Patents Assigned to Photon Dynamics, Inc.
  • Patent number: 7817333
    Abstract: An electro-optic modulator assembly includes a sensor layer made from an electro-optic modulator material that comprises liquid crystal droplets encapsulated within a polymer matrix. The sensor layer material comprises an interfacial agent, for example a defoaming agent, in an amount sufficient to lower an intrinsic operating voltage at which the sensor layer transmits light. The defoaming agent can comprise from about 1 to about 10 percent by weight of the electro-optic modulator material, and the defoaming agent may comprise a reactive component to react with the polymer matrix, for example at least one of a siloxane with a reactive end group, a reactive fluorinated polymer or a non-ionic block copolymer to react with the polymer matrix. The assembly can also include a hard coating layer to protect the sensor layer.
    Type: Grant
    Filed: February 6, 2007
    Date of Patent: October 19, 2010
    Assignee: Photon Dynamics, Inc.
    Inventor: Xianhai Chen
  • Patent number: 7761182
    Abstract: A repair system for flat panel display (FPD) substrates performs a number of operations, such as automatic image capture and processing, automatic defect classification, automatic repair classification, and repair macro (instruction) generation software. Defect classification, repair classification, and repair macro generation are based on an open architecture and can address any number of use-cases through the use of multi-tiered classifiers, and thus a wide variety of panel designs may be repaired within a single repair tool. The multi-tiered set of classifiers, e.g., defect classifier, repair classifier, enables an efficient decision-making repair process with capability for customization. The multi-tiered classifiers are optionally extended to support statistical learning (both online & batch) and active learning, in the context of a supporting database of defects and associated tools.
    Type: Grant
    Filed: January 20, 2006
    Date of Patent: July 20, 2010
    Assignee: Photon Dynamics, Inc.
    Inventors: Harry Gallarda, Steven Barnes, Lakshman Srinivasan, Wayne Wang
  • Patent number: 7714589
    Abstract: In accordance with the present invention, a first shorting bar drives the data lines of a TFT array having integrated gate driver circuitry. Another set of shorting bars drive the corresponding terminals of the gate driver circuitry. The pixel voltages are measured after all the pixels are charged by the driving signals applied to the shorting bars. Gate voltages are progressively applied to the gate lines by the gate driver integrated circuit (IC) via the set of shorting bars that, in turn, are driven by clock signals received from one or more pattern generators. Voltages are concurrently applied to the data lines which are connected together by the first shorting bar. The application of voltages generates a display pattern that is subsequently compared to an expected display pattern. By comparing the resulting display pattern and the expected display pattern, possible defects are detected.
    Type: Grant
    Filed: November 14, 2006
    Date of Patent: May 11, 2010
    Assignee: Photon Dynamics, Inc.
    Inventors: Mike Jun, Atila Ersahin, Barry McGinley, Sabari Sanjeevi
  • Publication number: 20100045334
    Abstract: Each sensor of a linear array of sensors includes, in part, a sensing electrode and an associated feedback circuit. The sensing electrodes are adapted to be brought in proximity to a flat panel having formed thereon a multitude of pixel electrodes in order to capacitively measure the voltage of the pixel electrodes. Each feedback circuit is adapted to actively drive its associated electrode via a feedback signal so as to maintain the voltage of its associated electrode at a substantially fixed bias. Each feedback circuit may include an amplifier having a first input terminal coupled to the sensing electrode and a second input terminal coupled to receive a biasing voltage. The output signal of the amplification circuit is used to generate the feedback signal that actively drives the sensing electrode. The biasing voltage may be the ground potential.
    Type: Application
    Filed: August 25, 2009
    Publication date: February 25, 2010
    Applicant: Photon Dynamics, Inc.
    Inventors: David W. Gardner, Andrew M. Hawryluk
  • Patent number: 7639319
    Abstract: Embodiments of polymer dispersed liquid crystals (PDLCs) in accordance with the present invention comprise TL-series liquid crystal materials and a polymer matrix comprising polyacrylate resins having hydroxyl groups. These hydroxyl groups allow crosslinking by using isocyanate, improving mechanical properties and heat resistance. Typical ratios of liquid crystal to polymer range between about 50/50 to 70/30 (wt/wt). The PDLC materials exhibit enhanced sensitivity to driving voltages and higher transmission˜voltage (T-V) curve slope. In testing thin film transistors (TFTs), these PDLC materials can be used to compensate for an increased air gap accommodating flatness variation in the TFT substrate, and to reduce electrostatic forces between modulator and panel. Embodiments of PDLC materials in accordance with the present invention form solid films upon evaporation of the solvent.
