Patents Assigned to J.A. Woollam Co. Inc.
  • Patent number: 10989601
    Abstract: A method of applying a reflective optics system that requires the presence of both convex and a concave mirrors that have beam reflecting surfaces. Application thereof achieves focusing of a beam of electromagnetic radiation with reduced effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved.
    Type: Grant
    Filed: May 1, 2020
    Date of Patent: April 27, 2021
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer, Craig M. Herzinger
  • Patent number: 10914866
    Abstract: Materials comprising metamaterials exhibiting form-induced birefringence and anisotropic optical properties are provided. The disclosed articles comprise structures with critical dimensions which are on the order of or smaller than the wavelength for the gigahertz and terahertz spectral range. Methods of preparing same using stereolithography are disclosed. In a further aspect, the disclosed methods pertain to spectroscopic ellipsometry methods comprising a biaxial (orthorhombic) layer homogenization approach is to analyze the terahertz ellipsometric data obtained at three different sample azimuth orientations. The disclosed articles and methods demonstrate provide an avenue to fabricate metamaterials for the terahertz spectral range and allows tailoring of the polarizability and anisotropy of the host material. This abstract is intended as a scanning tool for purposes of searching in the particular art and is not intended to be limiting of the present invention.
    Type: Grant
    Filed: July 17, 2018
    Date of Patent: February 9, 2021
    Assignees: HARRIS CORPORATION GCS, UNIVERSITY OF NORTH CAROLINA CHARLOTTE, J.A. WOOLLAM CO. INC.
    Inventors: Tino Hofmann, Daniel Fullager, Stefan Schoeche, Craig M. Herzinger, Susanne Madeline Lee, Erin Kathleen Sharma
  • Patent number: 10859439
    Abstract: An imaging system, and method of its use, for viewing a sample surface at an inclined angle, preferably in functional combination with a sample investigating reflectometer, spectrophotometer, ellipsometer or polarimeter system; wherein the imaging system provides that a sample surface and multi-element imaging detector surface are oriented with respect to one another to meet the Scheimpflug condition, and wherein a telecentric lens system is simultaneously positioned between the sample surface and the input surface of the multi-element imaging detector such that an image of the sample surface produced by said multi-element imaging detector is both substantially in focus over the extent thereof, and such that substantially no keystone error is demonstrated in said image.
    Type: Grant
    Filed: September 6, 2016
    Date of Patent: December 8, 2020
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Lihardt, Ping He, Galen L. Pfeiffer
  • Patent number: 10775298
    Abstract: Ellipsometers and polarimeters and the like having at least one rotating element which is driven by a motor that comprises air bearings.
    Type: Grant
    Filed: May 6, 2019
    Date of Patent: September 15, 2020
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Christopher D. Hassler, Galen L. Pfeiffer, Jeffrey S. Hale, Craig M. Herzinger, Brian D. Guenther, Brooks A. Hitt
  • Patent number: 10634607
    Abstract: A snapshot ellipsometer or polarimeter which does not require temporally modulated element(s) to measure a sample, but instead uses one or more spatially varying compensators, (eg. microretarder arrays and compound prisms), to vary the polarization state within a measurement beam of electromagnetic radiation. Analysis of the intensity profile of the beam after interaction with the spatially varying compensator(s) and the sample allows sample parameters to be characterized without any moving optics.
    Type: Grant
    Filed: October 12, 2018
    Date of Patent: April 28, 2020
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Griffin A. P. Hovorka, Jeremy A. Van Derslice
  • Patent number: 10627288
    Abstract: Reflectometer, Spectrophotometer, Ellipsometer and Polarimeter Systems that utilize 1) electromagnetic radiation energy absorbing or reflecting material of spatially distributed different optical densities and 2) wavelength dependent electromagnetic radiation energy aperturing, or both, placed near the entry to said multi-element detector, to improve detector capability to monitor intensity vs. wavelength spectra entered thereinto and provide more uniform detector output, while preferably maintaining beam information content.
    Type: Grant
    Filed: April 29, 2019
    Date of Patent: April 21, 2020
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Ping He
  • Publication number: 20200116626
    Abstract: A snapshot ellipsometer or polarimeter which does not require temporally modulated element(s) to measure a sample, but instead uses one or more spatially varying compensators, (eg. microretarder arrays and compound prisms), to vary the polarization state within a measurement beam of electromagnetic radiation. Analysis of the intensity profile of the beam after interaction with the spatially varying compensator(s) and the sample allows sample parameters to be characterized without any moving optics.
