Patents Assigned to Qorvo US, Inc.
-
Patent number: 11710704Abstract: The present disclosure relates to a radio frequency (RF) device that includes a mold device die and a multilayer redistribution structure underneath the mold device die. The mold device die includes a device region with a back-end-of-line (BEOL) portion and a front-end-of-line (FEOL) portion over the BEOL portion, and a first mold compound. The FEOL portion includes an active layer, a contact layer, and isolation sections. Herein, the active layer and the isolation sections reside over the contact layer, and the active layer is surrounded by the isolation sections. The first mold compound resides over the active layer without silicon crystal, which has no germanium content, in between. The multilayer redistribution structure includes redistribution interconnections and a number of bump structures that are at bottom of the multilayer redistribution structure and electrically coupled to the mold device die via the redistribution interconnections.Type: GrantFiled: May 30, 2019Date of Patent: July 25, 2023Assignee: Qorvo US, Inc.Inventors: Julio C. Costa, Michael Carroll
-
Patent number: 11710714Abstract: The present disclosure relates to a radio frequency (RF) device that includes a mold device die and a multilayer redistribution structure underneath the mold device die. The mold device die includes a device region with a back-end-of-line (BEOL) portion and a front-end-of-line (FEOL) portion over the BEOL portion, and a first mold compound. The FEOL portion includes an active layer formed from a strained silicon epitaxial layer, in which a lattice constant is greater than 5.461 at a temperature of 300K. The first mold compound resides over the active layer. Herein, silicon crystal does not exist between the first mold compound and the active layer. The multilayer redistribution structure includes a number of bump structures, which are at a bottom of the multilayer redistribution structure and electrically coupled to the FEOL portion of the mold device die.Type: GrantFiled: January 11, 2022Date of Patent: July 25, 2023Assignee: Qorvo US, Inc.Inventors: Julio C. Costa, Michael Carroll
-
Patent number: 11706048Abstract: A multi-protocol bus circuit is provided. The multi-protocol bus circuit includes multiple master circuits each configured to communicate a respective master bus command(s) via a respective one of multiple master buses based on a respective one of multiple master bus protocols, and a slave circuit(s) configured to communicate a slave bus command(s) via a slave bus based on a slave bus protocol that is different from any of the master bus protocols. To enable bidirectional bus communications between the master circuits and the slave circuit(s), the multi-protocol bus circuit further includes a multi-protocol bridge circuit configured to perform a bidirectional conversion between the slave bus protocol and each of the master bus protocols. As a result, it is possible to support bidirectional bus communications based on heterogeneous bus protocols with minimal impact on cost and/or footprint.Type: GrantFiled: December 16, 2021Date of Patent: July 18, 2023Assignee: Qorvo US, Inc.Inventors: Christopher Truong Ngo, Nadim Khlat, Alexander Wayne Hietala
-
Patent number: 11705633Abstract: A reactance cancelling radio frequency (RF) circuit array is disclosed. The reactance cancelling RF circuit array includes multiple RF circuits each coupled to one or two adjacent RF circuits by one or two pairs of coupling mediums each having a respective length less than one-quarter wavelength. In one aspect, an RF input signal is first split across the RF circuits and then combined to form an RF output signal. As a result, each RF circuit requires a lower power handling capability to process a portion of the RF input signal. In another aspect, each pair of the coupling mediums can cause reactance cancellation in each reactance-cancelling pair of the RF circuits. By coupling the RF circuits via the coupling mediums and enabling splitting-combining among the RF circuits, it is possible to miniaturize the reactance cancelling RF circuit array for improved performance across a wide frequency spectrum.Type: GrantFiled: December 15, 2021Date of Patent: July 18, 2023Assignee: Qorvo US, Inc.Inventors: Kelly M. Lear, Jeffery Galipeau, Nikolaus Klemmer
-
Patent number: 11705362Abstract: The present disclosure relates to a radio frequency (RF) device including a device substrate, a thinned device die with a device region over the device substrate, a first mold compound, and a second mold compound. The device region includes an isolation portion, a back-end-of-line (BEOL) portion, and a front-end-of-line (FEOL) portion with a contact layer and an active section. The contact layer resides over the BEOL portion, the active section resides over the contact layer, and the isolation portion resides over the contact layer to encapsulate the active section. The first mold compound resides over the device substrate, surrounds the thinned device die, and extends vertically beyond the thinned device die to define an opening over the thinned device die and within the first mold compound. The second mold compound fills the opening and directly connects the isolation portion of the thinned device die.Type: GrantFiled: April 22, 2019Date of Patent: July 18, 2023Assignee: Qorvo US, Inc.Inventors: Julio C. Costa, Michael Carroll
