Abstract: A levitation apparatus for use under vacuum or near vacuum conditions comprises a levitation plate (3) with a plurality of injection points (1) and adjacent suction points (2) for gas, creating an air bearing (4) and thereby supporting a thin plate-like substrate (5). Further embodiments comprise a transport mechanism for supported substrates and/or a tilting mechanism to incline the levitation plate.

Abstract: A sample substrate adapted for use with fluorescence excitation light with a first wavelength. A reflector is disposed on a base. The reflector includes a reflecting multilayer interference coating with at least two layers. Not all of the layers L fulfill a quarterwave condition: dL·nL=(2N+1)·¼ wherein dL is a physical thickness of layer L, nL is an index of refraction of layer L at the first wavelength, N is an integer equal to or greater than zero and 1 is the first wavelength. Thicknesses of the layers ensure that any fluorescent sample material disposed on top of said multilayer interference coating would be located near an antinode of a standing wave formed by the excitation light with the first wavelength incident on said substrate.

Abstract: A centering pin arrangement for clamping a substrate with a hole with radius rmax comprises two bolts (2, 3) with an essentially semicircular cross section K, said bolts having radii r2 and r3 respectively. Said radii r2 and r3 are different and at least one of the bolts (2, 3) has a radius bigger or equal to the radius rmax of the hole. In another embodiment both radii r2 and r3 are bigger than the radius rmax of the hole.

Abstract: Sputtering is performed by making use of a stationary magnetic field (Hs). Uneroded areas of the sputtering surface (3) which are subject to re-deposition are minimized or omitted by modulating the stationary magnetic field (Hs) adjacent to one of the magnetic poles responsible for the stationary magnetic field, by superimposing a modulating magnetic field (Hm) to said stationary field (Hs).

Abstract: An apparatus and method are provided for improved utilization of a sputter target in the longitudinal end regions. The focus of erosion in the end regions is widened, thereby extending the useful life of the target. This provides improved efficiency and reduces waste because a greater proportion of the target material in the more expansive central region can be harvested, because the target is utilized for a longer period of time.

Abstract: System for processing technical surfaces, in particular surfaces of essentially rotationally symmetrical work pieces (3), comprising at least one processing unit (4) and one motor-driven work-piece carrier (1) and, mounted thereon in rotatable fashion, at least two or more holders (5) that feed work pieces (3) to the processing unit (4), characterized in that the processing unit (4) includes means (6) serving to exert an essentially constant hold-down pressure on the surface of the respective work piece (3), while the motor drive is so designed as to control the feed-in-timing sequence of the work pieces (3) and the duration of their processing cycle in the processing unit (4).

Abstract: A vacuum transport chamber has a transport robot arrangement. A processing arrangement has at least one processing station communicating by at least one workpiece pass-through opening with the vacuum transport chamber. A loadlock arrangement communicates by at least one workpiece pass-through opening with an atmosphere outside the vacuum transport chamber and the processing arrangement. One single loadlock and processing tower is formed by the processing arrangement and the loadlock arrangement being arranged vertically on upon the other.

Abstract: A method for analyzing organic adsorbent layers (7) on a substrate (4) comprises the steps of providing a substrate (4) whose surface has an index of refraction equal or close to the index of refraction of the organic adsorbent to be analyzed. On the surface of the substrate (4) there is applied a layer system (5,6) with at least one layer (5) with index of refraction of the biological material and an organic adsorbent layer (7) on top of the layer system. When acting polarized light upon the substrate a change of polarization characteristics in reflection and/or transmission is detected.

Abstract: A method for bonding of disk shaped substrates comprises the steps of providing a first and a second substrate, applying a liquid adhesive to a first bonding surface and a second surface, irradiating the lacquered surface of at least one of the substrates with UV light for increasing the viscosity of the lacquer, joining the substrates in vacuum, irradiating the joined disk with UV light for increasing the viscosity of the lacquer in between the joined disks, placing the disk onto a rotatable chuck, rotating the disc with a rotation speed preferably >500rpm, and finally separating the 2 substrates to leave the full bonding layer on one of the substrates.

Abstract: A work piece or structural component is coated with a system of film layers at least one of which is composed of (AlyCr1-y) X, where X=N, C, B, CN, BN, CBN, NO, CO, BO, CNO, BNO or CBNO and 0.2?y<0.7, with the composition within said film being either essentially constant or varying over the thickness of the film continually or in steps, as well as a process for producing it.