    Type: Application
    Filed: October 12, 2018
    Publication date: April 16, 2020
    Applicant: J. A. WOOLLAM CO., INC.
    Inventors: Griffin A. P. Hovorka, Jeremy A. Van Derslice
  • Patent number: 10606093
    Abstract: A retarder that comprises at least two plates, each of which comprise two surfaces that are parallel to, or substantially parallel to one another, said plates being tipped with respect to one another so that the surfaces of one thereof are not parallel to the surfaces of the other, each said plate further comprising a biased fast axis that is neither parallel to, or perpendicular to surfaces of said plates.
    Type: Grant
    Filed: March 16, 2018
    Date of Patent: March 31, 2020
    Assignee: J.A. WOOLLAM CO., INC.
    Inventor: Craig M. Herzinger
  • Patent number: 10466171
    Abstract: Methodology of characterizing surface properties and determining refractive index and extinction coefficient of a prism shaped material, including simultaneously for a multiplicity of wavelengths, using an easy to practice technique.
    Type: Grant
    Filed: May 22, 2019
    Date of Patent: November 5, 2019
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Ronald A. Synowicki, Joel J. Mohrmann
  • Patent number: 10444140
    Abstract: A sample positioning system having two rotation elements with offset therebetween, to the second of which rotation elements is affixed a sample supporting stage. The rotation axes of the two rotation element are parallel, or substantially so. The sample positioning system finds application in the mapping of samples by Metrology systems such as Reflectometer, Spectrophotometer and Ellipsometer systems.
    Type: Grant
    Filed: May 23, 2019
    Date of Patent: October 15, 2019
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Griffin A. P. Hovorka, Martin M. Liphardt, Galen L Pfeiffer
  • Patent number: 10422739
    Abstract: Reflectometer, spectrophotometer, ellipsometer, and polarimeter systems having a supercontinuum laser source of coherent electromagnetic radiation over a range of about 400-about 2500 nm, a stage for supporting a sample and a detector of electromagnetic radiation, wherein the supercontinuum source provides a coherent beam of electromagnetic radiation which interacts with a sample, and the detector system comprises functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics, directs wavelengths in various ranges to various detectors that are well suited to detect them.
    Type: Grant
    Filed: September 12, 2018
    Date of Patent: September 24, 2019
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Jeremy A. Van Derslice, Martin M. Liphardt
  • Patent number: 10338362
    Abstract: In ellipsometer and polarimeter systems, reflective optics including both convex and a concave mirrors that have beam reflecting surfaces, as well as aperture control of beam size to optimize operation with respect to aberration and diffraction effects while achieve the focusing of a beam of electromagnetic radiation with minimized effects on a polarization state of an input beam state of polarization that results from adjustment of angles of incidence and reflections from the various mirrors involved, and further including detectors of electromagnetic radiation that enable optimization of the operation thereof for application over various specific wavelength ranges, involving functional combinations of gratings and/or combination dichroic beam splitter-prisms, which themselves can be optimized as regards wavelength dispersion characteristics.
    Type: Grant
    Filed: July 3, 2018
    Date of Patent: July 2, 2019
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer, Duane E. Meyer
  • Patent number: 10309897
    Abstract: Methodology of characterizing surface properties and determining refractive index and extinction coefficient of a prism shaped material, including simultaneously for a multiplicity of wavelengths, using an easy to practice technique.
    Type: Grant
    Filed: February 27, 2017
    Date of Patent: June 4, 2019
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Ronald A. Synowicki, Joel J. Mohrmann
  • Patent number: 10209528
    Abstract: A combination of a focusing element, and a filtering element which naturally adjusts the cross-sectional area of a beam of electromagnetic radiation passed through the focusing element as a function of wavelength over a specified range of wavelengths, wherein the filtering element is not uniform, but rather varies as a selection from the group consisting of: optical density and/or thickness is greatest near the center thereof; and optical density and/or thickness is smallest near the center thereof; and can demonstrate neutral density characteristics outside the specified range of wavelengths. The combination of a focusing element, and a filtering element can optionally be present in an ellipsometer or polarimeter system.
    Type: Grant
    Filed: June 9, 2015
    Date of Patent: February 19, 2019
    Assignee: J.A. WOOLLAM CO., INC.
