Patents Assigned to Leybold-Heraeus GmbH
  • Patent number: 4470767
    Abstract: In a vacuum pump having a housing presenting a suction side and a pressure side, a connecting line connected between the suction side and the pressure side and a weighted valve mounted in the connecting line and having a part which is movable to open the valve in order to place the suction and pressure sides in communication when a maximum permissible pressure difference between the suction and vacuum sides is exceeded, the valve is mounted so that the axis of movement of the valve part forms an angle of 45.degree. with the direction of the pumping action between the suction and pressure sides, whereby the weighted valve will function properly with the pump oriented to produce its pumping action in either the vertical or the horizontal direction.
    Type: Grant
    Filed: October 9, 1979
    Date of Patent: September 11, 1984
    Assignee: Leybold-Heraeus GmbH
    Inventors: Heinz Frings, Karl-Heinz Ronthaler
  • Patent number: 4469713
    Abstract: An arrangement for measuring and controlling the thickness of optically transparent coatings during their build-up on substrates in vacuum coating installations. The measurement is carried out by determining at least one reference value and at least one measured value for the transmission or reflection value of the coated object by using a measuring light beam, a monochromator, a photo-receiver, an amplifier and an analyzing circuit.
    Type: Grant
    Filed: August 25, 1982
    Date of Patent: September 4, 1984
    Assignee: Leybold-Heraeus GmbH
    Inventors: Horst Schwiecker, Alfons Zoller
  • Patent number: 4466940
    Abstract: A multicomponent alloy for targets employed in the sputter coating of gold layers, said alloy having 35% to 55%, preferably either 50% or 42%, non-aurous alloy components.
    Type: Grant
    Filed: August 9, 1982
    Date of Patent: August 21, 1984
    Assignees: Demetron Gesellschaftfur Electronik-Werstoffe mbh, Leybold-Heraeus GmbH
    Inventors: G. A. Horst Siewert, Horst Dietrich, Wolf-Dieter Munz, Jorg Goebel
  • Patent number: 4456433
    Abstract: A method for assembling a single-flow turbomolecular vacuum pump and a turbomolecular vacuum pump assembled by a method wherein the pump rotor, rotor shaft, antifriction bearings and motor armature are first assembled to form a unit, balanced outside of the pump casing, and thereafter introduced as a unit into the pump casing and mounted therein.
    Type: Grant
    Filed: September 18, 1981
    Date of Patent: June 26, 1984
    Assignee: Leybold Heraeus GmbH
    Inventors: Hans-Heinrich Henning, Hansen Pfaff
  • Patent number: 4450570
    Abstract: The invention concerns a vacuum arc melting and casting furnace comprising a vacuum chamber, a tilting crucible and a current connection leading to the bottom of the tilting crucible. This current connection consists of a fixed contact and of a co-operating contact arranged on the bottom of the crucible and movable with the tilting crucible. Also provided is an electrode rod for holding an electrode concentrically in relation to the tilting crucible.The fixed contact is secured on at least two current conductors which are substantially coaxial with the electrode rod or electrode. These conductors pass through the vacuum chamber from the top and extend past the tilting crucible, and their distance apart is such that the crucible can be tilted between them into the casting position.
    Type: Grant
    Filed: October 18, 1982
    Date of Patent: May 22, 1984
    Assignee: Leybold-Heraeus GmbH
    Inventors: Ernst Weingartner, Klaus Samietz
  • Patent number: 4447724
    Abstract: An apparatus for the chemical analysis of a sample ejects neutral and charged particles from the sample by ion bombardment from a primary ion source. An electric diaphragm passes only the ejected neutral particles for ioniziation in a plasma which is separate from the primary ion source and which serves only for the post-ionization of the neutral particles. The ionized particles are then analyzed by mass spectrometry. Charging of insulating samples by primary ions is prevented by rendering the diaphragm permeable to plasma electrons.
    Type: Grant
    Filed: January 7, 1982
    Date of Patent: May 8, 1984
    Assignee: Leybold Heraeus GmbH
    Inventor: Hans Oechsner
  • Patent number: 4435818
    Abstract: A method and apparatus for vacuum arc furnaces monitors the arc by spectrum analysis of the arc's light obtained with a radiation receiver. Upon the occurrence of spectrum lines indicating vaporization of the crucible material, the melting process is stopped or adjusted to extinguish the arc burning on the crucible which vaporized the crucible material for the spectrum analysis.
