Abstract: The pulse modulated RF power control method includes an output amplitude control step for controlling amplitude of a pulse output, and a duty control step for controlling a duty ratio of the pulse output. The output amplitude control step performs a constant amplitude control to control an amplitude value of the pulse output so that the amplitude value becomes equal to a set amplitude value. The constant amplitude control according to the output amplitude control, for instance, gives a feedback of the amplitude value of the pulse output outputted by the power control, obtains a difference value between the feedback value and the set amplitude value, and controls the amplitude value of the pulse output so that the difference value becomes zero.

Abstract: The present invention is directed to an apparatus for suppressing abnormal electrical discharge used for vacuum equipment which supplies power from a high-frequency power source to a plasma reaction chamber and executes a film formation process, provided with a power controller for controlling the high-frequency power source based on a deviation between a power command value and a power feedback value, and a cutoff controller for cutting off the power supply from the high-frequency power source to the plasma reaction chamber, based on a detection of the abnormal electrical discharge within the plasma reaction chamber. The cutoff controller exercises a first handling cutoff control and a second handling cutoff control, each having a different cutoff time. The first handling cutoff allows ions to remain in the plasma reaction chamber, and exercises the cutoff control over the high-frequency power source within a time duration which allows an arcing element to disappear.

Abstract: An instantaneous voltage-drop compensation circuit including: a first voltage detector detecting three-phase voltages to be input to a power converter converting three-phase AC to DC based on control pulse signals, and outputting three-phase voltage signals; a first three-phase to two-phase converter converting the detected signals to two-phase voltage signals; a first current detector detecting three-phase currents to be input to the power converter and outputting three-phase current signals; a second three-phase to two-phase converter converting the detected current signals to two-phase current signals; a first subtracter generating a first deviation signal from input current command signals and the two-phase current signals; an input current controller generating input current control signals based on the first deviation signal; and a first adder adding the two-phase voltage signals to the input current control signals, to generate control pulse signals for the power converter.

Abstract: An instantaneous voltage-drop compensation circuit including: a first voltage detector detecting three-phase voltages to be input to a power converter converting three-phase AC to DC based on control pulse signals, and outputting three-phase voltage signals; a first three-phase to two-phase converter converting the detected signals to two-phase voltage signals; a first current detector detecting three-phase currents to be input to the power converter and outputting three-phase current signals; a second three-phase to two-phase converter converting the detected current signals to two-phase current signals; a first subtracter generating a first deviation signal from input current command signals and the two-phase current signals; an input current controller generating input current control signals based on the first deviation signal; and a first adder adding the two-phase voltage signals to the input current control signals, to generate control pulse signals for the power converter.

Abstract: A series circuit of a first main transistor 4 and a first main diode 6 is connected across a DC input voltage source 1, and a filter capacitor 13 and a series circuit of a second main diode 12 and a second main transistor 8 are connected in parallel with the output load side. A filter reactor 7 is connected between the juncture of the first main transistor 4 and the first main diode 6 in the series circuit and the juncture between the second main diode 12 and the second main transistor 8 in the series circuit. Resonant capacitors 5 and 9 in effect are connected across the collector-emitter path of the first and second main transistors 4 and 8, respectively. In operations other than that with small load current, when the first and second main transistors 4 and 8 are turned off, the collector currents therefrom are caused to flow to the resonant capacitors 5 and 9, respectively, thus obtaining soft switching.

Abstract: A power supply apparatus for generating a plasma for supplying a high-frequency power to a plasma generating device which is a load. The power supply apparatus comprises: a DC power supply; a power conversion circuit which comprises an amplifier circuit of D-class comprising a plurality of switching elements, and which converts a DC power output of the DC power supply to a high-frequency power to output; and a load impedance conversion circuit which converts a load impedance to a predetermined delayed load, wherein the power supply apparatus is adapted to supply the high-frequency power output from the power conversion circuit to a plasma generating device through the load impedance conversion circuit.

Abstract: A DC power supply apparatus for supplying a DC power to a plasma generating device, includes: an input section for converting an inputted AC power into a DC power; a current type of inverter connected with a next stage of the input section; a transformer having a primary winding and a secondary winding, the primary winding being connected with the current type of inverter; a rectifying section for rectifying an AC power generated in the secondary winding of the transformer; and a smoothing circuit for smoothing the rectified power which is rectified by the rectifying section; wherein an electric energy to be supplied to the plasma generating device is controlled by controlling a switching operation of the current type of inverter as a current source.

Abstract: A power supply apparatus for generating a plasma for supplying a high-frequency power to a plasma generating device which is a load. The power supply apparatus comprises: a DC power supply; a power conversion circuit which comprises an amplifier circuit of D-class comprising a plurality of switching elements, and which converts a DC power output of the DC power supply to a high-frequency power to output; and a load impedance conversion circuit which converts a load impedance to a predetermined delayed load, wherein the power supply apparatus is adapted to supply the high-frequency power output from the power conversion circuit to a plasma generating device through the load impedance conversion circuit.

Abstract: A DC power supply apparatus for supplying a DC power to a plasma generating device, includes: an input section for converting an inputted AC power into a DC power; a current type of inverter connected with a next stage of the input section; a transformer having a primary winding and a secondary winding, the primary winding being connected with the current type of inverter; a rectifying section for rectifying an AC power generated in the secondary winding of the transformer; and a smoothing circuit for smoothing the rectified power which is rectified by the rectifying section; wherein an electric energy to be supplied to the plasma generating device is controlled by controlling a switching operation of the current type of inverter as a current source.

Abstract: An impedance matching device provided between a high-frequency generator and a load device matches an impedance of the high-frequency generator with an impedance of the load device and includes at least a coupled circuit which comprises a core, and a main winding and a control winding which are wound around the core. The coupled circuit changes an impedance of the impedance matching device by changing an inductance value of the main winding which depends on a magnitude of direct current flowing in the control winding.

Abstract: A method of controlling a current resonant parallel type switching regulator comprises providing a current circulating circuit for preventing a circuit loss increasing phenomenon from occurring due to an increase in a resonant current caused by an increase in a resonant voltage when an output load current is reduced, forming a closed circuit which connects the opposite terminals of a resonant circuit for inverting the polarity of the charge on the resonant circuit once, and then starting the operation of the regulator. The resonant current is reduced so that an excessive power is not supplied at a low load. Stresses on the switching elements and circuit losses are minimized.