Patents Assigned to Leybold-Heraeus GmbH
  • Patent number: 4258645
    Abstract: Coupling valve for joining stationary and movable evacuatable chambers having confronting chamber walls displaced parallel with respect to each other. A first frame is fastened to one chamber wall and is joined by a resilient member to a second movable frame which can be brought into engagement with the other chamber wall. The movable frame is provided with at least one actuator by which it can be tightened against the confronting chamber wall.
    Type: Grant
    Filed: November 22, 1978
    Date of Patent: March 31, 1981
    Assignee: Leybold-Heraeus GmbH
    Inventors: Hans Aichert, Friedrich Stark, Herbert Stephan, Otto-Horst Hoffmann
  • Patent number: 4251678
    Abstract: Electrical melting apparatus having a vertical column equipped with guides for at least two electrode feeders each of which have C-shaped carriages partly encompassing the column such that the individual electrode feeders can move past each other without interference.
    Type: Grant
    Filed: November 23, 1979
    Date of Patent: February 17, 1981
    Assignee: Leybold-Heraeus GmbH
    Inventors: Helmut Grof, Anton Wamser, Uwe Reimpell
  • Patent number: 4247383
    Abstract: A cathodic system has a planar target for use in an atomizing apparatus for the sputtering of a dielectric or nonmagnetic coating onto a substrate. The cathodic system includes a magnetic field generator disposed on the side of the target opposite from that of the substrate and is constructed in the form of a planar coil which is disposed parallel to the target and has an area which corresponds substantially to the area of the target. The planar coil is insulated from the target and is cooled during use.
    Type: Grant
    Filed: August 2, 1978
    Date of Patent: January 27, 1981
    Assignee: Leybold Heraeus GmbH
    Inventors: Walter Greve, Edgar Kaiser, Dieter Grone, Ulrich Patz
  • Patent number: 4244557
    Abstract: A vacuum-tight closure assembly includes a valve seat; a spreadable valve plate movable into a closed position for assuming a spreaded state in which it sealingly engages the valve seat; and a guide arrangement for a centered guiding of the valve plate during its motion into the closed position. The guide arrangement includes guide faces located in the vicinity of and stationarily with respect to the valve seat and counterguide faces located on and movable with the valve plate. The guide faces cooperate with the counterguide faces during the motion of the valve plate towards the closed position.
    Type: Grant
    Filed: October 3, 1978
    Date of Patent: January 13, 1981
    Assignee: Leybold-Heraeus GmbH
    Inventors: Wilhelm Polhede, Reinhard Reiter
  • Patent number: 4243887
    Abstract: A method and apparatus for analyzing a sample comprising the steps of irradiating a selected area of the sample with a first burst of laser energy to vaporize the sample, condensing the vaporized sample on the surface of an intermediate carrier and analyzing the condensed sample material deposited on the intermediate carrier.
    Type: Grant
    Filed: May 1, 1979
    Date of Patent: January 6, 1981
    Assignee: Leybold-Heraeus GmbH
    Inventors: Franz Hillenkamp, Raimund Kaufmann, Eberhard Unsold, Rainer Nietsche, Reiner Wechsung, Henning Vogt, Walter Bank, Lothar Aberle
  • Patent number: 4238525
    Abstract: Method and apparatus for vacuum depositing thin films on substrates which are located above 500.degree. C. by electron beam heating during the deposition. The substrates are positioned above an evaporating crucible filled with a bath of the material being evaporated which is also heated by electron beams. The electron beams are deflected at an angle of less than 80.degree. onto approximately one-half of the bath surface situated between the axis of symmetry and the end of the evaporating crucible.
    Type: Grant
    Filed: November 15, 1978
    Date of Patent: December 9, 1980
    Assignee: Leybold-Heraeus GmbH
    Inventors: Hans Aichert, Walter Dietrich, Friedrich Stark, Herbert Stephan
  • Patent number: 4237148
    Abstract: Method for vaporizing alloys containing metals having different vapor pressures from elongated vaporizing crucibles which are fed with the alloy to be vaporized in rod form at several points along the length of the crucible. The alloy is vaporized by direct bombardment of the molten bath surface with electron beams periodically deflected according to a pattern for the deposition of the alloy coating material on a plurality of substrates positioned above the vaporizing crucible. The proportional composition of the alloy to be vaporized is regulated differently over the length of the crucible such that the alloy component with the lowest boiling point (or the highest vapor pressure) is in a smaller proportion in the alloy to be vaporized which is fed to the center of the vaporizing crucible than in the alloy fed to the ends of the vaporizing crucible.
