seal, a second seal spaced apart from the first seal and a sealing chamber defined between the first and second seals. The sealing chamber is fluidly connected to a vacuum source. In operation, the sealing chamber is maintained at a pressure that is below atmospheric pressure. Contaminants that breach one of the first and second seals are pulled into the sealing chamber and removed by the vacuum source.

Abstract: A test leak device for functional testing of a leak detection device for the leak test of a test specimen (14) filled with a liquid (12) having an internal pressure that is lower than atmospheric pressure, comprising a reservoir (102) filled with a test liquid (104), wherein the test liquid (104) has a vapor pressure of less than 500 mbar at room temperature, and the reservoir (102) comprises an outlet (106), and a pump (100) cooperating with the reservoir (102) and configured to convey the test liquid (104) from the reservoir (102) in such a way that the test liquid (104) escapes from the pump (100) through the outlet (106) in liquid form from the reservoir (102).

Abstract: A particle detector includes at least one throttling element which defines an aerodynamic aperture. A light source illuminates a region of the aerodynamic aperture at about a focal point of an aerodynamic lens. A detector is configured to receive a light scattered from one or more particles which traverse the aerodynamic aperture. A method for detecting and measuring particles previously deposited on a surface of a semiconductor manufacturing chamber is also described.

Abstract: Method for adapting the concentration of a sample gas in a gas mixture to be analysed by a gas chromatograph assembly, the assembly comprising a sample gas inlet, a secondary gas inlet, a gas chromatograph sensor, a gas chromatograph column, and a gas chromatograph bypass parallel to the column, characterized by a) introducing sample gas through the sample gas inlet, b) introducing secondary gas through the secondary gas inlet, c) mixing the sample gas and the secondary gas to a gas mixture and conducting the mixture via the bypass, d) circulating the mixture in a gas conducting loop comprising the bypass and the sensor, e) repeating steps b), c) and d) without step a) to gradually reduce the concentration of sample gas within the mixture until the concentration reaches a desired predetermined level, f) analysing the mixture by means of gas chromatography employing the column and the sensor.

Abstract: A vacuum pressure sensor includes a vacuum-tight electrical feedthrough. The feedthrough has an electrically insulating insulator element with a through-opening, having a first boundary surface adjacent to the through-opening and a second boundary surface also adjacent to the through-opening and opposite to the first boundary surface, and an electrically conductive conductor element which extends through the through-opening and which is connected to the insulator element in a vacuum-tight manner along a circumferential line of the conductor element. The insulator element is transmissive to electromagnetic radiation in an optical wavelength range and the first boundary surface and/or the second boundary surface is formed as a curved surface.

Abstract: The invention relates to a film chamber (10) for testing the sealing tightness of a test specimen containing a test fluid, the film chamber comprising: at least one vacuum connection (20) which can be connected to a vacuum pump (32) and a gas detector (36); at least one flexible wall region (14) that defines a film chamber volume; and a frame (12) that surrounds the flexible wall region (14) on the outside in order to seal the film chamber volume. The film chamber is characterized in that: the vacuum connection (20) is located in a region arranged centrally with respect to the frame (12) and is radially outwardly surrounded by the frame (12); and at least one gas inlet (22, 30) for supplying a carrier gas is located in the region of the outer frame in such a way that the carrier gas flows through the gas inlet through the film chamber volume along the flexible wall region (14) radially from the outside inwardly to the vacuum connection (20).

Abstract: A plasma generation device for generating a plasma comprises a support having a first side and an opposing second side. The support is comprised of a ceramic matrix and a split-ring conductor is embedded in the ceramic matrix. A hermetically sealed via extends from the split-ring conductor to the second side of the support and connects to an electrical supply. A ground plane is formed on the second side of the support. A plasma is generated proximate to the first side of the support, and the support seals to a wall of the chamber such that the first side is exposed to the one or more gases inside the chamber and the second side is isolated from the plasma and the one or more gases inside of the chamber.

