Patents Assigned to Inficon
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Publication number: 20150241298Abstract: The invention relates to a method for determining the rate of leakage on a non-rigid specimen, wherein the specimen is introduced to a film chamber which can be evacuated, having at least one wall region made of a flexible material and the pressure in the film chamber is reduced outside of the specimen. The pressure gradient within the film chamber outside of the specimen is measured. In order to increase the accuracy of the leak detection, an outer over-pressure is exerted on the flexible wall region during pressure measurement which exceeds the pressure in the film chamber and outside of the specimen and the pressure inside the specimen.Type: ApplicationFiled: September 26, 2013Publication date: August 27, 2015Applicant: Inficon GmbhInventor: Silvio Decker
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Patent number: 9116065Abstract: An ionization vacuum measuring cell has: a) an evacuatable housing (10) with a measuring connection (8) for the vacuum to be measured, b) a first outer and a second inner electrode (3, 4) which are coaxially arranged in an interspaced manner with a common axis (7), whereby a measuring chamber (20) is formed between the two electrodes, the measuring chamber communicating with the measuring connection (8), c) a voltage source (16) which is connected to the electrodes (3, 4), d) a current measuring mechanism (17) for analyzing a discharge current generated between the electrodes (3, 4), and e) at least one permanent magnet ring (1) which surrounds the coaxial electrode (3, 4) arrangement, has a magnetizing direction (13) directed radially to the axis, and has a soft-magnetic yoke (2) that surrounds the permanent magnet ring (1).Type: GrantFiled: August 2, 2012Date of Patent: August 25, 2015Assignee: INFICON GMBHInventor: Bernhard Andreaus
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Patent number: 8956696Abstract: A method for forming an ultra-thin membrane for use in a chemical analyzer such as a mass spectrometer includes the step of applying a sacrificial blocking layer onto a porous substrate, applying a semi-permeable membrane layer onto the sacrificial blocking layer, and removing the sacrificial blocking layer following cure of the membrane layer. In a preferred version, at least one of the blocking layer and the membrane layer are applied to the porous support by means of spin coating, though other deposition techniques can be employed.Type: GrantFiled: February 10, 2011Date of Patent: February 17, 2015Assignee: INFICON GmbHInventors: Katherine A. Wolcott, Shawn M. Briglin
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Publication number: 20150014523Abstract: A fast method for determining molecular mass using mass spectrometry has the following steps: specifying a first adjusting value (M1) of the mass spectrometer, recording the associated signal amplitude (A1), specifying a second adjusting value (M2) which is different to the first, measuring the associated second signal amplitude (A2), specifying a third adjusting value (M3) which is different to the first (M1) and the second (M2) adjusting value, measuring the associated third signal amplitude (A3), determining a quadratic function containing the measured amplitude values as y-values and the specified adjusting values as x-values, determining the maximum of the quadratic function, wherein the searched adjusting value is determined from the x-value of the maximum.Type: ApplicationFiled: February 28, 2013Publication date: January 15, 2015Applicant: Inficon GmbHInventor: Norbert Rolff
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Patent number: 8916822Abstract: A detector in a residual gas analyzer (RGA) is configured to receive ions traveling in a downstream direction along a beamline and includes a steering electrode offset from the beamline. A first ion-receiving electrode is at least partly on the opposite side of the steering electrode from the beamline. A second ion-receiving electrode is at least partly offset from the beamline, at least partly across the beamline from at least a portion of the steering electrode, and at least partially upstream of at least a portion of the steering electrode. A shielding electrode is arranged at least partly between the beamline and the second ion-receiving electrode. A source applies a potential to the shielding electrode. A residual gas analyzer (RGA) includes an ion source, an analyzer, and such a detector.Type: GrantFiled: December 19, 2013Date of Patent: December 23, 2014Assignee: Inficon, Inc.Inventors: Kenneth Charles Wright, John James DeSantis
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Patent number: 8915122Abstract: The invention relates to a sniffing leak detector comprising a sniffing line (11) and a feed line (33) that leads to a vacuum pump (16). A distribution point (24) from which a branch line (25) leads to a test gas sensor (15) is provided on the feed line (33). In order for the intermediate pressure (P2) at the distribution point (24) to be independent of feed fluctuations of the vacuum pump (16), a throttle (D2) comprising a supercritically operated orifice (20) is provided between the distribution point (24) and the vacuum pump (16). The pressure drop at the orifice (20) is greater than half the intermediate pressure (P2) at the distribution point (24). The flow at the orifice (20) is thus blocked, wherein the flow (Q) remains constant regardless of changes of the pump pressure (P3). Changes of the intermediate pressure (P2) are thus prevented so that the sensitivity and signal stability of the test gas sensor (15) is unaffected by changes of the pump pressure.Type: GrantFiled: February 5, 2010Date of Patent: December 23, 2014Assignee: Inficon GmbHInventor: Daniel Wetzig