    Type: Grant
    Filed: May 25, 1982
    Date of Patent: March 6, 1984
    Assignee: Leybold-Heraeus GmbH
    Inventors: Otto Stenzel, Pierre Flecker
  • Patent number: 4428809
    Abstract: The invention concerns a method of and apparatus for forming electrically conductive transparent oxide coatings on water-containing substrates by magnetic-field reinforced cathodic atomization of a target hot-pressed from powdered oxide ceramic materials. The coatings formed have electrical conductivity.When the atomization process is carried out using direct-current voltages of between 150 and 600 volts and a power density of 3 to 15 and preferably 5 to 10 watts/cm.sup.2, the degree of pressing of the target is at least 75% of the density of the solid material and the atomization atmosphere is maintained at between 1.times.10.sup.-3 and 5.times.10.sup.-2 mbars with a composition of 2 to 20% oxygen, 40 to 70% hydrogen, and the remainder argon. Based upon the speed of travel of the web, a thickness of coating of between 10 and 100 mm and a specific resistance of between 100 and 10,000 .mu..OMEGA.cm are achieved.
    Type: Grant
    Filed: March 26, 1982
    Date of Patent: January 31, 1984
    Assignee: Leybold Heraeus GmbH
    Inventors: Klaus J. Heimbach, Wolf-Dieter Munz, Rolf Adam, Heinz Wenzl
  • Patent number: 4426264
    Abstract: The invention concerns an array of cathodes for sputtering apparatus that contains first, a target plate made out of the material to be sputtered, second, a system of magnets with poles of opposite signs positioned behind the target plate so that at least some of the lines of magnetic force emerging from the poles pass through and reenter the target plate, and third, a device that can be adjusted to alter the relative positions of the magnets and the target plate. The array is also set up so that at least some of the magnetic lines of force run from the poles through the target plate and back.The purpose of maintaining largely constant sputtering conditions as the target plate is consumed is achieved in accordance with the invention by moving the adjusting device essentially perpendicular to the largest surface of the target plate.
    Type: Grant
    Filed: December 14, 1981
    Date of Patent: January 17, 1984
    Assignee: Leybold Heraeus GmbH
    Inventors: Wolf-Dieter Munz, Hans Wolf
  • Patent number: 4426267
    Abstract: The invention concerns a method of coating shaped parts having a three-dimensional coating surface by the cathodic atomization of target material of a first cathode arrangement. The cathode arrangement comprises a magnetic field generator for the concentration of a first discharge space (plasma cloud) in the zone of the target surface by means of a first magnetic field (plasma trap), which is spatially closed with respect to the target. According to the invention and for the purpose of producing a uniform coating even on parts of complicated shape, it is proposed that, on their side disposed opposite the first cathode arrangement, the shaped parts should be simultaneously subjected to the atomizing action of a second cathode arrangement with the same target material.
    Type: Grant
    Filed: February 24, 1982
    Date of Patent: January 17, 1984
    Assignee: Leybold Heraeus GmbH
    Inventors: Wolf D. Munz, Gerhard Hessberger
  • Patent number: 4412131
    Abstract: A monochromator for charged particles comprises a premonochromator and a main monochromator is tandem with a retarding lens disposed therebetween. The arrangement is suitable for electron energy loss spectrometry due to the high achievable intensities.
    Type: Grant
    Filed: March 30, 1981
    Date of Patent: October 25, 1983
    Assignee: Leybold Heraeus GmbH
    Inventor: Hermann Froitzheim
  • Patent number: 4408563
    Abstract: An apparatus for regulating the evaporation rate of oxidizable substances in reactive vacuum deposition by the metered addition of oxygen to a vacuum deposition chamber during deposition, wherein the addition of oxygen to a predetermined value, the pressure "p" in the vacuum chamber is measured, and the evaporation rate "r" for any pressure changes is regulated such that the ratio of pressure to evaporation rate p:r is maintained substantially constant.
    Type: Grant
    Filed: May 4, 1981
    Date of Patent: October 11, 1983
    Assignee: Leybold-Heraeus GmbH
    Inventors: Klaus-Jurgen Heimbach, Walter Zultzke
  • Patent number: 4408469
    Abstract: A refrigerator cryostat for producing high vacuums at controlled temperatures in a sample chamber has first and second refrigerator stages for progressively lowering the refrigerator temperature to the sample chamber. An independent heater heats the sample chamber to provide, in combination with the refrigerator temperature, the controlled temperatures to the sample chamber. A vacuum pump preliminarily evacuates a casing about the refrigerator stages which is also in vacuum communication with the sample chamber, but a pumping surface in thermal communication with the first refrigerator stage and in the casing cryogenically augments the preliminary evacuation to the high vacuum levels necessary for operation of the refrigerator cryostat at sample chamber temperatures of, for example, from about 10.degree. K. to about 350.degree. K.
    Type: Grant
    Filed: December 7, 1981
    Date of Patent: October 11, 1983
    Assignee: Leybold Heraeus GmbH
    Inventor: Hans-Joachim Forth
  • Patent number: 4407488
    Abstract: The invention relates to a distillation and sublimation apparatus having a receiving vessel and a number of containers for the starting product. Each container has a bottom, an outer wall and an inner wall with a vapor duct, and the containers are stacked one upon the other in such manner that the vapor ducts are arranged in series. An annular space is present outside the stack of containers. The apparatus comprises a condenser into which the vapor duct of the bottom container discharges.For the purpose of solving the problem of preventing condensation of vapor on the receiving vessel, it is proposed, in accordance with the invention, that capillary gaps (28), which are open towards the receiving vessel (3), be present between the containers (26). Furthermore, the condenser (8) communicates with the annular space (10) by way of at least one return-flow orifice (19) for the gases.