Abstract: A device for leak detection on a test specimen, comprising a mass spectrometer (12), an at least three-stage turbomolecular pump (14), the input stage (18) of which is connected to the mass spectrometer (12) and which has a first intermediate gas inlet arranged between the input pump stage and the intermediate pump stage (26) and a second intermediate gas inlet arranged between the intermediate pump stage (26) and the output pump stage (24), an at least two-stage booster pump, the input pump stage (46) of which can be connected to the test specimen to be examined and which has an intermediate gas outlet (54) arranged between the input pump stage (46) and the output pump stage (48) and a pre-vacuum pump (22) which is connected to the outlet (20) of the output pump stage (24) of the turbomolecular pump (14) and is configured to generate a pre-vacuum pressure of less than 50 mbar at the outlet (20) of the turbomolecular pump (14) and to evacuate it against atmospheric pressure, characterized in that the intermed

Abstract: A wide-range ion source for a mass spectrometer comprises a first portion and a second portion that is positioned downstream of the first portion. The first portion includes an anode and a first filament that is positioned proximate the anode and secured in place relative to the anode. The first filament is exposed to a pressure of a process chamber. A first electron repeller has at least a partially circular shape. The second portion includes a tubular anode, a second filament surrounding the tubular anode, an extraction lens defining an opening and a focus lens to conduct ions into a volume.

Abstract: A gas leak detection device for identifying a gas leak in a test object, comprising a connector (20) for the test object or a test chamber accommodating the test object, a vacuum pump (16, 18) connected to the connector (20) for evacuating the test object or the test chamber, a gas detector (12) connected to the vacuum pump (16, 18) and the connector (20) and configured for detection of a first test gas and for integral leak detection or for localized leak detection of a gas leak in the test object according to the spraying principle during continuous operation of the vacuum pump (16, 18), a gas pressure sensor (24) connected to the vacuum pump (16, 18) and the connector (20) and configured for integral measurement of the total pressure increase at the connector (20) according to the pressure increase method and/or the partial pressure increase of at least one second test gas different from the first test gas at the connector (20) according to the partial pressure increase method, and a blocking device (26) c

Abstract: A time-of-flight mass spectrometer assembly includes a flange with a vacuum chamber facing surface and an environment facing surface. The flange defines an opening that extends between the vacuum chamber facing surface and the environment facing surface. A plurality of stacked components are supported by the vacuum chamber facing surface of the flange. A secondary flange is removably secured within the opening of the flange. The secondary flange includes a vacuum chamber facing surface and an environment facing surface. A supported spectrometer component is supported by the vacuum chamber facing surface of the secondary flange such that removal of the secondary flange from the flange acts to remove the supported component from the plurality of stacked components supported by the vacuum chamber facing surface of the flange.

Abstract: Sniffing leak detector including a handheld device with a sniffer tip probe including a sample gas inlet, a reference gas inlet, a gas analyzer, and a switching valve adapted to alternatingly connect the sample gas inlet to the gas analyzer and the reference gas inlet to the gas analyzer in a gas conducting manner, such that either the gas drawn through the sample gas inlet or the gas drawn through the reference gas inlet is analyzed by the gas analyzer, characterized in that the reference gas inlet is arranged in a remote distance from the sniffer tip probe and a reference gas conduit connecting the reference gas inlet and the switching valve includes a buffer chamber adapted to homogeneously mix gas drawn into the buffer chamber through the reference gas inlet with the remaining gas in the buffer chamber.

Abstract: A method for displaying gas concentration values on a graphical display of a leak detector comprises detecting a presence of a gas using a gas sensor. A signal is generated by the gas sensor and transmitted from the gas sensor to a processor. The received signal is processed to determine a gas concentration value and a corresponding time stamp. The gas concentration values and corresponding time stamps are displayed graphically as they are determined and newly determined gas concentration values and corresponding time stamps are displayed in relation to previously determined gas concentration values and time stamps in streaming manner.

Abstract: A sniffer probe for a gas analyzer is provided herein, the sniffer probe designed to suction gas and can be connected to the gas analyzer and includes a sniffer tip with a suction opening, such that gas is suctioned through the suction opening along a central perpendicular to the suction opening, and the sniffer tip has at least one elongate gas-guiding element, which is arranged substantially parallel to the central perpendicular and distally protrudes beyond the suction opening.

Abstract: A method for distinguishing a test gas escaping from a leak in a test object (21) from an interfering gas in the environment of the test object (21) during sniffing leak detection, having the steps: suctioning gas from the environment of the test object (21) in the region of the outer surface of the test object by means of a sniffing tip, which has a suction opening (14), which is connected, for gas conduction, to a sensor (18), which is designed to determine the test gas partial pressure of the test gas in the suctioned gas flow; varying, with periodic repetition, the flow intensity of the suctioned gas flow; setting a total pressure of the suctioned gas at the sensor (18) of at least 80 percent of the total pressure of the gas in the atmosphere (23) surrounding the test object (21); avoiding fluctuations of the total pressure of the suctioned gas at the sensor (18) of more than 10 percent; measuring the test gas partial pressure of test gas contained in the suctioned gas flow by means of the sensor (18); in