Patents Assigned to J.A. Woollam Co. Inc.
  • Ellipsometers and polarimeters comprising polarization state compensating beam directing sample wobble compensating system, and method of use
    Patent number: 8467057
    Abstract: An improved system and method for investigation of a wobbling surface of a sample with an electromagnetic beam, involving application of a beam directing dual reflection surface “prism” system, which, while effecting beam locus direction rotation of 90 degrees also preserves beam polarization state. The system allows causing an electromagnetic beam to access an otherwise difficult to access sample in, for instance, a vacuum deposition chamber, and enables achieving very closely spaced incident and spherical mirror reflected points of beam reflection from a sample surface in use.
    Type: Grant
    Filed: September 23, 2011
    Date of Patent: June 18, 2013
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Ping He
  • Mounting for deviation angle self compensating substantially achromatic retarder
    Patent number: 8462341
    Abstract: A system, method of configuring, and application a system for introducing a relative phase retardation into orthogonally polarized components of an electromagnetic beam entered thereinto, wherein the system involves a substantially achromatic multiple element retarder system for use in wide spectral range (for example, 190-1700 nm) rotating compensator spectroscopic ellipsometer and/or polarimeter systems.
    Type: Grant
    Filed: March 14, 2011
    Date of Patent: June 11, 2013
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Ping He, Blaine D. Johs, Steven E. Green, Craig M. Herzinger, Duane E. Meyer, Martin M. Liphardt
  • Fast sample height, AOI and POI alignment in mapping ellipsometer or the like
    Patent number: 8436994
    Abstract: A sample investigation system (ES) in functional combination with an alignment system (AS), and methodology of enabling calibration and very fast, (eg. seconds), sample height, angle-of-incidence and plane-of-incidence adjustments, with application in mapping ellipsometer or the like systems.
    Type: Grant
    Filed: January 15, 2011
    Date of Patent: May 7, 2013
    Assignee: J.A. Woollam Co., Inc
    Inventors: Martin M. Liphardt, Jeffrey S. Hale, Ping He, Galen L. Pfeiffer
  • Conjugate ratio adjustable lens system
    Patent number: 8416410
    Abstract: A lens system which allows easy relative adjustment of the position of at least two elements therein to minimize the effects of aberration, having particularly relevant application in ellipsometers, polarimeters, reflectometers and spectrophotometers finite size source is imaged onto a sample.
    Type: Grant
    Filed: April 26, 2010
    Date of Patent: April 9, 2013
    Assignee: J.A. Woollam Co., Inc
    Inventor: Martin M. Liphardt
  • Terahertz-infrared ellipsometer system, and method of use
    Patent number: 8416408
    Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including a polarization state generator comprising: an odd bounce image rotating system and a polarizer, or two polarizers; and optionally including least one compensator and/or modulator, in addition to an analyzer.
    Type: Grant
    Filed: June 11, 2010
    Date of Patent: April 9, 2013
    Assignees: J.A. Woollam Co., Inc., Board of Regents of the University of Nebraska
    Inventors: Craig M. Herzinger, Mathias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • System for naturally adjusting the cross-sectional area of a beam of electromagnetic radiation entered to a focusing means
    Patent number: 8351036
    Abstract: A combination of a focusing means, and a filtering means which naturally adjusts the cross-sectional area of a beam of electromagnetic radiation passed to the focusing means as a function of wavelength, optionally as an element of an ellipsometer or polarimeter system.
    Type: Grant
    Filed: March 25, 2010
    Date of Patent: January 8, 2013
    Assignee: J. A. Woollam Co., Inc.
    Inventor: Martin M. Liphardt
  • Application of digital light processor in imaging ellipsometer and the like systems
    Patent number: 8345241
    Abstract: Application of digital light processor (DLP) systems in an imaging ellipsometer or imaging polarimeter with a focusing means, sample and detector arranged to meet the Scheimpflug condition.
