Patent number: 11744153
Abstract: A method for producing a layer of composition AA?BO3, wherein A consists of at least one element selected from the group consisting of: Li, Na, K, Ca, Mg, Ba, Sr, Pb, La, Bi, Y, Dy, Gd, Tb, Ce, Pr, Nd, Sm, Eu, Ho, Zr, Sc, Ag and Tl, and B consists of at least one element selected from the group consisting of: Nb, Ta, Sb, Ti, Zr, Sn, Ru, Fe, V, Sc, C, Ga, Al, Si, Mn, Zr and Tl, is described. The method includes providing a donor substrate of composition ABO3, forming a layer of composition ABO3 by thinning the donor substrate, and exposing the layer of composition ABO3 to a medium containing ions of an element A? belonging to the same list of elements as A, A? being different from A, such that the ions penetrate into the layer of composition ABO3 to form the layer of composition AA?BO3.
Type:
Grant
Filed:
May 24, 2017
Date of Patent:
August 29, 2023
Assignee:
Soitec
Inventor:
Bruno Ghyselen