Abstract: An apparatus for and method of coating a three-dimensional shaped-part surface by the cathodic atomization of target material from two, facing, magnetically-concentrating cathodic atomization devices applies a voltage, which is negative with respect to ground and of such magnitude that touching of the plasma clouds from the devices is facilitated to the shaped part.
Abstract: Solar-controlled glazing having a transmission of between 5 and 40% in the visible spectrum range and having heat-reflection properties is produced by applying an oxide layer having an optical thickness of between 20 and 280 nm directly to a transparent substrate by cathodic evaporation in an oxygen-containing atmosphere to form a first layer. A chromium nitride layer having a geometric thickness of between 10 and 40 nm is then applied in an atmosphere consisting of inert gas and nitrogen to provide a second layer. An optical third dielectric layer may be applied to the second layer. The oxide layer is selected from oxides of tin, titanium and aluminium.
Type:
Grant
Filed:
March 23, 1984
Date of Patent:
August 13, 1985
Assignee:
Leybold-Heraeus GmbH
Inventors:
Klaus Hartig, Anton Dietrich, Michael Scherer
Abstract: A vaporizer crucible for vacuum vapor-deposition apparatus, comprises a metallic body 1 having a recess 2 for accommodating vaporizing material and connected in a thermally-conductive manner to a cooling duct 7 which surrounds the recess 2 at least partially. For effectively preventing reduction in heat transfer in the event of the formation of vapor bubbles in the cooling medium at least one guide device 22 for imparting a swirling motion to the cooling medium flowing in the cooling duct 7 is provided in said duct. The guide device 22 preferably takes the form of a spiral element matching the path of the cooling duct.
Type:
Grant
Filed:
July 7, 1983
Date of Patent:
July 16, 1985
Assignee:
Leybold-Heraeus GmbH
Inventors:
Albert Feuerstein, Klaus-Jurgen Heimbach, Helmut Warscheit
Abstract: An oil-sealed vacuum pump comprises an oil circuit for supplying a pump chamber and bearings of the vacuum pump with oil. The oil circuit includes first and second branch conduits leading to the bearings and the pump chamber, respectively. The vacuum pump further has an oil pump coupled to the oil circuit for driving oil therethrough, a valve assembly coupled to the oil circuit for shutting off oil supply to the pump chamber during standstill of the vacuum pump, and a pressure reducer coupled to the oil circuit for reducing the oil pressure to environmental pressure. The first branch conduit leading to the bearings is situated upstream of, and the second branch conduit leading to the pump chamber and the valve assembly are situated downstream of the pressure reducer as viewed in the direction of oil flow in the oil circuit.
Type:
Grant
Filed:
December 16, 1982
Date of Patent:
June 25, 1985
Assignee:
Leybold-Heraeus GmbH
Inventors:
Hanns-Peter Berges, Peter Frieden, Wolfgang Leier
Abstract: In an auxiliary-voltage DC source for supplying an electric circuit and, more particularly, one at a high potential in an electron gun without an isolation transformer, the primary winding of a current transformer is located in an alternating-current section of the electric circuit. The current transformer has at least one secondary winding which is connected through a rectifier to a parallel regulator for providing the auxiliary-voltage.
Abstract: A device for manufacturing powder from a melt by a mechanism for dividing it up. The device has a vertical shaft and a powder outtake that communicates with the shaft. To achieve the objectives of reducing the overall height of such a device and preventing the powder from sintering, the powder outtake consists of the lower section of the shaft and has essentially the same cross-section as the upper section. Both sections, together, essentially determine the overall height of the device. Both sections are connected with a releasable connecting element and can be separated from each other in a direction perpendicular to the axis of the shaft.
Abstract: The invention relates to apparatus for producing a microwave plasma for the treatment of substrates, and in particular for the plasma polymerization of monomers for coating substrates. The apparatus consists of a reaction chamber with a carrier for conveying the substrates and a way for maintaining an atmosphere of ionizable gases and monomers. The apparatus also has a first and at least one second wave-guide structure which are arranged at opposite acute setting angles to the surface of the substrate carrier and are each connected at one end to a microwave transmitter by way of a hollow conductor. Thus, the treatment intensities, i.e. the rates of deposition, are superposed, and this leads to greater uniformity in the properties of the product. The apparatus may also include angling the wave-guide structures toward each other and staggering crossbar structures in the wave-guides for further improvement.
Abstract: In a method and apparatus for short-path, high-vacuum distillation from a liquid on plate-like evaporating surfaces from which distillable fractions evaporate and precipitate onto condensation surfaces a short distance away, the liquid is placed upon the evaporating surfaces at a temperature such that the energy required for its evaporation is taken, at least in part, from the still-unevaporated fraction of the liquid.
Abstract: A magnetron cathode for cathodic evaporation apparatus with a target holder (10) for releasably securing a plate-like target (9). The associated magnet arrangement (7) has pole faces (7c, 7d) for producing at least one circumferentially closed tunnel of magnetic field lines which overlaps the target. The magnet arrangement (7) is accommodated in a housing of non-ferromagnetic material which extends over the pole faces.