    Type: Grant
    Filed: April 7, 2005
    Date of Patent: December 29, 2009
    Assignee: Photon Dynamics, Inc.
    Inventor: Xianhai Chen
  • Publication number: 20090295425
    Abstract: Each sensor of a linear array of sensors includes, in part, a sensing electrode and an associated feedback circuit. The sensing electrodes are adapted to be brought in proximity to a flat panel having formed thereon a multitude of pixel electrodes in order to capacitively measure the voltage of the pixel electrodes. Each feedback circuit is adapted to actively drive its associated electrode via a feedback signal so as to maintain the voltage of its associated electrode at a substantially fixed bias. Each feedback circuit may include an amplifier having a first input terminal coupled to the sensing electrode and a second input terminal coupled to receive a biasing voltage. The output signal of the amplification circuit is used to generate the feedback signal that actively drives the sensing electrode. The biasing voltage may be the ground potential.
    Type: Application
    Filed: August 12, 2009
    Publication date: December 3, 2009
    Applicant: Photon Dynamics, Inc.
    Inventors: David W. Gardner, Andrew M. Hawryluk
  • Patent number: 7543867
    Abstract: A vacuum gripper for use in substrate positioning operations includes a vacuum pad adapted to make contact with the substrate and a shaft connected to the vacuum pad. The shaft is characterized by a first diameter at a portion of the shaft proximal to the vacuum pad and a second diameter at a portion of the shaft distal to the vacuum pad. The vacuum gripper also includes a first air bearing surrounding the portion of the shaft proximal to the vacuum pad, a second air bearing surrounding the portion of the shaft distal to the vacuum pad, and an air source in fluid communication with the first air bearing and the second air bearing. The vacuum gripper further includes an exhaust port, a valve in fluid communication with the exhaust port, and a first flow restrictor in fluid communication with the valve.
    Type: Grant
    Filed: March 23, 2006
    Date of Patent: June 9, 2009
    Assignee: Photon Dynamics, Inc.
    Inventors: Digby Pun, Kent Nguyen, Robert Barnett
  • Publication number: 20090074987
    Abstract: A laser decal transfer is used to generate thin film features by directing laser pulses of very low energy at the back of a target substrate illuminating an area of a thin layer of a high viscosity rheological fluid coating the front surface of the target. The illuminated area is shaped and defined by an aperture centered about the laser beam. The decal transfer process allows for the release and transfer from the target substrate to the receiving substrate a uniform and continuous layer identical in shape and size of the laser irradiated area. The released layer is transferred across the gap with almost no changes to its initial size and shape. The resulting patterns transferred onto the receiving substrate are highly uniform in thickness and morphology, have sharp edge features and exhibit high adhesion, independent of the surface energy, wetting or phobicity of the receiving substrate.
    Type: Application
    Filed: January 7, 2008
    Publication date: March 19, 2009
    Applicants: Photon Dynamics, Inc., The United States of America as represented by the Secretary of Navy
    Inventors: Raymond Auyeung, Alberto Pique, Thomas H. Bailey, Lydia J. Young
  • Publication number: 20080315908
    Abstract: Each sensor of a linear array of sensors includes, in part, a sensing electrode and an associated feedback circuit. The sensing electrodes are adapted to be brought in proximity to a flat panel having formed thereon a multitude of pixel electrodes in order to capacitively measure the voltage of the pixel electrodes. Each feedback circuit is adapted to actively drive its associated electrode via a feedback signal so as to maintain the voltage of its associated electrode at a substantially fixed bias. Each feedback circuit may include an amplifier having a first input terminal coupled to the sensing electrode and a second input terminal coupled to receive a biasing voltage. The output signal of the amplification circuit is used to generate the feedback signal that actively drives the sensing electrode. The biasing voltage may be the ground potential.
    Type: Application
    Filed: August 29, 2008
    Publication date: December 25, 2008
    Applicant: Photon Dynamics, Inc.
    Inventors: David W. Gardner, Andrew M. Hawryluk
  • Patent number: 7468611
    Abstract: A system performs continuous full linear scan of a flat media. The system includes, in part, a chuck, and at least first, second and third gantries. The chuck is adapted to support the flat media during the test. The first gantry includes at least one linear array of non-contacting sensors that spans the width of the flat media and is adapted to move across an entire length of the flat media. Each of the second and third gantries includes a probe head that spans the width of the flat media and each is adapted to apply an electrical signal to the flat media. Each probe head is further adapted to move along a direction substantially perpendicular to the surface of the flat media during the times when the first gantry is in motion and while test signals are being continuously applied.
