Patents Assigned to Kyosan Electric Mfg. Co., Ltd.
-
Patent number: 10348267Abstract: An impedance matching device comprising a variable reactor having a main winding and control winding, wherein a generated magnet field in the core is an AC magnetic field with a magnitude exceeding a value to settle a deviation between a control target value for impedance matching and a feedback value, by changing the magnitude of the generated magnetic field by changing a control current passing through the control winding, thereby controlling inductance of the variable rector to be a predetermined value to perform impedance matching, the response delay in the impedance matching is reduced by reducing a response delay in the inductance variation of the variable reactor.Type: GrantFiled: February 15, 2016Date of Patent: July 9, 2019Assignee: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Sadao Mori, Tadaharu Ohno
-
Patent number: 10244615Abstract: There is provided a radio frequency power source device configured to change a voltage ratio between two output end voltages, by switching a connection state of a voltage divider that divides the radio frequency voltage, in such a manner that the radio frequency voltage is divided into voltage outputs in antiphase with each other with respect to ground potential, and high voltage and low voltage are delivered in switching manner. Switching of the connection state in the voltage divider enables selective delivery of voltage having different values, high voltage or low voltage, and by selecting and delivering high voltage for the time high voltage is required, reduction of the voltage output from the radio frequency output circuit is prevented.Type: GrantFiled: February 20, 2015Date of Patent: March 26, 2019Assignee: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Shinichi Kodama, Toshiyuki Adachi
-
Publication number: 20180249570Abstract: There is provided a radio frequency power source device configured to change a voltage ratio between two output end voltages, by switching a connection state of a voltage divider that divides the radio frequency voltage, in such a manner that the radio frequency voltage is divided into voltage outputs in antiphase with each other with respect to ground potential, and high voltage and low voltage are delivered in switching manner. Switching of the connection state in the voltage divider enables selective delivery of voltage having different values, high voltage or low voltage, and by selecting and delivering high voltage for the time high voltage is required, reduction of the voltage output from the radio frequency output circuit is prevented.Type: ApplicationFiled: February 20, 2015Publication date: August 30, 2018Applicant: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Shinichi Kodama, Toshiyuki Adachi
-
Publication number: 20180248534Abstract: An impedance matching device comprising a variable reactor having a main winding and control winding, wherein a generated magnet field in the core is an AC magnetic field with a magnitude exceeding a value to settle a deviation between a control target value for impedance matching and a feedback value, by changing the magnitude of the generated magnetic field by changing a control current passing through the control winding, thereby controlling inductance of the variable rector to be a predetermined value to perform impedance matching, the response delay in the impedance matching is reduced by reducing a response delay in the inductance variation of the variable reactor.Type: ApplicationFiled: February 15, 2016Publication date: August 30, 2018Applicant: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Sadao Mori, Tadaharu Ohno
-
Patent number: 10038435Abstract: In a configuration of an isolation circuit using a transformer of a high-frequency-isolation gate driver circuit in the frequency band from 1 to 100 MHz, a period for resetting the exciting current is eliminated, generation of self-resonance phenomenon after resetting is cancelled to reduce generation of noise current, and malfunctions of the switching element due to noise is prevented. In driving plural gate circuits by RF signals, exciting current is allowed to pass through a primary coil of a gate driver transformer alternately in both directions continuously all the time, in a configuration for isolating drive input signals by the gate driver transformer. Accordingly, the reset period that is required when the exciting current flows only in one way becomes unnecessary, and thus generation of self-resonance phenomenon after resetting is canceled. Then, generation of noise current caused by the self-resonance phenomenon is reduced.Type: GrantFiled: February 20, 2015Date of Patent: July 31, 2018Assignee: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Hiroshi Kunitama
-
