Abstract: A scale includes: a substrate that is made of low expansion glass of which a thermal expansion coefficient is 1×10?7/K or less; and scale gratings having a plurality of gratings that are arranged on a first face of the substrate at a predetermined interval and are made of a transparent inorganic material of which a thermal expansion coefficient is more than 1×10?7/K.

Abstract: A variable focal length optical system includes: an imaging lens configured to condense a parallel beam of light from an objective lens to form an intermediate image; a relay system including, in sequence from an object side, a first relay lens and a second relay lens and configured to relay the intermediate image to infinity; and a lens system of a liquid resonant type which is located between the first relay lens and the second relay lens. A front principal point of the lens system is located to be conjugated with an exit pupil of the objective lens and an expression, 1.90?fTube/fR1?2.15, is satisfied. In the expression, fTube denotes a focal length of the imaging lens and fR1 denote a focal length of the first relay lens.

Abstract: A life detection device of an encoder is used for the encoder including a scale and a head. The scale is housed in a scale frame. The head relatively moves along the scale to detect an amount of relative movement with the scale. The life detection device includes environmental condition detection means, life determination means, and informing means. The environmental condition detection means is configured to detect an environmental condition related to life detection in the encoder. The life determination means is configured to determine a life of a component constituting the encoder based on a detection result by the environmental condition detection means. The informing means is configured to inform the life based on a determination result by the life determination means.

Abstract: An error determination apparatus for determining a measurement error that occurs when a workpiece is measured by a coordinate measuring machine, the error determination apparatus includes an information acquisition part that acquires a) motion error information indicating a result of measuring a motion error of the coordinate measuring machine and b) design information of the workpiece, a measurement position specification part that specifies a measurement position on the workpiece on the basis of the design information, an error determination part that determines a measurement error occurring in the measurement at the measurement position due to the motion error on the basis of the motion error information, and an output part that outputs the measurement error determined by the error determination part.

Abstract: A pitch compensated inductive position encoder includes a scale comprising first and second tracks including periodic patterns having a wavelength W, a detector, and signal processing. The second track pattern may be shifted along the measuring direction by a pattern offset STO relative to the first track pattern. In the detector, first-track and second-track field generating coil portions generate fields in first and second interior areas aligned with the first and second pattern tracks, respectively. First and second sensing coil configurations that are aligned with the first and second tracks, respectively, are offset relative to one another by STO+/?0.5*W along the measuring direction. In various embodiments, the first and second sensing coil configurations may have the same sequence of individual coil polarities if the generated field polarities are different, and may have inverted or opposite sequences if the generated field polarities are the same.

Abstract: A device including: a storage section that stores information for measuring a light path difference of two light paths relating to interference of a white light, from a color appearing due to the interference; and a calculation section that measures, from an image configured by a plurality of pixels each including information representing a color, the light path difference relating to each of the pixels, based on at least the information stored in the storage section.

Abstract: A coordinate measuring machine including a surface plate; a probe moving body; an INC pattern and ABS pattern along a moving direction of the probe moving body; an INC detector that outputs a plurality of waveform signals in accordance with the moving amount based on the INC pattern; an ABS detector that outputs an absolute position signal of the probe moving body based on the ABS pattern in response to a request signal; and a control device that has a INC counting portion that counts the waveform signals outputted by the INC detector; a position information obtaining portion that reads a counted value at a timing when a work is detected by a probe; and a presetting portion that emits the request signal to the ABS detector to obtain the absolute position signal, and presets the counting portion to this absolute position signal.

Abstract: A coupling portion has one end coupleable to a distal end of a measurement spindle. The measurement spindle is disposed on a gauge inspector and movable in a measurement axis direction. A cylindrical stem is insertable into a gauge holding member to hold the inserted stem. The stem slidably holds a spindle having a distal end on which a contact point of a gauge is disposed. A frame has a first end coupled to a second end of the coupling portion and has a second end to which the gauge holding member is mountable. The gauge holding member is held to the frame such that an axis of the stem runs along the measurement axis direction. As a result, inspection is performed easily and accurately in a reverse posture with a contact point facing upward when a gauge is inspected.

Abstract: Provided is a defect judging unit for a measuring probe including: a stylus; four detection elements; and a signal processing part. The defect judging unit includes a defect judging part configured to compare four judged signals corresponding to the generated signals with predetermined thresholds when the object to be measured and the contact part are out of contact with each other and judge that a defect exists if any of the judged signals is greater than the predetermined threshold, and a judged result output part configured to output a judged result of the defect judging part. According to this configuration, the defect judging unit of the measuring probe and the defect judging method thereof capable of ensuring measurement reliability with a simple configuration are provided.

