Patents Assigned to Microvision, Inc.
  • Laser beam scanning assisted autofocus
    Patent number: 9648223
    Abstract: An apparatus with autofocus includes a scanning laser projector to provide autofocus assist. The scanning laser projector may project visible or nonvisible light in contrasting patterns to provide passive autofocus assist. The scanning laser projector may include a time-of-flight determination circuit to measure distances to provide active autofocus assist. Passive and active autofocus assist are combined to provide hybrid autofocus assist.
    Type: Grant
    Filed: September 4, 2015
    Date of Patent: May 9, 2017
    Assignee: Microvision, Inc.
    Inventor: Jari Honkanen
  • Resonant system excitation power reduction using dynamic phase offset
    Patent number: 9612433
    Abstract: A drive circuit for a resonant system provides an excitation signal having an amplitude and a phase. The resonant system provides a feedback signal representing an oscillation amplitude. The amplitude of the excitation signal is reduced for a substantially constant feedback signal amplitude by modifying the excitation signal phase.
    Type: Grant
    Filed: May 21, 2015
    Date of Patent: April 4, 2017
    Assignee: Microvision, Inc.
    Inventors: Patrick J. McVittie, Jonathan A. Morarity, Damon M. Domjan
  • Scanning laser planarity detection
    Patent number: 9596440
    Abstract: A scanning laser projector includes a proximity sensor and a planarity detector. When the proximity sensor detects an object closer than a proximity threshold, laser power is turned down. The scanning laser projector can measure distance at a plurality of projection points in the projector's field of view. If the projection points lie substantially in a plane, laser power may be turned back up.
    Type: Grant
    Filed: September 11, 2014
    Date of Patent: March 14, 2017
    Assignee: Microvision, Inc.
    Inventors: P. Selvan Viswanathan, Robert James Jackson
  • Scanned beam projector pulsed laser control
    Patent number: 9560328
    Abstract: Briefly, in accordance with one or more embodiments, a scanned beam projector comprises a laser diode to emit a beam, a scanning engine to scan the beam on a surface to project an image comprising virtual pixels on the surface, a digital-to-analog converter (DAC) coupled to the laser diode to cause the laser diode to emit the beam in response to a digital video signal provided to the DAC, and a pulsed pixel controller to provide the digital video signal to the DAC, the pulsed pixel controller to align the digital video signal provided to the DAC with the virtual pixels of the image, and to select an optimal waveform to be generated by the laser diode for each virtual pixel.
    Type: Grant
    Filed: October 6, 2015
    Date of Patent: January 31, 2017
    Assignee: Microvision, Inc.
    Inventor: Patrick J. McVittie
  • Hydrogel filaments for biomedical uses
    Patent number: 9486221
    Abstract: Described herein are apparatus, compositions, systems and associated methods to occlude structures and malformations with radiopaque hydrogel filaments with delayed controlled rates of expansion permitting the repositioning of the device once inside the structure or malformation. Further described is a device for implantation in an animal comprising a difunctional, low molecular weight ethylenically unsaturated shapeable macromer; an ethylenically unsaturated monomer; and a radiopaque element, wherein said device contains no support members. Methods of forming such devices are also disclosed.
    Type: Grant
    Filed: May 21, 2013
    Date of Patent: November 8, 2016
    Assignee: MicroVision, Inc.
    Inventors: Gregory M. Cruise, Michael J. Constant, Edward Michael Keeley, Terrance T. Tran
  • Laser SDE Effect Compensation by Adaptive Tuning
    Publication number: 20160260579
    Abstract: Laser sub-divisional error (SDE) effect is compensated by using adaptive tuning. This compensated signal can be applied to position detection of stage in ebeam inspection tool, particularly for continuous moving stage.
    Type: Application
    Filed: March 3, 2016
    Publication date: September 8, 2016
    Applicant: Hermes Microvision Inc.
    Inventors: Ying Luo, KuoFeng Tseng, Zhonghua Dong
  • Controlled light source startup in a display
    Patent number: 9407887
    Abstract: Briefly, in accordance with one or more embodiments, a display is powered on to display a projected image, and the operation of one or more display elements are ramped up until a stabilized state is reached. During said ramping up, a light source of the display is powered display at less than full power until the stabilized state is reached. While the light source is operating at less than full power, a splash screen may be displayed. After the stabilized state is reached, the light source can then be operated at or near full power. By providing a light output that is less than full power during ramp up, the display does not need to wait until the stabilized state is reached before the light source is powered on. As a result, the projector provides an output earlier in time to cue to the user that the projector is operating.
