Patents Assigned to Leybold Aktiengesellschaft
  • Method for cleaning material contaminated with greasy or oily substances
    Patent number: 5401321
    Abstract: The parts are heated by conduction and radiation while the chamber is evacuated, whereupon the chamber is sealed air-tight and the parts are also heated by condensation of vapors from the grease and oil. When the parts reach a constant temperature the chamber is again evacuated, causing the temperature of the parts to drop as condensate thereon evaporates. Finally, the chamber is returned to atmospheric pressure and the cleaned parts are removed.
    Type: Grant
    Filed: March 31, 1994
    Date of Patent: March 28, 1995
    Assignee: Leybold Aktiengesellschaft
    Inventors: Franz Hugo, Johannes Mosch, Erwin Wanetzky
  • Apparatus for coating a substrate by magnetron sputtering
    Patent number: 5399252
    Abstract: A pair of magnetron cathodes in an evacuable coating chamber are connected to the outputs of the secondary winding of a transformer, the primary winding being connected to the outputs of a medium frequency A.C. generator. An oval target is mounted on each cathode and surrounded by stainless steel bars. As an alternative the bars may be configured as plates connected to ground and mounted to the target by insulating spacers.
    Type: Grant
    Filed: November 8, 1993
    Date of Patent: March 21, 1995
    Assignee: Leybold Aktiengesellschaft
    Inventors: Michael Scherer, Wolfram Maass, Joachim Szczyrbowski
  • Device for generating a plasma by means of cathode sputtering and microwave-irradiation
    Patent number: 5397448
    Abstract: The invention relates to a device for generating a plasma by means of cathode sputtering and microwave irradiation. This device comprises a magnetron cathode over which is placed a microwave cavity resonator at the atmosphere side. At the vacuum side the device comprises laterally delimiting shielding sheets which on their inside are provided with a magnet which generates a magnetic field perpendicular to the surface of the target of the magnetron cathode.
    Type: Grant
    Filed: August 17, 1993
    Date of Patent: March 14, 1995
    Assignee: Leybold Aktiengesellschaft
    Inventors: Roland Gesche, Rudolf Latz
  • Apparatus and method for cooling films coated in a vacuum
    Patent number: 5395647
    Abstract: A wetting unit provides a contact agent between the coating roll and the film surface before coating by a thermal source.
    Type: Grant
    Filed: April 30, 1993
    Date of Patent: March 7, 1995
    Assignee: Leybold Aktiengesellschaft
    Inventor: Thomas Krug
  • Evaporation method of forming transparent barrier film
    Patent number: 5378506
    Abstract: This invention relates to a source material for vapor deposition, which is useful for forming a magnesium oxide thin film by vacuum vapor deposition process, and to a method of forming a transparent barrier film by using the magnesium oxide source material. The source material is composed of a magnesium oxide having a bulk density of 2.5 g/ml or more. This magnesium oxide can be obtained by sintering or fusing magnesium oxide material. For producing a transparent barrier film having a gas barrier property, this magnesium oxide is vapor-deposited on a surface of a transparent plastic base film by means of vacuum vapor deposition. The volume shrinkage or cracking of the evaporation source material can be avoided, thereby stabilizing the evaporation and prolonging duration of the evaporation. Further, it is possible to utilize a high power of electron beam.
    Type: Grant
    Filed: May 10, 1993
    Date of Patent: January 3, 1995
    Assignees: Toppan Printing Co., Ltd., Leybold Aktiengesellschaft
    Inventors: Nobuhiko Imai, Mamoru Sekiguchi, Mitsuru Kano, Thomas Krug, Gerhard Steiniger, Andreas Meier
  • Apparatus for coating substrates using a microwave ECR plasma source
    Patent number: 5378284
    Abstract: An apparatus and a method for producing layers on the surfaces of workpieces, preferably on spotlight, or headlight, reflector inserts formed of plastic, includes an apparatus having a vacuum chamber that can be operated as a batch system with a PCVD coating process, where a microwave ECR plasma coating source is used, and the workpieces to be coated are secured to a rotary cage arranged in the vacuum chamber. The rotary cage can be conducted past a microwave coating source with a frequency-matched and phase-matched planetary motion. Such a coating process can be used in a vacuum chamber, under plasma, and at pressures below 2.times.10.sup.-2 mbar.
    Type: Grant
    Filed: June 30, 1992
    Date of Patent: January 3, 1995
    Assignee: Leybold Aktiengesellschaft
    Inventors: Michael Geisler, Rudolf Koetter-Faulhaber, Michael Jung
  • Apparatus for holding disk-shaped substrates in the vacuum chamber of a coating or etching apparatus
    Patent number: 5376180
    Abstract: A rectangular substrate bed has on its top surface a row of disk-shaped holding members on which disk-shaped substrates are laterally positioned by a frame member having circular openings which expose the substrates. Seals are provided on each holding member so that substrates can be held in place by vacuum. The frame member is fixed to the substrate bed by clamps having pins which are received in bores at opposite ends of the substrate bed and the frame member.
