Patents Assigned to MKS Instruments
  • Classifying faults associated with a manufacturing process
    Publication number: 20080010531
    Abstract: Faults that are associated with a set of variables that are each associated with a manufacturing parameter are classified. A fault vector is defined according to a multivariate analysis based on a contribution to a metric of a subset of the variables. The fault vector is compared to a plurality of previously-defined fault vectors to determine a comparison value indicative of a correlation between the fault vector and the plurality of previously-defined fault vectors. The fault vector is associated with at least one of a first set of fault vectors indicative of a known fault or a second set of fault vectors indicative of an unknown fault based in part on the comparison value.
    Type: Application
    Filed: June 12, 2006
    Publication date: January 10, 2008
    Applicant: MKS Instruments, Inc.
    Inventors: Lawrence Hendler, Uzi Josef Lev-Ami
  • Method of forming a seal between a housing and a diaphragm of a capacitance sensor
    Patent number: 7316163
    Abstract: The axial distance between opposing conductors of a capacitance pressure transducer can depend, in part, upon the thickness of a seal that is disposed between a housing and a diaphragm of the capacitance pressure transducer. The present invention utilizes spacer elements and sealing beads to form a seal that is disposed between the housing and the diaphragm of a capacitance pressure transducer. The sealing beads have a melting temperature that is lower than the melting temperature of the spacer elements. The sealing beads are melted so that they flow around and surround the unmelted spacer elements. Upon solidifying, the sealing beads and the spacer elements thus form the seal. The thickness of the seal can be established accurately and uniformly by controlling the height of the spacer elements.
    Type: Grant
    Filed: October 5, 2006
    Date of Patent: January 8, 2008
    Assignee: MKS Instruments
    Inventor: Chris P. Grudzien
  • Ozonated Water Flow and Concentration Control Apparatus and Method
    Publication number: 20080002518
    Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
    Type: Application
    Filed: August 7, 2007
    Publication date: January 3, 2008
    Applicant: MKS Instruments, Inc.
    Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
  • Method and apparatus for classifying manufacturing outputs
    Patent number: 7313454
    Abstract: A method for process monitoring involves acquiring data samples associated with a plurality of manufacturing related variables for a plurality of outputs of a manufacturing process. The distance of each data sample relative to every other data sample is then calculated. The outputs are then grouped based on the Euclidean distances that satisfy a boundary determining criterion.
    Type: Grant
    Filed: December 2, 2005
    Date of Patent: December 25, 2007
    Assignee: MKS Instruments, Inc.
    Inventors: Lawrence Hendler, Matthew Richter
  • Power Over Ethernet (Poe) - Based Measurement System
    Publication number: 20070288125
    Abstract: Ethernet-enabled measurement systems are disclosed that are POE compatible. The measurement systems are configured to measure a physical variable, and to generate and communicate data representative of the measured physical variable. The physical variable may include, but is not limited to, fluid pressure, fluid flow rate, and fluid flow ratio. The POE compatible measurement systems are configured to communicate the data through a POE-capable cable over an Ethernet network in accordance with Ethernet networking protocol. The measurement systems are further configured to receive power through the same POE-capable cable from a power source connected to the Ethernet network.
    Type: Application
    Filed: June 9, 2006
    Publication date: December 13, 2007
    Applicant: MKS Instruments, Inc.
    Inventor: Mark J. Quaratiello
  • CONTROL SYSTEM FOR STATIC NEUTRALIZER
    Publication number: 20070279829
    Abstract: The present invention pertains to various embodiments for managing ion current balance by independently controlling positive ion current and negative ion current generated during static neutralization. In another embodiment, E-Field compensation may be provided. These embodiments disclose both method and apparatus implementations.
    Type: Application
    Filed: April 5, 2007
    Publication date: December 6, 2007
    Applicant: MKS Instruments, Inc.
    Inventors: Peter Gefter, Edward Oldynski, Brian Warren
  • Method and apparatus for preventing instabilities in radio-frequency plasma processing
    Patent number: 7304438
    Abstract: A method and apparatus for controlling a power supply to prevent instabilities due to dynamic loads in RF plasma processing systems, operating at frequencies of from 1 MHz and up, uses a feedforward type of control loop to tightly regulate the power supplied to the dynamic electrical load, such as loads caused by variable and inconsistent plasma impedance. A feedback control loop can also be used in combination with the feedforward loop, but at a slower rate, to help regulate the amount of power provided to the load.
    Type: Grant
    Filed: September 22, 2004
    Date of Patent: December 4, 2007
    Assignee: MKS Instruments, Inc.
