Patents Assigned to Photon Dynamics, Inc.
  • Patent number: 8866899
    Abstract: An apparatus for identifying a defect in an electronic circuit having periodic features, the apparatus including at least a camera for obtaining an image of the electronic circuit and an image processing system. The image processing system receives the image of the electronic circuit from the camera, performs a diagonal shift of the received image of the electronic circuit by at least a diagonal size of the periodic features of the electronic circuit to produce a shifted image of the electronic circuit, identifies a candidate defect using the image of the electronic circuit and the shifted image of the electronic circuit, computes one or more local defect-free reference (golden) images of the electronic circuit using at least one selected area in the closest proximity of the identified candidate defect and determines the defect in the electronic circuit using one or more computed local golden images of the electronic circuit, the image of the electronic circuit.
    Type: Grant
    Filed: June 7, 2011
    Date of Patent: October 21, 2014
    Assignee: Photon Dynamics Inc.
    Inventor: Nickolay Mokichev
  • Publication number: 20140266244
    Abstract: Described are techniques for maintaining reliable and reproducible conditions for panel inspection, i.e. pixel and line defect detection, while at the same time preventing large-scale panel damage. One implementation involves an apparatus for identifying a defect in an electronic circuit incorporating a circuit driving module configured to apply an electrical test signal to the electronic circuit; a defect detection module configured to identify the defect in the electronic circuit based at least on the applied electrical test signal; a signal monitoring module configured to measure the electrical test signal at the electronic circuit; and a control module operatively coupled to the signal monitoring module and the circuit driving module and configured to control at least the circuit driving module based on the electrical test signal measured at the electronic circuit.
    Type: Application
    Filed: March 16, 2014
    Publication date: September 18, 2014
    Applicant: Photon Dynamics Inc.
    Inventors: Viacheslav MINAEV, Raul Albert MARTIN, Thomas E. WISHARD, Michael Sean CASSADY, Jongho LEE, Thomas H. BAILEY, Sriram KRISHNASWAMI
  • Patent number: 8801964
    Abstract: Polymer network liquid crystal materials have improved mechanical properties such as rigidity and hardness and substantially improved electro-optical performance. The PNLC material can be manufactured with an emulsion process so as to simplify substantially the manufacturing process. Each LC droplet can be configured with the polymer network extending substantially across the LC droplet, and the polymer network may comprise a material to lower substantially the switching voltage, such as a fluorinated acrylate that may interact with the liquid crystal so as to lower the surface tension of the LC droplet. The PNLC material may comprise an interfacial layer combined with the polymer network so as to decrease substantially the driving voltage.
    Type: Grant
    Filed: December 22, 2010
    Date of Patent: August 12, 2014
    Assignee: Photon Dynamics, Inc.
    Inventor: Xianhai Chen
  • Patent number: 8773140
    Abstract: A system for inspection of electrical circuits including a calibration subsystem operative to apply a time varying voltage to an electrical circuit being inspected during calibration and to sense differences in an electrical state at various different locations in the electrical circuit being inspected, thereby providing an indication of location of defects therein.
    Type: Grant
    Filed: July 26, 2011
    Date of Patent: July 8, 2014
    Assignee: Photon Dynamics, Inc
    Inventors: Sam-Soo Jung, Raul Martin
  • Patent number: 8728589
    Abstract: A laser decal transfer is used to generate thin film features by directing laser pulses of very low energy at the back of a target substrate illuminating an area of a thin layer of a high viscosity rheological fluid coating the front surface of the target. The illuminated area is shaped and defined by an aperture centered about the laser beam. The decal transfer process allows for the release and transfer from the target substrate to the receiving substrate a uniform and continuous layer identical in shape and size of the laser irradiated area. The released layer is transferred across the gap with almost no changes to its initial size and shape. The resulting patterns transferred onto the receiving substrate are highly uniform in thickness and morphology, have sharp edge features and exhibit high adhesion, independent of the surface energy, wetting or phobicity of the receiving substrate.
    Type: Grant
    Filed: January 7, 2008
    Date of Patent: May 20, 2014
    Assignee: Photon Dynamics, Inc.
