Patents Assigned to Institute of Microelectronics
  • Patent number: 9831089
    Abstract: A method for adjusting an effective work function of a metal gate. The method includes forming a metal gate arrangement comprising at least a metal work function layer, and performing plasma treatment on at least one layer in the metal gate arrangement. In this way, it is possible to adjust the effective work function of the metal gate in a relatively flexible way.
    Type: Grant
    Filed: August 30, 2013
    Date of Patent: November 28, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Hong Yang, Wenwu Wang, Jiang Yan, Weichun Luo
  • Patent number: 9825135
    Abstract: Semiconductor devices and methods for manufacturing the same are provided. An example method may include: forming a sacrificial gate stack on a substrate; forming a gate spacer on sidewalls of the sacrificial gate stack; forming an interlayer dielectric layer on the substrate and planarizing it to expose the sacrificial gate stack; partially etching back the sacrificial gate stack to form an opening; expanding the resultant opening so that the opening is in a shape whose size gradually increases from a side adjacent to the substrate towards an opposite side away from the substrate; and removing a remaining portion of the sacrificial gate stack and forming a gate stack in a space defined by the gate spacer.
    Type: Grant
    Filed: February 3, 2017
    Date of Patent: November 21, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 9806169
    Abstract: Semiconductor devices and methods for manufacturing the same are provided. In one embodiment, the method may include: forming a first shielding layer on a substrate, and forming one of source and drain regions with the first shielding layer as a mask; forming a second shielding layer on the substrate, and forming the other of the source and drain regions with the second shielding layer as a mask; removing a portion of the second shielding layer which is next to the other of the source and drain regions; forming a gate dielectric layer, and forming a gate conductor as a spacer on a sidewall of a remaining portion of the second shielding layer; and forming a stressed interlayer dielectric layer on the substrate.
    Type: Grant
    Filed: November 26, 2012
    Date of Patent: October 31, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADAMY OF SCIENCES
    Inventors: Huilong Zhu, Qingqing Liang, Huicai Zhong
  • Publication number: 20170288037
    Abstract: A semiconductor device structure is provided. The semiconductor device includes a semiconductor substrate, a first device, and a second device. Each of the first and second devices includes a gate extending in a first direction, source/drain regions respectively formed on opposite first and second sides of the gate, dielectric spacers formed respectively on outer sidewalls of the gate on the first side and the second side, and conductive spacers serving contacts to the source/drain regions and formed respectively on outer sidewalls of the respective gate spacers. A second direction from the source/drain region on the first side to the source/drain region on the second side crosses the first direction.
    Type: Application
    Filed: June 22, 2017
    Publication date: October 5, 2017
    Applicant: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huicai Zhong, Qingqing Liang, Haizhou Yin
  • Patent number: 9779836
    Abstract: The present disclosure relates to the technical field of information data storage and processing. There is provided a method for regulating magnetic multi-domain state, comprising: when a current is applied to a magnetic thin film, applying an additional external magnetic field having a magnetic field strength of 0 to 4×105 A/m to regulate magnetization state of the magnetic thin film; wherein the current is configured to drive movements of a magnetic domain of the magnetic multi-domain states in the magnetic thin film, and the external magnetic field is configured to regulate generation of new magnetic domain in the magnetic thin film and state of the magnetic domain during the movement, so that the magnetic thin film is in a stable magnetic multi-domain state. Such a multi-domain state can't be affected by a higher or lower current and keeps stable when the current is removed.
    Type: Grant
    Filed: March 12, 2014
    Date of Patent: October 3, 2017
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Chong Bi, Shibing Long, Ming Liu
  • Patent number: 9780200
    Abstract: A semiconductor arrangement and a method for manufacturing the same. An arrangement may include a bulk semiconductor substrate; a fin formed on the substrate; a first FinFET and a second FinFET formed on the substrate. The first FinFET comprises a first gate stack intersecting the fin and a first gate spacer disposed on sidewalls of the first gate stack. The second FinFET includes a second gate stack intersecting the fin and a second gate spacer disposed on sidewalls of the second gate stack; a dummy gate spacer formed between the first FinFET and the second FinFET and intersecting the fin; an isolation section self-aligned to a space defined by the dummy gate spacer. The isolation section electrically isolates the first FinFET from the second FinFET; and an insulation layer disposed under and abutting the isolation section.
    Type: Grant
    Filed: January 16, 2014
    Date of Patent: October 3, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 9773707
    Abstract: There is provided a method for manufacturing a semiconductor device, including: providing a semiconductor substrate having a plurality of openings formed thereon by removing a sacrificial gate; filling the openings with a top metal layer having compressive stress; and performing amorphous doping with respect to the top metal layer in a PMOS device region. Thus, it is possible to effectively improve carrier mobility of an NMOS device, and also to reduce the compressive stress in the PMOS device region to ensure a desired performance of the PMOS device.