    Inventor: Michael Kishinevsky
  • Methods and apparatus for downstream dissociation of gases
    Publication number: 20070272299
    Abstract: A method and apparatus for activating and dissociating gases involves generating an activated gas with a plasma located in a chamber. A downstream gas input is positioned relative to an output of the chamber to enable the activated gas to facilitate dissociation of a downstream gas introduced by the gas input, wherein the dissociated downstream gas does not substantially interact with an interior surface of the chamber.
    Type: Application
    Filed: December 15, 2006
    Publication date: November 29, 2007
    Applicant: MKS Instruments, Inc.
    Inventors: Jack Schuss, William Holber, John Summerson, Susan Trulli, Weiguo Zhang, Xing Chen
  • Vertical mount mass flow sensor
    Patent number: 7296465
    Abstract: A thermal mass flow meter for measuring flow rate of a fluid includes a conduit that is configured to receive the fluid and that defines a primary flow path between an inlet and an outlet of the conduit. The conduit is bound at least in part by a sensor receiving surface. A thermal sensor tube has a thermal sensing portion that is mounted relative to the sensor receiving surface in a direction substantially perpendicular to both the primary flow path and the sensor receiving surface. When the thermal mass flow meter is mounted in a vertical direction so that fluid within the conduit flows in the vertical direction along the primary flow path, fluid within the sensor tube flows in a horizontal direction so as to substantially prevent thermal siphoning when the sensor tube is heated.
    Type: Grant
    Filed: November 22, 2005
    Date of Patent: November 20, 2007
    Assignee: MKS Instruments, Inc.
    Inventors: Junhua Ding, Michael L'Bassi, Kaveh H. Zarkar
  • Method for producing a pressure sensor for detecting small pressure differences and low pressures
    Patent number: 7284439
    Abstract: A process for producing a plate for a capacitive sensor element. In one embodiment of the present invention, a method includes forming a plate from a substantially pure aluminum oxide slurry, heating the plate a first time in an oven to sinter the plate, cooling the plate after the heating step, heating the plate a second time to smooth the plate, and cooling the plate after the second heating.
    Type: Grant
    Filed: December 15, 2004
    Date of Patent: October 23, 2007
    Assignee: MKS Instruments, Inc.
    Inventor: Steffan Jonsson
  • Multiple-Channel Flow Ratio Controller
    Publication number: 20070240778
    Abstract: A system for dividing a single mass flow into a plurality N of secondary flows includes an inlet configured to receive the single mass flow, a master FRC (flow ratio controller), and one or more slave FRCs. Each FRC is connected to the inlet and including at least one flow channel. The master FRC and the slave FRCs include in combination a total of N flow channels. Each flow channel i (i=1, . . . , N) is connected to carry a corresponding one of the N secondary flows. In response to preselected ratio setpoints received from a host controller, the master FRC and the slave FRCs maintain ratios Qi/QT (i=1, . . . , N) between individual flow rates Qi (i=1, . . . , N) and a total flow rate QT at the preselected ratio set points.
    Type: Application
    Filed: April 14, 2006
    Publication date: October 18, 2007
    Applicant: MKS Instruments, Inc.
    Inventors: Michael L'Bassi, Junhua Ding, David D'Entremont
  • HIGHLY RESPONSIVE MASTER-SLAVE VALVE POSITIONING
    Publication number: 20070235668
    Abstract: A master valve and at least one slave valve are connected via a network, wherein upon broadcast of a position setpoint of the master valve the at least one slave valve achieves a corresponding position within a shortened period of time, such network being a dedicated network or high speed shared network with position setpoint priority.
    Type: Application
    Filed: March 30, 2006
    Publication date: October 11, 2007
    Applicant: MKS Instruments, Inc.
    Inventors: David Goldman, Martin Ryan, Vladislav Davidkovich, Gordon Hill
  • Valve assembly having improved pump-down performance
    Patent number: 7278444
    Abstract: A valve assembly including a housing having a flow path extending to an outlet and a valve seat in the flow path and around the outlet, a slide plate located in the housing and movable transversely to a longitudinal axis of the flow path between a closed position, in which the slide plate is in contact with the valve seat and blocks flow through the flow path, and an opened position, in which the slide plate allows flow through the flow path, and wherein at least one of the slide plate and the valve seat includes at least one passageway for providing a predetermined amount of conductance between the slide plate and the valve seat when the slide plate is in the closed position.
    Type: Grant
    Filed: February 22, 2005
    Date of Patent: October 9, 2007
    Assignee: MKS Instruments, Inc.
    Inventors: Paul D. Lucas, Jaroslaw W. Pisera
  • Class E Amplifier With Inductive Clamp
    Publication number: 20070206395
    Abstract: A power supply including an inverter receiving a DC input signal from a DC input source (11). The inverter is implemented as a single-ended inverter. Each inverter is driven by a signal source (13A, 13B), which outputs an AC signal. The output from each inverter is input to a first stage harmonic filter. The power supply includes an output circuit that includes a rectifier (D1) arranged about a point so that if the inverter attempts to drive the point beyond a predetermined voltage, the rectifier conducts in order to return at least one of power and current to the DC input source. The output from the first harmonic filter (L1A, C1; L1B, C1) is output to a second harmonic filter (L2, C2) and is then output from the power supply.
