Abstract: A scanning projector includes a MEMS device with a scanning mirror that sweeps a beam in two dimensions. Actuating circuits receive scan angle information and provide signal stimulus to the MEMS device to control the amount of mirror deflection on two axes. The scan angle information may be modified to maintain a constant image size, a constant image brightness, and/or to correct for keystone distortion.

Abstract: Scanning platforms for use in scanning laser devices are described herein. These scanning platforms are particularly applicable to scanning laser devices that use microelectromechanical system (MEMS) structures to facilitate mirror motion. The scanning platforms include a centrally located stationary mount portion and a movable portion that surrounds the stationary portion. The movable portion is configured to be coupled to a mirror and to facilitate motion of that mirror. Such a scanning platform can facilitate reduced size in scanning mirror assembly, and thus can facilitate a more compact scanning laser device.

Abstract: This invention provides a charged particle source, which comprises an emitter and means of generating a magnetic field distribution. The magnetic field distribution is minimum, about zero, or preferred zero at the tip of the emitter, and along the optical axis is maximum away from the tip immediately. In a preferred embodiment, the magnetic field distribution is provided by dual magnetic lens which provides an anti-symmetric magnetic field at the tip, such that magnetic field at the tip is zero.

Abstract: A scanning projector includes a programmable voltage source to provide a programmable voltage to a laser light source. A look-ahead circuit determines future voltage requirements by finding peaks in future pixel data. The programmable voltage may change for each frame of video, for each line of video, or multiple times within each line of video.

Abstract: A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.

Abstract: A scanning projector and method is provided that generates a feedback signal from at least one photodetector. In the scanning projector, a scanning mirror is configured to reflect laser light into an image region and an over scanned region. The at least one photodetector is configured to receive a portion of the reflected laser light impacting the over scanned region, and provides the feedback signal responsive to the received portion of light. This feedback signal can then be used to provide precise control of the scanning mirror.

Abstract: A multi-beam apparatus for observing a sample with high resolution and high throughput is proposed. In the apparatus, a source-conversion unit changes a single electron source into a virtual multi-source array, a primary projection imaging system projects the array to form plural probe spots on the sample, and a condenser lens adjusts the currents of the plural probe spots. In the source-conversion unit, the image-forming means is on the upstream of the beamlet-limit means, and thereby generating less scattered electrons. The image-forming means not only forms the virtual multi-source array, but also compensates the off-axis aberrations of the plurality of probe spots.

Abstract: Laser light pulses are reflected off a scanning mirror. A time-of-flight distance measurement device receives reflected light pulses and determines distances. The light pulses have abrupt changes in amplitude. Reflected pulses are differentiated to reduce sensitivity to amplitude variations. Differentiated pulses may be compressed to keep the receiver from saturating. Distance measurements are combined with location information to produce a 3D image of a surface.

Abstract: An apparatus with autofocus includes a scanning laser projector to provide autofocus assist. The scanning laser projector may project visible or nonvisible light in contrasting patterns to provide passive autofocus assist. The scanning laser projector may include a time-of-flight determination circuit to measure distances to provide active autofocus assist. Passive and active autofocus assist are combined to provide hybrid autofocus assist.

Abstract: A drive circuit for a resonant system provides an excitation signal having an amplitude and a phase. The resonant system provides a feedback signal representing an oscillation amplitude. The amplitude of the excitation signal is reduced for a substantially constant feedback signal amplitude by modifying the excitation signal phase.

Abstract: A metal gasket has a cross-sectional shape that is a six sided shape that resembles an irregular quadrangle that is substantially isosceles trapezoidal in shape with two sharp angles between the longest side and the second- and third-longest sides, respectively. The longest side of the cross section is the inner wall of the metal gasket.

