Patents Assigned to Photon Dynamics, Inc.
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Publication number: 20200111396Abstract: A system for inspection of electrical circuits, which electrical circuits include a multiplicity of conductors which are mutually spaced from each other, the system including a voltage driver operative to apply different electrical voltages to a plurality of conductors from among the multiplicity of conductors, which plurality of conductors are in spatial propinquity to each other, a sensor operative to sense at least one characteristic of a test region defined thereby with respect to the electrical circuits, the sensor lacking sufficient spatial resolution to distinguish between the locations of individual ones of the plurality of conductors and a defect indicator responsive to at least one output of the sensor for ascertaining whether a defect exists in the plurality of conductors.Type: ApplicationFiled: June 18, 2018Publication date: April 9, 2020Applicant: PHOTON DYNAMICS, INC.Inventors: Raul Albert MARTIN, Richard Norio BLYTHE
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Patent number: 9535273Abstract: An optical apparatus for creating an image of object features buried underneath color filters. The apparatus includes: an illumination light source producing an illuminating light, the illumination light source incorporating at least three laser light emitters operating at different wavelengths, the illuminating light being a combination of light signals produced by the at least three light emitters; an electronic control module coupled to each of the at least three laser light emitters and configured to drive each of the at least three laser light emitters using a pulsed driving signal with controllable amplitude and temporal pulse parameters; an illumination optical path delivering the illuminating light from the illumination light source to the object; an image sensor for creating the image of the object using light collected from the object; and an imaging optical path for delivering the light from the object to the image sensor.Type: GrantFiled: July 21, 2011Date of Patent: January 3, 2017Assignee: PHOTON DYNAMICS, INC.Inventor: Andrey Bordenyuk
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Patent number: 9523714Abstract: A non-mechanical contact signal measurement apparatus includes a first conductor on a structure under test and a gas in contact with the first conductor. At least one electron beam is directed into the gas so as to induce a plasma in the gas where the electron beam passes through the gas. A second conductor is in electrical contact with the plasma. A signal source is coupled to an electrical measurement device through the first conductor, the plasma, and the second conductor when the plasma is directed on the first conductor. The electrical measurement device is responsive to the signal source.Type: GrantFiled: January 15, 2014Date of Patent: December 20, 2016Assignees: PHOTON DYNAMICS, INC., ORBOTECH LTD.Inventors: Alexander Kadyshevitch, Ofer Kadar, Arie Glazer, Ronen Loewinger, Abraham Gross, Daniel Toet
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Patent number: 9103876Abstract: A probe system for facilitating the inspection of a device under test. System incorporates a storage rack; a probe bar gantry assembly; a probe assembly configured to electrically mate the device under test; and a robot system for picking the probe assembly from the storage rack and deliver the probe assembly to the probe bar gantry. The robot system is also enabled to pick a probe assembly from the probe bar gantry and deliver the probe assembly to the storage rack. The probe assembly includes a clamping assembly for attaching the probe assembly to the probe bar gantry or the storage rack. The probe assembly may include an array of contact pins configured to mate with conductive pads on the device under test when the probe assembly is installed on the probe bar gantry assembly.Type: GrantFiled: January 7, 2011Date of Patent: August 11, 2015Assignee: PHOTON DYNAMICS, INC.Inventors: Kent Nguyen, Kaushal Gangakhedkar, David Baldwin, Nile Light, Steve Aochi, Yan Wang, Atila Ersahin, Hai Tran, Thomas H. Bailey, Kiran Jitendra, Alan Cable, Dave Smiley, Thomas E. Wishard
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Patent number: 8866899Abstract: An apparatus for identifying a defect in an electronic circuit having periodic features, the apparatus including at least a camera for obtaining an image of the electronic circuit and an image processing system. The image processing system receives the image of the electronic circuit from the camera, performs a diagonal shift of the received image of the electronic circuit by at least a diagonal size of the periodic features of the electronic circuit to produce a shifted image of the electronic circuit, identifies a candidate defect using the image of the electronic circuit and the shifted image of the electronic circuit, computes one or more local defect-free reference (golden) images of the electronic circuit using at least one selected area in the closest proximity of the identified candidate defect and determines the defect in the electronic circuit using one or more computed local golden images of the electronic circuit, the image of the electronic circuit.Type: GrantFiled: June 7, 2011Date of Patent: October 21, 2014Assignee: Photon Dynamics Inc.Inventor: Nickolay Mokichev
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Publication number: 20140266244Abstract: Described are techniques for maintaining reliable and reproducible conditions for panel inspection, i.e. pixel and line defect detection, while at the same time preventing large-scale panel damage. One implementation involves an apparatus for identifying a defect in an electronic circuit incorporating a circuit driving module configured to apply an electrical test signal to the electronic circuit; a defect detection module configured to identify the defect in the electronic circuit based at least on the applied electrical test signal; a signal monitoring module configured to measure the electrical test signal at the electronic circuit; and a control module operatively coupled to the signal monitoring module and the circuit driving module and configured to control at least the circuit driving module based on the electrical test signal measured at the electronic circuit.Type: ApplicationFiled: March 16, 2014Publication date: September 18, 2014Applicant: Photon Dynamics Inc.Inventors: Viacheslav MINAEV, Raul Albert MARTIN, Thomas E. WISHARD, Michael Sean CASSADY, Jongho LEE, Thomas H. BAILEY, Sriram KRISHNASWAMI
