Abstract: A configuration for coupling a chromatic range sensor optical probe to a coordinate measurement machine (CMM) includes an electric auto connection and a free-space fiber optic coupling with first and second coupling elements. The first coupling element has a first fiber optic connector configured to couple to wavelength detector and light source elements of a CMM through a first optical fiber, and is configured to mount to a probe head of the CMM. The second coupling element has a second fiber optic connector configured to couple to an optical pen of a chromatic range sensor (CRS) optical probe through a second optical fiber, and is configured to mount to the CRS optical probe. One of the first or second coupling elements includes a pair of optical lenses configured to collimate light received via the first optical fiber and focus the collimated light into the second optical fiber.

Abstract: A triangulation sensing system includes a projection axis configuration and an imaging axis configuration. The projection axis configuration includes a triangulation light source (e.g. an incoherent source) and a variable focus lens (VFL) that is controlled to rapidly periodically modulate a triangulation light focus position (TLFP) along a Z axis over a focus position scan range, to provide a corresponding triangulation light extended focus range (TLEFR) that supports accurate measurement throughout. In some implementations, the triangulation system may be configured to provide the best measurement accuracy for a workpiece region of interest (WROI) by exposing its triangulation image only when the scanned TLFP temporarily coincides with the WROI Z height. In some implementations, the triangulation system may be configured to limit various measurement operations to using only an operational pixel subset of a detector that receives image light from the WROI, in order to shorten the measurement time.

Abstract: An image pickup apparatus that is capable of improving measurement accuracy and measurement workability of an optical measurement apparatus, an optical measurement apparatus including the image pickup apparatus, and a measurement system. An image pickup apparatus according to an embodiment includes a base section, a beam splitter, and an image pickup section. The base is configured to detachably attach to an optical measurement apparatus including an optical projection system configured to project an image of a subject on a screen. The beam splitter is disposed on an optical axis of the optical projection system upon attachment of the base to the optical measurement apparatus. The image pickup circuitry includes an image pickup device configured to receive light generated through splitting at the beam splitter and is configured to take an image of the subject upon attachment of the base.

Abstract: A tunable acoustic gradient (TAG) lens includes a lens casing in which a controllable acoustic wave generating element is arranged and that surrounds a casing cavity in which an operational volume of a refractive fluid is contained. The lens casing includes a first case end portion comprising a window mounted along an optical path, and a second case end portion comprising a mirror mounted along the optical path. The TAG lens is configured to enable light to pass through the window of the TAG lens to enter the TAG lens and make a first pass through the operational volume of the refractive fluid and be reflected by the mirror of the TAG lens and make a second pass back through the operational volume of the refractive fluid and pass back out through the window of the TAG lens to exit the TAG lens and continue along the optical path.

Abstract: Scale pattern in a scale of an optical encoder includes a first scale mark that blocks a first light from being guided to an image capturer and guides a second light to the image capturer, and a second scale mark that guides the first light and the second light to the image capturer. Second scale mark is arranged in an ABS pattern and the first scale mark is arranged in an INC pattern by incorporating the second scale mark. Image capturer includes a first image capturing section that captures an image of the ABS pattern from the first light that arrives via the second scale mark, and a second image capturing section that captures an image of the INC pattern from the second light that arrives via the first scale mark and the second scale mark. Calculator calculates a position of a head relative to the scale.

Abstract: A rotary table apparatus includes: a table part having a placement surface; a support part having a guide surface facing an opposing surface which is on an opposite side of the placement surface of the table part; an air film forming part that forms an air film by supplying compressed air between the guide surface and the opposing surface; a negative pressure generating part that sucks air between the guide surface and the opposing surface; a discharge part formed with a discharge port; and an opening adjusting part that adjust the size of an opening area of the discharge port in accordance with the size of a compressed air pressure corresponding to a load applied to the table part.

