Patents Assigned to QUALCOMM MEMS Technologies
  • METHOD AND SYSTEM FOR DRIVING INTERFEROMETRIC MODULATORS
    Publication number: 20100073392
    Abstract: Systems and methods for driving a display of MEMS devices are disclosed. In one embodiment, a display includes an array comprising a plurality of interferometric modulators, and a driving circuit coupled to said array, said driving circuit configured to provide actuation signals to drive said array based on a temperature of the display. In another embodiment, a method of driving an array having a plurality of interferometric modulators configured into a display is disclosed, where the method includes sensing the temperature at a predetermined location in display, communicating a signal based on the sensed temperature to a display driver, generating an actuation signal to drive said display based on the received signal, and providing the actuation signal to the array.
    Type: Application
    Filed: November 30, 2009
    Publication date: March 25, 2010
    Applicant: QUALCOMM MEMS Technologies, Inc.
    Inventors: Brian J. Gally, William J. Cummings
  • Compatible MEMS switch architecture
    Patent number: 7684106
    Abstract: A method of fabricating a display device includes forming a switch and forming a plurality of display elements in parallel electrical communication with the switch. The switch includes an electrode, a first contact, and a second contact. The switch is responsive to voltages applied to the electrode to selectively place the first contact and the second contact in communication with one another. Forming the switch includes a first set of patterning steps. Forming the plurality of display elements includes a second set of patterning steps. The second set of patterning steps includes the first set of patterning steps.
    Type: Grant
    Filed: November 2, 2006
    Date of Patent: March 23, 2010
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventor: Jeffrey B. Sampsell
  • Internal optical isolation structure for integrated front or back lighting
    Patent number: 7684107
    Abstract: An optical isolation structure is incorporated into a display between the display elements and the transparent substrate for the display elements. The optical isolation structure reflects light rays within the substrate that impact the structure at high angles relative to normal to the structure, thereby permitting the substrate to be used as an integrated light guide for distributing light over the display from a light source on the edge of the substrate. The optical isolation structure may include a single layer having an index of refraction less than the substrate or a plurality of thin-film interference layers.
    Type: Grant
    Filed: October 6, 2006
    Date of Patent: March 23, 2010
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventors: Gang Xu, Alan Lewis, Brian Gally, Mark Mienko
  • Controller and driver features for bi-stable display
    Patent number: 7679627
    Abstract: The invention comprises systems and methods for controller and driver features for displays, and in particular, controller and driver features that relate to displays with bi-stable display elements. In one embodiment, such a display includes at least one driving circuit and an array comprising a plurality of bi-stable display elements, where the array is configured to be driven by the driving circuit, and where the driving circuit is programmed to receive video data and provide a subset of the received video data to the array based on a frame skip count. In some embodiments, the frame skip count is programmable or dynamically determined.
    Type: Grant
    Filed: April 1, 2005
    Date of Patent: March 16, 2010
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventors: Jeffrey B. Sampsell, Karen Tyger, Mithran Mathew
  • Support structure for MEMS device and methods therefor
    Patent number: 7679812
    Abstract: A microelectromechanical systems device having support structures formed of sacrificial material surrounded by a protective material. The microelectromechanical systems device includes a substrate having an electrode formed thereon. Another electrode is separated from the first electrode by a cavity and forms a movable layer, which is supported by support structures formed of a sacrificial material.
    Type: Grant
    Filed: July 21, 2006
    Date of Patent: March 16, 2010
    Assignee: Qualcomm Mems Technologies Inc.
    Inventors: Teruo Sasagawa, Clarence Chui, Manish Kothari, SuryaPrakash Ganti, Jeffrey B. Sampsell, Chun-Ming Wang
  • Method and system for driving interferometric modulators
    Patent number: 7675669
    Abstract: Systems and methods for driving a display of MEMS devices are disclosed. In one embodiment, a display includes an array comprising a plurality of interferometric modulators, and a driving circuit coupled to said array, said driving circuit configured to provide actuation signals to drive said array based on a temperature of the display. In another embodiment, a method of driving an array having a plurality of interferometric modulators configured into a display is disclosed, where the method includes sensing the temperature at a predetermined location in display, communicating a signal based on the sensed temperature to a display driver, generating an actuation signal to drive said display based on the received signal, and providing the actuation signal to the array.
    Type: Grant
    Filed: September 2, 2005
    Date of Patent: March 9, 2010
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventors: Brian J. Gally, William J. Cummings
  • LIGHT COLLECTION DEVICE WITH PRISMATIC LIGHT TURNING FEATURES
    Publication number: 20100051089
    Abstract: A light collection device includes a light guide body and a plurality of spaced-apart slits. The slits are formed by undercuts in the light guide body. Sides of the slits form facets that redirect light impinging on the facets. In some embodiments, the light collection body is attached to a photovoltaic cell. Light impinging on the light collection body is redirected towards the photovoltaic cell by the slits. The photovoltaic cells convert the light into electrical energy.
