Abstract: Methods and apparatus for enabling both isolated and dense patterns to be accurately patterned onto a wafer are disclosed. According to one aspect of the present invention, an illumination system that is suitable for use as a part of a projection tool includes an illumination source and an illuminator aperture. The illuminator aperture has a center point and an outer edge, and also includes a first pole and a second pole. The first pole is defined substantially about the center point, and the second pole is defined substantially between the first pole and the outer edge of the first pole. The illumination source is arranged to provide a beam to the illuminator aperture.
Abstract: A system for manipulating a planar substrate such as a semiconductor wafer is provided. The manipulator is typically used in conjunction with an XY stage to focus and planarize a wafer with respect to a tool. The manipulator employs redundant actuators of different types and a control system that uses low-bandwidth, high efficiency actuators to provide low frequency forces and high-bandwidth, but less efficient, actuators to provide all other forces. The manipulator provides support and manipulation of a substrate while minimizing errors due to thermal distortion.
Abstract: Methods and apparatus for enabling both isolated and dense patterns to be accurately patterned onto a wafer are disclosed. According to one aspect of the present invention, an illumination system that is suitable for use as a part of a projection tool includes an illumination source and an illuminator aperture. The illuminator aperture has a center point and an outer edge, and also includes a first pole and a second pole. The first pole is defined substantially about the center point, and the second pole is defined substantially between the first pole and the outer edge of the first pole. The illumination source is arranged to provide a beam to the illuminator aperture.
Type:
Application
Filed:
April 11, 2003
Publication date:
October 14, 2004
Applicant:
Nikon Precision Inc., A California Corporation
Abstract: A shutter for a camera capable of opening a shutter sector in a reduced period of time includes a shutter opening formed in a shutter plate, shutter sectors for opening and closing the shutter opening, a drive lever having a drive pin for operating the shutter sectors, and an actuator for driving the drive lever. The drive pin penetrates through-holes formed in the shutter sectors. The through-holes have a size sufficiently large so that the drive lever is driven by the actuator substantially in a no-load state immediately after starting to drive the drive lever so that the shutter sectors are not moved until the drive pin has achieved sufficient acceleration.
Abstract: A field emission display package (1) includes an anode plate (30) coated with a phosphor layer (40), a resistive buffer (60) spaced from the phosphor layer (40), a plurality of electron emitters (50) formed on the resistive buffer (60), a cathode plate (70) in contact with the resistive buffer (60), a silicon thin film (80), and a sealed housing (5). The sealed housing includes a front plate (10), a back plate (20) and a plurality of side walls (90) affixed between the front plate and the back plate so that the front plate, the back plate and the side walls define an interspace region. The front plate and the back plate are preferably made from glass. The side walls are made from an Invar-36 alloy having a coefficient of thermal expansion similar to that of the glass.
Abstract: A phase difference detection apparatus for detecting a phase difference between images formed on a pair of optical sensor arrays in which the possibility of unproductive compensation is reduced by use of a compensation effectiveness judgment unit that judges whether or not compensation of a pair of image data rows would be effective. A compensation unit calculates a compensation amount based on a difference in maximum values and minimum values in a pair of image data rows corresponding to the images produced by the optical sensor arrays and compensates the image data rows by the calculated compensation amount. Based upon the compensated values, a correlation calculation unit carries out a correlation calculation, and a maximum correlation detection unit detects a maximum correlation level. Based upon the maximum correlation level, a interpolation calculation unit carries out an interpolation calculation, and a phase difference is detected by a phase difference detection unit.
Abstract: A system for manipulating a planar substrate such as a semiconductor wafer is provided. The manipulator is typically used in conjunction with an XY stage to focus and planarize a wafer with respect to a tool. The manipulator employs redundant actuators of different types and a control system that uses low-bandwidth, high efficiency actuators to provide low frequency forces and high-bandwidth, but less efficient, actuators to provide all other forces. The manipulator provides support and manipulation of a substrate while minimizing errors due to thermal distortion.
Abstract: Apparatus for performing measurement of a dimension of a test marked formed by overlapping feature imaged onto a an image forming layer of a semiconductor wafer and the calculation of the critical dimensions of the features from test mark. This is used in semiconductor processing. Also included is software configured to program a measurement device to perform the measurement and calculation of the dimension of a test mark.