    Type: Grant
    Filed: April 6, 2010
    Date of Patent: August 2, 2016
    Assignee: Microvision, Inc.
    Inventors: Mark Champion, Heng Huang
  • Energy filter for charged particle beam apparatus
    Patent number: 9384936
    Abstract: This invention provides two methods for improving performance of an energy-discrimination detection device with an energy filter of reflective type for a charged particle beam. The first method employs a beam-adjusting means to improve the energy-discrimination power, and the second method uses an electron-multiplication means to enhance the image signal without noise raise. A LVSEM with such an improved energy-discrimination detection device can provide variant high-contrast images of interested features on a specimen surface for multiple application purposes.
    Type: Grant
    Filed: July 15, 2015
    Date of Patent: July 5, 2016
    Assignee: Hermes Microvision Inc.
    Inventors: Weiming Ren, Joe Wang, Shuai Li, Zhongwei Chen
  • Hot spot identification, inspection, and review
    Patent number: 9330987
    Abstract: A method for identifying, inspecting, and reviewing all hot spots on a specimen is disclosed by using at least one SORIL e-beam tool. A full die on a semiconductor wafer is scanned by using a first identification recipe to obtain a full die image of that die and then design layout data is aligned and compared with the full die image to identify hot spots on the full die. Threshold levels used to identify hot spots can be varied and depend on the background environments close thereto, materials of the specimens, defect types, and design layout data. A second recipe is used to selectively inspect locations of all hot spots to identify killers, and then killers can be reviewed with a third recipe.
    Type: Grant
    Filed: September 9, 2014
    Date of Patent: May 3, 2016
    Assignee: Hermes-Microvision, Inc.
    Inventors: Steve Lin, Wei Fang, Eric Ma, Zhonghua Dong, Jon Chiang, Yan Zhao, Chester Kuo, Zhongwei Chen
  • Multi-segment brightness compensation
    Patent number: 9300930
    Abstract: A scanning projector includes a brightness compensation component. The brightness compensation component modifies pixel brightness as a function of instantaneous scan phase of a sinusoidally scanning mirror. The brightness compensation component uses different brightness compensation functions based on whether the instantaneous scan phase is above or below a threshold. The threshold may correspond to a knee of a maximum laser power limit curve.
    Type: Grant
    Filed: February 18, 2014
    Date of Patent: March 29, 2016
    Assignee: Microvision, Inc.
    Inventors: P. Selvan Viswanathan, Markus Duelli
  • Method and system for measuring critical dimension and monitoring fabrication uniformity
    Patent number: 9282293
    Abstract: A method for measuring critical dimension (CD) includes steps of: scanning at least one area of interest of a die to obtain at least one scanned image; aligning the scanned image to at least one designed layout pattern to identify a plurality of borders within the scanned image; and averaging distances each measured from the border or the plurality of borders of a pattern associated with a specific type of CD corresponding to the designed layout pattern to obtain a value of CD of the die. The value of critical dimensions of dies can be obtained from the scanned image with lower resolution which is obtained by relatively higher scanning speed, so the above-mentioned method can obtain value of CD for every die within entire wafer to monitor the uniformity of the semiconductor manufacturing process within an acceptable inspection time.
    Type: Grant
    Filed: March 5, 2013
    Date of Patent: March 8, 2016
    Assignee: Hermes Microvision Inc.
    Inventors: Wei Fang, Jack Jau, Hong Xiao
  • MEMS device with multi-segment flexures
    Patent number: 9223129
    Abstract: A microelectromechanical systems (MEMS) device includes a scanning platform suspended from a fixed platform by two flexures that form a pivot axis. The two flexures may be symmetric or asymmetric about a centerline of the scanning platform. At least one flexure includes two segments that are not parallel to each other. A second flexure may include two segments with one segment being wider than the other. Flexure design reduces effects of mounting and thermal stresses when the MEMS device is mounted as part of an assembly.
    Type: Grant
    Filed: April 19, 2013
    Date of Patent: December 29, 2015
    Assignee: Microvision, Inc.
    Inventors: Dean R. Brown, Wyatt O. Davis, Jason B. Tauscher
  • Free form optical redirection apparatus and devices using same
    Patent number: 9217913
    Abstract: A projection system (900) includes a scanner (802) and light source (801). The scanner (802) is configured to crate a scan cone (994) for forming images (995). A principal beam (992) defines a traveling direction of the scan cone (994). An optical device (880) having decentered, free-form major faces is disposed at an output of the projection system (900) such that the scan cone (994) passes through the optical device (880). The optical device (880) is configured to redirect the principal beam (992), and accordingly the traveling direction of the scan cone (994), by a predetermined amount and to correct both anamorphic distortion and vertical smile distortion initially present in the image.