    Type: Grant
    Filed: February 25, 1994
    Date of Patent: December 27, 1994
    Assignee: Leybold Aktiengesellschaft
    Inventor: Peter Mahler
  • Target for cathode sputtering
    Patent number: 5372694
    Abstract: Target tiles formed from the material to be sputtered each have a parallelepipedal configuration and are each soldered, welded or cemented fixedly to a target base plate of similar dimensions, each target base plate being slightly smaller in its length (b) and slightly larger in its width (a) than the corresponding target tile, while the two marginal portions of the target base plates that project in each case beyond the lateral edges of the target tiles are fixed to the cathode body (3) by means of clamping cleats.
    Type: Grant
    Filed: October 27, 1993
    Date of Patent: December 13, 1994
    Assignee: Leybold Aktiengesellschaft
    Inventor: Joachim Szczyrbowski
  • Vacuum coating apparatus
    Patent number: 5372693
    Abstract: A vacuum coating apparatus has a pot-like tank (2) against whose open side a portion of a substrate (1) can be held sealingly. In the tank (2) there is disposed a target (7). A shut-off plate (9) makes it possible after lowering the substrate (1) to hold this target (7) under vacuum in a source chamber (11) protected against intrusion of air.
    Type: Grant
    Filed: March 16, 1994
    Date of Patent: December 13, 1994
    Assignee: Leybold Aktiengesellschaft
    Inventors: Gunter Brauer, Ulrich Patz, Michael Scherer, Joachim Szczyrbowski
  • Tap closure for a vacuum-induction melting and casting furnace
    Patent number: 5372355
    Abstract: An apparatus for opening and closing a bottom tap opening in a vacuum induction melting and casting furnace with a movable closing body, a plug rod for example, and a drive unit for the displacement of the closing body, the closing body being made of ceramic material and connected by levers to a coupling element, which has a compression spring to limit the maximum closing force of the closing body, and is displaceable by an electric motor drive.
    Type: Grant
    Filed: August 23, 1993
    Date of Patent: December 13, 1994
    Assignee: Leybold Aktiengesellschaft
    Inventors: Alfred Henn, Michael Schafer
  • Leak detector
    Patent number: 5369982
    Abstract: An apparatus for detecting leaks in a test object having chamber walls, having a first and a second side subject to differential pressure produced by production of a partial vacuum on the first side, the detection being carried out by use of a test gas present on the second side of said chamber walls. The apparatus has a vacuum pump for providing the partial vacuum, a detector for detecting the test gas, a connecting means for connecting the apparatus to the test object, and a plurality of primary control valves for controlling the leak detection process. The improvement comprises at least one of the primary control valves being actuated by a driving cylinder and a driving piston, where the piston is actuated via pneumatic actuation which is provided by the vacuum pump while the test object is connected to the apparatus.
    Type: Grant
    Filed: November 20, 1991
    Date of Patent: December 6, 1994
    Assignee: Leybold Aktiengesellschaft
    Inventor: Ernst Holthaus
  • Magnetron cathode for a rotating target
    Patent number: 5364518
    Abstract: Magnets are arranged inside a rotating tubular target to form a racetrack-shaped plasma having two straight stretches parallel to the target axis and two end stretches connecting the straight stretches. In order to achieve uniform target erosion, the magnets are arranged so that the plasma is wider and therefore less intense over the end stretches than it is over the straight stretches.
    Type: Grant
    Filed: November 13, 1992
    Date of Patent: November 15, 1994
    Assignee: Leybold Aktiengesellschaft
    Inventors: Klaus Hartig, Anton Dietrich, Joachim Szczyrbowski
  • Dry-running twin-shaft vacuum pump
    Patent number: 5364245
    Abstract: Dry-running twin-shaft vacuum pump (1) with at least one pumping chamber (11, 12, 13), with a rotor pair (4-5, 6-7, 8-9) situated in the pumping chamber and borne by the shafts, and with a drive housing (21); in the pumping of toxic media, to limit the contaminated areas to components that are easy to assemble it is proposed that between the drive housing (21) and the adjoining pumping chamber (13) an intermediate plate be provided, which is traversed by the shafts (2, 3), contains the laterally exiting exhaust duct (52), and is releasable from the wall (17) of the drive housing (21).
    Type: Grant
    Filed: June 8, 1993
    Date of Patent: November 15, 1994
    Assignee: Leybold Aktiengesellschaft
    Inventors: Hartmut Kriehn, Lothar Brenner
  • Device for supplying a multi-stage dry-running vacuum pump with inert gas
    Patent number: 5356275
    Abstract: The invention relates to a system for supplying inert gas to a multi-stage, dry-running vacuum pump (1) with systems for distributing the inert gas to the pump stages. To be able to monitor the flow of the inert gas and/or influence the rate of flow, a modularly constructed apparatus (36) with inert gas inlet, inert gas outlets and inert gas conduits is proposed, which is equipped with monitoring components.