    Type: Grant
    Filed: October 29, 1982
    Date of Patent: October 4, 1983
    Assignee: Leybold-Heraeus GmbH
    Inventors: Erwin Wanetzky, Franz Hugo, Fernand Kuhlmann
  • Patent number: 4397156
    Abstract: A displacer for low-temperature refrigerating machines having a regenerator disposed in a hollow space of the displacer, wherein the regenerator is formed at least in part of a sintered material, preferably sintered bronze spheres.
    Type: Grant
    Filed: October 21, 1981
    Date of Patent: August 9, 1983
    Assignee: Leybold Heraeus GmbH
    Inventors: Rolf Heisig, Hans-Hermann Klein, Karl-Heinz Volker
  • Patent number: 4395632
    Abstract: A cuvette for optical gas-analysis apparatus, having an elongated metallic housing with two end-faces, two chambers which are parallel to the longitudinal axis and have radiation-reflecting wall surfaces and which are separated from each other by a partition. One of the chambers is for holding a gas under investigation and the other is for holding a reference gas. The chambers are closed off at the end-faces of the housing by radiation-penetrable windows made of a material from the group consisting of calcium fluoride and barium fluoride and which are each initially connected by glass solder to an intermediate frame, which is connected to the housing. The intermediate frame has a U-shaped cross-section and is composed of a metal from the group consisting of gold, silver and aluminum and the intermediate frame is connected, to the windows and to the housing by glass solder.
    Type: Grant
    Filed: March 9, 1981
    Date of Patent: July 26, 1983
    Assignee: Leybold Heraeus GmbH
    Inventors: Rudi Ross, Helmut Heimel
  • Patent number: 4394765
    Abstract: An electro-slag remelting furnace having consumable electrodes and a mold for receiving a melt formed from the electrode material; at least one drive motor and at least one spindle and an associated stationary spindle nut for vertical movement of the electrode; at least one guide column, which is provided for vertically guiding the consumable electrodes and which extends parallel with the spindle and relative to which the spindle is rotatable mounted at its two ends; and at least one clamping device for the consumable electrodes.
    Type: Grant
    Filed: November 25, 1981
    Date of Patent: July 19, 1983
    Assignee: Leybold-Heraeus GmbH
    Inventors: Uwe Reimpell, Helmut Grof, Franz-Georg Knell, Anton Wamser
  • Patent number: 4371323
    Abstract: A displacement machine operating according to the spiral principle has at least one parallel motion guide device provided to ensure a torsionally rigid relative movement of two displacement elements.
    Type: Grant
    Filed: June 30, 1980
    Date of Patent: February 1, 1983
    Assignee: Leybold Heraeus GmbH
    Inventors: Berthold Fischer, Hans-Peter Kabelitz, Andreas Schmitz
  • Patent number: 4367199
    Abstract: The invention relates to an apparatus for drawing a monocrystal from a crucible by means of a coilable pulling element having the end that is located above the crucible secured a crystal-nucleus holder. The pulling element, which is preferably a steel cable, is connected to a lifting drive which is arranged on a platform which is rotatable about the pulling element. The lifting drive comprises a driven horizontal shaft with a longitudinally displaceable coiling drum thereon, onto which drum the pulling element can be tangentially coiled. The vertical speeds of the crystal-nucleus holder can be adjusted to speeds which differ greatly from each other by providing the lifting drive with a drive motor for rapid operation and a drive motor for flow operation, which motors act on the coiling drum by way of shafts which can be disconnected from each other by means of a clutch but which are disposed coaxially.
    Type: Grant
    Filed: June 11, 1981
    Date of Patent: January 4, 1983
    Assignee: Leybold Heraeus GmbH
    Inventor: Karl Jericho
  • Patent number: 4365944
    Abstract: A plant for producing metal powder from metal melts includes a first chamber with a device for converting a melt stream initially into liquid and then solid metal particles in a non-oxidizing atmosphere, a tundish with a closable floor opening that can be mounted on the first chamber and discharged thereinto, and a melt device for filling the tundish with molten metal. The metal melt is continuously protected against oxidation or absorption of gas, the structural height of the plant is reduced and the capacity of the melt device is utilized to a greater degree by enclosing the melt device by a second chamber separated from the first chamber for maintaining a nonoxidizing atmosphere. The second chamber is equipped with at least one lock into which the tundish can be brought and from which it can be removed.
    Type: Grant
    Filed: June 24, 1981
    Date of Patent: December 28, 1982
    Assignee: Leybold Heraeus GmbH
    Inventors: Heinz Pajonk, Franz Hohne, Rolf Ruthardt