Patents Assigned to Leybold-Heraeus GmbH
  • Patent number: 4101221
    Abstract: A process and apparatus for the photo-optical measurement of the absorption behavior of solid, liquid and gaseous media. The analysis medium and a comparison medium are exposed to two light beams. The light beams are broken up by a chopper means into a periodical sequence of light pulses and the measured difference of the beam attenuations in the analysis medium and comparison medium is evaluated in a circuit which is adjustable with regard to the intensity of the radiation from the optical light source and the sensitivity of the light receiver. The light pulses are divided by defined variation of their intensity into two different pulse series of which one series comprises measuring light pulses and the other series comprises control pulses.
    Type: Grant
    Filed: March 23, 1977
    Date of Patent: July 18, 1978
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventors: Gunter Schunck, Albert Randwo
  • Patent number: 4089505
    Abstract: In an oscillating valve in which a slide plate is subjected to a swinging movement between an opening position in which it is clear of a flow passage and a closing position in which it is inserted in the flow path, and, in its closing position, is applied against a sealing surface by a sealing force to block the flow path, a single drive device is provided to produce both the swinging movement and the sealing force and the sealing force is produced by moving the slide plate perpendicular to the sealing surface only after the slide plate has reached the closing position associated with its swinging movement.
    Type: Grant
    Filed: November 8, 1976
    Date of Patent: May 16, 1978
    Assignee: Leybold-Heraeus GmbH & Co. Kommandit-Gesellschaft
    Inventors: Fritz Anderle, Gerhard Frey, Lutz Grein, Uwe Reimpell, Friedrich Stark
  • Patent number: 4085022
    Abstract: A method for controlling the removal, by means of ion etching, of a thin layer or regions of the layer as determined by masks, from a substrate of a sample which has a chemical composition different than that of the layer to be removed. During the ion etching process, an electrical signal which changes after the removal of the thin layer is derived from the substrate or from its mount, or from an electrode disposed in the vicinity of said substrate and this electrical signal is utilized to control an arrangement which influences the ion bombardment of the surface of the sample.
    Type: Grant
    Filed: January 28, 1977
    Date of Patent: April 18, 1978
    Assignee: Leybold-Heraeus GmbH & Co. Kommandit-Gesellschaft
    Inventors: Reiner Wechsung, Jurgen Kirschner
  • Patent number: 4078897
    Abstract: Apparatus for producing monocrystals by potless zone melting, in which the monocrystal, setting out from a seed crystal, passes through a neck and a transitional zone into the main part of the monocrystal. A chamber is provided for the formation of a vacuum or a protective gas atmosphere plus a heating device for the production of the melting heat, driving means for the mechanical movements necessary for the crystal formation, a mounting for the seed crystal, and a supporting device which is applicable to the monocrystal beyond the neck, and a plurality of gripping bodies distributed about the circumference and applicable to the monocrystal radially on its substantially cylindrical surface the gripping bodies are disposed such that they first perform a radial approach to the monocrystal until a virtually force-free contact is made therewith, adapting themselves to the surface geometry and position of the monocrystal, whereupon the gripping force is increased and the gripping bodies are locked.
    Type: Grant
    Filed: April 12, 1976
    Date of Patent: March 14, 1978
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventors: Karl Jericho, Joachim Floymayr, Uwe Reimpell, Dieter Drechsel
  • Patent number: 4075414
    Abstract: The invention relates to a system for regulating the depth of immersion of melting electrodes in electrical slag remelting furnaces, consisting of an apparatus for the detection of the resistance and for changing this resistance upon the spatial displacement of the end of the electrode within the slag layer, a signal corresponding to the resistance being relayed to a regulating system for the electrode drive.
    Type: Grant
    Filed: November 26, 1975
    Date of Patent: February 21, 1978
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventor: Friedrich Werner Thomas
  • Patent number: 4067697
    Abstract: Device for introducing a specimen into and withdrawing the same from the interior of a chamber sealed from the surrounding environment. The device includes a test bar slidably and sealingly projecting through an opening in the chamber. The test bar has a first length portion which includes a specimen-supporting arrangement and which has a part that is in a sealing relationship with the opening in a first end position of the test bar in which the specimen-supporting arrangement is situated inside the chamber. The test bar further has a second length portion which has a part that is in a sealing relationship with the opening in a second end position of the test bar in which the specimen-supporting arrangement is situated externally of the chamber. A releasable coupling device detachably connects the two length portions of the test bar to one another.
