Abstract: A method for testing the sealing tightness of a specimen, containing a gas, in a film chamber made from flexible material. The film chamber is evacuated by a vacuum pump and the gas flow flowing out of the film chamber and generated by the vacuum pump is measured during the evacuation and is examined with respect to a possible leak of the specimen.

Abstract: A double-acting refrigerant compressor includes a piston freely guided on two cylinder portions arranged opposite to each other and being immobile relative to each other. The piston includes a flow channel extending internally through the piston. Each cylinder portion and the piston include, along the flow channel, respectively at least one back-check valve. The back-check valves are arranged in such a manner that their flow directions are unidirectional.

Abstract: A method for performing a leak-tightness test on a test object (16) in a foil chamber (10) which has at least one flexible wall region (12, 14), having the steps: using a gas or gas constituent contained in the test object as test gas for the leak-tightness test, introducing the test object into the foil chamber, evacuating the foil chamber to a pressure lower than the test gas pressure within the test object and than atmospheric pressure, introducing a carrier gas into the foil chamber into the region outside the test object, and measuring the test gas concentration of the gas mixture that forms in the foil chamber in the region outside the test object.

Abstract: A method for testing a leak detector by using a leak detection device having a test leak and which is provided with a cavity that can be filled with gas, including the following steps: a) filling the cavity with ambient air up to an interior pressure in the interior of cavity that corresponds to ambient atmospheric pressure, b) establishing an exterior pressure in the area surrounding the leak detection device that is lower than the interior pressure, c) measuring the leakage rate of the air flowing through the test leak from the interior to the exterior of the leak detection device, and d) establishing an atmosphere consisting of ambient air with ambient atmospheric pressure as exterior pressure in the area surrounding the leak detection device.

Abstract: A method of measuring an atmosphere in a guest vacuum chamber of a vacuum tool includes measuring a first composition of the atmosphere in the host vacuum chamber using a residual gas analyzer (RGA). The host and guest vacuum chambers are not coupled during the measuring of the first composition. The host vacuum chamber is coupled to the guest vacuum chamber, so the atmospheres in each can mix in the host vacuum chamber. A second composition of the atmosphere in the host vacuum chamber is measured using the RGA after the chambers are coupled. Using a processor, a composition of the guest atmosphere is automatically determined using the measured first and second compositions. A vacuum tool can include the host and guest chambers, the valve, the RGA, and a processor configured to control the valve to carry out this or other methods.

Abstract: The invention relates to a leak detector comprising a first sensor for detecting a gas component (helium) in a gas taken in. Because the sensor is susceptible to saturation or contamination, a second sensor is provided. The sensor is a thermal conductivity sensor. The thermal conductivity sensor has a lower detection sensitivity, yet, at a high concentration of the gas component, it does not risk being contaminated. The two sensors together allow for a large detection range, from extremely sensitive measurements to instances with high concentrations of the gas components as those which can occur with gross leaks.

Abstract: A testing device includes a test gas container, which is provided with a test leak for producing a test gas flow at a predefined leakage rate. The test leak includes at least one capillary tube, which connects the interior of the test gas container to the outer surroundings of the test gas container in a gas-conducting manner. The test gas container is at least partially made of a flexible material.

Abstract: A simplified device for voltage supply of the cathode of a mass spectrometer comprises a push-pull transformer, wherein, apart from the normal rectifier diodes (7, 9), a controlled rectifier (8, 10) is provided. The gate of the first transistor (8) is connected to the second output (30), and the gate of the second transistor (10) is connected to the first output (32) of the transformer. A voltage supply device, consisting of at least one voltage multiplier, is connected via capacitors (13, 14, 15) to the output of the transformer and feeds, amongst others, the emission current measurement device.

Abstract: A combination retainer and electrical contact mechanism for a deposition monitor sensor includes a sensor body and a removable flexible electrical contact spanning between a fixed electrical (contact) element in the sensor's body and one face of an associated monitor crystal. A retainer insulates or insures electrical isolation of the spanning electrical contact from unwanted contact to electrically grounded components in which at least one of the retainer and crystal holder include features that maintain the electrical contact with the retainer in order to provide a single mechanism.

Abstract: Vacuum pressure of a gas in a compartment (1) is measured. The vacuum pressure is established by a pump arrangement (3,5) with a pulsating pumping effect (g(t)). The shape of the resulting pulsation of the pressure (p(t)) in compartment (1) is exploited (15) as an indication of the operation status of the pump arrangement (3,5).

Abstract: The invention relates to a leak detector comprising a first sensor for detecting a gas component (helium) in a gas taken in. Because the sensor is susceptible to saturation or contamination, a second sensor is provided. The sensor is a thermal conductivity sensor. The thermal conductivity sensor has a lower detection sensitivity, yet, at a high concentration of the gas component, it does not risk being contaminated. The two sensors together allow for a large detection range, from extremely sensitive measurements to instances with high concentrations of the gas components as those which can occur with gross leaks.

