Abstract: A grating part includes a first transparent substrate having an optical grating on a surface thereof, a second transparent substrate having an optical grating on a surface thereof, and a spacer positioned between the first transparent substrate and the second transparent substrate, the spacer bonding the first transparent substrate and the second transparent substrate.

Abstract: Facilitate the work of setting the part program used in the measuring device for each object to be measured. A measurement control apparatus of the present invention includes a code reader that reads a code containing at least a part program identification information, and a measurement information providing unit that, when the code is read by the code reader, sends a start command of a part program corresponding to the part program identification information recorded in the code to a measuring device, and causes the measuring device to execute processing according to the part program prepared in advance.

Abstract: A digital micrometer includes a main-body frame, a spindle, a thimble part, and a displacement detector that detects displacement of the spindle. The main-body frame includes a U-shaped frame part, and a spindle holding part provided on the other end side of the U-shaped frame part and having a length in a direction away from an anvil. The spindle is held by a spindle holding part, provided to be movable forward and backward in an axial direction with respect to the anvil, and includes a contactor on one end face. The main-body frame and the spindle are formed of a non-magnetic material.

Abstract: A scale includes a base material, scale patterns arranged at a predetermined periodicity on a main surface of the base material, and a fluorine film that covers the scale patterns and is at least partly a monomolecular fluorine compound.

Abstract: A laser processing machine includes: a variable focal length optical system in which a focus position is periodically changed in response to a drive signal to be inputted; a position-detection light source configured to emit a detection light onto a workpiece through the variable focal length optical system; a light detector configured to receive the detection light reflected on the workpiece and output a light detection signal; a signal processor configured to output a synchronization pulse signal in synchronization with the focus timing when the detection light is focused on the surface of the workpiece in accordance with the inputted light detection signal; and a laser oscillator configured to oscillate a pulse laser beam in accordance with the inputted synchronization pulse signal to radiate the pulse laser beam on the workpiece through the variable focal length optical system.

Abstract: A measurement method of a surface shape and a surface shape measurement device uses an interferometer optical head that acquires an interference fringe image generated by a light path difference between the reference light and the measurement light, acquires N interference fringe images by scanning from a start point to an end point in the Z-axis direction, and measures the surface shape of the measurement target surface based on the interference fringe images. For a common position in the N interference fringe images, regarding an interference signal including values of N points that indicates a change in the interference light intensity along the Z-axis direction, a phase of an interference fringe produced by the light of a predetermined analysis wavelength is determined, and the relative position in the Z-axis direction of the measurement target surface within the range of the analysis wavelength is determined based on the phase.

Abstract: There is provided an inside-diameter measuring unit capable of automating inside-diameter measurement and a control method for automatic inside-diameter measurement. An inside-diameter measuring part is supported by a support frame part via a floating joint part. The floating joint part includes a rotation-allowing mechanism part and a translation-allowing mechanism part. A measuring head part of the inside-diameter measuring part is inserted into a hole by a robot arm part. The inside-diameter measuring part adjusts its position and posture autonomously by the reaction force when a contact point pushes against the inner wall of the hole to align the axis of the inside-diameter measuring part with the axis of the hole. An electric inside-diameter measuring unit can automatically measure the inside diameter of a hole.

Abstract: There is provided a housing unit having an immersion detection function, as a housing of an electronic device requiring waterproofing. A housing unit includes a casing liquid-tightly defining an internal housing space and housing an internal device in the housing space, and an immersion detector that detects whether liquid leak into the housing space of the casing. The casing includes a sealing means for waterproofing a joint, an entryway, or an opening. The immersion detector includes an electrolyte salt and a continuity detector that detects a change in conductivity when the liquid comes into contact with the electrolyte salt. The electrolyte salt is arranged inside the casing and further inside the casing than the sealing means.

Abstract: An encoder includes scale and detection head. The detection head includes light source (transmitting unit) and light-receiving unit (receiving unit). The light-receiving unit includes light-receiving surface (receiving surface) and converts light received at the light-receiving surface 50 into differential detection signals with two phases and outputs the same. The light-receiving surface includes element array group including four element arrays provided in a parallel manner along an orthogonal direction, with each element array including a plurality of light-receiving elements (receiving elements). The plurality of element arrays in the element array group are disposed at positions where the sum of: (i) a distance in the orthogonal direction from a reference position to a positive phase signal element array; and (ii) a distance in the orthogonal direction from the reference position to the negative phase signal element array, is the same for all the phases of the at least two phases.

Abstract: The inspection gauge is an inspection gauge for a coordinate measuring apparatus having a triangular pyramid shape, and includes a plurality of support members in which first ends are provided at positions corresponding to vertexes of the triangular pyramid and second ends are connected to each other in a region inside the triangular pyramid, and a plurality of spheres provided at positions corresponding to the vertexes of the triangular pyramid on the plurality of support members, and at least three support members of the plurality of support members have mutually different shapes.