    Type: Application
    Filed: December 16, 2008
    Publication date: March 4, 2010
    Applicant: QUALCOMM MEMS Technologies, Inc.
    Inventors: Kasra Khazeni, Manish Kothari, Gang Xu, Ion Bita, K. S. Narayanan
  • LIGHT TURNING DEVICE WITH PRISMATIC LIGHT TURNING FEATURES
    Publication number: 20100053148
    Abstract: A light guide device includes a light guide body and two or more pluralities of spaced-apart slits. The slits are formed by undercuts in the light guide body. Sidewalls of the slits form facets that redirect light impinging on the facets. In some embodiments, the light guide body is attached to a light source. The light source emits light that is injected into the light guide body and the slits redirect the light out of the light guide body and towards a desired target. In some embodiments, the target is a display and a first plurality of slits directs light from the light source across the light guide body and over the face of the display. A second plurality of slits then directs light out of the light guide body and towards the display.
    Type: Application
    Filed: September 1, 2009
    Publication date: March 4, 2010
    Applicant: QUALCOMM MEMS Technologies, Inc.
    Inventors: Kasra Khazeni, Manish Kothari, Gang Xu, Ion Bita, Kollengode S. Narayanan
  • Separable modulator
    Patent number: 7672035
    Abstract: A separable modulator architecture is disclosed. The modulator has a mirror suspended from a flexible layer over a cavity. The flexible layer also forms supports and support posts for the mirror. An alternative separable modulator architecture has a mirror suspended over a cavity. The modulator is supported by supports and support posts. The support posts comprise a flexible layer over support post plugs. A bus structure may be formed upon the flexible layer arranged over the support posts.
    Type: Grant
    Filed: December 1, 2008
    Date of Patent: March 2, 2010
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventors: Jeffrey B. Sampsell, Mark W. Miles, Clarence Chui, Manish Kothari
  • DIFFUSION BARRIER LAYER FOR MEMS DEVICES
    Publication number: 20100046058
    Abstract: Described herein is the use of a diffusion barrier layer between metallic layers in MEMS devices. The diffusion barrier layer prevents mixing of the two metals, which can alter desired physical characteristics and complicate processing. In one example, the diffusion barrier layer may be used as part of a movable reflective structure in interferometric modulators.
    Type: Application
    Filed: November 6, 2009
    Publication date: February 25, 2010
    Applicant: QUALCOMM MEMS Technologies, Inc.
    Inventors: Hsin-Fu Wang, Ming-Hau Tung, Stephen Zee
  • Method and device for providing electronic circuitry on a backplate
    Patent number: 7668415
    Abstract: A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.
    Type: Grant
    Filed: March 25, 2005
    Date of Patent: February 23, 2010
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventor: Karen Tyger
  • Interferometric modulators having charge persistence
    Patent number: 7667884
    Abstract: An iterferometric modulator is formed having a dielectric with charge persistence. The interferometric modulator is addressed by a method making advantageous use of the charge persistence property, wherein the interferometric modulator is pre-charged in such a way that the pre-charging is not observable to a viewer, and the actuation voltage threshold of the imod is significantly lowered. Subsequently the interferometric modulator may be actuated with a significantly lower actuation voltage, thereby saving power.
    Type: Grant
    Filed: October 26, 2006
    Date of Patent: February 23, 2010
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventor: Clarence Chui
  • METHOD AND APPARATUS TO REDUCE OR ELIMINATE STICTION AND IMAGE RETENTION IN INTERFEROMETRIC MODULATOR DEVICES
    Publication number: 20100039696
    Abstract: Method and apparatus to reduce or eliminate stiction and image retention in interferometric display devices are disclosed. In some embodiments, a display element comprises a plurality of interferometric modulator devices configured in a matrix, each interferometric modulator device having a movable reflective layer and a plurality of supporting posts, the plurality of posts defining a post spacing distance in at least one direction that is greater for one or more interferometric modulator devices disposed adjacent to an edge of the display element than one or more interferometric modulator devices disposed nonadjacent to an edge of the display element.
    Type: Application
    Filed: August 12, 2008
    Publication date: February 18, 2010
    Applicant: QUALCOMM MEMS Technologies, Inc.
    Inventors: Wilhelmus A. de Groot, Sauri Gudlavaleti, Yeh-Jiun Tung
  • METHODS FOR MEASUREMENT AND CHARACTERIZATION OF INTERFEROMETRIC MODULATORS
    Publication number: 20100039695
    Abstract: Various methods are described to characterize interferometric modulators or similar devices. Measured voltages across interferometric modulators may be used to characterize transition voltages of the interferometric modulators. Measured currents may be analyzed by integration of measured current to provide an indication of a dynamic response of the interferometric modulator. Frequency analysis may be used to provide an indication of a hysteresis window of the interferometric modulator or mechanical properties of the interferometric modulator. Capacitance may be determined through signal correlation, and spread-spectrum analysis may be used to minimize the effect of noise or interference on measurements of various interferometric modulator parameters.
