Abstract: A scale includes a substrate, a metal layer of Ni formed on one principal surface of the substrate, and a scale grating formed on the metal layer. A plurality of gratings of Cr are disposed at a predetermined interval in the scale grating.

Abstract: A measuring system includes: a measuring machine; a plurality of candidate probes attachable to the measuring machine; a selected probe selected from the candidate probes and attached to the measuring machine; and a control device configured to control the measuring machine to perform a measurement operation for a workpiece, the control device including: a calibration value recorder configured to record respective calibration values of the candidate probes with respect to the measuring machine; and a calibration value processor configured to acquire one of the calibration values corresponding to the selected probe from the calibration value recorder.

Abstract: A small-sized measuring device includes a position detector that is provided on a main body and detects the position of an object to be measured, a timer that measures time, and a central control unit that controls overall operation. The central control unit accepts a base-point setting standby time set by a user and stores the base-point setting standby time. The central control unit measures elapse of the base-point setting standby time after accepting an instruction to start measuring time from the user, performs a base-point setting step of setting the position of the object to be measured detected by the position detector as a base point after the base-point setting standby time has elapsed, and then measures the position of the object to be measured as a relative position from the base point.

Abstract: A small-sized measuring device includes a position detector that is provided on a main body and detects the position of an object to be measured, a photosensor, and a central control unit that controls overall operation. The photosensor is configured to function at least as an input device configured to accept a base-point setting instruction from the user. The central control unit, when accepting the base-point setting instruction from the user through the non-contact input sensor, performs a base-point setting step of setting the position of the object to be measured detected by the position detector as a base point, and performs a measurement step of measuring the position of the object to be measured as a relative position from the base point.

Abstract: A non-contact probe includes: a light irradiating section that scans a measurement target object with spot-like laser beam; an image-capturing section that captures an image of the laser beam reflected by the measurement target object by using a plurality of pixel columns selected from a light-reception surface including a plurality of pixel columns, and generates a captured image; a position sensing section that senses an image-formation position of the laser beam on the captured image; and a pixel column changing section that selects a different plurality of pixel columns such that the image-formation position is included in the selected plurality of pixel columns.

Abstract: The current invention relates to a method of structured lilumination microscopy for determining a height map of a test surface wherein use is made of a structured lilumination microscope. The invention is further related to a structured illumination microscope for determining a height map of a test surface. The microscope comprises a light source, a spatial light modulator, scanner, an optical detector, and a processor.

Abstract: An inspection method includes an image-data acquisition step of acquiring data about an image of a disk-shaped graduation plate as disk-shaped graduation-plate image data, and a polar-coordinate transformation step of transforming the disk-shaped graduation-plate image data into polar coordinates using a center of the disk-shaped graduation plate as a reference to generate polar-coordinate graduation image data. A defect detection step includes a processing-region setting step of setting a processing region for each of graduation line on a polar-coordinate angle display axis, a center-of-gravity calculation step of calculating a center of gravity for each processing region, and a center-of-gravity pitch calculation step of calculating a pitch of the center of gravity calculated in the center-of-gravity calculation step.

Abstract: There is provided an inspection method of inspecting a disk-shaped graduation plate accurately and efficiently. An inspection method includes an image-data acquisition step of acquiring data about an image of a disk-shaped graduation plate as disk-shaped graduation-plate image data, and a polar-coordinate transformation step of transforming the disk-shaped graduation-plate image data into polar coordinates using a center of the disk-shaped graduation plate as a reference to generate polar-coordinate graduation image data. A defect detection step includes a processing-region setting step of setting a processing region on a polar-coordinate angle display axis, a center-of-gravity calculation step of calculating a center of gravity for each processing region, and a center-of-gravity pitch calculation step of calculating a pitch of the center of gravity calculated in the center-of-gravity calculation step.

Abstract: A variable focal length lens device includes: a liquid resonant liquid lens unit having a refractive index changeable in response to an inputted drive signal; a scanning range setter setting a predetermined standard frequency band as a scanning range of a frequency of the drive signal; a resonance frequency detector scanning the frequency of the drive signal over the scanning range and detecting a resonance frequency of the liquid lens unit based on an oscillation state of the liquid lens unit; and a resonance frequency estimator calculating an estimated value of a target resonance frequency based on a standard resonance frequency detected from the standard frequency band by the resonance frequency detector, the scanning range setter further setting a target frequency band including the estimated value of the target resonance frequency as the scanning range.