    Type: Grant
    Filed: August 11, 2010
    Date of Patent: January 1, 2013
    Assignee: J. A. Woollam Co., Inc.
    Inventor: Martin M. Liphardt
  • Mapping ellipsometers and polarimeters comprising polarization state compensating beam directing means, and method of use
    Patent number: 8339603
    Abstract: Mapping ellipsometer and polarimeter systems which comprise polarization state change compensating beam directing means.
    Type: Grant
    Filed: October 2, 2009
    Date of Patent: December 25, 2012
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Blaine D. Johs
  • View-finder in ellipsometer or the like systems
    Patent number: 8339602
    Abstract: A system for and method of allowing visual observation of a sample being subject to investigation by an electromagnetic beam, to identify where thereupon a beam of sample investigating electromagnetic radiation is caused to impinge, in combination with a data detector of the beam of sample investigating electromagnetic radiation after it interacts with the sample.
    Type: Grant
    Filed: September 12, 2009
    Date of Patent: December 25, 2012
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Ping He
  • UV-IR range variable angle spectroscopic ellipsometer
    Patent number: 8253940
    Abstract: An ellipsometer, polarimeter, reflectometer, spectrophotometer or scatterometer system for use in the UV and infrared range of wavelengths, characterized by the combination of a fiber optic capable of transmitting wavelengths from below 2.2 micron up to at least 3.5 microns, and a beam collimator formed from a combination of two off-axis concave astigmatism reducing spherical mirrors capable of operating between about 190 nm up to 5.5 microns.
    Type: Grant
    Filed: August 23, 2010
    Date of Patent: August 28, 2012
    Assignee: J. A. Woollam Co., Inc.
    Inventors: Steven E. Green, Gerald T. Cooney, Martin M. Liphardt
  • Empirical correction for spectroscopic ellipsometric measurements of rough or textured surfaces
    Patent number: 8248607
    Abstract: A method of applying spectroscopic ellipsometry to arrive at accurate values of optical and physical properties for thin films on samples having rough or textured surfaces.
    Type: Grant
    Filed: August 3, 2010
    Date of Patent: August 21, 2012
    Assignees: J.A. Woollam Co., Inc., Board of Regents of Nebraska University
    Inventors: Craig M. Herzinger, Blaine D. Johs, Mathias M. Schubert, Tino Hofmann
  • Sample mapping in environmental chamber
    Patent number: 8248606
    Abstract: A system for and method of mapping process samples which are present in an environmental control chamber at a plurality of “X”-“Y” locations on the surface thereof, wherein the system includes a shield between windows for entering and exiting a beam of electromagnetic radiation, and a process sample.
    Type: Grant
    Filed: September 12, 2009
    Date of Patent: August 21, 2012
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Blaine D. Johs
  • Method of improving ellipsometric and the like data
    Patent number: 8223334
    Abstract: A system and method for improving data provided by ellipsometer, polarimeter and the like systems involving diminishing the effects of undesirable noise in the intensity of a beam of electromagnetic radiation caused by, for instance, random variations in intensity of a source provided beam of electromagnetic radiation and/or periodic or non-periodic variations in beam intensity resulting from wobble/wander of a moving sample, during investigation of the sample by the beam of electromagnetic radiation.
    Type: Grant
    Filed: September 25, 2009
    Date of Patent: July 17, 2012
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Blaine D. Johs, Martin M. Liphardt
  • System and method of applying horizontally oriented arc-lamps in ellipsometer or the like systems
    Patent number: 8189193
    Abstract: Control of the angle-of-incidence of a beam of electromagnetic radiation provided by a horizontally oriented arc-lamp in ellipsometer, polarimeter, spectrophotometer, reflectometer, Mueller matrix measuring, or the like systems.
