Abstract: There is provided a roughness tester that improves measurement efficiency and roughness measurement accuracy. A roughness tester includes a stylus unit including a stylus that is provided in such a manner as to protrude from and retract into a through hole of a skid and performs scanning movement along a surface of a workpiece, and a stylus displacement detecting unit that detects displacement of the stylus, and a drive unit that moves the stylus unit forward and backward in a drive-axis direction. The roughness tester further includes a height detector that is provided in such a manner as to face a front end face of the main-body housing part, interposing the skid between the height detector and the front end face and that detects a height of an object in a direction parallel with a measurement axis.

Abstract: An indenter reference that is brought into contact with an axial second side surface of a sample which is arranged further toward an axial first side than an indenter, the indenter reference serving as a position reference for the indenter; a holder that detachably holds the indenter reference and is coupled with the indenter reference; an indenter position detector that couples with the holder and detects a relative position of the indenter with respect to the indenter reference; a regulator that allows displacement between a first position that regulates movement of the indenter reference with respect to the holder and a second position where the indenter reference can be removed from the holder; and a biasing portion that biases the regulator to be kept at the first position.

Abstract: A calibration method of an X-ray measuring device includes: a front-stage feature position calculation step of parallelly moving spheres disposed in N places a plurality of times, and identifying centroid positions ImPos(1 to Q)_Dis(1 to M)_Sphr_(1 to N) of projected images of the spheres in the N places; an individual matrix calculation step of calculating an individual projection matrix PPj (j=1 to Q) for each of the spheres; an individual position calculation step of calculating moving positions Xb of the spheres on the basis of the individual projection matrix PPj (j=1 to Q); a coordinate integration step of calculating specific relative position intervals X(1 to N) of the spheres; a rear-stage feature position calculation step; a transformation matrix calculation step of calculating a projective transformation matrix Hk (k=1 to Q); a rotation detection step; a position calculation step; and a center position calculation step.

Abstract: A calibration method of an X-ray measuring device includes: mounting a calibration tool 102 on a rotating table 120; a moving position acquisition step of parallelly moving a position of an j-th sphere 106 with respect to a position of a first sphere 106, irradiating the calibration tool 102 with an X-ray 118, and acquiring, form an output of an X-ray image detector 124, a moving position Mj where the magnitude of a differential position Erjofa centroid position ImDisjh_Sphr_j of a projected image of the j(2£j£N)-th sphere 106 with respect to a centroid position ImDis1_Sphr_1 of a projected image of the first sphere 106 becomes equal to or less than a specified value Vx; a relative position calculation step of performing the moving position acquisition step on the remaining spheres; a feature position calculation step; a transformation matrix calculation step; a rotation detection step; a position calculation step; and a center position calculation step.

Abstract: A displacement sensor includes a radiation part that irradiates a workpiece displaceable in a predetermined displacement direction with light, a light receiving part that receives a reflected light generated when the light radiated by the radiation part is reflected on the workpiece, and a fringe generation part that includes a generation means for generating fringes on a light receiving surface of the light receiving part when the light receiving part receives the reflected light from the workpiece. The fringe generation part and the light receiving part are arranged such that the fringe generation part and the light receiving part are parallel to the displacement direction, or parallel to a virtual image of the displacement direction.

Abstract: An object is to respectively excite transmission coils with different voltages using a single power supply with low power consumption in an electromagnetic induction type encoder. A detection head of an encoder includes a voltage adjustment circuit and a plurality of excitation circuits. The excitation circuit includes a resonant circuit that includes a driving capacitor and a transmission coil connected in series and generates an alternate-current magnetic field inducing currents in scale coils disposed in a plurality of scale tracks on a scale by connecting both ends of the resonant circuit in a state in which the driving capacitor is charged. The voltage adjustment circuit includes a first transformer capacitor and controls a charging voltage of the driving capacitor in a single excitation circuit using the charged first transformer capacitor.

Abstract: A measurement apparatus includes a sensor that measures a workpiece, a multi-axis robot that moves the sensor in a three-dimensional space, a position determination part that determines i) a plurality of measurement positions that are positions along a normal direction at each of a plurality of positions to be measured on the workpiece and ii) a direction of the sensor at each of the plurality of measurement positions on the basis of at least either design data or captured image data indicating the geometry of the workpiece, a moving control part that sequentially moves the sensor to the plurality of measurement positions by controlling the robot, and a measurement control part that outputs measured data indicating a result that the sensor measured at each of the plurality of measurement positions in association with the plurality of positions to be measured.

Abstract: A measurement X-ray CT apparatus calibrates a geometrical positional relationship between a focus of an X-ray source, an X-ray detector, and a rotation center of a rotating table in advance. The measurement X-ray CT apparatus then obtains projection images by irradiating the object to be measured with X-rays to perform a CT scan, and generates a three-dimensional image of the object to be measured by CT reconstruction of the projection images. The measurement X-ray CT apparatus further includes a reference frame that is made of a material and has a structure less susceptible to environmental changes, and sensors that are located on the reference frame and intended to successively obtain calibration values of the geometrical positional relationship between the focus of the X-ray source and the X-ray detector during the CT scan. The calibration values are used as parameters of the CT reconstruction.