Publication number: 20170331471Abstract: In a configuration of an isolation circuit using a transformer of a high-frequency-isolation gate driver circuit in the frequency band from 1 to 100 MHz, a period for resetting the exciting current is eliminated, generation of self-resonance phenomenon after resetting is cancelled to reduce generation of noise current, and malfunctions of the switching element due to noise is prevented. In driving plural gate circuits by RF signals, exciting current is allowed to pass through a primary coil of a gate driver transformer alternately in both directions continuously all the time, in a configuration for isolating drive input signals by the gate driver transformer. Accordingly, the reset period that is required when the exciting current flows only in one way becomes unnecessary, and thus generation of self-resonance phenomenon after resetting is canceled. Then, generation of noise current caused by the self-resonance phenomenon is reduced.Type: ApplicationFiled: February 20, 2015Publication date: November 16, 2017Applicant: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Hiroshi Kunitama
-
Patent number: 9806629Abstract: In an inverter circuit, more particularly in a single-phase inverter, soft switching is performed with a simple configuration to prevent switching loss of a switching element. A resonance circuit is configured by a resonant capacitor provided on the power supply side of a bridge circuit constituting a single phase inverter, a resonant inductor provided on the output side of the bridge circuit, and the bridge circuit. A resonance current passing through the resonance circuit allows zero voltage switching (ZVS) and zero current switching (ZCS) to be implemented at the rising time of main switching elements constituting the bridge circuit, and the zero voltage switching is implemented by means of zero voltage of the resonant capacitor at the falling time of the main switching elements constituting the bridge circuit.Type: GrantFiled: December 26, 2013Date of Patent: October 31, 2017Assignee: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Shinichi Kodama, Toshiyuki Adachi
-
Publication number: 20170279364Abstract: An excessive voltage rise of load voltage, caused by an impedance mismatching on a transmission path, is prevented, and high-frequency power is regenerated. A parallel impedance is connected to the transmission path during the voltage rise, thereby regenerating voltage caused by a standing wave and preventing excessive load voltage, together with enhancing energy usage efficiency. Establishing the parallel impedance for the load impedance, on the transmission path between the high-frequency amplifier circuit of the high-frequency power supply device and the high-frequency load, reduces impedance at the connecting position to prevent generation of excessive voltage on the transmission path, and high-frequency power is regenerated from the transmission path by the parallel impedance.Type: ApplicationFiled: November 19, 2014Publication date: September 28, 2017Applicant: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Ryosuke Ohma
-
Patent number: 9699878Abstract: In detecting the unignited state of plasma based on a reflected wave, false detection during a normal plasma ignition time is prevented so as to detect the unignited state during plasma abnormality. When a pulse output is supplied to a plasma load by pulse driving from an RF power source, the unignited state of plasma abnormality is detected on the basis of the continuous state of the reflected wave, whereby a total reflected wave generated in the unignited state during plasma abnormality is detected in distinction from the reflected wave generated in the normal ignited state. With this configuration, in detecting the unignited state by comparing a peak value of the reflected wave with a threshold, it is possible to prevent that a reflected wave generated in the normal ignited state is erroneously detected as the total reflected wave that is generated in the abnormal unignited state.Type: GrantFiled: December 26, 2013Date of Patent: July 4, 2017Assignee: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Ryosuke Ohma
-
Patent number: 9621064Abstract: In a voltage-type DC power supply provided with an inverter, current supply from the inverter to the load side is suppressed when arc is generated. DC output from the voltage-type DC power supply is suspended and resumed: upon suspending the DC output, the chopper is separated from the inverter, thereby suppressing excessive current to the load when arc is generated, allowing the arc to be extinguished at high speed, and holding the current passing through the chopper in the form of circulating current. Upon restarting the inverter, the circulating current being held is supplied to the load, thereby reducing a delay of supply of DC power to the load at the time of resuming the DC output from the voltage-type DC power supply.Type: GrantFiled: December 26, 2013Date of Patent: April 11, 2017Assignee: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Shinichi Kodama, Toshiyuki Adachi
-