-
Patent number: 11705298Abstract: A method of forming a microelectromechanical device is disclosed wherein a beam of the microelectromechanical device may deviate from a resting to an engaged or disengaged position through electrical biasing. The microelectromechanical device comprises a beam disposed above a first RF conductor and a second RF conductor. The microelectromechanical device further comprises at least a center stack, a first RF stack, a second RF stack, a first stack formed on a first base layer, and a second stack formed on a second base layer, each stack disposed between the beam and the first and second RF conductors. The beam is configured to deflect downward to first contact the first stack formed on the first base layer and the second stack formed on the second base layer simultaneously or the center stack, before contacting the first RF stack and the second RF stack simultaneously.Type: GrantFiled: June 19, 2020Date of Patent: July 18, 2023Assignee: Qorvo US, Inc.Inventors: Robertus Petrus Van Kampen, Lance Barron, Richard L. Knipe
-
Patent number: 11705428Abstract: The present disclosure relates to a radio frequency device that includes a transfer device die and a multilayer redistribution structure underneath the transfer device die. The transfer device die includes a device region with a back-end-of-line (BEOL) portion and a front-end-of-line (FEOL) portion over the BEOL portion and a transfer substrate. The FEOL portion includes isolation sections and an active layer surrounded by the isolation sections. A top surface of the device region is planarized. The transfer substrate including a porous silicon (PSi) region resides over the top surface of the device region. Herein, the PSi region has a porosity between 1% and 80%. The multilayer redistribution structure includes a number of bump structures, which are at a bottom of the multilayer redistribution structure and electrically coupled to the FEOL portion of the transfer device die.Type: GrantFiled: November 8, 2019Date of Patent: July 18, 2023Assignee: Qorvo US, Inc.Inventors: Julio C. Costa, Michael Carroll
-
Patent number: 11699950Abstract: A fast-switching power management circuit operable to prolong battery life is provided. The power management circuit includes a voltage circuit that can generate an output voltage for amplifying an analog signal in a number of time intervals and a pair of hybrid circuits each causing the output voltage to change in any of the time intervals. A control circuit is configured to activate any one of the hybrid circuits during a preceding one of the time intervals to cause the output voltage to change in an immediately succeeding one of the time intervals. By starting the output voltage change earlier in the preceding time interval, it is possible to complete the output voltage change within a switching window in the succeeding time interval while concurrently reducing rush current associated with the output voltage change, thus helping to prolong battery life in a device employing the power management circuit.Type: GrantFiled: August 23, 2021Date of Patent: July 11, 2023Assignee: Qorvo US, Inc.Inventor: Nadim Khlat
-
Patent number: 11699978Abstract: Doherty radio frequency (RF) amplifier circuitry includes an input node, an output node, a main amplifier path, and a peaking amplifier path. The main amplifier path is coupled between the input node and the output node and includes a main amplifier. The peaking amplifier path is coupled in parallel with the main amplifier path between the input node and the output node, and includes a peaking amplifier and a peaking variable gain preamplifier between the input node and the peaking amplifier. The peaking variable gain preamplifier is configured to adjust a current provided to the peaking amplifier.Type: GrantFiled: April 12, 2021Date of Patent: July 11, 2023Assignee: Qorvo US, Inc.Inventors: Baker Scott, George Maxim, Dirk Robert Walter Leipold
-
Patent number: 11699629Abstract: The disclosure is directed to an integrated circuit (IC) die stacked with a backer die, including capacitors and thermal vias. The backer die includes a substrate material to contain and electrically insulate one or more capacitors at a back of the IC die. The backer die further includes a thermal material that is more thermally conductive than the substrate material for thermal spreading and increased heat dissipation. In particular, the backer die electrically couples capacitors to the IC die in a stacked configuration while also spreading and dissipating heat from the IC die. Such a configuration reduces an overall footprint of the electronic device, resulting in decreased integrated circuits (IC) packages and module sizes. In other words, instead of placing the capacitors next to the IC die, the capacitors are stacked on top of the IC die, thereby reducing an overall surface area of the package.Type: GrantFiled: March 26, 2021Date of Patent: July 11, 2023Assignee: Qorvo US, Inc.Inventors: Anthony Chiu, Bror Peterson, Andrew Ketterson
