Abstract: A method and apparatus for sputter depositing an insulation layer onto a surface of a cavity formed in a substrate and having a high aspect ratio is provided. A target formed at least in part from a material to be included in the insulation layer and the substrate are provided in a substantially enclosed chamber defined by a housing. A plasma is ignited within the substantially enclosed chamber and a magnetic field is provided adjacent to a surface of the target to at least partially contain the plasma adjacent to the surface of the target. A voltage is rapidly increased to repeatedly establish high-power electric pulses between a cathode and an anode. An average power of the electric pulses is at least 0.1 kW, and can optionally be much greater. An operational parameter of the sputter deposition is controlled to promote sputter depositing of the insulation layer in a transition mode between a metallic mode and a reactive mode.

Abstract: A method of magnetron sputtering, comprises rotating a magnet of a magnetron with an angular frequency ?, and, during sputtering of material from a source of the magnetron onto a substrate, periodically modulating a power level applied to the source with at least a component comprising a frequency f which is a harmonic of the angular frequency ? of rotation of the magnet other than the first harmonic.

Abstract: A pressure sensitive adhesive (PSA) is used to attach a plurality of wedge-shaped glass filter segments on a first side to a hub during the color ring build portion of the color wheel fabrication process. A strong adhesive, such as epoxy, is then used to adhere a second side of the filter segments directly to a turning surface of a motor, completing the color wheel fabrication. The epoxy is cured if necessary. The pressure sensitive adhesive can temporarily align the plurality of color filter segments in an alignment. The adhesive between the filter segments and the turning surface can then permanently bond the color filter segments in the alignment.

Abstract: For vacuum treatment of workpieces by a multitude of distinct processing stations (P11-P1n, P21-P2m) the processing stations are grouped in two groups (I and II). The workpieces are handled towards and from the processing stations of the first group (I) simultaneously, whereat the workpieces are treated by the processing stations of the second group (II) in a selectable individual sequence.

Abstract: A method of magnetically enhanced sputtering an electrically-conductive material onto interior surfaces of a trench described herein includes providing a magnetic field adjacent to a target formed at least in part from the electrically-conductive material, and applying a DC voltage between an anode and the target as a plurality of pulses. A high-frequency signal is applied to the pedestal supporting the semiconductor substrate to generate a self-bias field adjacent to the semiconductor substrate. The high-frequency signal is applied to the pedestal in pulses, during periods of time that overlap with the periods during which the DC voltage pulses are applied. The periods of time that the high-frequency signals are applied include a duration that extends beyond termination of the DC voltage pulse applied between the anode and the target. During each DC voltage pulse the electrically-conductive material is sputter deposited onto the side walls of the trench formed in the semiconductor substrate.

Abstract: A diffusion barrier system for a display device comprising a layer system with at least two layers of dielectric material, wherein at least two adjacent layers of that layer system comprise the same material. A respective method for manufacturing such a diffusion barrier system in a single process chamber of a plasma deposition system has the steps of introducing a substrate to be treated in said process chamber, discretely varying in a controlled manner during deposition at least one process parameter in the process chamber, without completely interrupting such process parameter, which results in layers with different properties and finally unloading said substrate from said process.

Abstract: A laser module with a linear laser diode array includes multiple, mutually separated laser cells. A nonlinear optical material serves to double the frequency of the radiation emitted by the laser cells. The linear laser diode array and the nonlinear optical material are so positioned relative to each other that the resulting frequency-doubled radiation propagates, within the nonlinear optical material and essentially within mutually separated columns associable with the laser cells, both in the direction of the radiation emitted by the laser cells and in the opposite direction. The laser module includes optical elements which divert the bidirectionally propagating frequency-doubled radiation in a manner whereby, upon diversion between the columns in the respective other direction, the radiation propagates in the nonlinear optical material, so that frequency-doubled light ultimately exits the nonlinear optical material in only one direction.

Abstract: A diffusion barrier system for a display device comprising a layer system with at least two layers of dielectric material, wherein at least two adjacent layers of that layer system comprise the same material. A respective method for manufacturing such a diffusion barrier system in a single process chamber of a plasma deposition system has the steps of introducing a substrate to be treated in said process chamber, discretely varying in a controlled manner during deposition at least one process parameter in the process chamber, without completely interrupting such process parameter, which results in layers with different properties and finally unloading said substrate from said process.

Abstract: A color wheel is provided with a balancing device. The balancing device encompasses an essentially circular track whose center point coincides with the axial center of rotation of the color wheel. The track is provided with at least two mutually independent, movable balancing weights. Moving the balancing weights along the track requires a force greater than the gravitational force of the balancing weight. In one example method for balancing a color wheel, a determination is made of a position in which a balancing weight corresponding to the total weight of the balancing weight system would have to be placed in order to balance the color wheel. At least one of the balancing weights is then moved to the position, according to the determination, where one of the balancing weights corresponding to the total weight of the balancing weight system would have to be placed.

Abstract: The present invention concerns a procedure for the production of a plasma that is at least co-produced in the vacuum chamber (1a) of a vacuum recipient (1) of a device suitable for plasma processing with at least one induction coil (2) carrying an alternating current, where the gas used to produce the plasma is fed into the vacuum chamber (1a) through at least one inlet (3) and the vacuum chamber (1a) is subject to the pumping action of at least one pump arrangement (4), and where a possibly pulsed direct current is also applied to the induction coil (2) in order to influence the plasma density.