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Patent number: 8801964Abstract: Polymer network liquid crystal materials have improved mechanical properties such as rigidity and hardness and substantially improved electro-optical performance. The PNLC material can be manufactured with an emulsion process so as to simplify substantially the manufacturing process. Each LC droplet can be configured with the polymer network extending substantially across the LC droplet, and the polymer network may comprise a material to lower substantially the switching voltage, such as a fluorinated acrylate that may interact with the liquid crystal so as to lower the surface tension of the LC droplet. The PNLC material may comprise an interfacial layer combined with the polymer network so as to decrease substantially the driving voltage.Type: GrantFiled: December 22, 2010Date of Patent: August 12, 2014Assignee: Photon Dynamics, Inc.Inventor: Xianhai Chen
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Patent number: 8773140Abstract: A system for inspection of electrical circuits including a calibration subsystem operative to apply a time varying voltage to an electrical circuit being inspected during calibration and to sense differences in an electrical state at various different locations in the electrical circuit being inspected, thereby providing an indication of location of defects therein.Type: GrantFiled: July 26, 2011Date of Patent: July 8, 2014Assignee: Photon Dynamics, IncInventors: Sam-Soo Jung, Raul Martin
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Patent number: 8728589Abstract: A laser decal transfer is used to generate thin film features by directing laser pulses of very low energy at the back of a target substrate illuminating an area of a thin layer of a high viscosity rheological fluid coating the front surface of the target. The illuminated area is shaped and defined by an aperture centered about the laser beam. The decal transfer process allows for the release and transfer from the target substrate to the receiving substrate a uniform and continuous layer identical in shape and size of the laser irradiated area. The released layer is transferred across the gap with almost no changes to its initial size and shape. The resulting patterns transferred onto the receiving substrate are highly uniform in thickness and morphology, have sharp edge features and exhibit high adhesion, independent of the surface energy, wetting or phobicity of the receiving substrate.Type: GrantFiled: January 7, 2008Date of Patent: May 20, 2014Assignee: Photon Dynamics, Inc.Inventors: Raymond Auyeung, Alberto Pique, Thomas H. Bailey, Lydia J. Young
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Publication number: 20140132299Abstract: A non-mechanical contact signal measurement apparatus includes a first conductor on a structure under test and a gas in contact with the first conductor. At least one electron beam is directed into the gas so as to induce a plasma in the gas where the electron beam passes through the gas. A second conductor is in electrical contact with the plasma. A signal source is coupled to an electrical measurement device through the first conductor, the plasma, and the second conductor when the plasma is directed on the first conductor. The electrical measurement device is responsive to the signal source.Type: ApplicationFiled: January 15, 2014Publication date: May 15, 2014Applicant: Photon Dynamics, Inc.Inventors: Alexander Kadyshevitch, Ofer Kadar, Arie Glazer, Ronen Loewinger, Abraham Gross, Daniel Toet
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Patent number: 8390926Abstract: System and method for selectively viewing features of objects, including features hidden under non-transparent materials.Type: GrantFiled: August 12, 2010Date of Patent: March 5, 2013Assignee: Photon Dynamics, Inc.Inventor: Andrey Bordenyuk
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Publication number: 20130027050Abstract: A system for inspection of electrical circuits including a calibration subsystem operative to apply a time varying voltage to an electrical circuit being inspected during calibration and to sense differences in an electrical state at various different locations in the electrical circuit being inspected, thereby providing an indication of location of defects therein.Type: ApplicationFiled: July 26, 2011Publication date: January 31, 2013Applicant: PHOTON DYNAMICS, INCInventors: Sam-Soo JUNG, Raul MARTIN
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Publication number: 20130021466Abstract: An optical apparatus for creating an image of object features buried underneath color filters. The apparatus includes: an illumination light source producing an illuminating light, the illumination light source incorporating at least three laser light emitters operating at different wavelengths, the illuminating light being a combination of light signals produced by the at least three light emitters; an electronic control module coupled to each of the at least three laser light emitters and configured to drive each of the at least three laser light emitters using a pulsed driving signal with controllable amplitude and temporal pulse parameters; an illumination optical path delivering the illuminating light from the illumination light source to the object; an image sensor for creating the image of the object using light collected from the object; and an imaging optical path for delivering the light from the object to the image sensor.Type: ApplicationFiled: July 21, 2011Publication date: January 24, 2013Applicant: PHOTON DYNAMICS, INC.Inventor: Andrey Bordenyuk
