Patents Assigned to J.A. Woollam Co. Inc.
  • Automatic sample alignment system and method of use
    Patent number: 7965390
    Abstract: A system which automatically reduces change in effective angle and plane of incidence of a reflected focused beam of electromagnetic radiation entering a detector, via use of a detector with dimensions less than is the spatial spread of a reflected focused beam at a location distal to the location on said sample from which it is caused to reflect, preferably after passing through a collimating lens. The basis of operation is that the portion of a reflected focused beam intercepted by the detector changes with change in sample position and/or orientation.
    Type: Grant
    Filed: February 10, 2009
    Date of Patent: June 21, 2011
    Assignee: J.A. Woollam Co., Inc.
    Inventor: Martin M. Liphardt
  • Horizontal attenuated total reflection system
    Patent number: 7920264
    Abstract: Horizontally oriented attenuated total reflection (HATR) system applied in spectroscopic ellipsometer or polarimeter systems, and methodology of use.
    Type: Grant
    Filed: July 28, 2008
    Date of Patent: April 5, 2011
    Assignee: J.A. Woollam Co., Inc.
    Inventor: Thomas F. Tiwald
  • Method of constructing a deviation angle self compensating substantially achromatic retarder to compensate beam traslation
    Patent number: 7907280
    Abstract: A method of configuring a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
    Type: Grant
    Filed: November 4, 2008
    Date of Patent: March 15, 2011
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Steven E. Green, Craig M. Herzinger, Duane E. Meyer, Martin M. Liphardt
  • Fast sample height, AOI and POI alignment in mapping ellipsometer or the like
    Patent number: 7872751
    Abstract: A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
    Type: Grant
    Filed: November 25, 2008
    Date of Patent: January 18, 2011
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • System and method for controlling intensity of a beam of electromagnetic radiation in ellipsometers and polarimeters
    Patent number: 7830512
    Abstract: An ellipsometer or polarimeter system and method for controlling intensity of an electromagnetic beam over a spectrum of wavelengths by applying control (P2) and beam (P) polarizers, optionally in combination with an intervening and control compensator (C).
    Type: Grant
    Filed: March 14, 2008
    Date of Patent: November 9, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Galen L. Pfeiffer, Martin M. Liphardt
  • System for controlling intensity of a beam of electromagnetic radiation and method for investigating materials with low specular reflectance and/or are depolarizing
    Patent number: 7821637
    Abstract: Disclosed is a system for controlling focus, angle of incidence and intensity of an electromagnetic beam over a spectrum of wavelengths, and methodology for optimizing investigation of samples which demonstrate low specular reflectance and/or are depolarizing of a polarized beam of electromagnetic radiation, such as solar cells.
    Type: Grant
    Filed: February 21, 2008
    Date of Patent: October 26, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Galen L. Pfeiffer, Martin M. Liphardt, James N. Hilfiker
  • Small volume cell
    Patent number: 7817266
    Abstract: A small internal volume cell having fluid entry, and exit ports wherein bubble traps are present in a bifurcated fluid pathway continuous with the fluid exit port. There further being present input and output apertures, for entering and exiting electromagnetic radiation, positioned to allow causing a beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; as well as methodology of its use.
    Type: Grant
    Filed: July 24, 2008
    Date of Patent: October 19, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Galen L. Pfeiffer, Thomas E. Tiwald
  • System and method of controlling intensity of an electromagnetic beam
    Patent number: 7796260
    Abstract: A system and method of substantially achromatically controlling the intensity of a spectroscopic beam with application in spectrophotometers, reflectometers, ellipsometers, polarimeters or the like systems.
    Type: Grant
    Filed: April 21, 2007
    Date of Patent: September 14, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Christopher A. Goeden, Galen L. Pfeiffer
  • Application of digital light processor in scanning spectrometer and imaging ellipsometer and the like systems
    Patent number: 7777878
    Abstract: Application of digital light processor (DLP) systems in monochromator, spectrophotometer or the like systems to mediate selection of individual wavelengths, and/or to image elected regions of a sample in an imaging ellipsometer, imaging polarimeter, imaging reflectometer, imaging spectrophotometer, and/or to provide chopped beams.
    Type: Grant
    Filed: December 18, 2007
    Date of Patent: August 17, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventor: Martin M. Liphardt
  • Ellipsometric investigation of anisotropic samples
    Patent number: 7777883
    Abstract: A system for reducing reflections of a beam of electromagnetic radiation from the opposite, back, surface of an anisotropic sample, including methodology for investigating the incident, front, surface thereof with electromagnetic radiation, and analyzing the data as if the sample is isotropic.
    Type: Grant
    Filed: June 10, 2008
    Date of Patent: August 17, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Ronald A. Synowicki, Thomas E. Tiwald
  • Non-destructive approach to ellipsometric monitoring of a film coating on the inner surface of a tube shaped sample
    Patent number: 7768660
    Abstract: Disclosed is the use of a focused electromagnetic beam which is caused to impinge on the top surface of a tube shaped sample, to investigate a film coating on its inner surface during fabrication thereof and/or thereafter.