Abstract: An inventive workpiece features on at least parts of its surface a wear resistant hard coating comprising the following composition Al1-a-b-c-dCraXbSicBdZ, where x is at least one element from Nb, Mo, W or Ta; Z is one element or compound from N, C, CN, NO, CO, CNO; and 0.2<=a<=0.5; 0.01<=b<=0.2; 0<=c<=0.1; 0<=d<=0.1. Further a PVD process for depositing such a wear resistant coating is disclosed whereby at least one workpiece is installed in a vacuum coating system and said system is operated in a low pressure argon atmosphere utilizing at least two metal or metal alloy targets with at least temporarily addition of a reactive gas.

Abstract: Apparatus and methods for sputtering are provided, which are useful for sputtering high magnetization saturation materials. In one embodiment, a plurality of sputtering target arrangements are arranged concentrically, wherein independent magnetic fields can be generated at least partially above the respective target arrangements. One or several target arrangements can include respective upper and lower parts that are spaced from one another but arranged in essentially parallel planes. Methods include co-sputtering from multiple target arrangements to produce sputtered alloy layers on a substrate, as well as alternately sputtering from different target arrangements to produce a plurality of sputtered layers on the substrate.

Abstract: A method for dividing substantially nonpolarized white light into three substantially nonpolarized fractions includes splitting the substantially nonpolarized white light into a first fraction and a second fraction, the first fraction being substantially nonpolarized light of a first wavelength interval and the second fraction of substantially nonpolarized light of a second and a third wavelength interval, the first wavelength interval being located between the second and the third wavelength interval and splitting the second fraction into a third fraction with substantially nonpolarized light of the second wavelength interval and into a fourth fraction with substantially nonpolarized light of the third wavelength interval.

Abstract: The invention relates to a method for operating an arc source, whereby an electric spark discharge is ignited and run on the surface of a target and the spark discharge is simultaneously fed a direct current with an associated constant voltage DV as well as a pulsed current generated by a periodically applied voltage signal. The voltage at the arc source is boosted over several microseconds and the shape of the voltage signal is in essence arbitrarily selectable.

Abstract: Provided is a method and test system for identifying a defective region of a photovoltaic cell from among a plurality of photovoltaic cells collectively forming a thin film solar module. A probe includes a plurality of test fingers arranged to be substantially simultaneously placed adjacent to an electric contact provided to different regions of one or more of the plurality of photovoltaic cells, and each of the test fingers is to receive an electrical output from the different regions of the one or more photovoltaic cells. A light source emits light to be converted by the photovoltaic cells into the electrical output during testing. A measurement circuit measures a property of the electrical output received from the different regions of the photovoltaic cells and transmits a measured value signal indicative of the property measured by the measurement circuit.

Abstract: A method and device for ablation of thin layers on the rim region of the surface of a plane substrate coated with a thin film. The rim region runs along the edge or edges of the substrate, and the thin layers should be ablated in at least two, not necessarily unconnected areas of the rim region along edge pieces not parallel to one another. A laser beam is pointed toward an ablation area. The areas of the rim region to be ablated are guided through the area so that in a plane of the surface of the substrate, during the whole ablation process, there is basically a constant distance in the space that lies partly in the ablation area and has its starting point outside the substrate surface and its end point within the substrate surface.

Abstract: Method for producing a substrate includes establishing a plasma discharge with a locally inhomogeneous density distribution and exposing the substrate to the inhomogeneously density-distributed plasma discharge. The distribution is established by establishing a specified relative movement of the inhomogeneous density distribution and of the substrate and establishing a specified time variation of an electric power signal supplying the discharge and/or of an optionally provided further electric signal which connects the substrate to bias voltage. When the electric power signal or further electric signal is an AC signal, the specified time variation of the signal addresses its modulation and the method includes setting the variation and the movement.

Abstract: Manufacturing a coated substrate by magnetron sputtering includes cyclically moving the magnetron magnetic field pattern along a sputter surface, positioning a substrate to be coated a distance from and facing the sputter surface, moving the substrate along the sputter surface and varying an amount of material deposited on the total substrate per time unit from the magnetron source that is cyclically and phase-locked with the cyclically moving magnetron magnetic field pattern.

Abstract: A magnetic actuator utilizes a single magnet and two voice coils to rotate a mirror between two angular positions with respect to a rest state. A magnetic field assembly applies magnetic flux across the voice coils. An upper plate and a lower plate are held together by a permanent magnet, so that each plate forms a magnetic pole. The voice coils are actuated by feeding current to their coils, resulting in an electromagnetic field being formed around the coils. The voice coils have magnetic flux passing across them, caused by the magnet and the two plates. Hence, the coils move upward or downward according to the current applied. A mirror holder includes a fixed periphery and moving arms attached to a torsional beam spanning the periphery. The arms are moved by the adjacent voice coils, twisting the torsional beam, and the attached mirror moves also.

Abstract: The present invention relates to a method for combining or for splitting the beam paths of substantially nonpolarized light of at least three different wavelength intervals. The splitting or the combining of the beam path of light of those wavelength intervals located between the other wavelength intervals takes place when the beam paths of the light of the two other wavelength intervals are already or still combined. The present invention also relates to an illumination unit comprising a white light source and utilizing this method by means of interference filters for splitting the white light into red, blue and green light beams. The invention also relates to an illumination unit comprising a red, green and blue light source and utilizing these methods by means of interference filters for the combination of the beam paths of the light sources.