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Publication number: 20120319713Abstract: A probe system for facilitating the inspection of a device under test. System incorporates a storage rack; a probe bar gantry assembly; a probe assembly configured to electrically mate the device under test; and a robot system for picking the probe assembly from the storage rack and deliver the probe assembly to the probe bar gantry. The robot system is also enabled to pick a probe assembly from the probe bar gantry and deliver the probe assembly to the storage rack. The probe assembly includes a clamping assembly for attaching the probe assembly to the probe bar gantry or the storage rack. The probe assembly may include an array of contact pins configured to mate with conductive pads on the device under test when the probe assembly is installed on the probe bar gantry assembly.Type: ApplicationFiled: January 7, 2011Publication date: December 20, 2012Applicant: PHOTON DYNAMICS, INC.Inventors: Kent Nguyen, Kaushal Gangakhedkar, David Baldwin, Nile Light, Steve Aochi, Yan Wang, Atila Ersahin, Hai Tran, Thomas H. Bailey, Kiran Jitendra, Alan Cable, Dave Smiley, Thomas E. Wishard
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Publication number: 20120162596Abstract: Polymer network liquid crystal materials have improved mechanical properties such as rigidity and hardness and substantially improved electro-optical performance. The PNLC material can be manufactured with an emulsion process so as to simplify substantially the manufacturing process. Each LC droplet can be configured with the polymer network extending substantially across the LC droplet, and the polymer network may comprise a material to lower substantially the switching voltage, such as a fluorinated acrylate that may interact with the liquid crystal so as to lower the surface tension of the LC droplet. The PNLC material may comprise an interfacial layer combined with the polymer network so as to decrease substantially the driving voltage.Type: ApplicationFiled: December 22, 2010Publication date: June 28, 2012Applicant: Photon Dynamics, Inc.Inventor: Xianhai Chen
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Publication number: 20120038977Abstract: System and method for selectively viewing features of objects, including features hidden under non-transparent materials.Type: ApplicationFiled: August 12, 2010Publication date: February 16, 2012Applicant: PHOTON DYNAMICS, INC.Inventor: Andrey Bordenyuk
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Patent number: 8025542Abstract: An apparatus includes integrated review, material removal and material deposition functions. The apparatus performs the review, material removal and material deposition operations along the same optical axis. The apparatus includes, in part, a camera, a pair of lenses, and one or more lasers. A first lens is used to focus the camera along the optical axis on a structure formed on the target substrate undergoing review. The first lens is also used to focus the laser beam on the structure to remove a material present thereon if the reviewed structure is identified as requiring material removal. The second lens is used to focus the laser beam on a ribbon to transfer a rheological compound from a recessed well formed in the ribbon to the structure if the reviewed structure is identified as requiring material deposition.Type: GrantFiled: May 14, 2007Date of Patent: September 27, 2011Assignees: Photon Dynamics, Inc., The United States of America as represented by the Secretary of the NavyInventors: Steven Edward Birrell, Alan Cable, Joel Visser, Lydia J. Young, Justin Kwak, Joachim Eldring, Thomas H. Bailey, Alberto Pique, Raymond Auyeung
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Patent number: 7977602Abstract: In laser micromachining and laser defect repair of a first material, a first set of one or more laser wavelengths is selected in accordance with the first material's absorption characteristics and is combined and delivered concurrently with a second set of one or more laser wavelengths which is selected in accordance with the absorption characteristics of a second material generated by and remaining from the ablating interaction of the first material with the first set of laser wavelengths. The concurrent presence of the second set of one or more laser wavelengths removes the residual second material.Type: GrantFiled: March 19, 2008Date of Patent: July 12, 2011Assignee: Photon Dynamics, Inc.Inventor: Steven Edward Birrell
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Patent number: 7960993Abstract: Each sensor of a linear array of sensors includes, in part, a sensing electrode and an associated feedback circuit. The sensing electrodes are adapted to be brought in proximity to a flat panel having formed thereon a multitude of pixel electrodes in order to capacitively measure the voltage of the pixel electrodes. Each feedback circuit is adapted to actively drive its associated electrode via a feedback signal so as to maintain the voltage of its associated electrode at a substantially fixed bias. Each feedback circuit may include an amplifier having a first input terminal coupled to the sensing electrode and a second input terminal coupled to receive a biasing voltage. The output signal of the amplification circuit is used to generate the feedback signal that actively drives the sensing electrode. The biasing voltage may be the ground potential.Type: GrantFiled: August 25, 2009Date of Patent: June 14, 2011Assignee: Photon Dynamics, Inc.Inventors: David W. Gardner, Andrew M. Hawryluk
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Patent number: 7916382Abstract: A PDLC modulator is fabricated using at least one of a selection of specially-formulated UV curable organic hard coatings as a protective layer on the exposed side of polyester (Mylar) film. The hard coatings of various related types show good adhesion on a polyester film substrate, superior hardness and toughness, and have a slippery top surface, which minimizes unnecessary wear. The coating as applied on the modulator surface significantly reduces scratch damage on modulators caused by unexpected particles on the panels under test. In addition, the slip surface will reduce stickiness to particles and therefore also reduce the possibility of panel damage.Type: GrantFiled: November 9, 2005Date of Patent: March 29, 2011Assignee: Photon Dynamics, Inc.Inventor: Xianhai Chen