Abstract: A method for manufacturing a semiconductor device is provided. The method may include: forming a first material layer and a second material layer on a substrate; forming an auxiliary layer on the second material layer; forming, in the auxiliary layer, openings corresponding to gate structures to be formed; forming a third material layer to cover the auxiliary layer; forming, on the third material layer, a mask layer corresponding to at least one of the gate structures; patterning the third material layer to remove its lateral extending portions, with the mask layer present thereon; removing the auxiliary layer; patterning the second material layer with the patterned third material layer a mask, such that the gate structures, for which different gate lengths can be defined, are formed.

Abstract: Provided is a method for manufacturing a MOSFET, including: forming a shallow trench isolation (STI) in a semiconductor substrate to define an active region for the MOSFET; performing etching with the STI as a mask, to expose a surface of the semiconductor substrate, and to protrude a portion of the STI with respect to the surface of the semiconductor substrate, resulting in a protruding portion; forming a first spacer on sidewalls of the protruding portion; forming a gate stack on the semiconductor substrate; forming a second spacer surrounding the gate stack; forming openings in the semiconductor substrate with the STI, the gate stack, the first spacer and the second spacer as a mask; epitaxially growing a semiconductor layer with a bottom surface and sidewalls of each of the openings as a growth seed layer; and performing ion implantation into the semiconductor layer to form source and drain regions.

Abstract: Provided is a method for manufacturing a fin structure. The method may include forming an initial fin on a substrate, forming a dielectric layer on the substrate to cover the initial fin, planarizing the dielectric layer by sputtering, and further etching the dielectric layer back to expose a portion of the initial fin, wherein the exposed portion serves as a fin.

Abstract: There is provided a method of manufacturing a Fin Field Effect Transistor (FinFET). The method may include: forming a fin on a semiconductor substrate; forming a dummy device including a dummy gate on the fin; forming an interlayer dielectric layer to cover regions except for the dummy gate; removing the dummy gate to form an opening; implanting ions to form a Punch-Through-Stop Layer (PTSL) in a portion of the fin directly under the opening, while forming reflection doped layers in portions of the fin on inner sides of source/drain regions; and forming a replacement gate in the opening.

Abstract: A MOSFET structure and a method for manufacturing the same are disclosed. The method comprises: a. providing a substrate (100); b. forming a silicon germanium channel layer (101), a dummy gate structure (200) and a sacrificial spacer (102); c. removing the silicon germanium channel layer and portions of the substrate which are not covered by the dummy gate structure (200) and located under both sides of the dummy gate structure 200, so as to form vacancies (201); d. selectively epitaxially growing a first semiconductor layer (300) on the semiconductor structure to fill bottom and sidewalls of the vacancies (201); and e. removing the sacrificial spacer (102) and filling a second semiconductor layer (400) in the vacancies which are not filled by the first semiconductor layer (300). In the semiconductor structure of the present disclosure, carrier mobility in the channel can be increased, negative effects induced by the short channel effects can be suppressed, and device performance can be enhanced.

Abstract: The present invention presents a method for manufacturing a semiconductor device structure as well as the semiconductor device structure. Said method comprises: providing a semiconductor substrate; forming a first insulating layer on the semiconductor substrate; forming a shallow trench isolation embedded in the first insulating layer and the semiconductor substrate; forming a channel region embedded in the semiconductor substrate; and forming a gate stack stripe on the channel region. Said method further comprises, before forming the channel region, performing a source/drain implantation on the semiconductor substrate. By means of forming the source/drain regions in a self-aligned manner before forming the channel region and the gate stack, said method achieves the advantageous effects of the replacement gate process without using a dummy gate, thereby simplifying the process and reducing the cost.