    Type: Grant
    Filed: October 19, 2007
    Date of Patent: December 23, 2008
    Assignee: Photon Dynamics, Inc.
    Inventors: Kent Nguyen, Eric Thompson, Hai Tran, Kaushal Gangakhedkar, Robert Barnett, Daniel Toet, David Baldwin, Steve Aochi, Neil Nguyen
  • Patent number: 7466161
    Abstract: Each sensor of a linear array of sensors includes, in part, a sensing electrode and an associated feedback circuit. The sensing electrodes are adapted to be brought in proximity to a flat panel having formed thereon a multitude of pixel electrodes in order to capacitively measure the voltage of the pixel electrodes. Each feedback circuit is adapted to actively drive its associated electrode via a feedback signal so as to maintain the voltage of its associated electrode at a substantially fixed bias. Each feedback circuit may include an amplifier having a first input terminal coupled to the sensing electrode and a second input terminal coupled to receive a biasing voltage. The output signal of the amplification circuit is used to generate the feedback signal that actively drives the sensing electrode. The biasing voltage may be the ground potential.
    Type: Grant
    Filed: April 20, 2006
    Date of Patent: December 16, 2008
    Assignee: Photon Dynamics, Inc.
    Inventors: David W. Gardner, Andrew M. Hawryluk
  • Publication number: 20080239208
    Abstract: Embodiments of polymer dispersed liquid crystals (PDLCs) in accordance with the present invention comprise TL-series liquid crystal materials and a polymer matrix comprising polyacrylate resins having hydroxyl groups. These hydroxyl groups allow crosslinking by using isocyanate, improving mechanical properties and heat resistance. Typical ratios of liquid crystal to polymer range between about 50/50 to 70/30 (wt/wt). The PDLC materials exhibit enhanced sensitivity to driving voltages and higher transmission˜voltage (T-V) curve slope. In testing thin film transistors (TFTs), these PDLC materials can be used to compensate for an increased air gap accommodating flatness variation in the TFT substrate, and to reduce electrostatic forces between modulator and panel. Embodiments of PDLC materials in accordance with the present invention form solid films upon evaporation of the solvent.
    Type: Application
    Filed: April 7, 2005
    Publication date: October 2, 2008
    Applicant: Photon Dynamics, Inc.
    Inventor: Xianhai Chen
  • Publication number: 20080230525
    Abstract: In laser micromachining and laser defect repair of a first material, a first set of one or more laser wavelengths is selected in accordance with the first material's absorption characteristics and is combined and delivered concurrently with a second set of one or more laser wavelengths which is selected in accordance with the absorption characteristics of a second material generated by and remaining from the ablating interaction of the first material with the first set of laser wavelengths. The concurrent presence of the second set of one or more laser wavelengths removes the residual second material.
    Type: Application
    Filed: March 19, 2008
    Publication date: September 25, 2008
    Applicant: Photon Dynamics, Inc.
    Inventor: Steven Edward Birrell
  • Publication number: 20080206489
    Abstract: A PDLC modulator is fabricated using at least one of a selection of specially-formulated UV curable organic hard coatings as a protective layer on the exposed side of polyester (Mylar) film. The hard coatings of various related types show good adhesion on a polyester film substrate, superior hardness and toughness, and have a slippery top surface, which minimizes unnecessary wear. The coating as applied on the modulator surface significantly reduces scratch damage on modulators caused by unexpected particles on the panels under test. In addition, the slip surface will reduce stickiness to particles and therefore also reduce the possibility of panel damage.
    Type: Application
    Filed: November 9, 2005
    Publication date: August 28, 2008
    Applicant: Photon Dynamics, Inc.
    Inventor: Xianhai Chen
  • Publication number: 20080198246
    Abstract: The anti-blooming structure of an image sensor is supplied with varying voltages during different integration periods such that charges generated in response to low level light are fully captured, whereas charges generated in response to a bright light spill over in a controlled manner. Accordingly, sensor's response may be generated to result in higher gains at low light levels and progressively lower gains at the higher light levels.
    Type: Application
    Filed: February 16, 2007
    Publication date: August 21, 2008
    Applicant: Photon Dynamics, Inc.