    Type: Grant
    Filed: November 24, 1978
    Date of Patent: December 2, 1980
    Assignee: Leybold-Heraeus GmbH
    Inventors: Hans Aichert, Otto-Horst Hoffman, Herbert Stephan
  • Patent number: 4233515
    Abstract: Method and device for determining the radiation parameters of a focused beam of charged particles guided periodically over a target surface, especially in an electron beam melting and vaporizing system wherein the target is the surface of a melt. At least one probe is positioned in front of the target surface in the direction of radiation and within the beam trace, the probe being connected to an electrical display device. The output signal of the probe is displayed via a cathode ray tube and the reversal point of the charged-particle beam is determined on the basis of the time interval between the signal peaks in conjunction with the velocity of the beam movement.
    Type: Grant
    Filed: November 24, 1978
    Date of Patent: November 11, 1980
    Assignee: Leybold-Heraeus GmbH
    Inventors: Walter Dietrich, Herbert Stephan
  • Patent number: 4233342
    Abstract: Method for vacuum depositing corrosion and oxidation resistant alloy coatings on turbine buckets having leading edges and trailing edges, with simultaneous rotation of the turbine buckets about their longitudinal axis in a vapor stream above a vapor source. The time of stay of each element of the surface above the vapor source is varied during a 360.degree. rotation such that it is shortest when the leading edges and the trailing edges are pointed towards the vapor source and longest when the concave and convex flanks are presented to it.
    Type: Grant
    Filed: November 21, 1978
    Date of Patent: November 11, 1980
    Assignee: Leybold-Heraeus GmbH
    Inventors: Hans Aichert, Walter Dietrich, Otto-Horst Hoffmann, Friedrich Stark, Herbert Stephan
  • Patent number: 4230739
    Abstract: Method for evaporating melts of alloys of metals of different vapor pressures from continuously fed, large-area evaporating crucibles by direct bombardment of the bath surface with focused electron beams which are periodically deflected according to a pattern. The alloy material is deposited on a plurality of substrates such as turbine blades which are positioned in a field above the evaporating crucible with local adaptation of the energy density to the thermal economy of the melt bath. At least one electron beam is deflected onto at least two substantially rectangular beam fields and is guided in each of these fields through a line raster at a frequency of at least 100 Hz while shifting periodically from one to the other field with a shift frequency of at most 5 Hz.
    Type: Grant
    Filed: November 22, 1978
    Date of Patent: October 28, 1980
    Assignee: Leybold-Heraeus GmbH
    Inventors: Hans Aichert, Walter Dietrich, Alfred Hauff, Peter Sommerkamp, Herbert Stephan
  • Patent number: 4226587
    Abstract: Pass-through heating device for vacuum coating apparatus having a heating chamber with at least one heating device, a thermal barrier positioned between the walls of the heating chamber and the heating device parallel to the longitudinal axis of the coating apparatus.
    Type: Grant
    Filed: November 22, 1978
    Date of Patent: October 7, 1980
    Assignee: Leybold-Heraeus GmbH
    Inventors: Hans Aichert, Otto-Horst Hoffmann, Friedrich Stark, Herbert Stephan
  • Patent number: 4219183
    Abstract: An operating mechanism for valves and the like comprises a housing with a port situated therein which is to be opened and closed. Associated with the port is a seat and a valve plate for closing the port. A rotatable shaft drive mechanism for the valve plate includes a shaft which rotates in one direction to effect movement of the valve plate from its open position to its closed position followed by a pressing movement over the valve plate against the seat and rotates in the other direction to effect movement of the valve plate in the opposite direction. The rotatable shaft drive mechanism includes an intermittent drive for the transformation of the rotatory movement of the shaft to the desired movement of the valve plate.
    Type: Grant
    Filed: November 3, 1978
    Date of Patent: August 26, 1980
    Assignee: Leybold-Heraeus GmbH
    Inventors: Otto-Horst Hoffmann, Walter Heil, Friedrich Stark
  • Patent number: 4218410
    Abstract: High-purity metal powder is made by the electron beam melting of a starting material in rod form in a vacuum wherein the molten metal is momentarily caught on a spinning plate rotating at high speed and flung therefrom and thereafter solidified by cooling. The metal on the spinning plate is bombarded with an electron beam that is so focused and periodically deflected that its focal spot is many times smaller than the diameter of the spinning plate. The beam deflection between the rotational center of the spinning plate and its marginal area is performed such that the spinning plate is scanned in a zone that extends radially of the axis of rotation of the spinning plate and is small in relation to its diameter. Cooling of the metal particles to the point of solidification is accomplished by radiation loss.