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Publication number: 20140361173Abstract: A device for identifying refrigerants includes a gas cell, which has a test gas inlet and a test gas outlet, an infrared source that radiates through the gas cell, and at least one sensor that detects the infrared radiation that passes through the gas cell. At least one wide-band filter is provided between the infrared source and the sensor. The passband of the at least one wide-band filter includes the absorption spectra of the refrigerants to be detected and does not include the absorption spectrum of hydrocarbons. The gas cell is connected to a cartridge, which contains the refrigerant to be detected in pure form as a reference gas.Type: ApplicationFiled: August 24, 2012Publication date: December 11, 2014Applicant: INFICON GMBHInventors: Gerhard Kuester, Werner Grosse Bley
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Patent number: 8899099Abstract: In order to determine leakage on a device, which contains gas that can be condensed, an adsorbent is used through which ambient gas of the object is conducted. The adsorbed gas is desorbed by means of actuating an excitation device and fed to a gas sensor containing a mass spectrometer. In this way, minute amounts of leaking gas can be determined by means of accumulation. The method is in particular suited for use in the serial production of refrigeration machines.Type: GrantFiled: October 22, 2010Date of Patent: December 2, 2014Assignee: Inficon GmbHInventors: Werner Grosse Bley, Gerhard Küster
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Patent number: 8893543Abstract: A leak detection method using a specimen filled with a test gas positioned in front of a suction opening. Air is suctioned along the entire surface of the specimen and takes up test gas in the case of a leak. The test gas is recognized by a test gas detector. According to the invention, full mobility of the specimen is ensured during the testing process so that the leak detection method can be carried out while the specimens are moving past the suction opening.Type: GrantFiled: December 15, 2009Date of Patent: November 25, 2014Assignee: Inficon GmbHInventors: Martin Bohn, Norbert Rolff, Jochen Puchalla, Michael Dauenhauer
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Publication number: 20140340098Abstract: A combination retainer and electrical contact mechanism for a deposition monitor sensor includes a sensor body and a removable flexible electrical contact spanning between a fixed electrical (contact) element in the sensor's body and one face of an associated monitor crystal. A retainer insulates or insures electrical isolation of the spanning electrical contact from unwanted contact to electrically grounded components in which at least one of the retainer and crystal holder include features that maintain the electrical contact with the retainer in order to provide a single mechanism.Type: ApplicationFiled: May 17, 2013Publication date: November 20, 2014Applicant: Inficon, Inc.Inventor: Carl A. Gogol, JR.
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Patent number: 8881576Abstract: The leak detection device comprises a plurality of measuring cells (10) in whose interior the absorption of a laser beam (17) is influenced by the presence of tracer gas. All of said measuring cells (10) are connected to a host unit (25) via light-conducting fibers (28,34). In the host unit (25), a laser (26) designed for modulation and a photodetector (37) are arranged. Modulation of the laser radiation is preferably performed by two-tone frequency modulation. This has the effect that the fiber length cannot significantly skew the result of the measurement.Type: GrantFiled: April 9, 2010Date of Patent: November 11, 2014Assignee: Inficon GmbHInventors: Vladimir Schwartz, Boris Chernobrod
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Patent number: 8850866Abstract: In order to functionally test a leak detector (20) that comprises a partial pressure sensor (21), a testing device (30) having a variable volume (33) is connected to the leak detector. Said testing device can be a syringe. By changing the volume (33), the partial pressure of the test gas contained in the ambient air is changed. A test is carried out to check whether the leak detector (20) indicates the change. According to the invention, a vacuum pumping device having mechanical vacuum pumps is not required. The method is suitable for testing vacuum systems that contain a vacuum pumping device that is used in the leak test to generate a required vacuum. The service technician can perform the functional test of the leak detector (20) separately from the system and the vacuum pumping device.Type: GrantFiled: February 10, 2010Date of Patent: October 7, 2014Assignee: Inficon GmbHInventor: Randolf Rolff
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Publication number: 20140176150Abstract: An ionization vacuum measuring cell has: a) an evacuatable housing (10) with a measuring connection (8) for the vacuum to be measured, b) a first outer and a second inner electrode (3, 4) which are coaxially arranged in an interspaced manner with a common axis (7), whereby a measuring chamber (20) is formed between the two electrodes, the measuring chamber communicating with the measuring connection (8), c) a voltage source (16) which is connected to the electrodes (3, 4), d) a current measuring mechanism (17) for analyzing a discharge current generated between the electrodes (3, 4), and e) at least one permanent magnet ring (1) which surrounds the coaxial electrode (3, 4) arrangement, has a magnetizing direction (13) directed radially to the axis, and has a soft-magnetic yoke (2) that surrounds the permanent magnet ring (1).Type: ApplicationFiled: August 2, 2012Publication date: June 26, 2014Applicant: INFICON GmbHInventor: Bernhard Andreaus