Patent number: 9590565Abstract: In a class-D amplifier, oscillation phenomenon is suppressed in a high RF range and surge voltage is reduced. An oscillation absorption circuit is connected on the power supply side of the class-D amplifier circuit, and the class-D amplifier circuit and thus connected oscillation absorption circuit equivalently configure an oscillation circuit. Resistance provided in the oscillation absorption circuit is assumed as damping resistance of the oscillation circuit, thereby suppressing the oscillation phenomenon and reducing the surge voltage. The oscillation absorption circuit is made up of the RL parallel circuit of resistance and inductance. The oscillation absorption circuit and the class-D amplifier circuit constitute the oscillation circuit, and the resistance of the oscillation absorption circuit constitutes the damping resistance of the oscillation circuit in the high RF range.Type: GrantFiled: December 26, 2013Date of Patent: March 7, 2017Assignee: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Ryosuke Ohma
-
Publication number: 20160308457Abstract: In an inverter circuit, more particularly in a single-phase inverter, soft switching is performed with a simple configuration to prevent switching loss of a switching element. A resonance circuit is configured by a resonant capacitor provided on the power supply side of a bridge circuit constituting a single phase inverter, a resonant inductor provided on the output side of the bridge circuit, and the bridge circuit. A resonance current passing through the resonance circuit allows zero voltage switching (ZVS) and zero current switching (ZCS) to be implemented at the rising time of main switching elements constituting the bridge circuit, and the zero voltage switching is implemented by means of zero voltage of the resonant capacitor at the falling time of the main switching elements constituting the bridge circuit.Type: ApplicationFiled: December 26, 2013Publication date: October 20, 2016Applicants: KYOSAN ELECTRIC MFG. CO., LTD., KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo YUZURIHARA, Shinichi KODAMA, Toshiyuki ADACHI
-
Publication number: 20160295675Abstract: In detecting the unignited state of plasma based on a reflected wave, false detection during a normal plasma ignition time is prevented so as to detect the unignited state during plasma abnormality. When a pulse output is supplied to a plasma load by pulse driving from an RF power source, the unignited state of plasma abnormality is detected on the basis of the continuous state of the reflected wave, whereby a total reflected wave generated in the unignited state during plasma abnormality is detected in distinction from the reflected wave generated in the normal ignited state. With this configuration, in detecting the unignited state by comparing a peak value of the reflected wave with a threshold, it is possible to prevent that a reflected wave generated in the normal ignited state is erroneously detected as the total reflected wave that is generated in the abnormal unignited state.Type: ApplicationFiled: December 26, 2013Publication date: October 6, 2016Applicant: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Ryosuke Ohma
-
Patent number: 9450519Abstract: A DC power source to supply DC power to a plasma generator is configured as a simple and small-sized device that forms high voltage for generating a plasma discharge. A step of passing a short-circuit current for extremely short time through the voltage source step-down chopper provided in the DC power source and accumulating energy in a reactor is performed repeatedly more than once, so as to discharge the energy accumulated in the reactor to the output capacitance and raise the output voltage sequentially, thereby boosting the voltage up to the ignition set voltage. The short-circuit current is formed by a switching element of a boosting circuit provided in the DC power source. Boosting the voltage at the output terminal by accumulating and discharging the short-circuit current is repeated to raise the voltage at the output terminal of the DC power source up to the ignition set voltage.Type: GrantFiled: December 26, 2013Date of Patent: September 20, 2016Assignee: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Shinichi Kodama, Toshiyuki Adachi
-
Patent number: 9451687Abstract: A high-frequency power supply device is provided with a plasma ignition step that supplies pulse power to ignite plasma, and drive power supply step to supply drive power for maintaining the plasma being generated. In the plasma ignition step, an ignition pulse being applied in an ignition pulse output operation is configured as including a main pulse that induces ignition, and a prepulse with lower power than the power of the main pulse and being applied at a stage prior to the main pulse. Since the ignition pulse is configured as including the main pulse and the prepulse, this enables protection of a high-frequency power source against reflected wave power, as well as reliably igniting the plasma.Type: GrantFiled: March 12, 2014Date of Patent: September 20, 2016Assignee: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Ryosuke Ohma