    Type: Application
    Filed: January 3, 2007
    Publication date: September 6, 2007
    Applicant: MKS Instruments, Inc.
    Inventors: Daniel Lincoln, Paul Bennett
  • Ozonated water flow and concentration control apparatus and method
    Patent number: 7264006
    Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
    Type: Grant
    Filed: August 19, 2005
    Date of Patent: September 4, 2007
    Assignee: MKS Instruments, Inc.
    Inventors: Jens Fittkau, Johannes Seiwert, Christiane Gottschalk
  • Passive bipolar arc control system and method
    Patent number: 7261797
    Abstract: A method and system for controlling arcs in a DC sputtering system with a passive circuit is presented. The arc control system includes a sputtering chamber that houses an anode and a sputtering target formed from a target material and serving as a cathode. A DC power supply provides a DC voltage between the cathode and anode such that a cathode current flows from the anode to the cathode. A resonant network is coupled between the DC power supply and the chamber and has a sufficient Q so that in reaction to an arc, the cathode current resonates through zero, causing a positive voltage to be applied between the cathode and anode. A reverse voltage clamp is coupled across the resonant network to clamp the cathode voltage to a predetermined reverse voltage. The reverse cathode voltage inhibits subsequent arcing by positively charging insulated deposits on the sputtering target.
    Type: Grant
    Filed: January 27, 2005
    Date of Patent: August 28, 2007
    Assignee: MKS Instruments, Inc.
    Inventor: Jeff C. Sellers
  • Linked extendable gas observation system for infrared absorption spectroscopy
    Publication number: 20070182965
    Abstract: A modular system for gas analysis has a first gas cell that receives and passes at least a portion of an infrared light beam through at least a portion of the first gas cell. A second gas cell disposed proximal to the first gas cell receives and passes at least a portion of the infrared light beam from the first gas cell through at least a portion of the second gas cell. At least a portion of the first gas cell and at least a portion of the second gas cell define a light path having an effective length. The system includes a means for adjusting the effective length of the light path to vary a property of the infrared light beam. Methods of making a variable effective length light path and methods of making a gas detector are also disclosed.
    Type: Application
    Filed: September 28, 2006
    Publication date: August 9, 2007
    Applicant: MKS Instruments, Inc.
    Inventors: Leonard Kamlet, Martin Spartz, Peter Rosenthal
  • Surface area deposition trap
    Patent number: 7252011
    Abstract: The disclosed pressure transducer assembly includes a housing, a pressure sensor disposed within the housing, a coupling establishing a sealed pathway between the housing and an external source of gas or fluid, and a deposition trap disposed in the pathway. The deposition trap provides a plurality of channels, each of the channels being narrower than the pathway.
    Type: Grant
    Filed: March 11, 2002
    Date of Patent: August 7, 2007
    Assignee: MKS Instruments, Inc.
    Inventor: Robert Traverso
  • Compensation for thermal siphoning in mass flow controllers
    Publication number: 20070174016
    Abstract: A thermal mass flow controller for controlling flow rate of a fluid includes a conduit configured to receive the fluid, a pressure sensor that measures the pressure of the fluid as the fluid flows within the conduit, a temperature sensor that measures the ambient temperature of the fluid, and a thermal sensor that generates an output representative of the flow rate of the fluid. The thermal mass flow controller further includes a control system configured to monitor the output from the thermal sensor, the pressure measured by the pressure sensor, and the ambient temperature measured by the temperature sensor, to regulate flow of the fluid within the conduit so as to compensate for a shift in the thermal sensor output caused by thermal siphoning.
    Type: Application
    Filed: January 26, 2006
    Publication date: July 26, 2007
    Applicant: MKS Instruments, Inc.
    Inventors: Junhua Ding, Michael L'Bassi, Kaveh Zarkar
  • Methods and systems for stabilizing an amplifier
    Patent number: 7248113
    Abstract: The invention generally relates to stabilizing an amplifier. In one aspect, a stabilization module that is in electrical communication with the amplifier is provided. The stabilization module includes both an open loop control system and a closed loop control system. The open loop control system is used to modify at least one characteristic of an input signal received by the stabilization module and to pass control to the closed loop control system. The closed loop control system is then used to modify the at least one characteristic of the input signal. The modified input signal is provided to the amplifier.
    Type: Grant
    Filed: May 31, 2006
    Date of Patent: July 24, 2007
    Assignee: MKS Instruments, Inc.
    Inventors: Jake O. Deem, Dan Thuringer