    Type: Grant
    Filed: October 19, 2009
    Date of Patent: May 29, 2012
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Ping He, James D. Welch
  • Terahertz-infrared ellipsometer system, and method of use
    Patent number: 8169611
    Abstract: The present invention relates to ellipsometer and polarimeter systems, and more particularly is an ellipsometer or polarimeter or the like system which operates in a frequency range between 300 GHz or lower and extending to higher than at least 1 Tera-hertz (THz), and preferably through the Infra-red (IR) range up to, and higher than 100 THz, including: a source such as a backward wave oscillator; a Smith-Purcell cell; a free electron laser, or an FTIR source and a solid state device; and a detector such as a Golay cell; a bolometer or a solid state detector; and preferably including at least one odd-bounce polarization state image rotating system, and optionally including a polarizer, at least one compensator and/or modulator, in addition to an analyzer.
    Type: Grant
    Filed: June 23, 2009
    Date of Patent: May 1, 2012
    Assignees: University of Nebraska Board of Regents, J. A. Woollam Co., Inc.
    Inventors: Craig M. Herzinger, Matias M. Schubert, Tino Hofmann, Martin M. Liphardt, John A. Woollam
  • Sample investigating system and method of use
    Patent number: 8159672
    Abstract: A spectroscopic system for adjusting spacing between an adjacent source/detector as a unit, and a sample, and a reflecting means for directing an incident beam which reflects from said sample back onto said sample and then into the detector along a locus which is in a plane of incidence that is offset from that of the incident beam, or directly from the reflecting means into the detector, including means for reducing reflections of a beam of electromagnetic from the back of a sample, including methodology of use.
    Type: Grant
    Filed: November 19, 2009
    Date of Patent: April 17, 2012
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Thomas E. Tiwald, Blaine D. Johs, Jeffrey S. Hale, Craig M. Herzinger, Steven E. Green, Ping He, Ronald A. Synowicki, John A. Woollam
  • Small volume cell
    Patent number: 8130375
    Abstract: A small internal volume cell having fluid entry, and exit ports wherein at least one bubble trap is present in a fluid pathway which is continuous with the fluid exit port. There further being present an input/output aperture, for entering and exiting electromagnetic radiation, positioned to allow causing an input beam of electromagnetic radiation to impinge on a sample substrate at a location thereon at which, during use, fluid contacts; and a mirror for directing electromagnetic radiation which reflects from said sample substrate, toward and out of said input/output aperture; as well as methodology of its use.
    Type: Grant
    Filed: July 28, 2009
    Date of Patent: March 6, 2012
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Galen L. Pfeiffer, Thomas E. Tiwald, Martin M. Liphardt
  • System and method of aligning a sample
    Patent number: 8064055
    Abstract: A system and method of use thereof that enables determining and setting sample alignment based on the location of, and geometric attributes of a monitored image formed by reflection of an electromagnetic beam from a sample and into an image monitor, which beam is directed to be incident onto the sample along a locus which is substantially normal to the surface of the sample.
    Type: Grant
    Filed: February 13, 2009
    Date of Patent: November 22, 2011
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin H. Liphardt, Blaine D. Johs
  • Ellipsometric investigation and analysis of textured samples
    Patent number: 8059276
    Abstract: System for, and method of ellipsometric investigation of and analysis of samples which have, for instance, a non-random effectively “regular” textured surface, and/or a surface characterized by an irregular array of faceted structures.
    Type: Grant
    Filed: December 8, 2008
    Date of Patent: November 15, 2011
    Assignee: J.A. Woollam Co., Inc
    Inventors: James N. Hilfiker, Jianing Sun, Ping He, Martin M. Liphardt
  • Spatial filter in sample investigation system
    Patent number: 8013996
    Abstract: Systems which utilize electromagnetic radiation to investigate samples and include at least one spatial filter which has an aperture having an opening therethrough of an arbitrary shape, including methodology for fabracting the aperture on an end of an optical fiber per se.
    Type: Grant
    Filed: May 12, 2009
    Date of Patent: September 6, 2011
    Assignee: J.A. Woollam Co., Inc.
    Inventors: Martin M. Liphardt, Ping He, Blaine D. Johs, Craig M. Herzinger