Abstract: A modular configuration for a scanning probe for a coordinate measuring machine include a stylus suspension module, a stylus position detection module, and a signal processing and control circuitry module. The stylus position detection module is configured to be assembled separately from the stylus suspension module before mounting to the stylus suspension module. The signal processing and control circuitry module is configured to be assembled separately from the stylus position detection module and the stylus suspension module before rigidly coupling to the stylus position detection module as part of assembling the scanning probe.

Abstract: An indenter reference that is brought into contact with an axial second side surface of a sample which is arranged further toward an axial first side than an indenter, the indenter reference serving as a position reference for the indenter; a holder that detachably holds the indenter reference and is coupled with the indenter reference; an indenter position detector that couples with the holder and detects a relative position of the indenter with respect to the indenter reference; a regulator that allows displacement between a first position that regulates movement of the indenter reference with respect to the holder and a second position where the indenter reference can be removed from the holder; and a biasing portion that biases the regulator to be kept at the first position.

Abstract: A scanning probe for a coordinate measurement machine includes a stylus suspension module, a stylus position detection module, a disruptor configuration, and a signal processing and control circuitry module. The stylus position detection module includes a sensor configuration, which comprises various coils, and a shield configuration that is located around the sensor configuration and comprises electrically conductive material for shielding the sensor configuration. The stylus position detection module is mounted to the stylus suspension module utilizing a module mounting configuration, which enables the relative position of the sensor configuration to be adjusted for alignment during the assembly of the scanning probe.

Abstract: An inductive position encoder includes a scale, a detector and a signal processor. The scale includes a periodic pattern of signal modulating elements (SME) arranged along a measuring axis (MA) with a spatial wavelength W1. The detector comprises sensing elements and a field generating coil that generates a changing magnetic flux. The sensing elements comprise conductive loops that provide detector signals responsive to a local effect on the changing magnetic flux provided by adjacent SME's. Some or all of the conductive loops are configured according to an intra-loop shift relationship wherein equal “shifted proportions” of a loop are shifted in opposite directions by W1/4K. K is an odd integer. The intra-loop shift relationship can be used to suppress Kth spatial harmonic components in the detector signals, while also overcoming longstanding detrimental layout problems. It combines easily with “loop width” spatial filtering techniques that filter other spatial harmonic signal components.

Abstract: A metrology system includes front and back vision components portions. The front vision components portion includes a light source, camera, variable focal length (VFL) lens, and objective lens defining an optical axis. The back vision components portion may include a reflective surface and a polarization altering component. A workpiece with apertures is located between the front and back vision components portions. For each aperture of the workpiece, the system adjusts a relative position between the front vision components portion and the workpiece to align its optical axis with each aperture such that light from the light source passes through the aperture and is reflected by the reflective surface of the back vision components portion. The system uses the VFL lens and camera to acquire an image stack including images of the aperture, and analyzes the image stack to determine a measurement related to a workpiece feature of the aperture.

Abstract: Provided are an offline teaching device and a measurement control device. The offline teaching device detects a shape of a measured object by a three-dimensional sensor unit, generates measurement procedure information in which measurement items are respectively associated with measurement points sequentially specified to the detected shape, and causes a measurement procedure information storage unit to store the measurement procedure information associated.

Abstract: An error determination apparatus for determining a measurement error that occurs when a workpiece is measured by a coordinate measuring machine, the error determination apparatus includes an information acquisition part that acquires a) motion error information indicating a result of measuring a motion error of the coordinate measuring machine and b) design information of the workpiece, a measurement position specification part that specifies a measurement position on the workpiece on the basis of the design information, an error determination part that determines a measurement error occurring in the measurement at the measurement position due to the motion error on the basis of the motion error information, and an output part that outputs the measurement error determined by the error determination part.

Abstract: There is provided a display panel module unit having a narrow frame suitable for a display unit of a small-sized measuring apparatus. A panel module unit includes a first panel part, a second panel part, and an intermediate cover housed in a housing part in order from a front side to a rear side. The housing part includes an annular side wall and at least one fixing means attached on an inner peripheral surface of the side wall, and the fixing means is a means for fixing a position of the intermediate cover in the housing part. The second panel part is housed between the first panel part and the intermediate cover, and a position of the second panel part is indirectly fixed by the intermediate cover. The second panel part is provided with a biasing means for biasing the first panel part from the rear side toward the front side.

Abstract: A displacement sensor includes a radiation part that irradiates a workpiece displaceable in a predetermined displacement direction with light, a light receiving part that receives a reflected light generated when the light radiated by the radiation part is reflected on the workpiece, and a fringe generation part that includes a generation means for generating fringes on a light receiving surface of the light receiving part when the light receiving part receives the reflected light from the workpiece. The fringe generation part and the light receiving part are arranged such that the fringe generation part and the light receiving part are parallel to the displacement direction, or parallel to a virtual image of the displacement direction.

Abstract: The present invention relates to a position specifying method for specifying a position through touch input in a screen displayed on a touch panel display.