Abstract: A method of fabricating an asymmetric FinFET is provided in the invention, comprising: a. providing a substrate (101); b. forming a fin (102) on the substrate (101), wherein the width of the fin (102) is defined as a second channel thickness; c. forming a shallow trench isolation; d. forming a sacrificial gate stack on the top surface and sidewalls of the channel which is in the middle of the fin, and forming source/drain regions in both ends of the fin; e. depositing an interlayer dielectric layer to cover the sacrificial gate stack and the source/drain regions, planarizing the interlayer dielectric layer to expose sacrificial gate stack; f. removing the sacrificial gate stack to expose the channel; g. forming an etch-stop layer (106) on top of the channel; h. covering a photoresist film (400) on a portion of the semiconductor structure near the source region; i.

Abstract: Planarization processing methods are disclosed. In one aspect, the method includes patterning a material layer and planarizing the patterned material layer by using sputtering. Due to the patterning of the material layer, the loading requirements of nonuniformity on a substrate for sputtering the material layer are reduced, compared with that before the patterning.

Abstract: The present disclosure discloses a MOSFET and a method for manufacturing the same, wherein the MOSFET comprises: an SOI wafer comprising a semiconductor substrate, a buried insulating layer, and a semiconductor layer, the buried insulating layer being disposed on the semiconductor substrate, and the semiconductor layer being disposed on the buried insulating layer; a gate stack disposed on the semiconductor layer; a source region and a drain region embedded in the semiconductor layer and disposed on both sides of the gate stack; and a channel region embedded in the semiconductor layer and sandwiched between the source region and the drain region, wherein the MOSFET further comprises a back gate and a counter doped region, and wherein the back gate is embedded in the semiconductor substrate, the counter doped region is disposed under the channel region and embedded in the back gate, and the back gate has a doping type opposite to that of the counter doped region.

Abstract: The present invention provides a SOI MOS device modeling method. The SOI MOS device is one having a source-drain injection not reaching the bottom. The method comprises: a) establishing an overall model comprising a primary MOS device model simulating an SOI MOS device having the source-drain injection reaching the bottom, a source body PN junction bottom capacitance model simulating a source body PN junction bottom capacitance, and a drain body PN junction bottom capacitance model simulating a drain body PN junction bottom capacitance; and b) extracting parameters respectively for the primary MOS device model, the source body PN junction bottom capacitance model, and the drain body PN junction bottom capacitance model in the overall model. In the prior art, the source body junction bottom capacitance and the drain body junction bottom capacitance in the SOI MOS device having a source-drain injection not reaching the bottom affect the performances of the device.

Abstract: The present invention provides a method for manufacturing a semiconductor device, comprising: forming a contact sacrificial pattern on a substrate to cover source and drain regions and expose a gate region; forming an interlayer dielectric layer on the substrate to cover the contact sacrificial pattern and expose the gate region; forming a gate stack structure in the exposed gate region; removing the contact sacrificial pattern to form the source/drain contact trench; and forming a source/drain contact in the source/drain contact trench. By means of a contact sacrificial layer process, the method of manufacturing a semiconductor device according to the present invention effectively reduces the distance between the gate spacer and the contact region and increases the area of the contact region, thus effectively reducing the parasitic resistance of the device.

Abstract: A vertical channel-type 3D semiconductor memory device and a method for manufacturing the same are disclosed. In one aspect, the method includes depositing alternating insulating and electrode layers on a substrate to form a multi-layer film. The method further includes etching the film to the substrate to form through-holes, each of which defines a channel region. The method further includes depositing barrier, storage, and tunnel layers in sequence on inner walls of through-holes to form gate stacks. The method further includes depositing and incompletely filling a channel material on a surface of the tunnel layer of gate stacks to form a hollow channels. The method further includes forming drains in contact hole regions for bit-line connection in top portions of the hollow channels. The method further includes forming sources in contact regions between the through-holes and the substrate in bottom portions of the hollow channels.

Abstract: The present invention provides a substrate structure, a semiconductor device, and a manufacturing method thereof. The substrate structure comprises: a semiconductor substrate; and a first isolation region, wherein the first isolation region comprises: a first trench extending through the semiconductor substrate; and a first dielectric layer filling the first trench. Due to the isolation region extending through the substrate, it is possible to make device structures on both surfaces of the substrate, so as to increase the utilization of the substrate and the integration degree of the devices.

