Patents Assigned to Inficon
  • Patent number: 10247637
    Abstract: Leak detection device for measuring the differential pressure between a test chamber (10) and a reference chamber, which can be separated from the test chamber (10) gas-tight by a first check valve (24), wherein a differential pressure sensor (34) is connected to the reference chamber and to the test chamber (10) in order to measure the differential pressure between the internal pressure of the reference chamber and the internal pressure of the test chamber (10), characterized in that the test chamber (10) and the reference chamber each have at least one wall region formed from a flexible film, wherein the ratio of the test chamber volume (20) to the surface area of the flexible wall region of the test chamber (10) adjacent to the test chamber volume (20) and the ratio of the reference chamber volume to the surface area of the flexible wall region of the reference chamber adjacent to the reference chamber volume are substantially equal.
    Type: Grant
    Filed: June 9, 2015
    Date of Patent: April 2, 2019
    Assignee: INFICON GmbH
    Inventors: Daniel Wetzig, Silvio Decker
  • Patent number: 10190932
    Abstract: The present invention relates to a method for preventing gases and fluids to penetrate a surface of an object, comprising the steps of: depositing (S1) an amorphous metal (5) on a surface of an object (4); forming (S2) a continuous layer of the amorphous metal (5) on the surface of the object (4); binding (S3) the amorphous metal (5) to the surface of the object by chemical binding; and passivation (S4) of a surface of the amorphous metal (5) facing away from the surface of the object (4).
    Type: Grant
    Filed: October 28, 2013
    Date of Patent: January 29, 2019
    Assignee: INFICON GMBH
    Inventors: Per Bjorkman, Bjorgvin Hjorvarsson
  • Patent number: 10175198
    Abstract: A system and method for chemical analysis are described herein. The system includes a probe, a sample collection cartridge, and a chemical analyzer. The probe is configured to collect the optimal amount of sample for a future analysis and to store this chemical sample in the sample collection cartridge. The probe also collects sample data. The chemical analyzer is configured to determine the optimal analysis settings based on the sample data and analyze the chemical sample stored in the sample collection cartridge based on the optimal analysis settings.
    Type: Grant
    Filed: February 16, 2017
    Date of Patent: January 8, 2019
    Assignee: Inficon, Inc.
    Inventors: Shawn Michael Briglin, Katherine Abigail Bartholomew
  • Publication number: 20180328809
    Abstract: A device for measuring the pressure at the test gas inlet of a mass-spectrometric leak detector, wherein a mass spectrometer is connected to the inlet of a high vacuum pump having its outlet connected to the inlet of a pre-vacuum pump, wherein the inlet of the pre-vacuum pump is connected to the test gas inlet and wherein the inlet of the pre-vacuum pump and at least one intermediate inlet of the high vacuum pump are connected to each other by a connection line comprising a flow throttle.
    Type: Application
    Filed: November 10, 2016
    Publication date: November 15, 2018
    Applicant: INFICON GmbH
    Inventors: Hjalmar Bruhns, Ludolf Gerdau, Norbert Moser, Günter Schmitz, Daniel Wetzig
  • Patent number: 10119883
    Abstract: An evacuable flexible test chamber (10) for a leakage test of a test piece, having a wall (12) surrounding a test chamber volume (36), is characterized in that at least a portion of said wall is made up of two layers (18, 20) of wall material of which at least the layer (20) facing said test chamber volume (36) is made from a flexible material, and that between said two layers (18, 20) an overpressure as compared to the atmosphere surrounding said test chamber (10) is adapted to be created.
    Type: Grant
    Filed: March 12, 2015
    Date of Patent: November 6, 2018
    Assignee: INFICON GmbH
    Inventors: Hendrik van Triest, Silvio Decker
  • Patent number: 10107703
    Abstract: A pressure step is applied to the interior of a compartment. A sensor which measures the pressure within compartment, in response of the prevailing pressure level, and the transient step response oscillation frequency is used to identify the gas or gas mixture present in the compartment.
    Type: Grant
    Filed: September 9, 2013
    Date of Patent: October 23, 2018
    Assignee: INFICON GMBH
    Inventors: Christian Berg, Martin Wüest
  • Patent number: 10101237
    Abstract: A test leak device for calibrating or testing leak detection apparatuses, said test leak device having a pressurized gas container that has an inlet for filing in a test gas and a leak that has a predefined leak rate. The test leak device has an integrated pressure sensor that monitors the pressure in the pressurized gas container and is designed for the wireless transmission of the measured pressure values to a receiver.