Abstract: An optical device includes a first lens holder holding a collimating lens, a second connector block supporting the first lens holder, a second lens holder supporting a light-forming lens, a pillar-shaped roller interposed between the second connector block and the second lens holder and disposed along an X-axis direction, and a pair of adjuster screws disposed across an optical axis in a Y-axis direction, the second lens holder and the second connector block being fixed with each other by the adjuster screws. Mutually facing end faces of the second connector block and the second lens holder are provided with respective V-shaped grooves extending along the X-axis direction, the roller being interposed between the V-shaped grooves. Each of the adjuster screws includes a head engaged with the second lens holder in a manner capable of relative movement in the X-axis direction and a shaft screwed into the second connector block.

Abstract: A calibration method includes: measuring, with a CMM, a ball-to-ball distance of a plurality of edges of an inspection gauge installed in a first posture, a second posture and a third posture, and calculating a calibration value calibrating a ball-to-ball distance between two balls at respective ends of a plurality of edges of the inspection gauge by solving simultaneous equations including the ball-to-ball distance of the plurality of edges of the inspection gauge installed in the first posture, the ball-to-ball distance of the plurality of edges of the inspection gauge installed in the second posture, the ball-to-ball distance of the plurality of edges of the inspection gauge installed in the third posture, and a measurement error of the CMM at the measurement position.

Abstract: A scanning probe for a coordinate measuring machine with inductive position sensor signal gain control is provided. The scanning probe includes a stylus position detection portion with field generating and sensing coils, and for which corresponding output signals are indicative of a position of the probe tip of the stylus. Signal processing and control circuitry is configured to implement different operating regions, such as a central high gain operating region which corresponds to a central probe tip position range, as well as other lower gain operating regions, and for which transition operations may be performed for adjusting the gain. In various implementations, transition operations for adjusting a gain may include operations such as: adjusting power to a field generating coil configuration; adjusting a gain of a front end amplifier; altering characteristics of sensing coils; adjusting an input range of an analog to digital converter, etc.

Abstract: An inductive position detector for stylus position measurement in a scanning probe comprises a coil board configuration located along a central axis in the probe. The coil board configuration includes a field generating coil configuration that surrounds a hole in the coil board configuration, a top axial sensing coil configuration and a bottom axial sensing coil configuration, and N top rotary sensing coils and N bottom rotary sensing coils. A stylus-coupled disruptor configuration includes a cylindrical disruptor element that is configured to move and fit within the hole of the coil board configuration, and moves along Z (axial) and X-Y (rotary) directions in a motion volume. The field generating coil configuration generates a changing magnetic flux (e.g., encompassing all or at least part of the cylindrical disruptor element), and coil signals indicate the cylindrical disruptor element and/or stylus positions.

Abstract: A height measurement device includes: a lens system; a lens controller to output a drive signal to the lens system; a continuous illuminator to continuously illuminate a workpiece; an image detector to detect an image of the workpiece; an image calculation unit to calculate an EDOF image on a basis of a detected image; a focal depth adjustment unit to cause an extended focal depth of the EDOF image to be increased or decreased by increasing or decreasing an amplitude of the drive signal; a focus determination unit to determine a focus state of a portion of interest of the workpiece included in the EDOF image; and a height measurement unit to measure an upper limit or a lower limit of the extended focal depth, the upper limit or the lower limit being based on a timing at which the focus state of the portion of interest has changed.

Abstract: A non-contact probe includes an irradiating part that radiates a laser beam, an irradiating mirror that reflects the laser beam from the irradiating part toward a workpiece, a light-receiving mirror that reflects the reflected light from the workpiece, and a galvano motor capable of swinging both the irradiating mirror and the light-receiving mirror. The irradiating mirror is provided at one axial end of the motor shaft that extends on both ends of the galvano motor, and the light-receiving mirror is provided at the other axial end of the motor shaft.

Abstract: A three-dimensional-measuring-apparatus inspection gauge includes a plurality of targets to be measured with which a tip of a probe of a three-dimensional measuring apparatus comes into contact; and a frame member that supports the plurality of targets. The plurality of targets are arranged in positions corresponding to each vertex of a triangular prism.

Abstract: An uncertainty estimation method including: acquiring first variable values, which are a plurality of variable values included in a function indicating a relationship between a measurement dimension and a maximum permissible length measurement error when a predetermined measurement condition value of a coordinate measuring machine is a first value, and second variable values, which are the plurality of variable values occurring when the measurement condition value is a second value; calculating a maximum permissible length measurement error corresponding to a third value by calculating the variable values occurring when the measurement condition value is the third value on the basis of the plurality of first variable values and the plurality of second variable values; and estimating the measurement uncertainty of the coordinate measuring machine on the basis of the calculated maximum permissible length measurement error.

Abstract: It is an object of the present invention to provide a measuring apparatus capable of easily restoring the tracking state when the tracking state of the target is interrupted. One aspect of the present invention is a measuring apparatus that emits a light beam toward a target, captures and tracks the target, and measures the three-dimensional coordinates of the target. The measuring apparatus includes: a light source for emitting light beam; an angle control unit for controlling the emission angle of the light beam emitted from the light source so as to track the moving target; an imaging unit for capturing the target or the vicinity of the target, and a recognition unit for recognizing the target or the specific portion including the target from an image captured by the imaging unit.