Abstract: An electrical connector (1) is provided for electrically mating with a mating connector (9) defining a receiving recess (95). The electrical connector includes a casing (2) and a theftproof member (8) movably disposed on the casing. The theftproof member has a latch portion (821). The theftproof member is movable between an unlocked position where the latch portion is disengaged from the receiving recess of the mating connector and a locked position where the latch portion latches into the receiving recess of the mating connector.
Abstract: A computer enclosure includes a front panel (10), a disk drive bracket (20) and a bottom panel (30). The front panel includes two opposite side plates (11) and a bottom flange (12). A bottom portion of each side plate forms an L-shaped securing portion (111) defining a locking hole (113). The disk drive bracket includes two sidewalls (22). A front end of a bottom portion of each sidewall defines a locking hole (221). Rearwardly of the locking hole, the bottom portion of the sidewall is bent to form a rail (222). The bottom panel includes two guiding channels (31) on opposite lateral sides thereof. In assembly, the disk drive bracket is secured to the front panel. The rails of the disk drive bracket are then slid into the guiding channels of the bottom panel, to attach the combined front panel and disk drive bracket to the bottom panel.
Abstract: A golf club preferably in the form of a golf putter includes a hard stainless steel club head having a striking surface for contacting a golf ball with a recess formed therein. A softer brass plate and an advertising insert closely fit within the recess, and are covered by transparent epoxy which hardens to form a portion of the striking surface through which advertising printed on the insert is visible. The club head further includes a rear recess behind the front recess, between which is defined a thin perforated wall. The stainless steel body, the brass plate, the transparent epoxy, and the perforated wall provide a golf putter which has a large sweet spot and which provides for advertising.
Abstract: An electrical connector (1) includes a dielectric housing (10) and a number of upper and lower terminals (20, 30). The dielectric housing defines a slot (15) extending in a longitudinal direction thereof and a number of upper and lower passageways (16, 17) communicating with the slot. The upper and lower terminals are respectively received in the upper and lower passageways. Each of the upper and lower terminals includes a mounting plate (21, 31), a resilient arm (22, 32) extending from the mounting plate for electrically connecting with an electronic card, a solder tail (25, 35) extending from the mounting plate for electrically connecting to the PCB, and upper and lower retaining portions (23, 33, 24, 34) extending from the mounting plate in a same direction and are retained in the housing.
Abstract: A phase difference detection apparatus for detecting a phase difference between images formed on a pair of optical sensor arrays in which the calculation of a compensation value is simplified. When a compensation effectiveness judgment unit judges that compensation of the pair of image data rows would be effective, a left and right difference compensation unit calculates a compensation amount based on a difference in maximum values and minimum values in a pair of image data rows corresponding to the images produced by the optical sensor arrays and compensates the image data rows by the calculated compensation amount. Based upon the compensated values, a correlation calculation unit carries out a correlation calculation, and a maximum correlation detection unit detects a maximum correlation level. Based upon the maximum correlation level, a interpolation calculation unit carries out an interpolation calculation, and a phase difference is detected by a phase difference detection unit.
Abstract: A camera shutter has a base plate provided with a shutter opening. Sectors are mounted on the base plate to undergo movement to open and close the shutter opening. A driving lever has a driving pin that extends through through-holes in the sectors for operating the sectors. One of the through-holes is configured so that a gap is formed between an edge of the through-hole and the driving pin in the direction of movement of the driving pin. As the driving pin moves to drive the sectors to close the shutter opening, the movement of the driving pin is abruptly stopped when the sectors fully close the shutter opening thereby causing the driving pin to rebound. The rebounding motion is not transmitted to the sector in which the gap is formed, and inertia permits further movement of the sector in the closing direction over a distance equal to the gap. This maintains the sectors in overlapping relation and prevents reexposure when the shutter is in a fully closed state.
Abstract: A dot printer not using any type, nor requiring any ink ribbon has an ink roller 1, a platen 2 having an outer surface coated with ink by contacting the ink roller 1, and a printing head 3 facing the platen 2 in an appropriately spaced apart relation thereto. The printing head 3 is a dot impact type printing head having a plurality of printing wires caused to project selectively to form letters, and a recording medium 6 is conveyed between the platen 2 and the printing head 3 to have printing made thereon by the printing head 3. A protective film 8 is employed between the printing head 3 and the recording medium 6.
Abstract: A golf club shaft, set of shafts, or golf clubs having shafts which have been produced by a process that includes a hydroforming step. By utilizing a hydroforming step, a metal or metal matrix composite golf club shaft can be formed into a variety of configurations or shapes heretofore not possible and can include hydroformed ornamental design features. The hydroformed shafts offer enhanced club feel and/or performance.