    Type: Grant
    Filed: August 28, 2015
    Date of Patent: September 26, 2017
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Guilei Wang, Jinbiao Liu, Jianfeng Gao, Junfeng Li, Chao Zhao
  • Patent number: 9762217
    Abstract: A sampler adapted to a one-dimension slow-varying signal, including: a signal preprocessing unit configured to preprocess an input signal; a slope-controllable sawtooth wave signal generating unit configured to generate a slope-controllable sawtooth wave signal and perform zero-resetting; a signal comparing unit configured to compare the preprocessed input signal from the signal preprocessing unit with the sawtooth wave signal and to output a pulse signal to the generating unit and a signal outputting unit when the preprocessed input signal is equal to the sawtooth wave signal; a counting unit configured to count a number of clock signals while the sawtooth wave signal generating unit is generating the sawtooth wave signal and to transmit the counted number to the signal outputting unit; the signal outputting unit configured to, upon receipt of the pulse signal output from the signal comparing unit, output the number counted by the counting unit at the moment.
    Type: Grant
    Filed: July 15, 2013
    Date of Patent: September 12, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS CHINESE ACADEMY OF SCIENCES
    Inventors: Dongmei Li, Qing Luo, Shengfa Liang, Hongzhang Yang, Xiaojing Li, Hao Zhang, Changqing Xie, Ming Liu
  • Patent number: 9748141
    Abstract: Provided are a semiconductor device and a method for manufacturing the same. An example method may include: forming a first semiconductor layer and a second semiconductor layer sequentially on a substrate, wherein the first semiconductor layer is doped; patterning the second and first semiconductor layers to form an initial fin; forming a dielectric layer on the substrate to substantially cover the initial fin, wherein a portion of the dielectric layer on top of the initial fin has a thickness sufficiently less than that of a portion of the dielectric layer on the substrate; etching the dielectric layer back to form an isolation layer, wherein the isolation layer partially exposes the first semiconductor layer, thereby defining a fin above the isolation layer; and forming a gate stack intersecting the fin on the isolation layer.
    Type: Grant
    Filed: November 19, 2012
    Date of Patent: August 29, 2017
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Patent number: 9735287
    Abstract: Memory devices, methods of manufacturing the same, and methods of accessing the same are provided. In one embodiment, the memory device may include a substrate, a back gate formed on the substrate, and a transistor. The transistor may include fins formed on opposite sides of the back gate on the substrate and a gate stack formed on the substrate and intersecting the fins. The memory device may further include a back gate dielectric layer formed on side and bottom surfaces of the back gate. The back gate dielectric layer may have a thickness reduced portion at a region facing the fins on one side of the gate stack.
    Type: Grant
    Filed: May 30, 2013
    Date of Patent: August 15, 2017
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventor: Huilong Zhu
  • Patent number: 9730329
    Abstract: An active chip package substrate and a method for preparing the same. The active chip package substrate includes: a core board; at least one upper active chip, embedded in the core board and having an active surface facing toward a lower surface of the core board, the upper active chip being an active bare chip; and at least one lower active chip, embedded in the core board and having an active surface facing toward an upper surface of the core board, the lower active chip being an active bare chip.
    Type: Grant
    Filed: November 29, 2011
    Date of Patent: August 8, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Zhongyao Yu, Xia Zhang
  • Patent number: 9716175
    Abstract: A quasi-nanowire transistor and a method of manufacturing the same are provided, the quasi-nanowire transistor comprising: providing an SOI substrate comprising a substrate layer (100), a BOX layer (120) and an SOI layer (130); forming a basic fin structure on the SOI layer, the basic fin structure comprising at least one silicon/silicon-germanium stack; forming source/drain regions (110) on both sides of the basic fin structure; forming a quasi-nanowire fin from a basic fin structure and an SOI layer thereunder; and forming a gate stack across the quasi-nanowire fin. The method can effectively control gate length characteristics. A semiconductor structure formed by the above method is also provided.
    Type: Grant
    Filed: November 27, 2012
    Date of Patent: July 25, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Huilong Zhu, Qingqing Liang, Haizhou Yin, Zhijiong Luo
  • Patent number: 9711409
    Abstract: A fin arrangement and a method for manufacturing the same are provided. An example method may include: patterning a substrate to form an initial fin on a selected area of the substrate; forming, on the substrate, a dielectric layer to substantially cover the initial fin, wherein a portion of the dielectric layer located on top of the initial fin has a thickness substantially less than that of a portion the dielectric layer located on the substrate; and etching the dielectric layer back to expose a portion of the initial fin, wherein the exposed portion of the initial fin is used as a fin.
    Type: Grant
    Filed: November 19, 2012
    Date of Patent: July 18, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 9711612
    Abstract: A semiconductor device structure and a method for fabricating the same. A method for fabricating semiconductor device structure includes forming gate lines on a semiconductor substrate; forming gate sidewall spacers surrounding the gate lines; forming respective source/drain regions in the semiconductor substrate and on either side of the respective gate lines; forming conductive sidewall spacers surrounding the gate sidewall spacers; and cutting off the gate lines, the gate sidewall spacers and the conductive sidewall spacers at predetermined positions, in which the cut gate lines are electrically isolated gates, and the cut conductive sidewall spacers are electrically isolated lower contacts. The method is applicable to the manufacture of contacts in integrated circuits.
