Abstract: An apparatus and method for generating moisture standards in gases are disclosed. In particular, the invention relates to an apparatus for introducing a preselected amount of water vapor or other vaporized liquid into a flowing gas stream at a constant rate, which comprises a suitable syringe having a needle attached thereto; an evaporator attached to said needle, wherein the evaporator is located in the flowing gas stream; and a means for applying pressure to the syringe, such that water or other liquid may be delivered at a constant rate from the syringe through the needle into the evaporator.

Abstract: Trace impurities such as organic compounds and carbon monoxide are reduced to sub-ppb levels in gases such as nitrogen, helium and argon, by gas purifying systems that contain an ultra-low emission (ULE) carbon material. Ultra-low emission (ULE) carbon materials can be made from commercially available carbon materials in the form of pellets, extrudates and beads and is capable of removing impurities from a gas stream down to parts-per-billion (ppb) and sub-ppb levels without concurrently emitting other impurities such as moisture or carbon dioxide to the purified gas stream. The carbon material is superactivated by heating the carbon to temperatures from 300° to about 800° degrees C. in an ultra-dry, inert gas stream. The ultra-low emission (ULE) carbon material is handled and stored in an environment that minimizes contamination from moisture and other oxygenated species in order to maintain its ppb and sub-ppb impurity removal and low emission properties.

Abstract: A method for removing trace moisture from a gas is disclosed. The method involves heating a zeolite having a high silica-to-alumina ratio to about 400° C. to remove physically adsorbed water from the zeolite, followed by heating the zeolite to a temperature in excess of 650° C., to form a superheated zeolite. The superheated zeolite is contacted with the gas, thereby adsorbing water from the gas. A dehydroxylated zeolite for removing trace moisture from a gas wherein the zeolite has a high silica-to-alumina ratio and a low level of metallic impurities is also disclosed. A method for removing metallic impurities from a gas using the low metals zeolite is also disclosed. The zeolites and methods of the invention are particularly useful for removing trace water and trace metal impurities from acid gases such as hydrogen chloride and hydrogen bromide.

Abstract: A method for removing trace moisture from a gas is disclosed. The method involves heating a zeolite having a high silica-to-alumina ratio to about 400.degree. C. to remove physically absorbed water from the zeolite, followed by heating the zeolite to a temperature in excess of 650.degree. C., to form a superheated zeolite. Heating to temperatures of 650.degree. C. or above is believed to cause dehydroxylation of the zeolite. A method for the preparation of a dehydroxylated zeolite is also disclosed. The superheated zeolite is contacted with the gas, thereby adsorbing water from the gas. A dehydroxylated zeolite for removing trace moisture from a gas wherein the zeolite has a high silica-to-alumina ratio and a low level of metallic impurities is also disclosed. The zeolite and methods of the invention are particularly useful for removing trace water from acid gases such as hydrogen chloride and hydrogen bromide.