Abstract: A sample substrate adapted for use with fluorescence excitation light with a first wavelength. A reflector is disposed on a base. The reflector includes a reflecting multilayer interference coating with at least two layers. Not all of the layers L fulfill a quarterwave condition: dL·nL=(2N+1)·1/4 wherein dL is a physical thickness of layer L, nL is an index of refraction of layer L at the first wavelength, N is an integer equal to or greater than zero and 1 is the first wavelength. Thicknesses of the layers ensure that any fluorescent sample material disposed on top of said multilayer interference coating would be located near an antinode of a standing wave formed by the excitation light with the first wavelength incident on said substrate.

Abstract: A light handling device, tolerant of elevated heat and heating cycles, includes a plurality of separate walls bounding a surrounded area, the walls reflecting light transmitted through the bounded area. The device includes a first composition adhesive engaged with at least two of the walls for securing the two walls together, and a second, different composition adhesive engaged with the same at least two of the walls for securing the two walls together.

Abstract: A waveguide plate and a process for making the waveguide plate with a plate-like glass substrate (1), carrying a waveguiding layer (2), with at least one coupling grating on the surface carrying said waveguiding layer (2), which coupling grating is formed as a grating of lines with a period between 150 nm and 1000 nm, the extension of said grating being at least 5 cm with lines parallel to one another, wherein the coupling angle (?) varies by not more than 0.1°/cm along a line of said grating and wherein the absolute value of the deviation of the coupling angle (?) on said waveguide plate, from a predefined desired value, does not exceed 0.5°. The deviation from the average value of the coupling angle does not exceed 0.3°, preferably not 0.15° on the whole waveguide plate.

Abstract: This invention concerns a method of producing subsurface marking in a transparent body. According to the invention, the marking is done less than 500 ?m below the surface by applying a layer system with a high destruction threshold, compared to the substrate, to the surface of the substrate. If the layer system is designed as an anti-reflection coating system for the reading wavelength, it increases the contrast for reading. If the layer system is designed as a mirror for the writing wavelength, the writing can be done in reflection at a lower intensity.

Abstract: A process is disclosed for manufacturing coated substantially plane workpieces, in which the workpieces are guided to a vacuum treatment area guided by a control. The treatment atmosphere is modulated in the treatment area as a function of workpiece position with the defined profile. The system and process can be used to deposit defined layer thickness distribution profiles on substrates in a reactive coating.

Abstract: A method of assembling a light handling device that includes a plurality of separate walls for reflecting and that is tolerant of elevated heat and heating cycles. The method provides a fast-set adhesive to portions of the walls that are to be secured together. The method also secures the walls in a temporary fixation device for a time period needed for the fast-set adhesive to set, and removes the walls from the temporary fixation device subsequent to the setting of the fast-set adhesive such that the walls are secured together by the fast-set adhesive. The method also provides another means of securing the walls together that is resistant to degradation caused by elevated heat and heating cycles.

Abstract: This invention relates to a platform (11) and a method for generating electromagnetic field distributions. The invention relates in particular to optical sensors for measuring biological or chemical substances. The platform (11) according to the invention comprises a substrate (13), a structured layer (19) and, positioned between the substrate (13) and the structured layer (19), a multilayer assembly (17), said components being so matched relative to one another that upon appropriate impingement by electromagnetic radiation an electromagnetic field distribution is generated that is at a maximum within the structured layer (19).

Abstract: An optical storage medium having at least two information layers is provided, wherein a first information layer is in the form of a dichroic filter that is reflective at a first selected wavelength and transmissive at a second selected wavelength. The dichroic filter has a laminate structure that includes at least a metallic layer and a dielectric layer, wherein the total thickness of the dichroic filter is about or less than 100 nm. A second information layer that is reflective at the second wavelength is disposed behind and spaced from the dichroic filter. This construction permits a first incident light beam at the first wavelength to be reflected from the dichroic filter, to produce a first reflected beam carrying information recorded in that layer.

Abstract: For avoiding the metallic inner surface of a PECVD reactor to influence thickness uniformity and quality uniformity of a ?c-Si layer (19) deposited on a large-surface substrate, (15) before each substrate is single treated at least parts of the addressed wall are precoated with a dielectric layer (13).

Abstract: The invention concerns a device and a process for applying a lubricant by means of vapour deposition to a target object, especially a magnetic data carrier. The device in accordance with the invention comprises a lubricant supply means (1) that can be filled from outside, possibly by means of a feed line. The produced lubricant vapour (5) is expanded through one or more exit openings (6) in the direction of a target object (8) on which the vapour deposition is to be effected. The vapour at first becomes adsorbed on the walls of a cone-shaped distribution element (4) situated between the lubricant supply means (1) and the target object (8), from which it subsequently desorbs again. Said adsorption/desorption process assures an even and homogeneous vapour distribution over the target object (8). A device for interrupting the vapour supply makes it possible for the device to be operated in a discontinuous manner.