    Type: Grant
    Filed: September 1, 1993
    Date of Patent: October 18, 1994
    Assignee: Leybold Aktiengesellschaft
    Inventors: Lothar Brenner, Rudolf Bahnen
  • Apparatus for the insertion and removal of a mask through the airlock of a vacuum coating apparatus
    Patent number: 5354380
    Abstract: A plunger (14) is displaceably mounted in a vacuum chamber (42) and movable on a first linear path into the plane of substrate (20), for the mounting and for the transport of the mask (15) provided with a bore (32) receiving the plunger (14). A slide (41) having a forked extremity is movable from an airlock chamber (39) transverse to the first linear path to engage an annular flange of the mask (15). In a return movement the mask is transported into the removal airlock chamber (39) from which the mask is then removable by means of a removal plunger (48).
    Type: Grant
    Filed: December 7, 1993
    Date of Patent: October 11, 1994
    Assignee: Leybold Aktiengesellschaft
    Inventor: Jaroslav Zejda
  • Apparatus and method for selectively coating a substrate in strip form
    Patent number: 5350598
    Abstract: A drum is provided on its surface with depressions corresponding to the portions of a web not to be coated and is partially enclosed by a chamber in which separating agent is evaporated. The depressions capture vapor as the drum is rotated, and the web is passed over the drum where it is not enclosed by the chamber. Separating agent condenses on selective of the web correspond to the depressions, and a functional coating is subsequently applied. Thereafter the functional coating is removed from the areas where the separating agent was applied.
    Type: Grant
    Filed: December 13, 1993
    Date of Patent: September 27, 1994
    Assignee: Leybold Aktiengesellschaft
    Inventor: Siegfried Kleyer
  • Device for holding disk-shaped substrates in the vacuum chamber of a coating or etching apparatus
    Patent number: 5350455
    Abstract: A flat rectangular substrate bed (3) having opposed parallel endwalls (14) and parallel sidewalls (16) receives a pair of clamping jaws (4) each having an L-shaped cross-section with a short limb against each sidewall and a long limb extending halfway over the top surface of the substrate bed. The long limbs (6) have arcuate recesses (7) which cooperate to surround the substrates (2) and thereby center and hold them. The two clamping jaws (4) are held by end bars (11) which are tightly joined to the substrate bed (3) by means of pins (10) and (12) received in respective bores (9) in the jaws and (13) in the endwalls.
    Type: Grant
    Filed: December 1, 1993
    Date of Patent: September 27, 1994
    Assignee: Leybold Aktiengesellschaft
    Inventor: Peter Mahler
  • Magnet configuration with permanent magnets
    Patent number: 5345207
    Abstract: The invention relates to a magnet configuration with permanent magnets (5, 6) around a yoke (2, 3, 4) connecting these permanent magnets (5, 6). The magnetic field strength of this magnet configuration is varied thereby that in the region of the yoke (2, 3, 4) at least one rotatable body (8) is provided which comprises at least two spatially separated materials (9, 10) with different magnetic properties.
    Type: Grant
    Filed: December 24, 1992
    Date of Patent: September 6, 1994
    Assignee: Leybold Aktiengesellschaft
    Inventor: Thomas Gebele
  • Method and apparatus for the coating of substrates
    Patent number: 5340454
    Abstract: Method and apparatus for the coating of substrates (1, 1', . . . ), preferably by cathode sputtering in a vacuum apparatus consisting of at least one sputtering chamber (6) in which different coating systems can be applied to the preferably curved substrates to be coated (1, 1', . . . ), the substrates (1, 1', . . . ) can be moved in a direction B through the vacuum apparatus and pass through the sputtering chamber (6) repeatedly in direction B as well as in the opposite direction in the so-called multipass mode, the uncoated substrates (1, 1', . . . ) or substrate carriers (12, 11', . . . ) being combined before entering the sputtering chamber into groups of several, preferably two substrates (1, 1', . . . ) each, and these run simultaneously through the sputtering chamber (6) in the so-called dual multipass mode.
    Type: Grant
    Filed: July 28, 1993
    Date of Patent: August 23, 1994
    Assignee: Leybold Aktiengesellschaft
    Inventors: Christian Schaefer, Klaus Hartig
  • Dry-running vacuum pump
    Patent number: 5338167
    Abstract: The invention relates to a dry-running vacuum pump (1) with at least one vertically disposed shaft (2, 3) which is mounted in an upper bearing plate (14) by means of a lubricated rolling bearing (27) situated in an open-topped pot-like component (51); in order to reduce the number of gaps in the area of this bearing (27) it is proposed that with the open-topped pot-like component (51) there be associated an open-bottomed pot-like component (54) fastened to the housing, the wall (55) of which reaches into the pot-like component (51) on the shaft, the rolling bearing's ring (62) that is fixed to the housing being supported on the inside of the said wall.
    Type: Grant
    Filed: May 25, 1993
    Date of Patent: August 16, 1994
    Assignee: Leybold Aktiengesellschaft
    Inventor: Hanns-Peter Berges