    Type: Grant
    Filed: July 30, 2014
    Date of Patent: October 16, 2018
    Assignee: INFICON GmbH
    Inventor: Silvio Decker
  • Patent number: 10082436
    Abstract: Method for processing a measurement signal (x) from a pressure measurement cell in order to generate an output signal (y) with the aid of a filter unit (10), wherein the method involves generating the output signal (y) with the aid of the filter unit (10) by at least reducing, preferably eliminating, a noise signal contained in the measurement signal (x), continuously determining a difference between the measurement signal (x) and the output signal (y), and changing a characteristic of the filter unit (10) as soon as the difference becomes greater than a threshold value, wherein the changed characteristic of the filter unit (10) remains as long as the difference becomes smaller than the threshold value, and wherein the changing of the filter characteristic involves decreasing the reduction in the noise signal present in the measurement signal (x).
    Type: Grant
    Filed: November 14, 2013
    Date of Patent: September 25, 2018
    Assignee: INFICON GMBH
    Inventor: Felix Mullis
  • Publication number: 20180252613
    Abstract: Method for detecting a leak in a specimen contained in a test chamber, the method comprising the following steps: positioning the specimen in the test chamber, evacuating the test chamber, measuring the partial pressure in the test chamber as a measuring signal M during the evacuation of the test chamber, forming a difference D from the progress of the signal M(t) over time t and a fitting function F(t) including the term t?n, where n is a positive rational number, and judging the presence of a leak in the specimen based on the differential signal D.
    Type: Application
    Filed: September 12, 2016
    Publication date: September 6, 2018
    Applicant: INFICON GMBH
    Inventors: Jochen Puchalla-König, Ludolf Gerdau
  • Patent number: 10047437
    Abstract: Systems for a managing a chemical process and photoionization detectors for analyzing a process gas are presented. In one aspect, the system includes a process gas source in fluid communication with the process chamber and a photoionization detector. The photoionization detector is configured to analyze the process gas. The photoionization detector includes a heat resistant coupling for connection to the system, a gas sample chamber with the radiation window soldered or brazed to a wall of the gas sample chamber, and a radiation source configured to emit radiation through the radiation window and into the gas sample chamber to analyze the process gas. In another aspect, the photoionization detector includes a removable coupling, a gas sample chamber, and a radiation source. The removable coupling is for connection to the process gas handling system and includes a metal gasket and metal flanges.
    Type: Grant
    Filed: June 14, 2016
    Date of Patent: August 14, 2018
    Assignee: INFICON, INC.
    Inventors: Michael F. Vollero, Shawn M. Briglin
  • Patent number: 10031075
    Abstract: A device for identifying refrigerants includes a gas cell, which has a test gas inlet and a test gas outlet, an infrared source that radiates through the gas cell, and at least one sensor that detects the infrared radiation that passes through the gas cell. At least one wide-band filter is provided between the infrared source and the sensor. The passband of the at least one wide-band filter includes the absorption spectra of the refrigerants to be detected and does not include the absorption spectrum of hydrocarbons. The gas cell is connected to a cartridge, which contains the refrigerant to be detected in pure form as a reference gas.
    Type: Grant
    Filed: August 24, 2012
    Date of Patent: July 24, 2018
    Assignee: Inficon GmbH
    Inventors: Gerhard Kuester, Werner Grosse Bley
  • Publication number: 20180172538
    Abstract: A sensor unit including a measuring cell with a section-wise heat-conducting surface, a housing in which the measuring cell for the most part is contained, and an access channel to the measuring cell. The sensor unit includes a cavity that is confined for the most part by an outer surface of the measuring cell and by a wall of the housing facing towards the surface of the measuring cell. The cavity is closed in itself.
    Type: Application
    Filed: February 13, 2018
    Publication date: June 21, 2018
    Applicant: INFICON GMBH
    Inventors: Hansjakob HANSELMANN-WILLI, Francesco SCUDERI
  • Patent number: 9983085
    Abstract: Vacuum pressure of a gas in a compartment (1) is measured. The vacuum pressure is established by a pump arrangement (3,5) with a pulsating pumping effect (g(t)). The shape of the resulting pulsation of the pressure (p(t)) in compartment (1) is exploited (15) as an indication of the operation status of the pump arrangement (3,5).
    Type: Grant
    Filed: September 9, 2013
    Date of Patent: May 29, 2018
    Assignee: INFICON GMBH
    Inventors: Martin Wüest, Christian Berg
  • Patent number: 9945749
    Abstract: An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by a releasable plug connection (106).