    Type: Grant
    Filed: September 27, 2010
    Date of Patent: July 18, 2017
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huicai Zhong, Qingqing Liang, Haizhou Yin
  • Patent number: 9704715
    Abstract: A method for manufacturing a semiconductor device is provided. The method may include: forming a first material layer and a second material layer on a substrate; forming an auxiliary layer on the second material layer; forming, in the auxiliary layer, openings corresponding to gate structures to be formed; forming a third material layer to cover the auxiliary layer; forming, on the third material layer, a mask layer corresponding to at least one of the gate structures; patterning the third material layer to remove its lateral extending portions, with the mask layer present thereon; removing the auxiliary layer; patterning the second material layer with the patterned third material layer a mask, such that the gate structures, for which different gate lengths can be defined, are formed.
    Type: Grant
    Filed: October 29, 2013
    Date of Patent: July 11, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Huilong Zhu
  • Patent number: 9691624
    Abstract: Provided is a method for manufacturing a fin structure. The method may include forming an initial fin on a substrate, forming a dielectric layer on the substrate to cover the initial fin, planarizing the dielectric layer by sputtering, and further etching the dielectric layer back to expose a portion of the initial fin, wherein the exposed portion serves as a fin.
    Type: Grant
    Filed: December 14, 2012
    Date of Patent: June 27, 2017
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Huilong Zhu, Miao Xu, Jun Luo, Chunlong Li, Guilei Wang
  • Patent number: 9691878
    Abstract: Provided is a method for manufacturing a MOSFET, including: forming a shallow trench isolation (STI) in a semiconductor substrate to define an active region for the MOSFET; performing etching with the STI as a mask, to expose a surface of the semiconductor substrate, and to protrude a portion of the STI with respect to the surface of the semiconductor substrate, resulting in a protruding portion; forming a first spacer on sidewalls of the protruding portion; forming a gate stack on the semiconductor substrate; forming a second spacer surrounding the gate stack; forming openings in the semiconductor substrate with the STI, the gate stack, the first spacer and the second spacer as a mask; epitaxially growing a semiconductor layer with a bottom surface and sidewalls of each of the openings as a growth seed layer; and performing ion implantation into the semiconductor layer to form source and drain regions.
    Type: Grant
    Filed: October 30, 2012
    Date of Patent: June 27, 2017
    Assignee: Institute of Microelectronics, Chinese Academy of Science
    Inventors: Haizhou Yin, Huilong Zhu, Changliang Qin, Huaxiang Yin
  • Patent number: 9679962
    Abstract: There is provided a method of manufacturing a Fin Field Effect Transistor (FinFET). The method may include: forming a fin on a semiconductor substrate; forming a dummy device including a dummy gate on the fin; forming an interlayer dielectric layer to cover regions except for the dummy gate; removing the dummy gate to form an opening; implanting ions to form a Punch-Through-Stop Layer (PTSL) in a portion of the fin directly under the opening, while forming reflection doped layers in portions of the fin on inner sides of source/drain regions; and forming a replacement gate in the opening.
    Type: Grant
    Filed: July 30, 2015
    Date of Patent: June 13, 2017
    Assignee: Institute of Microelectronics, Chinese Academy of Sciences
    Inventors: Miao Xu, Huilong Zhu, Lichuan Zhao
  • Patent number: 9653550
    Abstract: A MOSFET structure and a method for manufacturing the same are disclosed. The method comprises: a. providing a substrate (100); b. forming a silicon germanium channel layer (101), a dummy gate structure (200) and a sacrificial spacer (102); c. removing the silicon germanium channel layer and portions of the substrate which are not covered by the dummy gate structure (200) and located under both sides of the dummy gate structure 200, so as to form vacancies (201); d. selectively epitaxially growing a first semiconductor layer (300) on the semiconductor structure to fill bottom and sidewalls of the vacancies (201); and e. removing the sacrificial spacer (102) and filling a second semiconductor layer (400) in the vacancies which are not filled by the first semiconductor layer (300). In the semiconductor structure of the present disclosure, carrier mobility in the channel can be increased, negative effects induced by the short channel effects can be suppressed, and device performance can be enhanced.
    Type: Grant
    Filed: October 22, 2013
    Date of Patent: May 16, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventor: Haizhou Yin
  • Patent number: 9653358
    Abstract: The present invention presents a method for manufacturing a semiconductor device structure as well as the semiconductor device structure. Said method comprises: providing a semiconductor substrate; forming a first insulating layer on the semiconductor substrate; forming a shallow trench isolation embedded in the first insulating layer and the semiconductor substrate; forming a channel region embedded in the semiconductor substrate; and forming a gate stack stripe on the channel region. Said method further comprises, before forming the channel region, performing a source/drain implantation on the semiconductor substrate. By means of forming the source/drain regions in a self-aligned manner before forming the channel region and the gate stack, said method achieves the advantageous effects of the replacement gate process without using a dummy gate, thereby simplifying the process and reducing the cost.
    Type: Grant
    Filed: February 25, 2011
    Date of Patent: May 16, 2017
    Assignee: INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES
    Inventors: Huicai Zhong, Qingqing Liang