Abstract: One modified source-conversion unit and one method to reduce the Coulomb Effect in a multi-beam apparatus are proposed. In the modified source-conversion unit, the aberration-compensation function is carried out after the image-forming function has changed each beamlet to be on-axis locally, and therefore avoids undesired aberrations due to the beamlet tilting/shifting. A Coulomb-effect-reduction means with plural Coulomb-effect-reduction openings is placed close to the single electron source of the apparatus and therefore the electrons not in use can be cut off as early as possible.

Abstract: Laser sub-divisional error (SDE) effect is compensated by using adaptive tuning. This compensated signal can be applied to position detection of stage in ebeam inspection tool, particularly for continuous moving stage.

Abstract: A scanning laser projector includes a proximity sensor and a planarity detector. When the proximity sensor detects an object closer than a proximity threshold, laser power is turned down. The scanning laser projector can measure distance at a plurality of projection points in the projector's field of view. If the projection points lie substantially in a plane, laser power may be turned back up.

Abstract: A scanning electron microscope (SEM) with a swing objective lens (SOL) reduces the off-aberrations to enhance the image resolution, and extends the e-beam scanning angle. The scanning electron microscope comprises a charged particle source, an accelerating electrode, and a swing objective lens system including a pre-deflection unit, a swing deflection unit and an objective lens, all of them are rotationally symmetric with respect to an optical axis. The upper inner-face of the swing deflection unit is tilted an angle ? to the outer of the SEM and its lower inner-face is parallel to the optical axis. A distribution for a first and second focusing field of the swing objective lens is provided to limit the off-aberrations and can be performed by a single swing deflection unit. Preferably, the two focusing fields are overlapped by each other at least 80 percent.

Abstract: A metal seal flange assembly for a vacuum system is presented. Its metal gasket has a crossectional shape that is an irregular hexagon with two acute angles between the longest side and the second- and third-longest sides, respectively. The longest side of the irregular hexagon is the vertical inner wall of the metal gasket. This design can reduce the normal force required to seal the metal seal flange assembly and reduce the number of bolts needed, enabling use in a limited working space.

Abstract: A structure for discharging an extreme ultraviolet mask (EUV mask) is provided to discharge the EUV mask during the inspection by an electron beam inspection tool. The structure for discharging an EUV mask includes at least one grounding pin to contact conductive areas on the EUV mask, wherein the EUV mask may have further conductive layer on sidewalls or/and bottom. The inspection quality of the EUV mask is enhanced by using the electron beam inspection system because the accumulated charging on the EUU mask is grounded.

Abstract: Briefly, in accordance with one or more embodiments, a scanned beam projector comprises a laser diode to emit a beam, a scanning engine to scan the beam on a surface to project an image comprising virtual pixels on the surface, a digital-to-analog converter (DAC) coupled to the laser diode to cause the laser diode to emit the beam in response to a digital video signal provided to the DAC, and a pulsed pixel controller to provide the digital video signal to the DAC, the pulsed pixel controller to align the digital video signal provided to the DAC with the virtual pixels of the image, and to select an optimal waveform to be generated by the laser diode for each virtual pixel.

Abstract: A method and system for inspecting defects saves scanned raw data as an original image so as to save time for repeated scanning and achieve faster defect inspection and lower false rate by reviewing suspicious defects and other regions of interest in the original image by using the same or different image-processing algorithm with the same or different parameters.

Abstract: Embodiments of this patent disclosure provide for eyeglasses with multiple set of hinges for folding into a compact configuration to be fitted inside a compact case for easy storage and carrying. In one aspect, a pair of foldable eyeglasses having multiple set of hinges is disclosed. The eyeglasses include a frame surrounding a pair of lenses, and a pair of temples each of which extending from an outer edge of the frame, and the eyeglasses are in an unfolded configuration when the eyeglasses is being worn by a user. The eyeglasses also include a horizontal hinge positioned on each temple for folding the pair of temples horizontally from the unfolded configuration toward the frame into a first folded configuration. The eyeglasses additionally include a vertical hinge positioned on each temple for folding the pair of temples vertically from the first folded configuration toward the frame into a second folded configuration.