    Type: Application
    Filed: February 6, 2009
    Publication date: February 18, 2010
    Applicant: QUALCOMM MEMS Technologies, Inc.
    Inventors: Alok Govil, Kasra Khazeni
  • METHOD AND APPARATUS FOR SENSING, MEASUREMENT OR CHARACTERIZATION OF DISPLAY ELEMENTS INTEGRATED WITH THE DISPLAY DRIVE SCHEME, AND SYSTEM AND APPLICATIONS USING THE SAME
    Publication number: 20100039409
    Abstract: Methods and systems for electrical sensing, measurement and characterization of display elements are described. An embodiment includes integrating the electrical sensing, measurement and characterization with the display drive scheme. This embodiment allows for measurement of DC or operational hysteresis voltages and/or response times of interferometric modulator MEMS devices, for example, to be fully integrated with the display driver IC and/or the display drive scheme. Another embodiment allows these measurements to be performed and used without resulting in display artifacts visible to a human user. Another embodiment allows the measurement circuitry to be integrated with the display driver IC and/or the display drive scheme re-using several existing circuitry components and features, thus allowing for integration of the measurement method and its use relatively easily.
    Type: Application
    Filed: February 11, 2009
    Publication date: February 18, 2010
    Applicant: QUALCOMM MEMS Technologies, Inc.
    Inventor: Alok Govil
  • METHOD OF REDUCING OFFSET VOLTAGE IN A MICROELECTROMECHANICAL DEVICE
    Publication number: 20100039424
    Abstract: A method of conditioning a microelectromechanical device is disclosed. In one embodiment the method comprises applying a conditioning signal to a microelectromechanical device having an offset voltage of a first sign, the conditioning signal having an average that is of a second sign which is opposite the first sign. In another embodiment the method comprises applying a conditioning signal to a microelectromechanical device having an offset voltage of a first value, the conditioning signal having an average of a second value which differs from the first value.
    Type: Application
    Filed: August 14, 2008
    Publication date: February 18, 2010
    Applicant: QUALCOMM MEMS Technologies, Inc.
    Inventors: Feng Ming Pao, Chung-Hsien Lin, Mao-Chuan Ke
  • MEMS device fabricated on a pre-patterned substrate
    Patent number: 7664345
    Abstract: A microelectromechanical systems device fabricated on a pre-patterned substrate having grooves formed therein. A lower electrode is deposited over the substrate and separated from an orthogonal upper electrode by a cavity. The upper electrode is configured to be movable to modulate light. A semi-reflective layer and a transparent material are formed over the movable upper electrode.
    Type: Grant
    Filed: April 16, 2008
    Date of Patent: February 16, 2010
    Assignee: Qualcomm Mems Technologies, Inc.
    Inventor: Clarence Chui
  • Methods and devices for inhibiting tilting of a movable element in a MEMS device
    Patent number: 7663794
    Abstract: Interferometric modulators having a separable modulator architecture are disclosed having a reflective layer suspended from a flexible layer over a cavity. The interferometric modulators have one or more anti-tilt members that inhibit undesirable movement of the reflective layer, such as curling and/or tilting. The stabilization of the reflective layer by the anti-tilt members can improve the quality of the optical output of the interferometric modulators, as well as displays comprising such interferometric modulators.
    Type: Grant
    Filed: January 15, 2008
    Date of Patent: February 16, 2010
    Assignee: Qualcomm MEMS Technologies, Inc.
    Inventor: William J Cummings
  • Apparatus and method of dual-mode display
    Patent number: 7660028
    Abstract: One embodiment includes display comprising a light modulator configured to display a portion of an image such as a reflective light modulator, a light emitter configured to display the portion of the image and a circuit configured to selectively provide signals to at least one of the light modulator and the light emitter indicative of the portion of the image. In one such embodiment, an active matrix provides a simple, efficient drive for such devices. Other embodiments methods of making and driving such devices.
    Type: Grant
    Filed: March 28, 2008
    Date of Patent: February 9, 2010
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventor: Je-Hsiung Lan
  • Methods for etching layers within a MEMS device to achieve a tapered edge
    Patent number: 7660058
    Abstract: Certain MEMS devices include layers patterned to have tapered edges. One method for forming layers having tapered edges includes the use of an etch leading layer. Another method for forming layers having tapered edges includes the deposition of a layer in which the upper portion is etchable at a faster rate than the lower portion. Another method for forming layers having tapered edges includes the use of multiple iterative etches. Another method for forming layers having tapered edges includes the use of a liftoff mask layer having an aperture including a negative angle, such that a layer can be deposited over the liftoff mask layer and the mask layer removed, leaving a structure having tapered edges.
    Type: Grant
    Filed: August 18, 2006
    Date of Patent: February 9, 2010
    Assignee: QUALCOMM MEMS Technologies, Inc.
    Inventors: Chengbin Qiu, Teruo Sasagawa, Ming-Hau Tung, Chun-Ming Wang, Stephen Zee