    Inventors: Raymond Auyeung, Alberto Pique, Thomas H. Bailey, Lydia J. Young
  • Publication number: 20140132299
    Abstract: A non-mechanical contact signal measurement apparatus includes a first conductor on a structure under test and a gas in contact with the first conductor. At least one electron beam is directed into the gas so as to induce a plasma in the gas where the electron beam passes through the gas. A second conductor is in electrical contact with the plasma. A signal source is coupled to an electrical measurement device through the first conductor, the plasma, and the second conductor when the plasma is directed on the first conductor. The electrical measurement device is responsive to the signal source.
    Type: Application
    Filed: January 15, 2014
    Publication date: May 15, 2014
    Applicant: Photon Dynamics, Inc.
    Inventors: Alexander Kadyshevitch, Ofer Kadar, Arie Glazer, Ronen Loewinger, Abraham Gross, Daniel Toet
  • Patent number: 8390926
    Abstract: System and method for selectively viewing features of objects, including features hidden under non-transparent materials.
    Type: Grant
    Filed: August 12, 2010
    Date of Patent: March 5, 2013
    Assignee: Photon Dynamics, Inc.
    Inventor: Andrey Bordenyuk
  • Publication number: 20120162596
    Abstract: Polymer network liquid crystal materials have improved mechanical properties such as rigidity and hardness and substantially improved electro-optical performance. The PNLC material can be manufactured with an emulsion process so as to simplify substantially the manufacturing process. Each LC droplet can be configured with the polymer network extending substantially across the LC droplet, and the polymer network may comprise a material to lower substantially the switching voltage, such as a fluorinated acrylate that may interact with the liquid crystal so as to lower the surface tension of the LC droplet. The PNLC material may comprise an interfacial layer combined with the polymer network so as to decrease substantially the driving voltage.
    Type: Application
    Filed: December 22, 2010
    Publication date: June 28, 2012
    Applicant: Photon Dynamics, Inc.
    Inventor: Xianhai Chen
  • Patent number: 8025542
    Abstract: An apparatus includes integrated review, material removal and material deposition functions. The apparatus performs the review, material removal and material deposition operations along the same optical axis. The apparatus includes, in part, a camera, a pair of lenses, and one or more lasers. A first lens is used to focus the camera along the optical axis on a structure formed on the target substrate undergoing review. The first lens is also used to focus the laser beam on the structure to remove a material present thereon if the reviewed structure is identified as requiring material removal. The second lens is used to focus the laser beam on a ribbon to transfer a rheological compound from a recessed well formed in the ribbon to the structure if the reviewed structure is identified as requiring material deposition.
    Type: Grant
    Filed: May 14, 2007
    Date of Patent: September 27, 2011
    Assignees: Photon Dynamics, Inc., The United States of America as represented by the Secretary of the Navy
    Inventors: Steven Edward Birrell, Alan Cable, Joel Visser, Lydia J. Young, Justin Kwak, Joachim Eldring, Thomas H. Bailey, Alberto Pique, Raymond Auyeung
  • Patent number: 7977602
    Abstract: In laser micromachining and laser defect repair of a first material, a first set of one or more laser wavelengths is selected in accordance with the first material's absorption characteristics and is combined and delivered concurrently with a second set of one or more laser wavelengths which is selected in accordance with the absorption characteristics of a second material generated by and remaining from the ablating interaction of the first material with the first set of laser wavelengths. The concurrent presence of the second set of one or more laser wavelengths removes the residual second material.
    Type: Grant
    Filed: March 19, 2008
    Date of Patent: July 12, 2011
    Assignee: Photon Dynamics, Inc.
    Inventor: Steven Edward Birrell
  • Patent number: 7960993
    Abstract: Each sensor of a linear array of sensors includes, in part, a sensing electrode and an associated feedback circuit. The sensing electrodes are adapted to be brought in proximity to a flat panel having formed thereon a multitude of pixel electrodes in order to capacitively measure the voltage of the pixel electrodes. Each feedback circuit is adapted to actively drive its associated electrode via a feedback signal so as to maintain the voltage of its associated electrode at a substantially fixed bias. Each feedback circuit may include an amplifier having a first input terminal coupled to the sensing electrode and a second input terminal coupled to receive a biasing voltage. The output signal of the amplification circuit is used to generate the feedback signal that actively drives the sensing electrode. The biasing voltage may be the ground potential.