-
Publication number: 20160204698Abstract: A DC power source to supply DC power to a plasma generator is configured as a simple and small-sized device that forms high voltage for generating a plasma discharge. A step of passing a short-circuit current for extremely short time through the voltage source step-down chopper provided in the DC power source and accumulating energy in a reactor is performed repeatedly more than once, so as to discharge the energy accumulated in the reactor to the output capacitance and raise the output voltage sequentially, thereby boosting the voltage up to the ignition set voltage. The short-circuit current is formed by a switching element of a boosting circuit provided in the DC power source. Boosting the voltage at the output terminal by accumulating and discharging the short-circuit current is repeated to raise the voltage at the output terminal of the DC power source up to the ignition set voltage.Type: ApplicationFiled: December 26, 2013Publication date: July 14, 2016Applicant: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Shinichi Kodama, Toshiyuki Adachi
-
Publication number: 20160165713Abstract: A high-frequency power supply device is provided with a plasma ignition step that supplies pulse power to ignite plasma, and drive power supply step to supply drive power for maintaining the plasma being generated. In the plasma ignition step, an ignition pulse being applied in an ignition pulse output operation is configured as including a main pulse that induces ignition, and a prepulse with lower power than the power of the main pulse and being applied at a stage prior to the main pulse. Since the ignition pulse is configured as including the main pulse and the prepulse, this enables protection of a high-frequency power source against reflected wave power, as well as reliably igniting the plasma.Type: ApplicationFiled: March 12, 2014Publication date: June 9, 2016Applicant: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Ryosuke Ohma
-
Publication number: 20160141971Abstract: In a voltage-type DC power supply provided with an inverter, current supply from the inverter to the load side is suppressed when arc is generated. DC output from the voltage-type DC power supply is suspended and resumed: upon suspending the DC output, the chopper is separated from the inverter, thereby suppressing excessive current to the load when arc is generated, allowing the arc to be extinguished at high speed, and holding the current passing through the chopper in the form of circulating current. Upon restarting the inverter, the circulating current being held is supplied to the load, thereby reducing a delay of supply of DC power to the load at the time of resuming the DC output from the voltage-type DC power supply.Type: ApplicationFiled: December 26, 2013Publication date: May 19, 2016Applicant: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Shinichi Kodama, Toshiyuki Adachi
-
Patent number: 9216749Abstract: An onboard system transmits a train occupancy range based on a measured train position to a ground system. The ground system provisionally detects the occupancy state of each block section based on the train occupancy range acquired from the onboard system. Exit detection points (Qh, Qr) are set at a position outside each block section. It is determined that the train has left the block section when the entirety of the train occupancy range has passed the exit detection point (Qh, Qr). When the provisional detection result indicates that the detection target block section is not occupied, and it has been determined that the train has left the detection target block section, it is determined that the detection target block section is not occupied.Type: GrantFiled: August 7, 2013Date of Patent: December 22, 2015Assignee: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Tomonori Itagaki, Kaoru Oshima, Tamotsu Yokoyama, Kenji Mizuno
-
Publication number: 20150333708Abstract: In a class-D amplifier, oscillation phenomenon is suppressed in a high RF range and surge voltage is reduced. An oscillation absorption circuit is connected on the power supply side of the class-D amplifier circuit, and the class-D amplifier circuit and thus connected oscillation absorption circuit equivalently configure an oscillation circuit. Resistance provided in the oscillation absorption circuit is assumed as damping resistance of the oscillation circuit, thereby suppressing the oscillation phenomenon and reducing the surge voltage. The oscillation absorption circuit is made up of the RL parallel circuit of resistance and inductance. The oscillation absorption circuit and the class-D amplifier circuit constitute the oscillation circuit, and the resistance of the oscillation absorption circuit constitutes the damping resistance of the oscillation circuit in the high RF range.Type: ApplicationFiled: December 26, 2013Publication date: November 19, 2015Applicant: KYOSAN ELECTRIC MFG. CO., LTD.Inventors: Itsuo Yuzurihara, Satoshi Aikawa, Ryosuke Ohma