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Patent number: 8756978Abstract: A leak detector comprises a cell provided with a tracer gas inlet preferably permeable to a tracer gas. In the cell, the tracer gas is caused to assume an energetically higher metastable state. By means of laser spectroscopy the absorption spectrum of the metastable tracer gas is sampled in an optical measuring section, whereby the presence of tracer gas is detected.Type: GrantFiled: April 9, 2010Date of Patent: June 24, 2014Assignee: Inficon GmbHInventors: Vladimir Schwartz, Daniel Wetzig, Boris Chernobrod
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Publication number: 20140166878Abstract: A detector in a residual gas analyzer (RGA) is configured to receive ions traveling in a downstream direction along a beamline and includes a steering electrode offset from the beamline. A first ion-receiving electrode is at least partly on the opposite side of the steering electrode from the beamline. A second ion-receiving electrode is at least partly offset from the beamline, at least partly across the beamline from at least a portion of the steering electrode, and at least partially upstream of at least a portion of the steering electrode. A shielding electrode is arranged at least partly between the beamline and the second ion-receiving electrode. A source applies a potential to the shielding electrode. A residual gas analyzer (RGA) includes an ion source, an analyzer, and such a detector.Type: ApplicationFiled: December 19, 2013Publication date: June 19, 2014Applicant: Inficon Inc.Inventors: Kenneth Charles Wright, John James DeSantis
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Patent number: 8752412Abstract: A sniffing leak detector which comprises a first suction line in a sniffing probe, the line leading to a main device, is provided with a larger second suction line through which gas is sucked in from the sniffing tip by a gas delivery pump. By connecting the second suction line, the distance sensitivity is increased. By disconnecting the second suction line, on the other hand, the sensitivity is increased. Thus, it is possible to first search for leaks by use of a high gas throughput and subsequently exactly determine the leaks under the quantitative aspect by use of a reduced flow.Type: GrantFiled: September 1, 2008Date of Patent: June 17, 2014Assignee: Inficon GmbHInventors: Daniel Wetzig, Stefan Mebus, Norbert Rolff
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Publication number: 20140157863Abstract: A method of measuring an atmosphere in a guest vacuum chamber of a vacuum tool includes measuring a first composition of the atmosphere in the host vacuum chamber using a residual gas analyzer (RGA). The host and guest vacuum chambers are not coupled during the measuring of the first composition. The host vacuum chamber is coupled to the guest vacuum chamber, so the atmospheres in each can mix in the host vacuum chamber. A second composition of the atmosphere in the host vacuum chamber is measured using the RGA after the chambers are coupled. Using a processor, a composition of the guest atmosphere is automatically determined using the measured first and second compositions. A vacuum tool can include the host and guest chambers, the valve, the RGA, and a processor configured to control the valve to carry out this or other methods.Type: ApplicationFiled: December 4, 2013Publication date: June 12, 2014Applicant: INFICON, Inc.Inventor: Chenglong Yang
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Patent number: 8740582Abstract: For refrigeration units, maintenance machines are required that can receive and compress the refrigerant from the refrigeration unit. Furthermore, a vacuum pump is required, which is connected to the emptied lines and pumps out humidity and air. The maintenance machine according to the invention includes a motor that drives a compressor via a freewheel in one rotational direction. The same motor drives a vacuum pump via a second freewheel in the other rotational direction. The maintenance machine, which can perform two different functions, includes only one single motor. The machine is lightweight, so that it can be carried by the maintenance personnel. Furthermore, it is small and can be produced in a cost-effective manner.Type: GrantFiled: May 27, 2010Date of Patent: June 3, 2014Assignee: Inficon GmbHInventor: Gerd H. Rabe
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Publication number: 20140096595Abstract: A method for tightness testing, wherein an evacuated test object is exposed to the external influence of a test gas and wherein a gas mixture made of a test gas withdrawn from the test object and of a carrier gas, is examined for the presence of test gas by use of a test gas sensor which, when viewed in the flow direction of the gas mixture, is arranged downstream of a condensing pump for analyzing the compressed gas mixture, wherein the test object is exposed to the ambient atmosphere without being surrounded by a test chamber, and that a test gas gun is provided for generating the atmosphere containing the test gas.Type: ApplicationFiled: October 2, 2013Publication date: April 10, 2014Applicant: Inficon GmbHInventor: Daniel Wetzig
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Patent number: 8689611Abstract: A system for detection of a leak at a leakage testing point of a test object by a tracer gas. A positionable tracer gas mediating unit has a tip. A marker is attachable at the leakage testing point. A marker detector is associated with the positionable tracer gas mediating unit. The tip of the tracer gas mediating unit is arranged to be positioned within a predetermined distance interval from the marker during a leak detection test. The marker detector is arranged to detect the marker when the tip is positioned within the predetermined distance interval so as to certify a correct positioning of the tip.Type: GrantFiled: October 15, 2007Date of Patent: April 8, 2014Assignee: Inficon ABInventor: Fredrik Enquist