Patents Assigned to Nikon Corporation
  • Publication number: 20200197577
    Abstract: An article for a living body or a biological sample is provided, the article including a first film and a second film, in which the first film includes an amorphous carbon film in which a proportion of the number of carbon atoms having an sp2-hybrid orbital to a total number of carbon atoms having an sp2-hybrid orbital and carbon atoms having an sp3-hybrid orbital is in a range of 23 to 43 atom % or a titanium-doped amorphous carbon film in which a proportion of the number of titanium atoms to the number of carbon atoms is in a range of 3 to 12 atom %, and the second film includes any one film selected from an amorphous carbon film in which a static contact angle with pure water is 10° or less, a titanium-doped amorphous carbon film in which a proportion of the number of titanium atoms to the number of carbon atoms is less than 3 atom % or greater than 12 atom %, or a titanium-doped amorphous carbon film in which a static contact angle with pure water is 10° or less.
    Type: Application
    Filed: October 17, 2019
    Publication date: June 25, 2020
    Applicant: NIKON CORPORATION
    Inventors: Masaki MORIYAMA, Yuki TAKAHASHI, Yusuke TAKI
  • Publication number: 20200201013
    Abstract: A structured illumination microscope includes a spatial light modulator containing ferroelectric liquid crystals, an interference optical system for illuminating a specimen with an interference fringe generated by making lights from the spatial light modulator interfere with each other, a controller for applying a voltage pattern having a predetermined voltage value distribution to the ferroelectric liquid crystals, an image forming optical system for forming an image of the specimen, which has been irradiated with the interference fringe, an imaging element for generating an image by imaging the image formed by the image forming optical system, and a demodulating part for generating a demodulated image using a plurality of images, wherein the controller applies an image generation voltage pattern for generating the demodulated images and a burn-in prevention voltage pattern calculated based on the image generation voltage pattern to the ferroelectric liquid crystals.
    Type: Application
    Filed: February 28, 2020
    Publication date: June 25, 2020
    Applicant: NIKON CORPORATION
    Inventors: Fumihiro DAKE, Ryosuke KOMATSU, Yosuke SHIMIZU
  • Patent number: 10692916
    Abstract: An image-capturing unit includes; an image-capturing chip; a power supply circuit unit that outputs electrical power to be fed to the image-capturing chip; a power supply line that feeds electrical power from the power supply circuit unit to the image-capturing chip; a disconnecting unit that is provided to the power supply line and is electrically disconnecting the power supply circuit unit and the image-capturing chip when a leakage current of the image-capturing chip is measured; and an implementation substrate on which the power supply circuit unit, the image-capturing chip, the power supply line and the disconnecting unit are implemented.
    Type: Grant
    Filed: June 27, 2016
    Date of Patent: June 23, 2020
    Assignee: NIKON CORPORATION
    Inventors: Hirofumi Arima, Ryoichi Suganuma, Ryuuzou Motoori
  • Patent number: 10691027
    Abstract: A pattern forming apparatus comprising: a rotary drum that includes a cylindrical outer circumferential surface which is curved at a predetermined radius from a predetermined center line, that rotates about the center line in a state in which a part of a sheet substrate is supported in a length direction of the sheet substrate along the outer circumferential surface; a pattern forming part that forms the pattern on the sheet substrate at a first specific position; a scale disk that is fixed to an end portion of the rotary drum in a direction in which the center line extends while being coaxial with the center line and that includes a circular scale; and a first reading mechanism that is arranged to oppose with the scale formed at the outer circumferential surface of the scale disk, that is arranged at substantially same azimuth as an azimuth.
    Type: Grant
    Filed: November 22, 2019
    Date of Patent: June 23, 2020
    Assignee: Nikon Corporation
    Inventors: Masaki Kato, Tohru Kiuchi
  • Patent number: 10690896
    Abstract: Comprising, in order from an object side: a first lens group G1 having negative refractive power; a second lens group G2 having positive refractive power; a third lens group G3 having negative refractive power; a fourth lens group G4 having positive refractive power; a fifth lens group G5 having negative refractive power; and a sixth lens group G6 having positive refractive power; upon varying magnification, air distances between the neighboring lens groups G1-G6 being varied; and a predetermined conditional expression being satisfied, thereby providing a variable magnification optical system which has excellent optical performance, an optical apparatus, and a method for manufacturing a variable magnification optical system.
