Abstract: A rotating head (11) for crystal pulling systems (1) according to Czochralski has a reference platform (16) which is able to rotate around a vertical rotation axis (A--A) with a vertical feed-through opening (25) for a pulling cable (13) that can be wound up and a drive assembly (23) for driving a horizontal shaft (22). A winding drum (15) with a helical winding groove (29) for the pulling cable is located on this shaft in a fixed manner so it cannot rotate, but can be moved axially. In order to avoid abrasion and contamination and to accurately guide the cable (13), a helical guiding element (30) with the same pitch as the winding groove is located on the horizontal shaft (22) at a location remote from the vertical rotation axis (A--A). This guiding element is able to rotate with the horizontal shaft.

Abstract: The invention relates to a vacuum pump (1) with an oil separator (42) connected downstream of its outlet (33) and with a duct (45, 46) through which the oil separated in the oil separator (42) is returned to the vacuum pump (1); to feed back the oil in a simple manner, the oil feed duct (45, 46) opens into a duct (47) that supplies gas ballast to the pump (1).

Abstract: A friction vacuum pump (1) is provided with pump sections of different designs, of which the pump section on the inlet side consists of turbomolecular pump stages (14, 15) and a further pump section of Siegbahn stages (16, 17) with spiral grooves (19), whereby the active pumping surfaces of the Siegbahn stages are formed by facing surfaces of an annular rotor disc and an annular stator disc (16, 17). To simplify the production of such a pump, it is proposed that the annular stator discs (16) have spiral grooves (19).

Abstract: The invention relates to a process for operating a controlled heat conductance vacuum gauge with a measuring cell (18) comprising a Wheatstone bridge (1) with supply voltage (12, 13) and measurement voltage terminals (14, 15), a power supply and measuring instrument (21) and a connecting cable (19) containing several conductors and to a circuit therefor; in order to prevent errors of measurement caused by connecting cables (19) of different lengths and to automate cable length equalization it is proposed that the voltage of a power supply terminal (12, 13) of the Wheatstone bridge (1) in the measuring cell (18) be recorded without current via one (26) of the conductors of the connecting cable (19) and taken into account in the formation of the measurement value.

Abstract: A plate made of silicate glass (glass master) (3) is provided with a pressing surface (surface coat) carrying the sound recording in the form of raised contours formed from a photoresist (5) with a layer of primer (adhesion promotor) (4) to hold the photoresist layer (5) to the glass plate (3). A first metal layer (6) is deposited on the photoresist (5) from a sputter target which consists of a NiV alloy; and a protective layer (7) of nickel is electrolytically deposited on the first layer. The metal master (8) consisting of first layer (6) and protective layer (7) is pulled from the photoresist layer (5).

Abstract: The invention relates to a friction vacuum pump (1) with a housing (2, 3), a rotor (8) and a rotor bearing (9) which is supported in the housing (2, 3) via a sleeve-like support (21). In order to obtain a precise support which nonetheless permits slight oscillations in the rotating system, it is proposed that the sleeve-like support (21) is in turn supported in the housing (2, 3) via several, preferably three, substantially axially extending rods (26).

Abstract: The invention relates to a capillary tube (1) determining the leakage rate for a test leak; in order to simplify its production and reduce the risk of breakage, it is proposed that the capillary tube (1) be a prior art quartz capillary tube encased in plastic. A holder joined to one end of the capillary tube by a removable connecting coupler has a nozzle for introducing a test sample into the tube.

Abstract: The invention relates to a test gas detector, preferably for leak detection instruments, with a selective, preferably test-gas-permeable inlet system (6) and with a device (5) recording the presence of test gas; to reduce the complexity in the production of the vacuum it is proposed that the test gas recorder (5) comprise a gas consuming vacuum gauge (8).

Abstract: A method of operating a claw-type vacuum pump with two or more stages, each of which has a suction chamber with a pair of claw rotors and end-located suction and discharge ports. To avoid the possibility of liquids affecting operation of the pump, the invention proposes that the pump is operated without internal compression and that the gases emerging from at least one stage are cooled.

Abstract: Modular vacuum system includes functional units arranged in tandem to form two parallel transport paths which connect at one end of the system. Each unit includes a housing milled from a single block of metal having external walls, an internal wall, and side-by-side openings which align with side-by-side openings in an adjacent unit.

Abstract: Apparatus for coating substrates 31, 31", . . . in a vacuum chamber 2 including a substrate carrier 30 disposed therein and a device 29 for generating a first plasma cloud 28 and, further, including magnets 26, 27 directing the plasma cloud 28 onto the surface of the substrates 31, 31" . . . wherein this device for generating the plasma cloud 28 has an election emitter 11 and a downstream tubular anode 38, the anode has an inlet 10 for the process gas to ignite the plasma and, further, the device is provided with magnets 4, 7 for directing and guiding the plasma through the anode tube 38 into the process chamber 43 and including a device for generating atoms, molecules or clusters of the materials for producing a layer on the substrates 31, 31", . . . , preferably an electron beam evaporator 37 from which the evaporated or sputtered material 33 can be directly applied onto the substrates 31, 31" . . . .