    Type: Grant
    Filed: August 25, 2009
    Date of Patent: June 14, 2011
    Assignee: Photon Dynamics, Inc.
    Inventors: David W. Gardner, Andrew M. Hawryluk
  • Patent number: 7916382
    Abstract: A PDLC modulator is fabricated using at least one of a selection of specially-formulated UV curable organic hard coatings as a protective layer on the exposed side of polyester (Mylar) film. The hard coatings of various related types show good adhesion on a polyester film substrate, superior hardness and toughness, and have a slippery top surface, which minimizes unnecessary wear. The coating as applied on the modulator surface significantly reduces scratch damage on modulators caused by unexpected particles on the panels under test. In addition, the slip surface will reduce stickiness to particles and therefore also reduce the possibility of panel damage.
    Type: Grant
    Filed: November 9, 2005
    Date of Patent: March 29, 2011
    Assignee: Photon Dynamics, Inc.
    Inventor: Xianhai Chen
  • Patent number: 7817333
    Abstract: An electro-optic modulator assembly includes a sensor layer made from an electro-optic modulator material that comprises liquid crystal droplets encapsulated within a polymer matrix. The sensor layer material comprises an interfacial agent, for example a defoaming agent, in an amount sufficient to lower an intrinsic operating voltage at which the sensor layer transmits light. The defoaming agent can comprise from about 1 to about 10 percent by weight of the electro-optic modulator material, and the defoaming agent may comprise a reactive component to react with the polymer matrix, for example at least one of a siloxane with a reactive end group, a reactive fluorinated polymer or a non-ionic block copolymer to react with the polymer matrix. The assembly can also include a hard coating layer to protect the sensor layer.
    Type: Grant
    Filed: February 6, 2007
    Date of Patent: October 19, 2010
    Assignee: Photon Dynamics, Inc.
    Inventor: Xianhai Chen
  • Patent number: 7761182
    Abstract: A repair system for flat panel display (FPD) substrates performs a number of operations, such as automatic image capture and processing, automatic defect classification, automatic repair classification, and repair macro (instruction) generation software. Defect classification, repair classification, and repair macro generation are based on an open architecture and can address any number of use-cases through the use of multi-tiered classifiers, and thus a wide variety of panel designs may be repaired within a single repair tool. The multi-tiered set of classifiers, e.g., defect classifier, repair classifier, enables an efficient decision-making repair process with capability for customization. The multi-tiered classifiers are optionally extended to support statistical learning (both online & batch) and active learning, in the context of a supporting database of defects and associated tools.
    Type: Grant
    Filed: January 20, 2006
    Date of Patent: July 20, 2010
    Assignee: Photon Dynamics, Inc.
    Inventors: Harry Gallarda, Steven Barnes, Lakshman Srinivasan, Wayne Wang
  • Patent number: 7714589
    Abstract: In accordance with the present invention, a first shorting bar drives the data lines of a TFT array having integrated gate driver circuitry. Another set of shorting bars drive the corresponding terminals of the gate driver circuitry. The pixel voltages are measured after all the pixels are charged by the driving signals applied to the shorting bars. Gate voltages are progressively applied to the gate lines by the gate driver integrated circuit (IC) via the set of shorting bars that, in turn, are driven by clock signals received from one or more pattern generators. Voltages are concurrently applied to the data lines which are connected together by the first shorting bar. The application of voltages generates a display pattern that is subsequently compared to an expected display pattern. By comparing the resulting display pattern and the expected display pattern, possible defects are detected.
    Type: Grant
    Filed: November 14, 2006
    Date of Patent: May 11, 2010
    Assignee: Photon Dynamics, Inc.
    Inventors: Mike Jun, Atila Ersahin, Barry McGinley, Sabari Sanjeevi
  • Publication number: 20100045334
    Abstract: Each sensor of a linear array of sensors includes, in part, a sensing electrode and an associated feedback circuit. The sensing electrodes are adapted to be brought in proximity to a flat panel having formed thereon a multitude of pixel electrodes in order to capacitively measure the voltage of the pixel electrodes. Each feedback circuit is adapted to actively drive its associated electrode via a feedback signal so as to maintain the voltage of its associated electrode at a substantially fixed bias. Each feedback circuit may include an amplifier having a first input terminal coupled to the sensing electrode and a second input terminal coupled to receive a biasing voltage. The output signal of the amplification circuit is used to generate the feedback signal that actively drives the sensing electrode. The biasing voltage may be the ground potential.