    Inventor: Martin M. Liphardt
  • Patent number: 10175160
    Abstract: Methodology of characterizing pore size distribution in a porous thin film having a surface, or in a surface region of a porous semi-infinite bulk substrate having a surface, involving applying a mathematical model of a sample based on effective medium approaches, such as the Bruggeman effective medium approach.
    Type: Grant
    Filed: April 20, 2018
    Date of Patent: January 8, 2019
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Stefan Schoeche, Jeremy A. Van Derslice, Jeffrey S. Hale, Craig M. Herzinger
  • Patent number: 10073120
    Abstract: Optical Hall Effect (OHE) method for evaluating such as free charge carrier effective mass, concentration, mobility and free charge carrier type in a sample utilizing a permanent magnet at room temperature.
    Type: Grant
    Filed: October 13, 2017
    Date of Patent: September 11, 2018
    Assignees: BOARD OF REGENTS FOR THE UNIVERSITY OF NEBRASKA, J.A. WOOLLAM CO., INC.
    Inventors: Tino Hofmann, Mathias M. Schubert, Stefan Schoeche, Philipp Kuehne, Craig M. Herzinger, John A. Woollam, Gregory K. Pribil, Thomas E. Tiwald, Sean R. Knight
  • Patent number: 10066989
    Abstract: A system for providing variable wavelength intensity attenuation to said focused beams by application of an aperture-like element that comprises at least two regions of “filter” material, or comprises different materials graded into one another, which different materials that have different responses to different wavelengths, wherein said system is applied to reduce differences in wavelength intensity levels when applied in collimated portions of a beam as a Spectral Angle Adjustor (SAA) or to preserve information in a beam while changing said beam effective diameter as a Spectral Aperture Stop (SAS); or to affect a Spectral Field Stop (SFS) that controls source image size when applied at a convergent/divergent beam focal point as a Spectrally Varying Aperture, (SVA) the end result depending on where in a beam it is applied.
    Type: Grant
    Filed: September 9, 2016
    Date of Patent: September 4, 2018
    Assignee: J.A. WOOLLAM CO., INC
    Inventors: Martin M. Liphardt, Ping He
  • Patent number: 10061068
    Abstract: A substantially achromatic multiple element compensator system for use in a wide spectral range, (for example 190-1700 nm), rotating compensator spectroscopic ellipsometer or polarimeter or the like system, which does not require external surface coatings at locations whereat total internal reflections occur. Multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation. Berek-type retarders on both input and output sides of the multiple elements are oriented to minimize changes in the net retardance vs. wavelength via adjustment of Berek-type retarders. Berek-type retarders.
    Type: Grant
    Filed: February 27, 2017
    Date of Patent: August 28, 2018
    Assignee: J.A. WOOLLAM CO., INC.
    Inventors: Craig M. Herzinger, Ping He, Jeffrey S. Hale
  • Patent number: 10048059
    Abstract: Disclosed are systems and methods that enable determination of uncorrelated thickness of a working electrode and surface region optical constants in settings involving electrochemical processing at a working electrodes in a Piezoelectric Balance system, by simultaneous application of an Ellipsometer system, the working electrode optionally having a multiplicity of nanofibers that are oriented non-normally to a surface of said working electrode. Further disclosed is, simultaneous with said determinations, the monitoring of electrochemical processes at a piezoelectric balance working electrode driven by electrical energy applied between said working electrode and counter electrode.
    Type: Grant
    Filed: August 11, 2016
    Date of Patent: August 14, 2018
    Assignees: J. A. WOOLLAM CO., INC, THE BOARD OF REGENTS OF THE UNIVERSITY OF NEBRASKA
    Inventors: Mathias M. Schubert, Tino Hofmann, John A. Woollam, Rebecca Y. Lai
  • Patent number: 10026167
    Abstract: Anisotropic contrast methodology in combination with use of sample investigating polarized electromagnetic radiation to provide Jones or Mueller Matrix imaging data corresponding to areas on samples.
    Type: Grant
    Filed: December 9, 2015
    Date of Patent: July 17, 2018
    Assignees: BOARD OF REGENTS OF THE UNIVERSITY OF NEBRASKA, J. A. WOOLLAM CO., INC.
    Inventors: Tino Hofmann, Mathias M. Schubert, Tadas Kasputis, Angela K. Pannier, Craig M. Herzinger, John A. Woollam