Abstract: A scale includes a base material, scale patterns arranged at a predetermined periodicity on a main surface of the base material, and a fluorine film that covers the scale patterns and is at least partly a monomolecular fluorine compound.

Abstract: A measuring apparatus and a measuring method capable of measuring a surface of an object includes a movable body having a mounting portion on which the object is mounted, and first and second surfaces not coplanar with each other, a first scale portion provided to press the first surface and to measure a first scale position along a first scale axis parallel to a normal direction of the first surface, a second scale portion provided to press the second surface and to measure a second scale position along a second scale axis parallel to a normal direction of the second surface, a first probe having a reference point of position measurement set on a probe axis parallel to the second direction and at an intersection of the first scale axis and the second scale axis, and a second probe measuring a position along the probe axis.

Abstract: The measuring device according to the present invention includes: a measuring element that contacts with an object to be measured; a detector that detects a displacement amount of the measuring element in a process in which the measuring element slides relatively in a certain direction on a surface of the object to be measured during time from a measurement start to a measurement end; a storage unit; a data collecting unit that acquires the displacement amount detected by the detector in a predetermined cycle and causes the storage unit to successively store the displacement amount; a display unit that can perform graphical displaying; and a display controller that causes the display unit to display predetermined information on the basis of a displacement amount for each predetermined cycle.

Abstract: A laser interference device includes: a measurement mirror being movable in an X direction; a reference mirror disposed at a position different from a position of the measurement mirror in a Y direction; a beam splitter having a splitting surface that divides a laser beam into a measurement light and a reference light; a first light guide configured to guide the measurement light incident from the beam splitter and emit the measurement light toward the measurement mirror; and a second light guide configured to guide the reference light incident from the beam splitter and emit the reference light toward the reference mirror, in which a first distribution path formed by the first light guide and a second distribution path formed by the second light guide are mutually equal in a mechanical path length and an optical path length.

Abstract: A surface property measuring device includes a measuring arm that is supported so as to be capable of circular arced movement, a stylus that is provided to a distal end of the measuring arm, a position change detector that detects a change in position of the measuring arm, and a measurement force applier (voice coil motor) that biases the measuring arm in a circular arced movement direction and applies a measurement force. A control device includes a central controller that outputs a measurement force instruction that issues an instruction for an orientation and size of the measurement force, and a measurement force controller that controls the orientation and size of the measurement force produced by the measurement force applier. The measurement force controller monitors a position change detection, and when a position change speed of the measuring arm exceeds a predetermined threshold value, applies feedback.

Abstract: A position detection encoder includes a scale that has a position detection pattern and a linear pattern that is formed in a direction parallel to a length direction of the position detection pattern; and a position detector generating a position detection signal with a different value due to a displacement of the position detection pattern in the length direction. In the position detector, a position confirmation pattern is formed that includes two markers arranged at an interval equal to or less than an offset tolerance value for a positional relationship of the position detector and the scale in a width direction of the position detection pattern.

Abstract: A test force generating spring that is interposed between an indenter shaft provided with an indenter at a distal end and a press that linearly displaces the indenter shaft toward a sample stage so as to press the indenter into a surface of a sample is configured as an annular spring having left/right symmetry, the annular spring including a left/right pair of through-holes that are formed running from one side surface of a substantially rectangular metal block to another side surface on a rear side of the block and a slit that is formed so as to connect the pair of through-holes. With this configuration, a highly accurate test force can be generated and a hardness test can be favorably performed by a hardness tester.

Abstract: A variable focal length optical system includes: an imaging lens configured to condense a parallel beam of light from an objective lens to form an intermediate image; a relay system including, in sequence from an object side, a first relay lens and a second relay lens and configured to relay the intermediate image to infinity; and a lens system of a liquid resonant type which is located between the first relay lens and the second relay lens. A front principal point of the lens system is located to be conjugated with an exit pupil of the objective lens and an expression, 1.90?fTube/fR1?2.15, is satisfied. In the expression, fTube denotes a focal length of the imaging lens and fR1 denote a focal length of the first relay lens.