    Type: Grant
    Filed: July 9, 2013
    Date of Patent: April 17, 2018
    Assignee: INFICON GMBH
    Inventors: Bernhard Andreaus, Rolf Enderes, Martin Wuest, Oskar Untermarzoner, Rudolf Stocker
  • Patent number: 9933325
    Abstract: Test leak device including a gas-filled container and a capillary extending through a container wall. The gas including at least 10% of atmospheric air.
    Type: Grant
    Filed: August 13, 2014
    Date of Patent: April 3, 2018
    Assignee: Inficon GmbH
    Inventor: Rudi Widt
  • Patent number: 9927315
    Abstract: A sensor unit including a measuring cell with a section-wise heat-conducting surface, a housing in which the measuring cell for the most part is contained, and an access channel to the measuring cell. The sensor unit includes a cavity that is confined for the most part by an outer surface of the measuring cell and by a wall of the housing facing towards the surface of the measuring cell. The cavity is closed in itself.
    Type: Grant
    Filed: July 5, 2013
    Date of Patent: March 27, 2018
    Assignee: INFICON GMBH
    Inventors: Hansjakob Hanselmann-Willi, Francesco Scuderi
  • Patent number: 9927321
    Abstract: The invention relates to a method for determining the rate of leakage on a non-rigid specimen, wherein the specimen is introduced to a film chamber which can be evacuated, having at least one wall region made of a flexible material and the pressure in the film chamber is reduced outside of the specimen. The pressure gradient within the film chamber outside of the specimen is measured. In order to increase the accuracy of the leak detection, an outer over-pressure is exerted on the flexible wall region during pressure measurement which exceeds the pressure in the film chamber and outside of the specimen and the pressure inside the specimen.
    Type: Grant
    Filed: September 26, 2013
    Date of Patent: March 27, 2018
    Assignee: INFICON GmbH
    Inventor: Silvio Decker
  • Patent number: 9810597
    Abstract: A sniffer leak detector includes a mass spectrometer for analyzing hydrogen or helium, a turbomolecular pump which is connected with said mass spectrometer and whose outlet is connected with a prevacuum pump, and a sniffer probe which includes a plurality of intake lines and is connected with said inlet of said turbomolecular pump, wherein a vacuum pump includes at least three stages whose inlet stage defines said prevacuum pump and is connected with said outlet of said turbomolecular pump via a blocked throttle, wherein, between adjacent stages of said vacuum pump, an intermediate inlet each is provided, wherein each intermediate inlet is connected with a different intake line of said sniffer probe and at least one of the intake lines as a suction line is connected with said inlet of said turbomolecular pump for obtaining different gas flows.
    Type: Grant
    Filed: September 2, 2014
    Date of Patent: November 7, 2017
    Assignee: Inficon GmbH
    Inventors: Heike Hilgers, Hjalmar Bruhns, Daniel Wetzig, Norbert Rolff
  • Patent number: 9791339
    Abstract: Arrangement with capacitive pressure-measuring cell has a diaphragm for measuring vacuum pressure and a printed circuit board acting as a temperature sensor and another electronic component designed as a microchip that contains a digital signal processor with a temperature-to-digital converter and a capacitance-to-digital converter using a time measuring method. The converters determine temperature and capacitance of the cell in comparison to a reference resistor for temperature arranged on the printed circuit board and reference capacitor for capacitance for the pressure to be measured dependent on deformation of the diaphragm. A temperature-corrected pressure signal derived from the two measured signals uses correlation, the measured signals having been determined in advance from a calibration process, and the temperature-corrected pressure signal is provided as a pressure signal at the signal output for further processing. In this manner there is quick pressure measurement with high measuring accuracy.
    Type: Grant
    Filed: November 20, 2013
    Date of Patent: October 17, 2017
    Assignee: INFICON AG
    Inventors: Felix Mullis, Martin Wuest
  • Publication number: 20170292894
    Abstract: A method for calibrating a test chamber, which encloses an interior volume (20), is designed as a film chamber (12) comprising at least one flexible wall region (14, 16), and is connected in a gas-conducting way to a pressure sensor (30), to a vacuum pump (26), and via a calibration valve (34) to a calibration chamber (36) enclosing a calibration volume (37), comprising the following steps: evacuating the film chamber (12); measuring the pressure difference inside of the film chamber (12); after the evacuation has been completed, connecting the calibration volume (37) in a gas-conducting manner to the interior volume (20) of the film chamber (12) while measuring the pressure change, wherein the pressure in the calibration chamber (36) is greater than the pressure in the film chamber (12) before the connection to the film chamber (12). A corresponding device is likewise disclosed.
    Type: Application
    Filed: September 22, 2015
    Publication date: October 12, 2017
    Applicant: INFICON GmbH
    Inventor: Silvio Decker