-
Patent number: 11676878Abstract: The present disclosure relates to a thermally enhanced package, which includes a carrier, a thinned die over the carrier, a mold compound, and a heat extractor. The thinned die includes a device layer over the carrier and a dielectric layer over the device layer. The mold compound resides over the carrier, surrounds the thinned die, and extends beyond a top surface of the thinned die to define an opening within the mold compound and over the thinned die. The top surface of the thinned die is at a bottom of the opening. At least a portion of the heat extractor is inserted into the opening and in thermal contact with the thinned die. Herein the heat extractor is formed of a metal or an alloy.Type: GrantFiled: May 26, 2021Date of Patent: June 13, 2023Assignee: Qorvo US, Inc.Inventors: Julio C. Costa, George Maxim
-
Patent number: 11677365Abstract: An envelope tracking (ET) power management apparatus incorporating multiple power amplifiers is provided. The ET power management apparatus includes a single ET integrated circuit (ETIC) configured to provide multiple ET voltages to the multiple power amplifiers for amplifying a radio frequency (RF) signal concurrently. The ETIC includes multiple first ET voltage circuits configured to generate multiple first ET voltages and a second ET voltage circuit configured to generate a second ET voltage. The ETIC is configured to provide each of the first ET voltages to an output stage amplifier(s) in a respective one of the power amplifiers and provide the second ET voltage to a driver stage amplifier in all of the power amplifiers. By supporting the multiple power amplifiers using a single ETIC, it is possible to reduce footprint, power consumption, and heat dissipation in an electronic device employing the ET power management apparatus.Type: GrantFiled: January 6, 2021Date of Patent: June 13, 2023Assignee: Qorvo US, Inc.Inventor: Nadim Khlat
-
Patent number: 11667516Abstract: A method of forming a microelectromechanical device wherein a beam of the microelectromechanical device may deviate from a resting to an engaged or disengaged position through electrical biasing. The microelectromechanical device comprises a beam disposed above a first RF electrode and a second RF electrode. The microelectromechanical device further comprises one or more electrical contacts disposed below the beam. The one or more electrical contacts comprise a first layer of ruthenium disposed over an oxide layer, a titanium nitride layer disposed on the first layer of ruthenium, and a second layer of ruthenium disposed on the titanium nitride layer.Type: GrantFiled: June 19, 2020Date of Patent: June 6, 2023Assignee: Qorvo US, Inc.Inventors: Mickael Renault, Jacques Marcel Muyango, Shibajyoti Ghosh Dastider
-
Patent number: 11671064Abstract: Equalizer circuitry includes a differential target voltage input, an equalizer output, a first operational amplifier, and a second operational amplifier. The differential target voltage input includes a target voltage input node and an inverted target voltage input node. The first operational amplifier and the second operational amplifier are coupled in series between the differential target voltage input and the equalizer output. The first operational amplifier is configured to receive a target voltage signal and provide an intermediate signal based on the target voltage input signal. The second operational amplifier is configured to receive the intermediate signal and an inverted target voltage signal and provide an output signal to the equalizer output.Type: GrantFiled: January 6, 2021Date of Patent: June 6, 2023Assignee: QORVO US, INC.Inventors: Nadim Khlat, Michael R. Kay, James M. Retz
-
Patent number: 11665867Abstract: Thermal structures and, more particularly, improved thermal structures for heat transfer devices and spatial power-combining devices are disclosed. A spatial power-combining device may include a plurality of amplifier assemblies and each amplifier assembly includes a body structure that supports an input antenna structure, an amplifier, and an output antenna structure. One or more heat sinks may be partially or completely embedded within a body structure of such amplifier assemblies to provide effective heat dissipation paths away from amplifiers. Heat sinks may include single-phase or two-phase materials and may include pre-fabricated complex thermal structures. Embedded heat sinks may be provided by progressively forming unitary body structures around heat sinks by additive manufacturing techniques.Type: GrantFiled: May 18, 2022Date of Patent: May 30, 2023Assignee: Qorvo US, Inc.Inventor: Dylan Murdock
-