    Type: Application
    Filed: August 25, 2009
    Publication date: February 25, 2010
    Applicant: Photon Dynamics, Inc.
    Inventors: David W. Gardner, Andrew M. Hawryluk
  • Patent number: 7639319
    Abstract: Embodiments of polymer dispersed liquid crystals (PDLCs) in accordance with the present invention comprise TL-series liquid crystal materials and a polymer matrix comprising polyacrylate resins having hydroxyl groups. These hydroxyl groups allow crosslinking by using isocyanate, improving mechanical properties and heat resistance. Typical ratios of liquid crystal to polymer range between about 50/50 to 70/30 (wt/wt). The PDLC materials exhibit enhanced sensitivity to driving voltages and higher transmission˜voltage (T-V) curve slope. In testing thin film transistors (TFTs), these PDLC materials can be used to compensate for an increased air gap accommodating flatness variation in the TFT substrate, and to reduce electrostatic forces between modulator and panel. Embodiments of PDLC materials in accordance with the present invention form solid films upon evaporation of the solvent.
    Type: Grant
    Filed: April 7, 2005
    Date of Patent: December 29, 2009
    Assignee: Photon Dynamics, Inc.
    Inventor: Xianhai Chen
  • Publication number: 20090295425
    Abstract: Each sensor of a linear array of sensors includes, in part, a sensing electrode and an associated feedback circuit. The sensing electrodes are adapted to be brought in proximity to a flat panel having formed thereon a multitude of pixel electrodes in order to capacitively measure the voltage of the pixel electrodes. Each feedback circuit is adapted to actively drive its associated electrode via a feedback signal so as to maintain the voltage of its associated electrode at a substantially fixed bias. Each feedback circuit may include an amplifier having a first input terminal coupled to the sensing electrode and a second input terminal coupled to receive a biasing voltage. The output signal of the amplification circuit is used to generate the feedback signal that actively drives the sensing electrode. The biasing voltage may be the ground potential.
    Type: Application
    Filed: August 12, 2009
    Publication date: December 3, 2009
    Applicant: Photon Dynamics, Inc.
    Inventors: David W. Gardner, Andrew M. Hawryluk
  • Patent number: 7543867
    Abstract: A vacuum gripper for use in substrate positioning operations includes a vacuum pad adapted to make contact with the substrate and a shaft connected to the vacuum pad. The shaft is characterized by a first diameter at a portion of the shaft proximal to the vacuum pad and a second diameter at a portion of the shaft distal to the vacuum pad. The vacuum gripper also includes a first air bearing surrounding the portion of the shaft proximal to the vacuum pad, a second air bearing surrounding the portion of the shaft distal to the vacuum pad, and an air source in fluid communication with the first air bearing and the second air bearing. The vacuum gripper further includes an exhaust port, a valve in fluid communication with the exhaust port, and a first flow restrictor in fluid communication with the valve.
    Type: Grant
    Filed: March 23, 2006
    Date of Patent: June 9, 2009
    Assignee: Photon Dynamics, Inc.
    Inventors: Digby Pun, Kent Nguyen, Robert Barnett
  • Publication number: 20090074987
    Abstract: A laser decal transfer is used to generate thin film features by directing laser pulses of very low energy at the back of a target substrate illuminating an area of a thin layer of a high viscosity rheological fluid coating the front surface of the target. The illuminated area is shaped and defined by an aperture centered about the laser beam. The decal transfer process allows for the release and transfer from the target substrate to the receiving substrate a uniform and continuous layer identical in shape and size of the laser irradiated area. The released layer is transferred across the gap with almost no changes to its initial size and shape. The resulting patterns transferred onto the receiving substrate are highly uniform in thickness and morphology, have sharp edge features and exhibit high adhesion, independent of the surface energy, wetting or phobicity of the receiving substrate.
    Type: Application
    Filed: January 7, 2008
    Publication date: March 19, 2009
    Applicants: Photon Dynamics, Inc., The United States of America as represented by the Secretary of Navy
    Inventors: Raymond Auyeung, Alberto Pique, Thomas H. Bailey, Lydia J. Young