    Type: Grant
    Filed: May 26, 2016
    Date of Patent: June 23, 2020
    Assignee: Nikon Corporation
    Inventors: Kosuke Machida, Takeshi Suzuki, Takeru Uehara
  • Patent number: 10691026
    Abstract: An illumination optical system which illuminates an illumination objective surface with a light from a light source. The illumination optical system includes a spatial light modulator which includes a plurality of optical elements arranged within a predetermined plane and controlled individually, and which forms a light intensity distribution in an illumination pupil of the illumination optical system; and a polarization unit which is arranged in a position optically conjugate with the predetermined plane, and which polarizes an incident light beam having a first and second partial light beams, coming into the polarization unit such that the first and second partial light beams have polarization states different from each other, and emits the polarized incident light beam as an outgoing light beam, wherein the polarization unit changes, in a cross section of the outgoing light beam, a ratio between a cross sectional areas of the first and second partial light beams.
    Type: Grant
    Filed: January 2, 2019
    Date of Patent: June 23, 2020
    Assignee: NIKON CORPORATION
    Inventors: Osamu Tanitsu, Hirohisa Tanaka, Kinya Kato, Takashi Mori
  • Patent number: 10690317
    Abstract: A new and useful illumination device, e.g. for a lithographic optical imaging system, is provided, and comprises a mirror array located between a radiation source and an illumination pupil. Each mirror element of the mirror array is individually steerable (controllable), and the polarization state of light from each mirror element of the mirror array can be selectively controlled, so that the illumination pupil can be filled with a distribution of light that is selectively controlled.
    Type: Grant
    Filed: August 1, 2017
    Date of Patent: June 23, 2020
    Assignee: NIKON CORPORATION
    Inventors: Daniel Gene Smith, Michael Sogard
  • Publication number: 20200192232
    Abstract: A liquid crystal exposure apparatus that irradiates a substrate held by a substrate holder which moves along an XY plane with an illumination light via an optical system while the substrate holder moves in the X-axis direction, has; a scale measured based on movement of the substrate holder in the X-axis direction, heads that measure the scale while relatively moving in the X-axis direction with respect to the scale, a plurality of scales arranged at mutually different positions in the X-axis direction measured based on movement of the substrate holder in the Y-axis direction, and a plurality of heads provided for each scale that measures the scales while relatively moving in the Y-axis direction with respect to the scales based on movement of the substrate in the Y-axis direction.
    Type: Application
    Filed: February 21, 2020
    Publication date: June 18, 2020
    Applicant: NIKON CORPORATION
    Inventor: Akinori SHIRATO
  • Patent number: 10683185
    Abstract: A processing system and a device manufacturing method that can perform manufacturing of an electronic device without stopping the entire manufacturing system, even when the processing state actually implemented on a sheet substrate by a processing device differs from the target processing state.
    Type: Grant
    Filed: February 14, 2019
    Date of Patent: June 16, 2020
    Assignee: NIKON CORPORATION
    Inventors: Yoshiaki Kito, Masaki Kato, Kei Nara, Masakazu Hori
  • Patent number: 10684455
    Abstract: A zoom optical system comprising, in order from an object side: a first lens group (G1) having positive refractive power; a front-side lens group; an intermediate lens group having positive refractive power; and a rear-side lens group. The front-side lens group is composed of one or more lens groups and has a negative lens group. At least part of the intermediate lens group is a focusing lens group. The rear-side lens group is composed of one or more lens groups. Upon zooming, the first lens group and the intermediate lens group are moved with respect to an image surface, a distance between the first lens group and the front-side lens group is changed, and a distance between the intermediate lens group and the rear-side lens group is changed. The following conditional expression is satisfied: 0.000<?Fw<0.800 where ?Fw denotes a lateral magnification of the focusing lens group in the wide-angle end state.