Abstract: In a moisture sensor (1), the effective sensor field (4) is formed by two sensor elements (8a, 8b,) having interdigitating parallel tracks. These sensor elements consist of layers of a metal nitride compound, especially a chromium-nitrogen compound, deposited by means of magnetron cathode sputtering or glow discharge onto a dielectric substrate (2), the metal nitride layers being deposited onto the substrate surface which has first been cleaned by ion sputtering. These sensor element layers (8a, 8b) have a high hardness of about 2,000 on the Vickers scale, as a result of which the sensor elements (8a, 8b) are highly resistant to abrasive wear such as that caused by windshield wipers or scratching from ice. The moisture sensor can be produced with a low electrical surface resistivity of <100 ohms.quadrature. and is chemically stable with respect to environmental effects such as salt water and/or windshield cleaning fluids.

Abstract: A gear motor (1), with an electric motor (4) whose rotor (7) has a hollow shaft (8), drives, through at least one gear box (26) with at least one drive step, at least one load. For the purpose of compact configuration combined with low vibration, there is coaxially disposed in the hollow shaft (8) an output shaft (19) which can be shifted selectively by means of a first clutch (24) to the hollow shaft (8), and by means of a second clutch (16) via the gear box (26) to the hollow shaft (8). Preferably the clutches are configured as magnetic clutches, and again preferably the first clutch (24) is disposed for the direct shifting of the hollow shaft (8) to the output shaft (19) at the one end of the hollow shaft (8), and the second clutch (16) at the other end of the hollow shaft (8). The gear motor (1) is used preferentially for driving rotary parts in crystal pulling apparatus.

Abstract: An AC voltage source connected to at least one cathode is switched off rapidly upon the occurrence of a critical number of so-called "microarcs" which precede a "large arc". In order to be able to differentiate between large arcs and microarcs, a special counting and evaluation device is provided.

Abstract: In an apparatus for the transport of discoidal substrates (3, 3', . . . ) through a treatment station or from a first to a second processing station (4 and 5, respectively) of a vacuum coating apparatus a motor unit (6) is provided, having three planar, positive conveyors driven by the latter, each having at least two sprockets (10, 10' and 12, 12') and a cogbelt (13, 14) guided over each sprocket pair, two of these conveyors being disposed to one another such that their sprockets (10, 10') extend in a common plane, the sprockets (12, 12') of a third conveyor extending in a plane which runs at right angles to the plane of the sprockets (10, 10') of the other two conveyors, and all three of the parallel strands of the three conveyors, which are at an angle to one another, being tangent to the outside edge of circular discoidal substrates (3, 3', . . .

Abstract: In an apparatus for the transfer of substrates (9) from an initial station (3) through several process stations (4 to 8) and back to this initial station (3), manipulators (10 to 14) having pivoting gripper arms (15 to 19) and carousel transfer systems (20,21) for the transfer of the substrates (9) are provided. One of the carousels (20) provided with substrate holders (22) cooperates both with a two-armed first manipulator (11) and with a two-armed second manipulator (10). The second manipulator (10) lifts several substrates (9) simultaneously from the first carousel (20) in one period of time and feeds them to the corresponding second process station (5) which is configured for the simultaneous processing of several substrates.

Abstract: The invention relates to a process for operating a regulated heat conduction vacuum gauge with a Wheatstone bridge (1) powered by a controllable supply voltage and a gauge filament (6) and a resistance (9) as two of its components among others, designed to be temperature-dependant to compensate for interference effects of the ambient temperature on the gauge filament (6) and to a suitable circuit for implementing this process; it is proposed, in order to improve and simplify the temperature compensation, that, by linking various electrical measurements of the bridge (1) or by equivalent approximation systems, the value or the temperature of the temperature-dependant resistance (9) be found and taken into account in determining the pressure measurements (drawing FIG. 2).

Abstract: A lock valve disposed between a pulling pot and a lock chamber is opened at the start of the pulling process and thereby uncovers a lock entrance for the crystal that is to be pulled, and together with a gasket closes the lock entrance after the end of the pulling process and thereby hermetically separates the pulling pot from the lock chamber. The gasket (9) is protected during the pulling of the crystal by a guard (15, 16) against the thermal radiation of the hot crystal.

Abstract: The invention relates to a process of providing a scratch-resistant coating for a lens made of an optical material comprising synthetics. In order for the synthetic material, for example a CR 39, to be protected against scratches, a very thin adhesion layer of SiO is applied first, and is subsequently provided with a thick SiO.sub.2 layer. Both layers are deposited in a vacuum chamber which comprises both a thermal vaporizer for vaporizing the coating materials and a plasma source for irradiating the substrate simultaneously with application of the vaporized coating material.

Abstract: Lenses are brought individually or in pairs on a transport device (12) to a continuous vacuum apparatus (1) equipped with a rotating substrate carrier (3). The eyeglass lenses (13) are introduced through a system of locks (15) into the continuous vacuum apparatus (1), where they are coated in at least one controllable coating station (5, 6, 7) with at least one transparent layer and then sent back to the transport device (12). The eyeglass lenses (13) are given codes (18), and the codes are read by a code reader (19). The coating parameters of the individual coating stations (5, 6, 7) and the drive of the substrate carrier (3) are controlled by the code reader (19).