Abstract: A three-dimensional model generating method selecting a predetermined plane element defining a three-dimensional model element using measurement data, which includes measurement point group data obtained by measuring a measured object, a type of a plane element, and geometric values of the plane element; obtaining a condition required for generating a three-dimensional model element; generating the three-dimensional model element using the selected plane element and the obtained condition; and generating the three-dimensional model of the measured object using one or a plurality of three-dimensional model elements. A calculator displays a three-dimensional image corresponding to the measured object as well as a list of at least the structural elements which, of the plane elements included in the measurement data, configure the three-dimensional image.

Abstract: An electronic position encoder includes a scale and a detector. The detector includes a field generating coil (FGC) having elongated portions bounding a generated field area, and a sensing area, both aligned along the scale. Sensing elements in the sensing area provide position signals responsive to the scale interacting with the generated field. Sensing elements and elongated portions are fabricated in “front” layers of the detector portion. A crosswise shielded end section (SES) fabricated in a “rear” layer connects the elongated portions via feedthroughs. The sensing element area is longer than the elongated portions of the FGC. A projection of the SES normal to the layers overlaps sensing elements in the sensing element area. A conductive shield region CSR is configured in a CSR layer interposed between the front and rear layers to intercept at least a majority of the projection of the SES toward the overlapped sensing elements.

Abstract: A rotary table includes: a stage; a rotary base configured to be rotated around a rotation center axis; a support mechanism that is disposed on the rotary base and supports the stage; a leveling adjustment mechanism configured to perform a leveling adjustment of the stage; and a transfer mechanism configured to transfer a rotative force of the rotary base to the stage. The transfer mechanism includes: an annular transfer member configured to receive the support mechanism therethrough; a first connecting mechanism that connects the transfer member and the rotary base and is rotatable around the first axis; and a second connecting mechanism that connects the transfer member and the stage and is rotatable around a second axis defined in a direction intersecting the first axis.

Abstract: There is provided a movement mechanism including a Z spindle the posture of which is hardly changed when the Z spindle is moved upward and downward, and having less measurement errors due to hysteresis. A movement mechanism includes a Z-axis movement mechanism and an X-axis movement mechanism that moves the Z-axis movement mechanism in the horizontal direction. The Z-axis movement mechanism includes a Z spindle having a length in the vertical direction and a Z-axis drive unit that moves the Z spindle in the vertical direction. The Z-axis drive unit includes an open belt having an upper end fixed near an upper end portion of the Z spindle, and a lower end fixed to near a lower end portion of the Z spindle, a drive pulley around which the open belt wounded and that feeds and drives the open belt upward and downward, an upper tension roller that pushes the open belt against the Z spindle, and a lower tension roller that pushes the open belt against the Z spindle.

Abstract: There is provided a signal processing method, for a photoelectric encoder, capable of correctly determining a bright part and a dark part of a bright/dark pattern having distorted light intensity distribution by setting an appropriate threshold. A detector unit includes a light source, a light-receiving detector that receives transmitted light from a scale to acquire a bright/dark image, and a lens arranged between the light source and the light-receiving detector. The detector unit classifies the bright/dark image acquired by the light-receiving detector into an image-forming region corresponding to a center region of the lens and a non-image-forming region corresponding to a region except for the center region of the lens, calculates a representative value reflecting a light intensity of the image-forming region, and obtains a pre-processed bright/dark image in which the light intensity of the non-image-forming region is replaced with the representative value.

Abstract: A scale includes: a substrate; scale gratings that are formed on a face of the substrate and has a plurality of metal gratings at a predetermined interval; and an inorganic transparent member that is provided between the plurality of metal gratings, wherein at least a surface of the face of the substrate is made of a metal, and wherein the scale gratings and the inorganic transparent member are exposed to atmosphere.