Abstract: A sensor unit including a measuring cell with a section-wise heat-conducting surface, a housing in which the measuring cell for the most part is contained, and an access channel to the measuring cell. The sensor unit includes a cavity that is confined for the most part by an outer surface of the measuring cell and by a wall of the housing facing towards the surface of the measuring cell. The cavity is closed in itself.

Abstract: The leak detection appliance has a test inlet to which a test chamber containing the test specimen can be connected. A high-vacuum pump produces a high vacuum in a test gas detector. A backing pump contains two pump stages. In order to evacuate the test chamber, the pump stages are operated in parallel mode, with their suction capabilities being added. When the necessary vacuum has been achieved, the pump stages are operated in series in order to produce the necessary high vacuum which is required for high detection sensitivity on the test gas detector.

Abstract: The present invention relates to gas sensor housing (1), comprising: a gas sensor (3) held by a housing body (11) below a primary gas permeable membrane (2); at least one connector element (10) molded into the housing body (11) such that the respective ends thereof enable connectivity to the gas sensor (3) such that signals may be carried from the gas sensor (3) to the connector element (10); a sensor envelope (9) providing an enclosure for the housing body (11); means for retaining the primary gas permeable membrane (2) in place above the gas sensor (3); a spacer section (7) providing a separation distance (X) between the gas sensor (3) and the primary gas permeable membrane (2).

Abstract: An ionization vacuum measuring cell comprises an anode (3A) and a cathode (4K) in a measuring chamber (107). The measuring chamber (107) is arranged in a housing (101) which has a vacuum-tight feedthrough (103) for a connection rod (104) of the cathode (4K) towards the outside. The measuring chamber (107) holds the rod (104) in a feedthrough (109) which is electrically insulating only. The measuring chamber (107) in the housing (101) can be exchanged by a releasable plug connection (106).

Abstract: A sound velocity sensor is defined by a hermetic multi-chambered enclosure for containing flowing gases and mixtures of gases. The contained flowing gases are acoustically excited and the acoustic energy is measured over a fixed distance between a first sending end of the enclosure and a receiving end. The speed of sound of the gases are determined by comparing the energy transmitted through the flowing gases at various frequencies so as to precisely determine the resonant frequency of the gases flowing through the enclosure. In accordance with the present design, the chambers of the enclosure include internal transition shapes therebetween for optimizing the transmission of acoustic energy through the flowing gases and also enhancing one or more additional resonant modes at higher useful frequencies. The transition shapes used in connection with the sensor can be at least one of parabolic, hyperbolic, linear and exponential in nature.

Abstract: Arrangement with capacitive pressure-measuring cell has a diaphragm for measuring vacuum pressure and a printed circuit board acting as a temperature sensor and another electronic component designed as a microchip that contains a digital signal processor with a temperature-to-digital converter and a capacitance-to-digital converter using a time measuring method. The converters determine temperature and capacitance of the cell in comparison to a reference resistor for temperature arranged on the printed circuit board and reference capacitor for capacitance for the pressure to be measured dependent on deformation of the diaphragm. A temperature-corrected pressure signal derived from the two measured signals uses correlation, the measured signals having been determined in advance from a calibration process, and the temperature-corrected pressure signal is provided as a pressure signal at the signal output for further processing. In this manner there is quick pressure measurement with high measuring accuracy.

Abstract: The invention relates to the use of an indicator for testing the tightness of water conducting components in a housing which is either mixed into the water or released upon contacting water drops or generated from a generative material upon contact with water. According to the invention, the presence of the indicator in gaseous or vaporous form is detected by a sensor.

Abstract: An apparatus for monitoring and detecting material deposited onto a substrate during a deposition process in a processing chamber includes a storage structure having a primary axis extending between respective first and second ends and an exterior lateral surface between the first and second ends extending about the primary axis. A plurality of monitor crystals are supported by the storage structure at spaced positions along said exterior lateral surface and in which a drive mechanism advances the storage structure rotatably and axially relative to the primary axis such that at least one monitor crystal is advanced or retracted relative to at least one measuring position. A retained crystal that is advanced to the measuring position can be electrically connected, using a brush contact or other mechanism, in order to excite the crystal using a resonance circuit.

Abstract: A fast method for determining molecular mass using mass spectrometry has the following steps: specifying a first adjusting value (M1) of the mass spectrometer, recording the associated signal amplitude (A1), specifying a second adjusting value (M2) which is different to the first, measuring the associated second signal amplitude (A2), specifying a third adjusting value (M3) which is different to the first (M1) and the second (M2) adjusting value, measuring the associated third signal amplitude (A3), determining a quadratic function containing the measured amplitude values as y-values and the specified adjusting values as x-values, determining the maximum of the quadratic function, wherein the searched adjusting value is determined from the x-value of the maximum.