    Type: Grant
    Filed: March 12, 1976
    Date of Patent: January 10, 1978
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventor: Hans-Dietrich Polaschegg
  • Patent number: 4061871
    Abstract: Electron gun for heating, melting and vaporizing purposes having an electron-emitting cathode, at least one beam-forming electrode associated with the cathode, an accelerating anode, an electromagnetic lens and a beam guiding-tube extending in the direction of the beam path and surrounded by an electromagnetic deflection system for the x-axis deflection and one for the y-axis deflection. An envelope tube is disposed outside of the deflection systems and is joined at its extremity to the end of the beam guiding tube by an end plate through which the pole shoes of the x-axis deflection system are brought. The end plate is inclined towards the cathode beginning from the pole shoes of the x-axis deflection system.
    Type: Grant
    Filed: April 29, 1976
    Date of Patent: December 6, 1977
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventors: Peter Sommerkamp, Walter Heil
  • Patent number: 4055984
    Abstract: A device adapted to detecting leaks in an article having readily deformable walls has conventional arrangements for performing a leak detection by overpressure or by vacuum and has a deformable backup wall for engagement with the walls of the article. The backup wall is, on its face oriented towards the article, so configured that between the backup wall and the article there is obtained a coherent fluidtight space which may be evacuated.
    Type: Grant
    Filed: July 14, 1976
    Date of Patent: November 1, 1977
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventor: Joachim Marx
  • Patent number: 4049039
    Abstract: An arrangement for the manufacture of solid forging blocks with manipulator pins in which an electro-slag remelt process is used for filling an ingot having a vertical bore hole. At least one consumable electrode is used, and the ingot with the vertical bore is placed on a block table having at least one power connection in the region of the block table and flush with a depression for slag start material. The filling of the core zone is started with this depression having a depth of substantially at least 25% of the diameter of the block bore. A movable starting disk is applied as a lower boundary of the depression, and the slag start material is placed on top of the disk. After formation of liquid slag, the depression is exclusively filled from material of the consumable electrode. The power connection to the starting disk is fed along during the entire remelt process.
    Type: Grant
    Filed: October 15, 1976
    Date of Patent: September 20, 1977
    Assignee: Leybold-Heraeus GmbH & Co. Kg
    Inventors: Helmut Theodor Grof, Jochen Schumann, Anton Wamser, Rainer Schumann, Werner Friedrich Thomas
  • Patent number: 4045707
    Abstract: System for the power control of high voltage electron beam generators having a cathode and a control electrode associated with the cathode. The system is provided with a high voltage isolation transformer with primary and secondary winding for supplying the control electrode with a control voltage. A system precedes the isolation transformer on the primary side and is adapted to generate square wave pulses susceptible of amplitude modulation. The pulse generator is designed such that the pulses are square wave impulses symmetrical with the null line. The isolation transformer is provided with a tertiary winding on the primary side and the primary winding receives input from an amplifier whose input is connected with the output voltage of the tertiary winding. A rectifier bridge is connected to the secondary winding.
    Type: Grant
    Filed: March 29, 1976
    Date of Patent: August 30, 1977
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventors: Thorn Gernot, Thomas Friedric-Wilhelm
  • Patent number: 4034256
    Abstract: An electron gun for heating, fusing and vaporizing having a high voltage portion, an electron emitting cathode and at least one beam forming electrode associated with the cathode. An accelerating anode, a beam guiding tube extending in the direction of the beam path and surrounded by a jacket tube and an electromatic lens are also provided. One or more deflection systems are positioned in the space formed between the beam guiding tube and the jacket tube. The beam guiding tube, the jacket tube, the electromatic lens and the deflection systems are contained in a single, replaceable unit which is joined by a plurality of hollow posts parallel to the gun axis to the high-voltage portion of the gun. The space for the electromagnetic lens and the deflection systems communicates with the atmosphere through at least one of the hollow posts.
    Type: Grant
    Filed: May 27, 1976
    Date of Patent: July 5, 1977
    Assignee: Leybold-Heraeus GmbH & Co.
    Inventors: Peter Sommerkamp, Walter Heil
  • Patent number: 4024291
    Abstract: An arrangement for regulating the vapor deposited layer build-up in the production of deposited optically active thin layers on substrates in a vacuum. The optical characteristics of the deposited layer are measured continuously and the measurements are converted into proportional electrical signals. These signals are differentiated twice, with the second derivative serving to provide the zero-axis crossings of the signals. The vapor deposition process is interrupted dependent on the zero-axis crossings.
    Type: Grant
    Filed: September 21, 1976
    Date of Patent: May 17, 1977
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventor: Ingo Wilmanns
  • Patent number: 4024376
    Abstract: A measuring device for determining the rate of evaporation of materials in vacuum systems, particularly for producing thin layers of precise thickness on substrates. An electrically conducting housing has an opening which can be aligned with the material to be evaporated. An electrode located within the housing and insulated therefrom, is connected to an evaluation device for the evaporation rate. The electrode is located outside the line of sight through the opening of the housing, and the electrode has a positive potential with respect to the housing. The current flowing between the housing and the electrode is applied to the evaluation device.