Abstract: A foolproof device provided to a manufacturing process includes an imaging part that captures an object on which a plurality of identifiable marks are provided, an image processing part that obtains state data including a coordinate position of each mark from at least one captured image captured by the imaging part, a storage that stores reference data obtained by the image processing part, the reference data including a reference position of each mark, and a comparison processing part that compares the reference data stored in the storage with the current state data obtained by the image processing part, and outputs a result of the comparison regarding at least some of the plurality of marks.

Abstract: An automatic measuring apparatus includes an inside-diameter measuring unit that measures the inside diameter of a workpiece, a robot arm part, and a control unit. The inside-diameter measuring unit is installed with the tip side facing upward. A cone-shaped guide cone is provided at the tip of the inside-diameter measuring unit. A workpiece stopper is attached to the outside of the inside-diameter measuring unit. A support surface, which serves as a placing surface on which the workpiece is placed, is supported by a spring, and the inclination and position of the support surface changes to follow a change in the posture and position of the workpiece.

Abstract: There is provided a measuring device that is inexpensive and easy to use, yet provides sufficient accuracy and resolution in continuous scanning measurement to measure workpiece surfaces. A dial gauge includes a spindle provided to be movable reciprocatively in an axial direction through a main body case. The main body case includes a stem provided to protrude from a side face of the main body case. A ball bearing that bears the spindle is provided inside the stem. A workpiece and the dial gage are relatively moved while a contact point at the tip of the spindle is in contact with the surface of the workpiece, and continuous scanning measurement is performed to measure irregularities of the surface of the workpiece or the amount of runout of the rotating workpiece.

Abstract: A small-sized measuring device includes a position detector that is provided on a main body and detects the position of an object to be measured, a timer that measures time, and a central control unit that controls overall operation. The central control unit accepts a base-point setting standby time set by a user and stores the base-point setting standby time. The central control unit measures elapse of the base-point setting standby time after accepting an instruction to start measuring time from the user, performs a base-point setting step of setting the position of the object to be measured detected by the position detector as a base point after the base-point setting standby time has elapsed, and then measures the position of the object to be measured as a relative position from the base point.

Abstract: A small-sized measuring device includes a position detector that is provided on a main body and detects the position of an object to be measured, a photosensor, and a central control unit that controls overall operation. The photosensor is configured to function at least as an input device configured to accept a base-point setting instruction from the user. The central control unit, when accepting the base-point setting instruction from the user through the non-contact input sensor, performs a base-point setting step of setting the position of the object to be measured detected by the position detector as a base point, and performs a measurement step of measuring the position of the object to be measured as a relative position from the base point.

Abstract: An optical sensor includes a radiation part that irradiates an object to be measured with laser light, an imaging part that receives laser light reflected by the object to be measured and captures an image of the object to be measured, a first driving part that moves the radiation part in a radiation direction of laser light to the object to be measured, and a second driving part that moves the imaging part in a reflection direction of laser light from the object to be measured and an orthogonal direction to the reflection direction.

Abstract: A three-dimensional geometry measurement apparatus including: a preliminary measurement part that creates a plurality of pieces of preliminary measurement data indicating three-dimensional coordinates of a reference point on a reference instrument; a reference data creation part that creates reference data; a calculation part that calculates a correction value on the basis of the reference data and the preliminary measurement data which does not match the reference data; a target measuring part that creates target measurement data indicating results of measuring a measurement point of the object to be measured; a correction part that corrects the target measurement data in the measurement system corresponding to the preliminary measurement data that does not match the reference data, on the basis of the correction value; and a geometry identification part that identifies a geometry of the object to be measured using the corrected target measurement data.

Abstract: A one dimensional measuring machine includes a scale having graduations, a mover that has a light source configured to emit light to the graduations of the scale and a light receiving element configured to receive the light having passed through the scale from the light source, and can move along the scale, a light amount information detector that detects information regarding a light amount of the light emitted to the scale from the light source while the mover moves along the scale, and a contamination detector that detects a degree of contamination of the scale, based the information regarding the light amount of the light detected by the light amount information detector.