    Inventor: David W. Gardner
  • Publication number: 20080186563
    Abstract: An electro-optic modulator assembly includes a sensor layer made from an electro-optic modulator material that comprises liquid crystal droplets encapsulated within a polymer matrix. The sensor layer material comprises an interfacial agent, for example a defoaming agent, in an amount sufficient to lower an intrinsic operating voltage at which the sensor layer transmits light. The defoaming agent can comprise from about 1 to about 10 percent by weight of the electro-optic modulator material, and the defoaming agent may comprise a reactive component to react with the polymer matrix, for example at least one of a siloxane with a reactive end group, a reactive fluorinated polymer or a non-ionic block copolymer to react with the polymer matrix. The assembly can also include a hard coating layer to protect the sensor layer.
    Type: Application
    Filed: February 6, 2007
    Publication date: August 7, 2008
    Applicant: Photon Dynamics, Inc.
    Inventor: Xianhai Chen
  • Publication number: 20080157802
    Abstract: Each sensor of a linear array of sensors includes, in part, a sensing electrode and an associated feedback circuit. The sensing electrodes are adapted to be brought in proximity to a flat panel having formed thereon a multitude of pixel electrodes in order to capacitively measure the voltage of the pixel electrodes. Each feedback circuit is adapted to actively drive its associated electrode via a feedback signal so as to maintain the voltage of its associated electrode at a substantially fixed bias. Each feedback circuit may include an amplifier having a first input terminal coupled to the sensing electrode and a second input terminal coupled to receive a biasing voltage. The output signal of the amplification circuit is used to generate the feedback signal that actively drives the sensing electrode. The biasing voltage may be the ground potential.
    Type: Application
    Filed: March 12, 2008
    Publication date: July 3, 2008
    Applicant: Photon Dynamics, Inc.
    Inventors: David W. Gardner, Andrew M. Hawryluk
  • Publication number: 20080139075
    Abstract: An apparatus includes integrated review, material removal and material deposition functions. The apparatus performs the review, material removal and material deposition operations along the same optical axis. The apparatus includes, in part, a camera, a pair of lenses, and one or more lasers. A first lens is used to focus the camera along the optical axis on a structure formed on the target substrate undergoing review. The first lens is also used to focus the laser beam on the structure to remove a material present thereon if the reviewed structure is identified as requiring material removal.
    Type: Application
    Filed: May 14, 2007
    Publication date: June 12, 2008
    Applicants: Photon Dynamics, Inc., The United States of America as represented by the Secretary of Navy
    Inventors: Steven Edward Birrell, Alan Cable, Joel Visser, Lydia J. Young, Justin Kwak, Joachim Eldring, Thomas H. Bailey, Alberto Pique, Raymond Auyeung
  • Patent number: 7386161
    Abstract: A concurrent low resolution/high resolution parallel scanning system and method are provided as an improvement in the scanning process of an inspection system for planar objects, such as large flat plates employed in panel displays, whereby lower resolution defect detection efficiently overlaps and parallels higher resolution defect review and classification stages in which defects are automatically defined and resolved. Although the invention is a valid solution for the more general problem of optically inspecting the surface of a flat article for defects, the invention is particularly useful for detecting pattern defects on large glass plates deposited with integrated-circuits for forming LCD flat panel displays.
    Type: Grant
    Filed: October 17, 2003
    Date of Patent: June 10, 2008
    Assignee: Photon Dynamics, Inc.
    Inventors: Adam Weiss, Afsar Saranli
  • Publication number: 20080094081
    Abstract: A system performs continuous full linear scan of a flat media. The system includes, in part, a chuck, and at least first, second and third gantries. The chuck is adapted to support the flat media during the test. The first gantry includes at least one linear array of non-contacting sensors that spans the width of the flat media and is adapted to move across an entire length of the flat media. Each of the second and third gantries includes a probe head that spans the width of the flat media and each is adapted to apply an electrical signal to the flat media. Each probe head is further adapted to move along a direction substantially perpendicular to the surface of the flat media during the times when the first gantry is in motion and while test signals are being continuously applied.
    Type: Application
    Filed: October 19, 2007
    Publication date: April 24, 2008
    Applicant: Photon Dynamics, Inc.
    Inventors: Kent Nguyen, Eric Thompson, Hai Tran, Kaushal Gangakhedkar, Robert Barnett, Daniel Toet, David Baldwin, Steve Aochi, Neil Nguyen