Abstract: A data correction apparatus including an acquisition part that acquires, from a measurement apparatus capable of periodically measuring a distance while moving at least one of (i) an object to be measured or (ii) at least a part of the measurement apparatus, measurement data in which a first measurement result of the distance is arranged in time series and a second measurement result that is obtained by measuring the distance when the object to be measured and the measurement apparatus are in a stationary state is arranged at a head or a tail of the first measurement result, and a correction part that corrects an error included in the measurement data by applying the measurement data to a recurrence formula based on a time derivative of a measurement result of the measurement apparatus.

Abstract: When measuring a mass-produced work piece using a measuring X-ray CT apparatus, which is configured to emit X-rays while rotating a work piece that is arranged on a rotary table and to reconstruct a projection image thereof to generate volume data of the work piece, the present invention assigns values to volume data for a predetermined work piece and stores the same as master data; obtains volume data for a mass-produced work piece under identical conditions to the predetermined work piece; measures the volume data and obtains an X-ray CT measured value for the mass-produced work piece; and corrects the X-ray CT measured value for the mass-produced work piece using the master data.

Abstract: A surface texture measuring device according to the present invention includes a surface texture detecting component that outputs measurement results for a surface texture of a measurable object, where the measurement results are recognized as a change in the movement of a contact pin of a detector when tracing a surface of the measurable object with the contact pin; a posture detecting sensor that detects a measured posture, which is a posture at the time of measurement by the detector; a memory component that is preloaded with correction values corresponding to each of a plurality of postures; and a correcting component that compares the measured posture with the plurality of postures stored in the memory component, and corrects the measurement results using a correction value that corresponds to a posture equivalent to the measured posture.

Abstract: A measurement apparatus including: a laser that outputs a frequency-modulated laser beam; a branch that splits the frequency-modulated laser beam into a reference light and a measurement light; a beat signal generator that generates a beat signal by mixing the reference light and a reflected light that is reflected by radiating the measurement light onto an object to be measured; a frequency analyzer that frequency-analyzes the beat signal; a storage that stores a reference frequency signal which is a frequency signal obtained by converting a reference signal output by the beat signal generator in a state without the object to be measured; and calculation circuitry that calculates a difference between propagation distances of the reference light and the measurement light.

Abstract: A measurement apparatus including a laser apparatus; a branching part that branches the frequency modulated laser beam into a reference light and a measurement light; a beat signal generation part that generates a beat signal by mixing the reflected light reflected by irradiating the measurement light to an object to be measured; and a detection part that performs frequency analysis on first sampling data generated by sampling the beat signal at a first frequency and second sampling data generated by sampling the beat signal at a second frequency obtained by dividing a resonance frequency of the laser resonator by a positive integer, wherein the first frequency is a frequency equal to the resonance frequency or being a frequency equal to or more than twice the resonance frequency of the laser resonator and a measurement method are provided.

Abstract: An image measuring method performed with an image measuring device measuring a dimension of a measured object from an image of the measured object captured by an image capturer. The method executes a standard reference object measurement measuring a dimension of the standard reference object with the image measuring device; a standard reference dimension input inputting a dimension of the standard reference object specified by a device other than the image measuring device; a preset value calculation calculating a preset value from the dimension of the measured standard reference object and from a dimension of the standard reference object measured by a predetermined measurement tool; a measurement measuring a dimension of a measured object other than the standard reference object using the image measuring device; and a correction correcting the dimension of the measured object other than the standard reference object measured by the image measuring device.

Abstract: A variable focal length lens system includes a tunable acoustic gradient (TAG) lens; a TAG lens controller; and processor(s) configured to: (a) operate the TAG lens controller to drive a periodic modulation of the TAG lens optical power at a TAG lens resonant frequency, using a first amplitude driving signal that provides a first focal Z range extending between peak focus distances Z1max+ and Z1max?; and expose a first image using a first exposure increment approximately at the timing of Z1max+ or Z1max?; (b) adjust the TAG lens controller to drive the periodic modulation using a second amplitude driving signal that provides a second focal Z range extending between peak focus distances Z2max+ and Z2max?; and expose a second image using a second exposure increment approximately at the timing of Z2max+ or Z2max?; and (c) perform processing that includes determining focus metric values for the first and second images.

Abstract: A calibration method includes the steps of placing a structure to be measured at a first position, measuring a first distance from a laser interferometer to a reflector, and measuring first coordinates of a body to be measured, moving the structure to be measured to a second position, measuring a second distance from the laser interferometer to the reflector and measuring second coordinates of the structure to be measured with the coordinate measuring apparats, while the structure to be measured is at the second position, determining a scale error of the reference instrument, mounting the reference instrument, measuring the interval between objects to be measured, and calculating a calibration value of the interval between the objects to be measured.