Abstract: There is provided an inside-diameter measuring unit capable of automating inside-diameter measurement and a control method for automatic inside-diameter measurement. An inside-diameter measuring part is supported by a support frame part via a floating joint part. The floating joint part includes a rotation-allowing mechanism part and a translation-allowing mechanism part. A measuring head part of the inside-diameter measuring part is inserted into a hole by a robot arm part. The inside-diameter measuring part adjusts its position and posture autonomously by the reaction force when a contact point pushes against the inner wall of the hole to align the axis of the inside-diameter measuring part with the axis of the hole. An electric inside-diameter measuring unit can automatically measure the inside diameter of a hole.

Abstract: There is provided an inside-diameter measuring unit capable of automating inside-diameter measurement and a control method for automatic inside-diameter measurement. An inside-diameter measuring part is supported by a support frame part via a floating joint part. The floating joint part includes a rotation-allowing mechanism part and a translation-allowing mechanism part. A measuring head part of the inside-diameter measuring part is inserted into a hole by a robot arm part. The inside-diameter measuring part adjusts its position and posture autonomously by the reaction force when a contact point pushes against the inner wall of the hole to align the axis of the inside-diameter measuring part with the axis of the hole. An electric inside-diameter measuring unit can automatically measure the inside diameter of a hole.

Abstract: A measurement method of a surface shape includes combining N stacked images captured while scanning the measuring head. For a position in the N stacked images, from an integral curve including values of N points, which is obtained by integrating square values or absolute values of the interference signal including values at N points: a start-point-side noise part straight line that approximates a start-point-side noise part, which corresponds to a range where the slope is smaller than the slope in the vicinity of the measurement target surface at the start-point-side than the measurement target surface; an end-point-side noise part straight line that approximates an end-point-side noise part, which corresponds to a range where the slope is smaller than the slope in the vicinity of the measurement target surface at the end-point-side than the measurement target surface; and a surface proximity straight line that approximates surface proximity part.

Abstract: A grating part includes a first transparent substrate having an optical grating on a first principal surface and a second transparent substrate having an optical grating on a first principal surface; a second principal surface of the first substrate on an opposite side from the first principal surface and a second principal surface of the second substrate on an opposite side from the first principal surface are bonded.

Abstract: There is provided a probe unit correction method for correcting linear expansion of a probe unit to obtain an accurate measurement value. First, a probe offset value is calculated as a model. Then, a probe unit correction method includes a temperature data acquisition step of acquiring a temperature difference between a temperature at a time of calibration and a temperature of a current measurement environment, a reference tip coordinate correction step of calculating, as a reference tip correction coordinate value, a correction value of a reference tip coordinate value to which linear expansion is added, and a probe offset correction step of calculating, as a probe offset correction value, a correction value of a probe offset value to which the linear expansion is added.

Abstract: A workpiece inspection and defect detection system includes a light source configuration, a lens configuration, and a camera configuration for imaging workpieces. The system acquires training and run mode workpiece images for acquiring corresponding sets of training and run mode workpiece image data. Each set of image data includes at least first and second color channel workpiece image data corresponding to first and second color channels (e.g., for which ratios between the first and second color channel workpiece image data may be determined as part of synthetic image data to improve the ability of the system to detect defects). The defect detection portion is trained based at least in part on the image data, and is utilized to perform analysis to determine defect images that include workpieces with defects (e.g., for which metrology operations may be performed for measuring dimensions of defects, etc.).

Abstract: A scale includes a base material, an intermediate layer of soft magnetic material formed on one surface of the base material and roughened on face thereof opposite to the base material, and a scale pattern of a conductor formed on the intermediate layer.

Abstract: A supplementary metrology position coordinates determination (SMPD) system is used with a robot. “Robot accuracy” (e.g., for controlling and sensing an end tool position of an end tool that is mounted proximate to a distal end of its movable arm configuration) is based on robot position sensors included in the robot. The SMPD system includes an imaging configuration and an XY scale and an alignment sensor for sensing alignment/misalignment therebetween, and an image triggering portion and processing portion. One of the XY scale or imaging configuration is coupled to the movable arm configuration and the other is coupled to a stationary element (e.g., a frame above the robot). The imaging configuration acquires an image of the XY scale with known alignment/misalignment, which is utilized to determine metrology position coordinates that are indicative of the end tool position, with an accuracy level that is better than the robot accuracy.

Abstract: An inductive position detection configuration for stylus position measurement in a scanning probe comprises a stylus position detection portion arranged along a central axis in the probe. The stylus position detection portion includes a field generating coil configuration and top and bottom axial and rotary sensing coil configurations. The field generating coil configuration generates a changing magnetic flux, and coil signals indicate conductive disruptor element and/or stylus positions. A field generating coil coupling and crosstalk reducing configuration couples signal processing and control circuitry to the field generating coil configuration to provide a coil drive signal, and is configured to reduce crosstalk that would otherwise occur if the field generating coil configuration were directly connected to the signal processing and control circuitry without the field generating coil coupling and crosstalk reducing configuration.