    Type: Grant
    Filed: May 3, 1978
    Date of Patent: August 19, 1980
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventors: Herbert Stephan, Hans Aichert, Joseph Heimerl
  • Patent number: 4218424
    Abstract: An apparatus for the zone drawing of monocrystal rods comprises a hermetically sealed housing having two rod holders movably disposed rotatably and vertically one over the other within the housing. A stationary high frequency heating system is disposed between the rod holders. Each rod holder comprises one transport slide, a sliding guide and a spindle drive disposed within the housing for the independent vertical movement of the rod holders and one drive for the rotation of the rod holders.
    Type: Grant
    Filed: September 2, 1977
    Date of Patent: August 19, 1980
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventors: Joachim Floymayr, Karl Jericho, Dietrich Drechsel, Friedrich Bubeck
  • Patent number: 4214015
    Abstract: Method for coating metal substrates with alloys wherein the substrates are at a temperature above 500.degree. C. The coating process is interrupted temporarily at least once and the substrates are allowed to cool by at least 30.degree. C. Before the beginning of or during the resumed coating process, the substrate temperature is substantially restored.
    Type: Grant
    Filed: November 15, 1978
    Date of Patent: July 22, 1980
    Assignee: Leybold-Heraeus GmbH
    Inventor: Herbert Stephan
  • Patent number: 4214159
    Abstract: An apparatus for analyzing a sample by electromagnetic irradiation includes a vacuum chamber, a support for holding the sample in the vacuum chamber, an arrangement for irradiating the sample with an electromagnetic beam, a mass analyzer disposed in the vacuum chamber, an arrangement for extracting particles from the sample and introducing them into the mass analyzer and a layer of conductive material situated in the vicinity of support in the zone of the sample.
    Type: Grant
    Filed: August 31, 1978
    Date of Patent: July 22, 1980
    Assignee: Leybold-Heraeus GmbH
    Inventors: Franz Hillenkamp, Raimund Kaufmann, Rainer Nitsche, Eberhard Unsold, Reiner Wechsung
  • Patent number: 4208042
    Abstract: Evaporating crucible having a crucible floor and a peripheral rim therearound. The floor has a plurality of floor apertures for feeding a plurality of rods of evaporating material and, surrounding the floor apertures, superelevations are provided whereby the distance from the crucible floor to the maximum fill level of the evaporating material is reduced by at least fifteen percent.
    Type: Grant
    Filed: November 22, 1978
    Date of Patent: June 17, 1980
    Assignee: Leybold-Heraeus GmbH
    Inventors: Hans Aichert, Walter Dietrich, Alfred Hauff, Otto-Horst Hoffmann, Herbert Stephan
  • Patent number: 4207835
    Abstract: An arrangement and photometer for measuring and controlling the thickness of optically active thin layers wherein the axis of the measurement light beam coming from the measurement light source is directed to the measurement object and a referenced light receiver, independent of the optical properties of the measurement object, is associated with the measurement light beam. The output signal of the referenced light receiver is mixed with a trigger stage for a phase sensitive photometer amplifier and is fed to a compensation circuit for the equilization of brightness variations in the measurement light source.
    Type: Grant
    Filed: June 16, 1977
    Date of Patent: June 17, 1980
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventors: Horst Schwiecker, Gernot Thorn, Hans-Peter Ehrl
  • Patent number: 4208585
    Abstract: Apparatus for directing a beam of electromagnetic radiation onto a sample by focusing and deflecting the radiation, employing a spherical mirror for focusing and deflecting the radiation onto the sample.
    Type: Grant
    Filed: September 6, 1978
    Date of Patent: June 17, 1980
    Assignee: Leybold-Heraeus GmbH
    Inventor: Henning Vogt
  • Patent number: 4207031
    Abstract: A dual speed mechanical rotary vacuum pump wherein a mechanical rotary vacuum pump is directly connected to a two speed electrical motor which drives the pump and the speed of the motor is controlled by an electrical control circuit which selectively causes the motor to rotate at either a first speed for a predetermined period of time or at a second slower speed. The speed of the motor is automatically switched to the slower speed after the predetermined period of time.
    Type: Grant
    Filed: March 29, 1978
    Date of Patent: June 10, 1980
    Assignee: Leybold-Heraeus GmbH & Co. KG
    Inventors: Alfred E. Maskrey, Donald H. Hockenberry