    Type: Grant
    Filed: October 15, 2019
    Date of Patent: June 16, 2020
    Assignee: Nikon Corporation
    Inventors: Satoru Shibata, Tomoyuki Sashima
  • Patent number: 10685995
    Abstract: An image sensor includes: a photoelectric conversion layer where light having entered therein undergoes photoelectric conversion; a first electrode disposed at one surface located on one side of the photoelectric conversion layer; and a second electrode disposed at the one surface so as to surround the first electrode.
    Type: Grant
    Filed: January 6, 2017
    Date of Patent: June 16, 2020
    Assignee: NIKON CORPORATION
    Inventors: Yuki Kita, Shiro Tsunai
  • Patent number: 10684562
    Abstract: A measurement device is equipped with a surface plate, a slider which holds a substrate and which is movable relative to the surface plate, a drive system that moves the slider, a first position measurement system which measures the slider's first position information relative to the surface plate, a measurement unit having a mark detection system that detects a mark on a substrate, a second position measurement system which measures a relative second position information between the mark detection system and substrate, and a controller which obtains the first position information from the first position measurement system and second position information from the second position measurement system while controlling the slider's movement by the drive system, and obtains position information of a plurality of marks based on detection signals of the mark detection system having detected marks on the substrate, the first position information, and the second position information.
    Type: Grant
    Filed: August 9, 2017
    Date of Patent: June 16, 2020
    Assignee: NIKON CORPORATION
    Inventor: Yuichi Shibazaki
  • Patent number: 10686001
    Abstract: An image sensor includes: a photoelectric conversion unit that photoelectrically converts incident light transmitted through a microlens to generate electric charge; an accumulation unit that accumulates the electric charge generated by the photoelectric conversion unit; and a transfer unit that transfers the electric charge generated by the photoelectric conversion unit to the accumulation unit, wherein: the photoelectric conversion unit, the transfer unit, and the accumulation unit are provided along a direction of an optical axis of the microlens.
    Type: Grant
    Filed: September 26, 2016
    Date of Patent: June 16, 2020
    Assignee: NIKON CORPORATION
    Inventors: Toru Takagi, Satoshi Nakayama, Ryoji Ando, Takashi Seo, Yohei Matsuoka, Yoshiyuki Watanabe
  • Patent number: 10686004
    Abstract: An image sensor having a plurality of pixels along a first direction includes: a first pixel having a first photoelectric conversion unit that generates an electric charge through photoelectric conversion and a reflecting portion disposed at least in a part of an area located in the first direction relative to a center of the first photoelectric conversion unit, which reflects part of light having been transmitted through the first photoelectric conversion unit toward the first photoelectric conversion unit; and a second pixel having a second photoelectric conversion unit that generates an electric charge through photoelectric conversion and a second reflecting portion disposed at least in a part of an area located in a direction opposite from the first direction relative to a center of the second photoelectric conversion unit, which reflects part of light having been transmitted through the second photoelectric conversion unit toward the second photoelectric conversion unit.
    Type: Grant
    Filed: February 28, 2017
    Date of Patent: June 16, 2020
    Assignee: NIKON CORPORATION
    Inventors: Shutaro Kato, Toru Takagi, Takashi Seo, Ryoji Ando
  • Patent number: 10686987
    Abstract: An electronic apparatus includes: an input unit that inputs image data generated by an image capturing unit that has a plurality of pixel groups, each pixel group including at least one pixel, and that is capable of performing image-capturing under different imaging conditions for each of the pixel groups and data for the imaging conditions for each of the pixel groups; and a recording control unit that generates image data for each of pixel groups having the same imaging conditions based on the image data inputted from the input unit and records the image data generated for each of the pixel groups having the same imaging conditions in a recording unit.