    Type: Grant
    Filed: August 30, 2007
    Date of Patent: August 3, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Gregory K. Pribil, John A. Woollam, Martin M. Liphardt, James D. Welch
  • Flying mobile on-board ellipsometer, polarimeter, reflectometer and the like systems
    Patent number: 7746471
    Abstract: A substantially self-contained “on-board” material system investigation system for effecting relative translational and rotational motion between a source and detector of electromagnetic radiation and a sample, which system is functionally mounted on a three dimensional locational system to enable positioning at desired locations on, and distances from, the surface of a sample, including the capability to easily and conveniently effect rotation and/or to change the angle-of-incidence of a beam of electromagnetic radiation onto a sample surface and/or to provide gas flow confined in a mini-chamber near the surface of a sample, at a location at which a beam having UV, VUV, IR and/or NIR wavelengths of electromagnetic radiation is caused to be impinged thereupon.
    Type: Grant
    Filed: August 5, 2007
    Date of Patent: June 29, 2010
    Assignee: J.A Woollam Co., Inc.
    Inventors: Blaine D. Johs, Ping He, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch
  • Automated ellipsometer and the like systems
    Patent number: 7746472
    Abstract: Systems and methodology for orienting the tip/tilt and vertical height of samples, preferably automated, as applied in ellipsometer and the like systems.
    Type: Grant
    Filed: August 29, 2008
    Date of Patent: June 29, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Ping He, Martin M. Liphardt, Christopher A. Goeden, John A. Woollam, James D. Welch
  • Method of determining substrate etch depth
    Patent number: 7705995
    Abstract: A method of monitoring, in real time, the depth to which a process sample is etched by an etching procedure involving investigating a sample substrate that has a patterned surface which, when electromagnetic radiation in an appropriate wavelength range is caused to reflect from, demonstrates lateral interference effects, such that when a frequency transform is applied to spectroscopic reflection data, three distinguishable peaks occur, at least for some range of pattern depth in the sample surface.
    Type: Grant
    Filed: June 15, 2005
    Date of Patent: April 27, 2010
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Jeffrey S. Hale
  • Information maintenance during intensity attenuation in focused beams
    Patent number: 7671989
    Abstract: Maintenance of information content in a focused beam of electromagnetic radiation when the intensity thereof is attenuated by application of an aperture-like element.
    Type: Grant
    Filed: June 18, 2008
    Date of Patent: March 2, 2010
    Assignee: J. A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Ping He
  • Back surface reflection reduction systems and methodology
    Patent number: 7636161
    Abstract: A system for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
    Type: Grant
    Filed: March 20, 2007
    Date of Patent: December 22, 2009
    Assignee: J.A. Woollam Co., Inc.
    Inventor: Thomas E. Tiwald
  • Spectroscopic ellipsometer and polarimeter systems
    Patent number: 7633625
    Abstract: A rotating compensator spectroscopic ellipsometer or polarimeter system having a source of a polychromatic beam of electromagnetic radiation, a polarizer, a stage for supporting a material system, an analyzer, a dispersive optics and a detector system which comprises a multiplicity of detector elements, the system being functionally present in an environmental control chamber and therefore suitable for application in wide spectral range, (for example, 130-1700 nm). Preferred compensator design involves a substantially achromatic multiple element compensator systems wherein multiple total internal reflections enter retardance into an entered beam of electromagnetic radiation, and the elements thereof are oriented to minimize changes in the net retardance vs. the input beam angle resulting from changes in the position and/or rotation of the system of elements.
    Type: Grant
    Filed: September 17, 2007
    Date of Patent: December 15, 2009
    Assignee: J.A. Woollam Co., Inc.
    Inventors: John A. Woollam, Blaine D. Johs, Craig M. Herzinger, Ping He, Martin M. Liphardt, Galen L. Pfeiffer
  • Sample investigating system
    Patent number: 7623237
    Abstract: A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
    Type: Grant
    Filed: June 14, 2006
    Date of Patent: November 24, 2009
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Thomas E. Tiwald, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He, Ronald A. Synowicki, John A. Woollam
  • System for and method of reducing change caused by motor vibrations in ellipsometers, polarimeters or the like
    Patent number: 7623238
    Abstract: A system and method which reduces change in locus of a beam of electromagnetic radiation which otherwise result from vibrations caused by operation of a motor which controls the rotation of an element which affects the beam.
    Type: Grant
    Filed: June 2, 2007
    Date of Patent: November 24, 2009
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Ping He, Martin M. Liphardt
  • Sample orientation system and method
    Patent number: 7619752
    Abstract: System and method for orienting the tilt and vertical position of samples in ellipsometer and the like systems.
    Type: Grant
    Filed: October 30, 2007
    Date of Patent: November 17, 2009
    Assignee: J. A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Christopher A. Goeden