Abstract: A sliding contact arrangement for transmitting heavy currents to and from a bus bar has a cage with conductive contact faces and an arrangement to cause a conductive sliding contact to bear on the bus bar and only one of the contact faces.
Abstract: A resonant-circuit, high-frequency electrical power supply for a mass spectrometer has a transductor for magnetically retuning the power supply in response to tuning variations produced by operating variations in the mass spectrometer.
Abstract: A rotatable connector for heavy electric currents has a first annular flange unit coaxially in the annular space of a second annular flange unit. Inner and outer fluid-cooled conductors physically and electrically connect to the first flange unit. The conductors and first flange unit are rotatable relative to the second flange unit about the axis of the flange units. U-shaped stranded wires are embedded at their opposite ends in corresponding first and second flanges of the first and second flange units. The first flange of the first flange unit is cooled by the fluid cooling the outer conductor and the other flanges of the units are separately fluid cooled. The combination of embedding the stranded wires in the flanges and fluid cooling the flanges keeps the stranded wires cool enough for carrying heavy electric currents without corroding contact of the stranded wires with the cooling fluid.
Abstract: A thermal conductivity vacuum gage has a vacuum-sensing probe and a separate operating unit for indicating the vacuum sensed by the probe and supplying electrical power for the vacuum sensing by the probe. An electrically-conducting cable connects the probe to the operating unit to form measuring and power supply circuits therebetween. The portion of the measuring circuit and the portion of the power supply circuit in the operating unit are identical or common, i.e. the same circuit portion, so that variations in the operation of this common circuit portion affect circuits the same in contrast to prior gages having separate measuring and power supply circuits, whereby variations in the operation of one could affect the other.
Abstract: An arrangement for manufacturing powder from a melt by a mechanism for dividing it up. The device has a vertical shaft and a powder outtake that communicates with the shaft through a funnel-shaped housing component. To achieve the objectives of reducing the overall height of such a device and preventing the powder from sintering, the axis of the housing component is perpendicular to the axis of the shaft, and the shaft tilts in a bearing until the axis of the housing component is horizontal.
Abstract: High-power cathode system for producing multilayers of different target materials on a substrate has at least two different target materials which abut one another at a boundary line in the field of a magnetic field generator thereof. The substrate is transported for coating across the boundary line, preferably perpendicularly.
Type:
Grant
Filed:
December 22, 1983
Date of Patent:
December 18, 1984
Assignees:
Leybold-Heraeus GmbH, Glyco-Metal Werke
Abstract: A clamp for joining a pair of flanges has a clamp chain with grooved clamp shoes thereon which, in the closed position of the clamp, straddle the edges of the flanges to press them together. At least some of the clamp shoes are fastened to the clamp chain through an intermediate member which pivots at both the clamp chain and the clamp shoe.
Abstract: A vacuum pump comprises a suction nipple valve including a cylinder, a piston slidably received therein and a movable valve closing member operatively connected to the piston. The vacuum pump further has a pressure medium conduit having a first end communicating with the cylinder; an inlet opening at a second end of the conduit for pressure medium to flow through the inlet opening to the piston; a control arrangement for closing and opening the inlet opening dependent upon run or standstill of the vacuum pump. In the closed state of the inlet opening an oil quantity is maintained above the inlet opening.
Type:
Grant
Filed:
December 16, 1982
Date of Patent:
November 20, 1984
Assignee:
Leybold-Heraeus GmbH
Inventors:
Hanns-Peter Berges, Peter Frieden, Hans-Peter Kabelitz
Abstract: An energy-beam welding machine has a vacuum chamber consisting of upper and lower parts. For receiving workpieces of various heights, the lower part of the chamber can be lowered to a position below a conveying plane in which the workpieces can be advanced and a lifting column which carries a workpiece-receiving device at its upper end is movable in the vertical direction relative to the lower part of the chamber. The extent of the relative movement can be varied by a displaceable stop between the lifting column and the lower part of the chamber so that, even when the vertical dimensions of the workpieces differ, the position of the welded seams is always in the same plane, and the lower faces of the workpieces can also always be introduced laterally into the lower part of the chamber from the conveying plane.
Abstract: A cryopump having two refrigerator stages operable for producing progressively lower temperatures and at least one surface between the refrigerator stages and in such thermal communication therewith as to have, during operation of the refrigerator stages, temperatures which adsorb and desorb thereon at least one gas in the cryopump, having the improvement comprising:shield means extending over substantially all of the surface for substantially preventing the gas from circulating to the surface; andmeans for maintaining the shield means at a substantially constant temperature during operation of the refrigerator stages.
Abstract: A refrigerator has a cold producer with a pneumatically-operated displacer for displacing a working, cold-producing gas. The pneumatic and working gas-supply control is separate from the cold producer and connected thereto by tubes having volumes less than the maximum volumes of the portions of the chamber supplied thereby.