    Type: Grant
    Filed: February 25, 2015
    Date of Patent: December 22, 2015
    Assignee: Microvision, Inc.
    Inventor: Joshua M. Hudman
  • High efficiency laser modulation
    Patent number: 9167217
    Abstract: A scanning laser projector drives laser light sources with waveforms for higher efficiency. Optical light power values for pixels are mapped to amplitude/duration pairs. Laser diodes are driven with electrical currents having the amplitude for time period specified by the duration. For increasing optical light power values, amplitude values are increased, and then durations are increased.
    Type: Grant
    Filed: May 2, 2013
    Date of Patent: October 20, 2015
    Assignee: Microvision, Inc.
    Inventors: Scott Woltman, Robert James Jackson, Christopher Brian Adkins
  • Scanning laser proximity detection
    Patent number: 9140971
    Abstract: A scanning laser projector detects obstructions in a projector field of view using a proximity detector that detects infrared light at a photodetector. The photodetector is tested with an additional infrared light source. The additional infrared light source may also be used as proximity detector that can detect a local obstruction blocking the photodetector.
    Type: Grant
    Filed: October 31, 2013
    Date of Patent: September 22, 2015
    Assignee: Microvision, Inc.
    Inventors: Scott Woltman, Robert James Jackson
  • Multi-Segment Brightness Compensation
    Publication number: 20150237316
    Abstract: A scanning projector includes a brightness compensation component. The brightness compensation component modifies pixel brightness as a function of instantaneous scan phase of a sinusoidally scanning mirror. The brightness compensation component uses different brightness compensation functions based on whether the instantaneous scan phase is above or below a threshold. The threshold may correspond to a knee of a maximum laser power limit curve.
    Type: Application
    Filed: February 18, 2014
    Publication date: August 20, 2015
    Applicant: Microvision, Inc.
    Inventors: P. Selvan Viswanathan, Markus Duelli
  • Piezoelectric actuated device, method and system
    Patent number: 9105834
    Abstract: A piezoelectric actuated device includes one or more areas of piezoelectric material coupled to a substrate. The piezoelectric material may be placed on regions of the substrate that exhibit the greatest curvature and stress when the device is vibrating according to a desired structural Eigenmode of vibration. The piezoelectric material may have a non-uniform density.
    Type: Grant
    Filed: January 27, 2012
    Date of Patent: August 11, 2015
    Assignee: Microvision, Inc.
    Inventors: Wyatt O. Davis, Utku Baran, Dean R. Brown, Hakan Urey
  • Multiple laser drive method, apparatus and system
    Patent number: 9104038
    Abstract: A scanning projector includes a scanning mirror that sweep a beam in two dimensions. The beam is created by multiple laser light sources, at least two of which create light at substantially the same wavelength. A first of the two light sources is driven up to a transition point past which both of the two light sources are driven (equally or unequally).
    Type: Grant
    Filed: April 25, 2013
    Date of Patent: August 11, 2015
    Assignee: Microvision, Inc.
    Inventors: Scott Woltman, Robert James Jackson
  • Method and system for measuring critical dimension and monitoring fabrication uniformity
    Patent number: 9100553
    Abstract: A method for measuring critical dimension (CD) includes steps of: scanning at least one area of interest of a die to obtain at least one scanned image; aligning the scanned image to at least one designed layout pattern to identify a plurality of borders within the scanned image; and averaging distances each measured from the border or the plurality of borders of a pattern associated with a specific type of CD corresponding to the designed layout pattern to obtain a value of CD of the die. The value of critical dimensions of dies can be obtained from the scanned image with lower resolution which is obtained by relatively higher scanning speed, so the above-mentioned method can obtain value of CD for every die within entire wafer to monitor the uniformity of the semiconductor manufacturing process within an acceptable inspection time.
    Type: Grant
    Filed: March 5, 2013
    Date of Patent: August 4, 2015
    Assignee: Hermes Microvision Inc.
    Inventors: Wei Fang, Jack Jau, Hong Xiao
  • Arrangement for and method of projecting an image with linear scan lines
    Patent number: 9071770
    Abstract: A lightweight, compact image projection module, especially for mounting in a housing having a light-transmissive window, is operative for sweeping a composite laser beam as a pattern of linear scan lines on a planar projection surface and for causing selected pixels arranged along each linear scan line to be illuminated to produce an image of high quality and in color.
    Type: Grant
    Filed: March 4, 2011
    Date of Patent: June 30, 2015
    Assignee: Microvision, Inc.
    Inventors: Chinh Tan, Frederick F. Wood, Miklos Stern