Patent number: 11664269Abstract: The present disclosure relates to a radio frequency (RF) device including a device substrate, a thinned device die with a device region over the device substrate, a first mold compound, and a second mold compound. The device region includes an isolation portion, a back-end-of-line (BEOL) portion, and a front-end-of-line (FEOL) portion with a contact layer and an active section. The contact layer resides over the BEOL portion, the active section resides over the contact layer, and the isolation portion resides over the contact layer to encapsulate the active section. The first mold compound resides over the device substrate, surrounds the thinned device die, and extends vertically beyond the thinned device die to define an opening over the thinned device die and within the first mold compound. The second mold compound fills the opening and directly connects the isolation portion of the thinned device die.Type: GrantFiled: April 22, 2019Date of Patent: May 30, 2023Assignee: Qorvo US, Inc.Inventors: Julio C. Costa, Michael Carroll
-
Patent number: 11664241Abstract: The present disclosure relates to a radio frequency (RF) device that includes a mold device die and a multilayer redistribution structure underneath the mold device die. The mold device die includes a device region with a back-end-of-line (BEOL) portion and a front-end-of-line (FEOL) portion over the BEOL portion, a thermally conductive film, and a first mold compound. The FEOL portion includes isolation sections and an active layer surrounded by the isolation sections. The thermally conductive film, which has a thermal conductivity greater than 10 W/m·K and an electrical resistivity greater than 1E5 Ohm-cm, resides between the active layer and the first mold compound. Herein, silicon crystal does not exist between the first mold compound and the active layer. The multilayer redistribution structure includes a number of bump structures, which are at a bottom of the multilayer redistribution structure and electrically coupled to the FEOL portion of the mold device die.Type: GrantFiled: November 8, 2019Date of Patent: May 30, 2023Assignee: Qorvo US, Inc.Inventors: Julio C. Costa, Michael Carroll, Philip W. Mason, Merrill Albert Hatcher, Jr.
-
Patent number: 11658614Abstract: A supply voltage circuit for reducing in-rush battery current in an envelope tracking (ET) integrated circuit (ETIC) is provided. The ETIC includes an ET voltage circuit configured to generate a time-variant ET voltage, which includes an offset voltage, in multiple time intervals based on a supply voltage. In some cases, the offset voltage and the supply voltage may both need to be increased or decreased as the time-variant ET voltage increases or decreases. As the offset voltage and the supply voltage increase or decrease, an excessive in-rush battery current may result in a reduced battery life. In this regard, a supply voltage circuit is configured to help the ETIC to adapt the supply voltage on a per-symbol basis. As a result, it is possible to reduce the in-rush battery current in the ETIC while still allowing the time-variant ET voltage to change in a timely manner.Type: GrantFiled: November 11, 2021Date of Patent: May 23, 2023Assignee: Qorvo US, Inc.Inventor: Nadim Khlat
-
Patent number: 11652144Abstract: The present disclosure relates to a Gallium-Nitride (GaN) based module, which includes a module substrate, a thinned switch die residing over the module substrate, a first mold compound, and a second mold compound. The thinned switch die includes an electrode region, a number of switch interconnects extending from a bottom surface of the electrode region to the module substrate, an aluminium gallium nitride (AlGaN) barrier layer over a top surface of the electrode region, a GaN buffer layer over the AlGaN barrier layer, and a lateral two-dimensional electron gas (2DEG) layer realized at a heterojunction of the AlGaN barrier layer and the GaN buffer layer. The first mold compound resides over the module substrate, surrounds the thinned switch die, and extends above a top surface of the thinned switch die to form an opening over the top surface of the thinned switch die. The second mold compound fills the opening.Type: GrantFiled: April 3, 2019Date of Patent: May 16, 2023Assignee: Qorvo US, Inc.Inventors: Julio C. Costa, Michael Carroll
-
Patent number: 11646242Abstract: The present disclosure relates to a thermally enhanced package, which includes a carrier, a thinned die over the carrier, a mold compound, and a heat extractor. The thinned die includes a device layer over the carrier and a dielectric layer over the device layer. The mold compound resides over the carrier, surrounds the thinned die, and extends beyond a top surface of the thinned die to define an opening within the mold compound and over the thinned die. The top surface of the thinned die is at a bottom of the opening. At least a portion of the heat extractor is inserted into the opening and in thermal contact with the thinned die. Herein the heat extractor is formed of a metal or an alloy.Type: GrantFiled: November 29, 2018Date of Patent: May 9, 2023Assignee: Qorvo US, Inc.Inventors: Julio C. Costa, George Maxim