Abstract: Provided is a MOSFET, comprising: a substrate (100); a gate stack (500) on the substrate (100); source/drain regions (305) in the substrate on both sides of the gate stack (500); an interlayer dielectric layer (400) covering the source/drain regions; and source/drain extension regions (205) under edges on both sides of the gate stack (500); wherein insulators, which are not connected each other, are formed beneath the source/drain extension regions (205) under edges on both sides of the gate stack (500). By means of the MOSFET in the present disclosure, negative effects induced by DIBL on device performance can be effectively reduced.

Abstract: A method for manufacturing a fin structure. The method includes: forming a first semiconductor layer and a second semiconductor layer sequentially on a substrate; patterning the second and first semiconductor layers to form an initial fin; selectively etching the first semiconductor layer of the initial fin so that the first semiconductor layer has a lateral recess; forming an isolation layer having a portion that fills the lateral recess, wherein the isolation layer, except the portion that fills the lateral recess, has a top surface lower than a top surface of the first semiconductor layer but higher than a bottom surface of the first semiconductor layer, and thus defines a fin above the isolation layer; and forming a gate stack intersecting the fin on the isolation layer.

Abstract: A method for manufacturing a FinFET device, including providing a substrate; implementing a source/drain doping on the substrate; etching the doped substrate to form a source region and a drain region; forming a fin channel between the source region and the drain region; and forming a gate on the Fin channel. The fin and the gate are formed after the source/drain doping is implemented on the substrate, so that the source/drain doping is done as a doping for a planar device, which ensures the quality of the source/drain coping and improves the property of the FinFET device.

Abstract: An ITC-IGBT and a manufacturing method therefor. The method comprises: providing a heavily doped substrate, forming a GexSi1-x/Si multi-quantum well strained super lattice layer on the surface of the heavily doped substrate, and forming a lightly doped layer on the surface of the GexSi1-x/Si multi-quantum well strained super lattice layer. The GexSi1-x/Si multi-quantum well strained super lattice layer is formed on the surface of the heavily doped substrate through one step, simplifying the production process of the ITC-IGBT.

Abstract: A method of depositing a tungsten (W) layer is disclosed. In one aspect, the method includes depositing a SiH4 base W film on a surface of a substrate to preprocess the surface. The method includes depositing a B2H6 base W layer on the preprocessed surface. The SiH4 base W film may be several atom layers thick. The film and base W layer may be deposited in a single ALD process, include reactive gas soak, reactive gas introduction, and main deposition operations. Forming the film may include introducing SiH4 gas into a reactive cavity during the gas soak operation, and introducing SiH4 and WF6 gas into the cavity during the gas introduction operation. The SiH4 and WF6 gases may be alternately introduced, for a number of cycles depending on the thickness of the tungsten layer to be deposited.

Abstract: A FinFET and a method of manufacturing the same are disclosed. The method includes forming a semiconductor fin. The method further includes forming a first region, the first region being one of a source region and a drain region. The method further includes forming a sacrificial spacer. The method further includes forming a second region with the sacrificial spacer as a mask, the second region being the other one of the source region and the drain region. The method further includes removing the sacrificial spacer. The method further includes replacing the sacrificial spacer with a gate stack comprising a gate conductor and a gate dielectric that separates the gate conductor from the semiconductor fin.

Abstract: Provided are a semiconductor device and a method of manufacturing the same. An example device may include: a fin formed on a substrate; a gate stack formed on the substrate and intersecting the fin, wherein the gate stack is isolated from the substrate by an isolation layer, and a Punch-Through Stopper (PTS) formed under the fin, including a first section directly under a portion of the fin where the fin intersects the gate stack and second sections on opposite sides of the first section, wherein the second sections each have a doping concentration lower than that of the first section.