    Type: Grant
    Filed: September 28, 2015
    Date of Patent: June 16, 2020
    Assignee: NIKON CORPORATION
    Inventors: Yoshiaki Miyakawa, Naoki Yamagata
  • Publication number: 20200180214
    Abstract: A photocurable composition for three-dimensional stereolithography which has a lower viscosity and from which a cured product having a high refractive index is obtained, and a three-dimensional object formed by using the composition. The composition is a photocurable composition for three-dimensional stereolithography containing a fluorene monomer, a carbazole monomer, a diluent monomer, and a photopolymerization initiator, the carbazole monomer being contained in an amount of less than 30 wt % with respect to the total amount of the fluorene monomer and the carbazole monomer, and the diluent monomer being contained in an amount of at least 20 wt % with respect to total solids.
    Type: Application
    Filed: July 28, 2017
    Publication date: June 11, 2020
    Applicants: NIKON CORPORATION, ESSILOR INTERNATIONAL
    Inventors: Christophe PROVIN, Akiko MIYAKAWA
  • Publication number: 20200183291
    Abstract: A liquid crystal exposure apparatus that exposes a substrate with an illumination light via a projection optical system is equipped with: a substrate holder that holds the substrate; a substrate encoder system that includes head units and scales, and acquires the position information of the substrate holder on the basis of the output of the head units; and a drive section that relatively moves one of the head units and the scales on the substrate holder with respect to the other.
    Type: Application
    Filed: December 10, 2019
    Publication date: June 11, 2020
    Applicant: NIKON CORPORATION
    Inventors: Yasuo AOKI, Atsushi HARA, Takachika SHIMOYAMA, Toru KAWAGUCHI, Katsuhiro SHIMATAKE, Iori NODA
  • Publication number: 20200183256
    Abstract: An interchangeable device that is attachable to an electronic device includes a first communication unit communicating with the electronic device via a first path; and a second communication unit communicating with the electronic device via a second path. The first path includes a first contact that outputs to the electronic device a signal indicating whether it is possible to perform communication via the first path, a second contact that communicates a first clock signal with the electronic device, a third contact to which a signal is input from the electronic device synchronized with the first clock signal, and a fourth contact that outputs a signal to the electronic device synchronized with the first clock signal. The second path includes a seventh contact communicating a second clock signal with the electronic device, and an eighth contact that outputs to the electronic device a signal synchronized with the second clock signal.
    Type: Application
    Filed: February 18, 2020
    Publication date: June 11, 2020
    Applicant: NIKON CORPORATION
    Inventors: Kazuharu IMAFUJI, Masafumi OIKAWA
  • Patent number: 10678034
    Abstract: A variable magnification optical system includes, in order from an object: a first lens group (G1) having a negative refractive power; a second lens group (G2); a third lens group (G3); a fourth lens group (G4) having a negative refractive power; and a fifth lens group (G5) having a positive refractive power, the system performing varying magnification by changing the distance between the first and second lens groups, the distance between the second and third lens groups, the distance between the third and fourth lens groups, and the distance between the fourth and fifth lens groups, and the fourth lens group including a 42nd lens group (G42) configured to be movable so as to have a component in a direction orthogonal to an optical axis and a 41st lens group (G41) disposed at an object-side of the 42nd lens group.
    Type: Grant
    Filed: January 29, 2016
    Date of Patent: June 9, 2020
    Assignee: Nikon Corporation
    Inventor: Atsushi Shibayama
  • Patent number: 10677791
    Abstract: A fluidic device includes a valve configured to adjust a fluid flow in a first direction of a flow path. The fluidic device includes: a diaphragm of the valve; a first substrate having a groove that constitutes the flow path and a protrusion part at a position facing the diaphragm in the groove; and a second substrate to which the diaphragm is fixed at a first fixation part and a second fixation part, wherein a length from a first end part of the protrusion part to a second end part of the protrusion part seen in the first direction is greater than a length from the first fixation part to the second fixation part.
    Type: Grant
    Filed: December 21, 2016
    Date of Patent: June 9, 2020
    Assignee: NIKON CORPORATION
    Inventors: Kenji Miyamoto, Masaru Kato