Abstract: A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.

Abstract: A beam combining device combines laser beams and performs speckle reduction of the laser light. Two laser beams are incident on a non-polarizing beam splitter and combined beams are split into two light paths with different optical path lengths. The two light paths may have different geometric path lengths and/or different indices of refraction in the paths to produce the different optical path lengths. One of the light paths is passed through a polarization rotation device and then the two light paths are recombined with a polarizing beam splitter to produce a combined reduced speckle laser beam.

Abstract: A bi-acylindrical lens collimates a divergent elliptical laser beam. A first surface of the bi-acylindrical lens is shaped to form a first acylindrical lens, and a second surface of the bi-acylindrical lens is shaped to form a second acylindrical lens. The first acylindrical lens collimates the divergent elliptical laser beam on the fast axis, and the second acylindrical lens collimates the diverging elliptical laser beam on the slow axis.

Abstract: The embodiments described herein provide improved scanner assemblies that include a first plastic body, a second plastic body, a movable scanning platform and a drive device. The first plastic body includes a first plurality of coupling structures, while the second plastic body includes a second plurality of coupling structures. The moveable scanning platform is positioned between the first plastic body and the second plastic body, and each of the first plurality of coupling structures is welded to a corresponding one of the second plurality of coupling structures.

Abstract: Briefly, in accordance with one or more embodiments, a MEMS laser beam display to implement mixed-mode depth detection comprises an imaging engine to project an image in a field of view of the MEMS laser beam display, a time of flight (TOF) depth detector to determine a distance to a target within the field of view in a first mode of depth detection, wherein the TOF depth detector determines coarse depth data of the target, and a structured light depth detector to determine a distance to the target in a second mode of depth detection, wherein the structured light depth detector determines fine depth data of the target. Depth processing circuitry may generate a composite three-dimensional (3D) image of the target, or may identify a gesture region of the target for gesture recognition.

Abstract: Briefly, in accordance with one or more embodiments, an information handling system comprises a scanning system to scan one or more component wavelength beams into a combined multi-component beam in a first field of view, and a redirecting system to redirect one or more of the component wavelength beams into a second field of view. A first subset of the one or more component wavelength beams is projected in the first field of view and a second subset of the one or more component wavelength beams is projected in the second field of view. The first subset may project a visible image in the first field of view, and user is capable of providing an input to control the information handling system via interaction with the second subset in the second field of view.

Abstract: A scanned beam 3D sensing system includes smart infrared pulsing to detect objects in a field of view. Infrared laser light pulses are emitted at a first density in a field of view and reflections are detected. Times of flight of the infrared laser light pulses are measured to determine if an object is in the field of view. The density of the infrared pulses may be increased based on various factors. The higher density infrared pulses may be scanned in a region of interest that is a subset of the field of view. Power consumption is reduced by reducing the density of laser pulses when possible.

Abstract: Laser scanning devices and methods are described that provide for improved touch detection. The laser scanning devices and methods determine if an object is touching a touch surface by determining if a halo region having corresponding locally high amplitude signals is proximate to the object. The presence of such a halo region can confirm that the object is touching surface and not just hovering above the surface. Furthermore, the presence of the halo region can confirm object touching even for objects having significantly different sizes. As one example, the determined presence of the halo region can be used to reliably determine that a human finger is touching the surface even though human fingers can have significantly different sizes.

Abstract: This invention provides a charged particle source, which comprises an emitter and means of generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

Abstract: A method and system for inspecting defects saves scanned raw data as an original image so as to save time for repeated scanning and achieve faster defect inspection and lower false rate by reviewing suspicious defects and other regions of interest in the original image by using the same or different image-processing algorithm with the same or different parameters.

Abstract: A resonant scanning mirror includes a sensor to provide position information. A parameter estimation circuit estimates parameters from the position information. The parameter estimation circuit includes wideband analog circuits that have poles far removed from the resonant frequency of the scanning mirror. The parameter estimation circuit also includes an analog-to-digital converter that samples at a high sample rate, and digital filters that exhibit near perfect linearity.

Abstract: A scanning mirror resonates on a first axis and moves on a second axis at a frequency dictated by a sync signal. The period of movement on the second axis is not necessarily an integer multiple of the period of movement on the first axis. A drive circuit excites movement of the mirror. The drive circuit adds a position offset to the signal that excites movement on the second axis. The position offset is capable of causing the resonant movement on the first axis to scan a substantially identical trajectory for at least a portion of each period on the second axis.

Abstract: The embodiments described herein provide improved techniques for laser welding. These techniques can provide improved weld strength while reducing the potential for damage at the welding surface. In general, the techniques use a mask to selectively block a portion of the laser beam during welding. Specifically, the mask is made to include at least one laser light blocking feature and at least one laser light passing feature. The mask is positioned to be in contact with the plastic bodies that are to be welded together, with the laser light blocking feature and laser light passing feature proximate to the area that is to be welded. Then during welding the laser beam is operated to simultaneously impact the laser light blocking feature and pass through the laser light passing feature.

Abstract: A structure, for defect inspection, is provided, which includes a scanning pad scanned by an electron beam inspection tool and a test key. The structure can be located in the scribe line. A virtual grounding pad is further provided if the test key is located in the dummy pattern regions.

Abstract: A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.

Abstract: A multi-beam apparatus for observing a sample with oblique illumination is proposed. In the apparatus, a new source-conversion unit changes a single electron source into a slant virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample with oblique illumination, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means not only forms the slant virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots. The apparatus can provide dark-field images and/or bright-field images of the sample.

Abstract: Briefly, in accordance with one or more embodiments, a MEMS scanned beam projector includes a light source to emit a light beam, a scanning platform to redirect the light beam impinging on the platform, and a display controller to control the light source and the scanning platform to cause the scanning platform to scan the light beam in a vertical direction and a horizontal direction in a scan pattern to project an image onto a projection surface. The display controller is configured to correct for image distortion in the projected image by providing a compensated drive signal to the scanning platform to compensate for the image distortion.

Abstract: The embodiments described herein provide scanners with a modular construction that includes a separately formed scan plate coupled to a microelectromechanical system (MEMS) flexure structure. Such modular scanners, when incorporated into laser scanning devices, reflect laser light into a pattern of scan lines. In general, the modular scanner includes a scan plate that is formed separately from the flexure structure. The scan plate and flexure structure each include coupling features that serve to couple the scan plate to the flexure structure. The flexure structure includes flexure arms that facilitate rotation of the scan plate to reflect laser light into a pattern of scan lines.

Abstract: Devices and methods are described herein for providing foveated image projection. In general, at least one source of laser light is used to generate a laser beam, and scanning mirror(s) that reflect the laser beam into a pattern of scan lines. The source of light is controlled to selectively generate projected image pixels during a first portion of the pattern of scan lines, and to selectively generate depth mapping pulses during a second portion of the pattern of scan lines. The projected image pixels generate a projected image, while the depth mapping pulses are reflected from the surface, received, and used to generate a 3-dimensional point clouds that describe the measured surface depth at each point. Thus, during each scan of the pattern both a projected image and a surface depth map can be generated, with the surface depth map used to modify some portion of the projected pixels.

Abstract: A load lock system for charged particle beam imaging with a particle shielding plate, a bottom seal plate and a plurality of sensor units is provided. The sensor units are located above the wafer, the shield plate is designed to have a few number of screws, and the bottom seal plate contains no cable, no contact sensors and fewer screws used. In the invention, the system is designed to improve the contamination particles from components in the load lock system of charged particle beam inspection tool and also to simplify its assembly.