Abstract: A form measuring instrument includes: a contact tip configured to contact with a workpiece; a movement mechanism configured to cause relative movement of the contact tip with respect to the workpiece; a movement controlling unit configured to control the movement mechanism; a contact sensor configured to detect a contact amount of the contact tip with the workpiece and output a detection signal corresponding to the contact amount; and an abnormality determining unit configured to determine an abnormality of sensitivity of the contact sensor based on a change in the detection signal outputted from the contact sensor during an operation of the movement mechanism in which the contact tip is pressed against the workpiece.

Abstract: A calibration configuration for a chromatic range sensor (CRS) optical probe of a coordinate measurement machine (CMM) includes a cylindrical calibration object and a spherical calibration object. The cylindrical calibration object includes at least a first nominally cylindrical calibration surface having a central axis that extends along a Z direction that is intended to be aligned approximately parallel to a rotation axis of the CRS optical probe. The spherical calibration object includes a nominally spherical calibration surface having a first plurality of surface portions. The CMM is operated to obtain radial distance measurements and determine cylindrical calibration data using radial distance measurements of the cylindrical calibration object and to determine spherical calibration data using radial distance measurements of the spherical calibration object.

Abstract: A metrology system includes an optical assembly portion; an adjustment mechanism configured to change a distance and an angular orientation between the optical assembly portion and a workpiece surface; and a processor configured to control the adjustment mechanism to move the optical assembly portion to position a workpiece surface within a focal Z autofocus range; capture an image stack of the workpiece surface wherein each image of the image stack corresponds to a different autofocus height; determine an autofocus height for at least three locations of the workpiece surface; control the adjustment mechanism based on the autofocus heights to rotate the optical assembly portion relative to the workpiece surface to nominally align the optical axis of the optical assembly portion with a surface normal of the workpiece surface and adjust a distance between the optical assembly portion and the workpiece surface; and execute a defined operation on the workpiece surface.

Abstract: A scale capable of maintaining measurement accuracy even if the pattern of the scale pattern is scratched is provided. The scale 2 comprises a scale pattern 4 having a plurality of unit patterns provided at a predetermined pitch along the measurement direction on a surface thereof. At least one of the plurality of unit patterns comprises a plurality of loop portions 8 formed with conductors in a loop shape. The plurality of loop portions 8 included in the unit pattern are arranged so as to be spaced from each other such that the centers of gravity of the loop portions 8 are at the same position in the measurement direction on the surface of the scale 2. Thereby, the plurality of loop portions 8 included in the unit pattern can prevent deviation of the center of gravity of the magnetic flux distribution in the measurement direction, even if any of the plurality of the loop portions 8 is scratched. Therefore, the scale 2 can maintain the measurement accuracy.

Abstract: An optical encoder includes a scale, a calculator, and a head having a light source, an image capturer, and a lens array having first and second lenses. The calculator includes a signal generator, an extractor, a signal combiner, and a displacement calculator. The signal generator generates a sine wave signal. The extractor extracts first and second regions. The signal combiner, based on an inter-regional distance, uses a sine wave signal of the second region to generate a sine wave signal that extends to a first end of the first region such that the generated sine wave signal overlaps with a sine wave signal of the first region. The signal combiner also combines the sine wave signal of the first region with the generated sine wave signal. The displacement calculator calculates an amount of relative displacement based on the sine wave signal that is combined by the signal combiner.

Abstract: An electromagnetic induction type encoder, wherein at least one of widths of a first transceiver coil, a first plurality of conductors and a first receiver coil of a first track in a direction vertical to facing direction between a detection head and a scale and a measurement direction is different from corresponding width of a second transceiver coil, a second plurality of conductors and a second receiver coil in the direction vertical to the facing direction and the measurement direction.

Abstract: An image measuring apparatus includes an imager that acquires an image of a measurement target object, a touch panel display that displays the image acquired by the imager and accepts touch input operation of specifying a position in the displayed image, and an edge detector that searches for and detects an edge present in a predetermined range around the in-image specified position specified by a user's touch input operation in the image displayed on the touch panel display. When edges are found in a vicinity of the specified position, the edge detector causes a control object for selecting each of the edges to be displayed on the touch panel display not only in an aspect that prevents a wrong edge from being selected through the touch operation but in an aspect that allows visual recognition of a correspondence between each of the edges and a corresponding control object.

Abstract: A confocal range sensing (CRS) system is provided including a wavelength detector, source light configuration, and one or more measurement channels. Each measurement channel is configured to sense a respective distance to a workpiece surface and includes a confocal detection aperture and confocal light source aperture. The source light configuration includes first and second phosphor compositions, a wavelength combining configuration, and a shared source light path. The first and second phosphor compositions are located in separate respective first and second phosphor regions. As part of workpiece height measurement operations, the first and second phosphor compositions emit first and second emitted light, respectively, to the wavelength combining configuration which outputs first and second emitted light along the shared source light path as source light (i.e.

Abstract: There is provided a display panel module unit having a narrow frame suitable for a display unit of a small-sized measuring apparatus. A panel module unit includes a first panel part, a second panel part, and an intermediate cover housed in a housing part in order from a front side to a rear side. The housing part includes an annular side wall and at least one fixing means attached on an inner peripheral surface of the side wall, and the fixing means is a means for fixing a position of the intermediate cover in the housing part. The second panel part is housed between the first panel part and the intermediate cover, and a position of the second panel part is indirectly fixed by the intermediate cover. The second panel part is provided with a biasing means for biasing the first panel part from the rear side toward the front side.