    Type: Grant
    Filed: June 13, 1975
    Date of Patent: May 17, 1977
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventor: Karl-Georg Redel
  • Patent number: 4023920
    Abstract: A turbomolecular vacuum pump has a housing, a vertically oriented hollow pump rotor situated in the housing, and a vertically upwardly oriented stub shaft affixed to the housing and extending into the hollow pump rotor. The pump rotor is supported on the stub shaft by a magnetic axial bearing and at least one magnetic radial bearing, all disposed in the space surrounded by the hollow pump rotor.
    Type: Grant
    Filed: September 26, 1974
    Date of Patent: May 17, 1977
    Assignees: Leybold-Heraeus GmbH & Co. KG, Societe de Propulsion-S.E.P.
    Inventors: Werner Bachler, Rudiger Frank, Helmut Habermann, Maurice Brunet
  • Patent number: 4020352
    Abstract: A system for irradiating flowable material has an irradiation chamber; inlet and outlet conduits for introducing the flowable material into and discharging it from the irradiation chamber. The latter includes a spiral passage for guiding the flowable material in a spiral path from the inlet conduit to the outlet conduit. A radiation source is supported within the irradiation chamber in the zone of the spiral passage for irradiating the material flowing therethrough.
    Type: Grant
    Filed: July 10, 1975
    Date of Patent: April 26, 1977
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventors: Peter Mahler, Gerhard Frey, Gotthard Lerch
  • Patent number: 3984088
    Abstract: A vaporizing crucible for vapor depositing systems, especially for electron beam heating, includes a plurality of side-by-side segments held in contact with one another by an adjustable compression device. The individual segments have between them layers of a resilient, electrically conductive material which forms a joint between adjacent segments. The segments are surrounded by a frame in which the adjustable compression device is positioned for the transfer of current and compressing the segments. A layer of resilient conductive material can also be positioned between the compression device and the lateral surfaces of the segments, extending perpendicular to the joints. The frame can also include a hollow base on which the segments rest. A layer of resilient, electrically conductive material can be positioned between the segments and the hollow base.
    Type: Grant
    Filed: October 6, 1975
    Date of Patent: October 5, 1976
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventor: Peter Sommerkamp
  • Patent number: 3976908
    Abstract: An electron beam generator with a linear cathode which has at least one end clamped to enable the cathode to move longitudinally. A beam forming electrode is at the same potential as the cathode and has an exit opening for the electron beam. The beam-forming electrode is provided with connection means to supply beam and heater voltage to the cathode. The clamps used to clamp the cathode, are connection contacts for the ends of the cathode and are outside of the contact points in the emission area of the cathode.
    Type: Grant
    Filed: February 5, 1975
    Date of Patent: August 24, 1976
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventor: Karl Georg Redel
  • Patent number: 3969314
    Abstract: In the formation of mixtures of plastic and fillers, the stability of the mixture is improved by preliminarily intensively predrying the fillers and then mixing the plastic and fillers together while maintaining the mixture completely free of moisture.
    Type: Grant
    Filed: July 3, 1974
    Date of Patent: July 13, 1976
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventor: Hans Grigull
  • Patent number: 3969042
    Abstract: A turbomolecular vacuum pump has a stator, a rotor having a vertical axis of rotation and disposed in the stator; a drive motor for rotating the rotor; a downwardly open, axially extending chamber in the rotor; a vertically upwardly oriented, stationarily supported stub shaft projecting into the rotor chamber; and axial, as well as radial gas bearings disposed within the rotor chamber for generating gas cushions between the rotor and the stub shaft.
    Type: Grant
    Filed: November 25, 1974
    Date of Patent: July 13, 1976
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventor: Werner Bachler
  • Patent number: 3938582
    Abstract: An arrangement for the continuous manufacture of metal ingots by progressive crystallization below a slag layer in a mold open at the bottom. Below the bottom edge of the mold, there are distributed along the periphery of the mold, several blocking elements moveable in the direction of the ingot surface. The edges and surfaces facing the ingot are adapted to the shape of the ingot cross section, and the blocking elements may be sectors of an annular ring.
    Type: Grant
    Filed: September 12, 1974
    Date of Patent: February 17, 1976
    Assignee: Leybold Heraeus GmbH & Co. KG
    Inventors: Wolfgang Schwartz-Domke, Helmut Grof, Anton Wamser